JP2021173792A - 光導波路デバイス - Google Patents
光導波路デバイス Download PDFInfo
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- JP2021173792A JP2021173792A JP2020075239A JP2020075239A JP2021173792A JP 2021173792 A JP2021173792 A JP 2021173792A JP 2020075239 A JP2020075239 A JP 2020075239A JP 2020075239 A JP2020075239 A JP 2020075239A JP 2021173792 A JP2021173792 A JP 2021173792A
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- 230000003287 optical effect Effects 0.000 claims abstract description 184
- 239000010409 thin film Substances 0.000 claims abstract description 130
- 239000000463 material Substances 0.000 claims abstract description 28
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 230000000737 periodic effect Effects 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 17
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 33
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 29
- 239000000203 mixture Substances 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 229910052738 indium Inorganic materials 0.000 claims description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 3
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 3
- 229910000681 Silicon-tin Inorganic materials 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 229910052744 lithium Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- 230000007774 longterm Effects 0.000 abstract description 8
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 322
- 238000005530 etching Methods 0.000 description 38
- 230000005684 electric field Effects 0.000 description 31
- 238000000034 method Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 9
- 230000009471 action Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000000087 stabilizing effect Effects 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/07—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 buffer layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/20—LiNbO3, LiTaO3
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
図1は、実施の形態1にかかる薄膜LN光変調器を示す図である。図1(a)は、薄膜LN光変調器100の平面図、図1(b)は、図1(a)のA−A’線断面図を示す。
{V(t)−V(0)}/VDC …(1)
次に、図3〜図7を用いて実施の形態2にかかる薄膜LN光変調器100の他の構成例を説明する。以下の構成例では、実施の形態1で説明した、バッファ層121と中間層123に元素の周期表の第3〜第18族の金属元素に同じ材質を用いることを前提としている。これにより、上記説明した薄膜LN光変調器100の一つの特性であるDCドリフトの抑制に加え、散乱損失の低減および電界効率の特性向上を図る。
前記中間層と、前記バッファ層は、元素の周期表の第3〜第18族の金属元素の同じ材料によりなることを特徴とする光導波路デバイス。
101〜104,122a 光導波路
111 電極
111b 底面(電極)
120 基板
121 中間層
121b,122b,123b 段差部
122 薄膜LN層
123 バッファ層
123a 凹部
Claims (12)
- 基板上に、中間層、ニオブ酸リチウムの薄膜LN層、バッファ層が積層され、前記薄膜LN層に光導波路が形成され、前記光導波路の近傍に電極を有する光導波路デバイスにおいて、
前記中間層と、前記バッファ層は、元素の周期表の第3〜第18族の金属元素の同じ材料によりなることを特徴とする光導波路デバイス。 - 前記中間層と、前記バッファ層は、酸化シリコンとインジウムの酸化物を含むことを特徴とする請求項1に記載の光導波路デバイス。
- 前記中間層と、前記バッファ層は、酸化シリコンとチタンの酸化物を含むことを特徴とする請求項1に記載の光導波路デバイス。
- 前記中間層と、前記バッファ層は、酸化シリコンと錫の酸化物を含むことを特徴とする請求項1に記載の光導波路デバイス。
- 前記中間層と、前記バッファ層は、酸化シリコンとゲルマニウムの酸化物を含むことを特徴とする請求項1に記載の光導波路デバイス。
- 前記中間層と、前記バッファ層は、酸化シリコンと亜鉛の酸化物を含むことを特徴とする請求項1に記載の光導波路デバイス。
- 前記中間層と、前記バッファ層は、さらに他の金属または半導体元素の酸化物を含むことを特徴とする請求項2〜6のいずれか一つに記載の光導波路デバイス。
- 前記中間層と、前記バッファ層は、元素の周期表の第3〜第18族の金属元素の1種以上の酸化物と、酸化シリコンとの混合物または化合物によりなることを特徴とする請求項1に記載の光導波路デバイス。
- 前記中間層と、前記バッファ層は、シリコンを除く半導体元素の1種以上の酸化物と、酸化シリコンとの混合物または化合物によりなることを特徴とする請求項1に記載の光導波路デバイス。
- 前記中間層と、前記バッファ層は、元素の周期表の第3〜第18族の金属元素と、シリコンを除く半導体元素のそれぞれ1種以上で構成される酸化物と酸化シリコンとの混合物または化合物によりなることを特徴とする請求項1に記載の光導波路デバイス。
- 前記薄膜LN層は、Xcutニオブ酸リチウムからなることを特徴とする請求項1〜10のいずれか一つに記載の光導波路デバイス。
- さらに、前記電極の底面が、前記バッファ層の表面の位置よりも低い位置に設けられたことを特徴とする請求項1〜11のいずれか一つに記載の光導波路デバイス。
Priority Applications (3)
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JP2020075239A JP2021173792A (ja) | 2020-04-21 | 2020-04-21 | 光導波路デバイス |
US17/165,562 US11693290B2 (en) | 2020-04-21 | 2021-02-02 | Optical waveguide device |
CN202110192519.4A CN113534563B (en) | 2020-04-21 | 2021-02-20 | Optical waveguide device |
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JP2020075239A JP2021173792A (ja) | 2020-04-21 | 2020-04-21 | 光導波路デバイス |
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JP2021173792A true JP2021173792A (ja) | 2021-11-01 |
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JP2020075239A Pending JP2021173792A (ja) | 2020-04-21 | 2020-04-21 | 光導波路デバイス |
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JP (1) | JP2021173792A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023188361A1 (ja) * | 2022-03-31 | 2023-10-05 | 住友大阪セメント株式会社 | 光導波路素子とそれを用いた光変調デバイス及び光送信装置 |
WO2023188195A1 (ja) | 2022-03-30 | 2023-10-05 | 住友大阪セメント株式会社 | 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021173792A (ja) * | 2020-04-21 | 2021-11-01 | 富士通オプティカルコンポーネンツ株式会社 | 光導波路デバイス |
JP2021173791A (ja) * | 2020-04-21 | 2021-11-01 | 富士通オプティカルコンポーネンツ株式会社 | 光導波路デバイスおよび光導波路デバイスの製造方法 |
Citations (12)
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JPH0643503A (ja) * | 1990-05-15 | 1994-02-18 | Oki Electric Ind Co Ltd | 光デバイス |
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- 2020-04-21 JP JP2020075239A patent/JP2021173792A/ja active Pending
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- 2021-02-02 US US17/165,562 patent/US11693290B2/en active Active
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WO2023188195A1 (ja) | 2022-03-30 | 2023-10-05 | 住友大阪セメント株式会社 | 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 |
WO2023188361A1 (ja) * | 2022-03-31 | 2023-10-05 | 住友大阪セメント株式会社 | 光導波路素子とそれを用いた光変調デバイス及び光送信装置 |
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CN113534563A (zh) | 2021-10-22 |
US20210325760A1 (en) | 2021-10-21 |
US11693290B2 (en) | 2023-07-04 |
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