JP2021105650A - 光導波路素子および光変調器 - Google Patents
光導波路素子および光変調器 Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 215
- 239000000463 material Substances 0.000 claims abstract description 62
- 230000005693 optoelectronics Effects 0.000 claims abstract description 14
- 239000010410 layer Substances 0.000 claims description 231
- 239000000758 substrate Substances 0.000 claims description 207
- 238000000034 method Methods 0.000 claims description 37
- 230000003014 reinforcing effect Effects 0.000 claims description 22
- 239000012790 adhesive layer Substances 0.000 claims description 14
- 238000005304 joining Methods 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 230000006866 deterioration Effects 0.000 abstract description 13
- 235000012431 wafers Nutrition 0.000 description 14
- 230000001902 propagating effect Effects 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 229910044991 metal oxide Inorganic materials 0.000 description 8
- 150000004706 metal oxides Chemical class 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 230000031700 light absorption Effects 0.000 description 7
- 239000013307 optical fiber Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000003786 synthesis reaction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000000644 propagated effect Effects 0.000 description 3
- 230000002194 synthesizing effect Effects 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- -1 Ta 2 O 5 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000000678 plasma activation Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
2a〜2c 分岐部
3a〜3c 合成部
5、102 基板
6 リブ部
7、101 補強基板
9a 上面バッファ層(第1バッファ層)
9b 下面バッファ層(第2バッファ層)
10、206 光導波路
20 接着層
103 バッファ層
200 光変調器
204 筐体
208 入力光ファイバ
210 出力光ファイバ
212a、212b、212c、212d 電極
218 中継基板
228 偏波合成部
240a、240b、240c、240d リードピン
250 終端基板
G 接地電極
S 信号電極
Claims (10)
- 電気光学効果を有する基板と、
前記基板に形成された光導波路と、
前記基板上に設けられた第1バッファ層と、
前記基板下に設けられた第2バッファ層と、を備える光導波路素子であって、
前記第1バッファ層および前記第2バッファ層が略同一の材料からなるとともに略同一の厚さを有し、前記第1バッファ層および前記第2バッファ層がそれぞれ前記基板の上面および下面に接触するように形成されていることを特徴とする光導波路素子。 - 前記第1バッファ層および前記第2バッファ層はそれぞれ、酸化シリコンと周期律表の三〜八族、一b族および二b族の金属元素およびシリコンを除く半導体元素から選ばれる1種またはそれ以上の元素の酸化物の少なくとも1種との混合物、またはシリコンと前記金属元素および半導体元素から選ばれる1種またはそれ以上の元素との酸化物の透明絶縁膜からなることを特徴とする請求項1に記載の光導波路素子。
- 前記第1バッファ層および前記第2バッファ層の材料は、電気光学効果を有する前記基板の材料よりも屈折率が低いことを特徴とする請求項1または2に記載の光導波路素子。
- 前記第1バッファ層および前記第2バッファ層の材料は、電気抵抗率が108Ωcm以上であり、1016Ωcm以下であることを特徴とする請求項1から3のいずれか一項に記載の光導波路素子。
- 前記第1バッファ層および前記第2バッファ層のそれぞれの厚さが、0.3μm以上であり2.0μm以下であることを特徴とする請求項1から4のいずれか一項に記載の光導波路素子。
- 前記基板および前記第2バッファ層が直接接合法にて接合されていることを特徴とする請求項1から5のいずれか一項に記載の光導波路素子。
- 前記第2バッファ層の下に配置される補強基板を有し、
前記第2バッファ層と前記補強基板とが接着層を介して接合されていることを特徴とする請求項6に記載の光導波路素子。 - 前記基板上に突設されたリブ部が前記光導波路として用いられることを特徴とする請求項1から7のいずれか一項に記載の光導波路素子。
- 複数のマッハツェンダー部により前記光導波路が形成されていることを特徴とする請求項1から8のいずれか一項に記載の光導波路素子。
- 請求項1から9のいずれか一項に記載の光導波路素子を構成する光導波路を少なくとも一部に用いたことを特徴とする光変調器。
Priority Applications (4)
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JP2019236029A JP7419806B2 (ja) | 2019-12-26 | 2019-12-26 | 光導波路素子および光変調器 |
US17/757,951 US20230026594A1 (en) | 2019-12-26 | 2020-10-20 | Optical waveguide element and optical modulator |
PCT/JP2020/039347 WO2021131273A1 (ja) | 2019-12-26 | 2020-10-20 | 光導波路素子および光変調器 |
CN202080089292.4A CN114846392A (zh) | 2019-12-26 | 2020-10-20 | 光波导元件及光调制器 |
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JP2019236029A JP7419806B2 (ja) | 2019-12-26 | 2019-12-26 | 光導波路素子および光変調器 |
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JP2021105650A true JP2021105650A (ja) | 2021-07-26 |
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JP (1) | JP7419806B2 (ja) |
CN (1) | CN114846392A (ja) |
WO (1) | WO2021131273A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021173792A (ja) * | 2020-04-21 | 2021-11-01 | 富士通オプティカルコンポーネンツ株式会社 | 光導波路デバイス |
JP2022549713A (ja) * | 2020-05-14 | 2022-11-28 | 上海徠刻科技有限公司 | 弱位相ドリフトを有するニオブ酸リチウムウェイブガイド |
WO2023188195A1 (ja) | 2022-03-30 | 2023-10-05 | 住友大阪セメント株式会社 | 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US20240241396A1 (en) * | 2021-09-30 | 2024-07-18 | Sumitomo Osaka Cement Co., Ltd. | Optical waveguide device, and optical transmission apparatus and optical modulation device using same |
WO2023188361A1 (ja) * | 2022-03-31 | 2023-10-05 | 住友大阪セメント株式会社 | 光導波路素子とそれを用いた光変調デバイス及び光送信装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH05257105A (ja) * | 1991-12-27 | 1993-10-08 | Fujitsu Ltd | 光導波路デバイス |
JPH0756036A (ja) * | 1993-08-13 | 1995-03-03 | Fujitsu Ltd | 光導波路デバイス及びその製造方法 |
JP2007122038A (ja) * | 2005-09-29 | 2007-05-17 | Sumitomo Osaka Cement Co Ltd | 光制御デバイス |
JP2008089936A (ja) * | 2006-09-30 | 2008-04-17 | Sumitomo Osaka Cement Co Ltd | 光制御素子 |
JP2013025283A (ja) * | 2011-07-26 | 2013-02-04 | Sumitomo Osaka Cement Co Ltd | 光導波路素子 |
JP2017032968A (ja) * | 2016-02-08 | 2017-02-09 | 住友大阪セメント株式会社 | 光変調器及びそれを用いた光送信装置 |
US9664931B1 (en) * | 2012-11-16 | 2017-05-30 | Hrl Laboratories, Llc | Electro-optic modulation structures |
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JP2006267224A (ja) | 2005-03-22 | 2006-10-05 | Sumitomo Osaka Cement Co Ltd | 光変調器の製造方法及び光変調器 |
JP2007101641A (ja) | 2005-09-30 | 2007-04-19 | Sumitomo Osaka Cement Co Ltd | 光変調器及びその製造方法 |
JP5254855B2 (ja) | 2008-03-28 | 2013-08-07 | 日本碍子株式会社 | 進行波型光変調器 |
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2019
- 2019-12-26 JP JP2019236029A patent/JP7419806B2/ja active Active
-
2020
- 2020-10-20 WO PCT/JP2020/039347 patent/WO2021131273A1/ja active Application Filing
- 2020-10-20 US US17/757,951 patent/US20230026594A1/en active Pending
- 2020-10-20 CN CN202080089292.4A patent/CN114846392A/zh active Pending
Patent Citations (7)
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JPH05257105A (ja) * | 1991-12-27 | 1993-10-08 | Fujitsu Ltd | 光導波路デバイス |
JPH0756036A (ja) * | 1993-08-13 | 1995-03-03 | Fujitsu Ltd | 光導波路デバイス及びその製造方法 |
JP2007122038A (ja) * | 2005-09-29 | 2007-05-17 | Sumitomo Osaka Cement Co Ltd | 光制御デバイス |
JP2008089936A (ja) * | 2006-09-30 | 2008-04-17 | Sumitomo Osaka Cement Co Ltd | 光制御素子 |
JP2013025283A (ja) * | 2011-07-26 | 2013-02-04 | Sumitomo Osaka Cement Co Ltd | 光導波路素子 |
US9664931B1 (en) * | 2012-11-16 | 2017-05-30 | Hrl Laboratories, Llc | Electro-optic modulation structures |
JP2017032968A (ja) * | 2016-02-08 | 2017-02-09 | 住友大阪セメント株式会社 | 光変調器及びそれを用いた光送信装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021173792A (ja) * | 2020-04-21 | 2021-11-01 | 富士通オプティカルコンポーネンツ株式会社 | 光導波路デバイス |
JP2022549713A (ja) * | 2020-05-14 | 2022-11-28 | 上海徠刻科技有限公司 | 弱位相ドリフトを有するニオブ酸リチウムウェイブガイド |
WO2023188195A1 (ja) | 2022-03-30 | 2023-10-05 | 住友大阪セメント株式会社 | 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 |
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WO2021131273A1 (ja) | 2021-07-01 |
CN114846392A (zh) | 2022-08-02 |
US20230026594A1 (en) | 2023-01-26 |
JP7419806B2 (ja) | 2024-01-23 |
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