JP2021086944A - 加工装置 - Google Patents
加工装置 Download PDFInfo
- Publication number
- JP2021086944A JP2021086944A JP2019215408A JP2019215408A JP2021086944A JP 2021086944 A JP2021086944 A JP 2021086944A JP 2019215408 A JP2019215408 A JP 2019215408A JP 2019215408 A JP2019215408 A JP 2019215408A JP 2021086944 A JP2021086944 A JP 2021086944A
- Authority
- JP
- Japan
- Prior art keywords
- unit
- jig table
- suction path
- jig
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000000078 claw Anatomy 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 5
- 230000003028 elevating effect Effects 0.000 claims description 21
- 230000007246 mechanism Effects 0.000 claims description 21
- 230000001174 ascending effect Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 abstract description 4
- 230000032258 transport Effects 0.000 description 16
- 230000000149 penetrating effect Effects 0.000 description 12
- 238000001514 detection method Methods 0.000 description 9
- 238000003754 machining Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 5
- 239000002390 adhesive tape Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
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- 238000006467 substitution reaction Methods 0.000 description 1
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- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
- B25J15/065—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum provided with separating means for releasing the gripped object after suction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D49/00—Machines or devices for sawing with straight reciprocating saw blades, e.g. hacksaws
- B23D49/007—Jig saws, i.e. machine saws with a vertically reciprocating narrow saw blade chucked at both ends for contour cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
- B25J15/0206—Gripping heads and other end effectors servo-actuated comprising articulated grippers
- B25J15/022—Gripping heads and other end effectors servo-actuated comprising articulated grippers actuated by articulated links
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
- B25J15/0683—Details of suction cup structure, e.g. grooves or ridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Dicing (AREA)
- Feeding Of Workpieces (AREA)
Abstract
Description
本発明の実施形態1に係る加工装置を図面に基づいて説明する。図1は、実施形態1に係る加工装置の構成例を示す斜視図である。図2は、実施形態1に係る加工装置の治具テーブルを模式的に示す斜視図である。図3は、図1に示された加工装置の治具テーブルの断面図である。図4は、図1に示された加工装置のテーブルベースの一部を断面で示す側面図である。図5は、図1に示された加工装置の搬送ユニットを一部断面で示す側面図である。図6は、図5に示された搬送ユニットが治具テーブルを把持する状態を一部断面で示す側面図である。
2 加工領域
3 着脱領域
10 治具テーブル
14 第1吸引路
15 第2吸引路
16 第1逆止弁(逆止弁)
17 第2逆止弁(逆止弁)
20 テーブルベース
30 切削ユニット(加工ユニット)
40 移動ユニット
50 仮置き領域
60 搬送ユニット
65 把持爪
66 吸引配管
67 リンク機構
68 昇降ユニット
121 保持領域
151 開口
200 被加工物
Claims (2)
- 被加工物を加工する加工装置であって、
被加工物を保持する保持領域と、一端が該保持領域に接続し他端が下面に開口する第1吸引路と、一端が該保持領域に接続し他端が上面に開口する第2吸引路と、を備える治具テーブルと、
該治具テーブルが着脱可能に固定され、該第1吸引路から該保持領域に負圧を作用させるテーブルベースと、
該テーブルベースに固定された該治具テーブルが保持する被加工物を加工する加工ユニットと、
被加工物が加工される加工領域と、該治具テーブルが該テーブルベースに着脱される着脱領域と、の間で該テーブルベースを移動する移動ユニットと、
加工前の被加工物が支持された該治具テーブルを仮置きする仮置き領域と、
該治具テーブルの該第2吸引路に負圧を作用させつつ、該仮置き領域に載置された該治具テーブルを該テーブルベースに搬送する搬送ユニットと、を備え、
該搬送ユニットは、
該治具テーブルの両脇を上方から把持する一対の把持爪と、
該把持爪で把持された該治具テーブルの該第2吸引路の開口に上方から接続し、該保持領域に吸引力を作用させて被加工物を保持する吸引配管と、
該吸引配管を昇降させ、該第2吸引路の該開口に接続する作用位置と、該開口から離れた上昇位置とに該吸引配管を位置付ける昇降ユニットと、を有し、
該把持爪は、リンク機構を介して該昇降ユニットに固定され、該昇降ユニットの昇降動作で回動して開閉し、該治具テーブルを把持する加工装置。 - 該第1吸引路及び該第2吸引路それぞれの他端側には逆止弁が配置されている請求項1に記載の加工装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019215408A JP7357521B2 (ja) | 2019-11-28 | 2019-11-28 | 加工装置 |
US17/094,160 US11794357B2 (en) | 2019-11-28 | 2020-11-10 | Processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019215408A JP7357521B2 (ja) | 2019-11-28 | 2019-11-28 | 加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021086944A true JP2021086944A (ja) | 2021-06-03 |
JP7357521B2 JP7357521B2 (ja) | 2023-10-06 |
Family
ID=76088434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019215408A Active JP7357521B2 (ja) | 2019-11-28 | 2019-11-28 | 加工装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US11794357B2 (ja) |
JP (1) | JP7357521B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113927550B (zh) * | 2021-10-19 | 2023-07-28 | 东莞市天泓成型技术有限公司 | 一种用于加工5g腔体的定位治具 |
CN115026758B (zh) * | 2022-04-22 | 2023-08-18 | 江苏大中电机股份有限公司 | 一种高效尘密型电机密封装配工装 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001024050A (ja) | 1999-07-08 | 2001-01-26 | Disco Abrasive Syst Ltd | ワーク保持装置 |
JP3920720B2 (ja) * | 2002-03-29 | 2007-05-30 | 株式会社荏原製作所 | 基板受渡し方法、基板受渡し機構及び基板研磨装置 |
JP2009032867A (ja) | 2007-07-26 | 2009-02-12 | Disco Abrasive Syst Ltd | 分割装置 |
JP5758111B2 (ja) * | 2010-12-02 | 2015-08-05 | 株式会社ディスコ | 切削装置 |
US9911640B2 (en) * | 2015-09-01 | 2018-03-06 | Boris Kesil | Universal gripping and suction chuck |
JP6935168B2 (ja) * | 2016-02-12 | 2021-09-15 | 株式会社ディスコ | 加工装置 |
JP7106298B2 (ja) * | 2018-03-05 | 2022-07-26 | 株式会社ディスコ | チャックテーブル、切削装置、及び、切削装置のチャックテーブル修正方法 |
JP7303635B2 (ja) * | 2019-01-07 | 2023-07-05 | 株式会社ディスコ | ワークの保持方法及びワークの処理方法 |
JP7343293B2 (ja) * | 2019-04-18 | 2023-09-12 | 株式会社ディスコ | 分割加工装置 |
JP7313219B2 (ja) * | 2019-07-22 | 2023-07-24 | 株式会社ディスコ | エキスパンド方法及びエキスパンド装置 |
-
2019
- 2019-11-28 JP JP2019215408A patent/JP7357521B2/ja active Active
-
2020
- 2020-11-10 US US17/094,160 patent/US11794357B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US11794357B2 (en) | 2023-10-24 |
JP7357521B2 (ja) | 2023-10-06 |
US20210162608A1 (en) | 2021-06-03 |
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