JP2020177973A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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Abstract
Description
[先行技術文献]
[特許文献]
特許文献1 特開2017−41601号公報
特許文献2 特開2011−216825号公報
特許文献3 特開2015−118991号公報
特許文献4 特開2015−185742号公報
特許文献5 特開2018−6648号公報
特許文献6 特開2018−120990号公報
Claims (13)
- 第1導電型のドリフト領域を有する半導体基板と、
前記半導体基板の上面に複数のゲート構造部を有するトランジスタ部と、
前記ドリフト領域よりもドーピング濃度の高い第1導電型のカソード領域を、前記半導体基板の下面に有するダイオード部と
を備え、
それぞれのゲート構造部は、
前記半導体基板の上面から前記ドリフト領域に達して設けられたゲートトレンチ部と、
前記半導体基板の上面と前記ドリフト領域との間において前記ゲートトレンチ部に接して設けられた、前記ドリフト領域よりもドーピング濃度の高い第1導電型のエミッタ領域と、
前記エミッタ領域と前記ドリフト領域との間において前記ゲートトレンチ部に接して設けられた、第2導電型のベース領域と
を有し、
上面視において、前記カソード領域からの距離が最も近い前記ゲート構造部の第1閾値が、前記カソード領域からの距離が最も遠い前記ゲート構造部の第2閾値に比べて、0.1V以上1V以下低い
半導体装置。 - 前記第1閾値を有する前記ゲート構造部が、上面視において、前記カソード領域の端辺と平行に設けられている
請求項1に記載の半導体装置。 - 前記ゲートトレンチ部は、前記カソード領域の端辺と平行な方向に長手を有して設けられ、
前記トランジスタ部は、前記ゲート構造部を有し、前記ゲートトレンチ部の長手に沿って設けられた複数のゲートメサ部を有し、
前記複数のゲートメサ部のうち、前記カソード領域からの距離が最も近いゲートメサ部に、前記第1閾値を有する前記ゲート構造部が設けられている
請求項1または2に記載の半導体装置。 - 前記ゲートトレンチ部は、
ゲート導電部と、
前記ゲート導電部と前記半導体基板との間に設けられたゲート絶縁膜と
を有し、
前記第1閾値を有する前記ゲート構造部の前記ゲートトレンチ部における前記ゲート絶縁膜の膜厚は、前記第2閾値を有する前記ゲート構造部の前記ゲートトレンチ部における前記ゲート絶縁膜の膜厚よりも小さい
請求項1から3のいずれか一項に記載の半導体装置。 - 前記第1閾値を有する前記ゲート構造部の前記ベース領域のドーピング濃度は、前記第2閾値を有する前記ゲート構造部の前記ベース領域のドーピング濃度よりも低い
請求項1から4のいずれか一項に記載の半導体装置。 - 前記第1閾値を有する前記ゲートメサ部のチャネル密度は、前記第2閾値を有する前記ゲートメサ部の前記チャネル密度よりも高い
請求項3に記載の半導体装置。 - 前記ゲートメサ部は、前記半導体基板の上面において、前記エミッタ領域と、前記ベース領域よりもドーピング濃度の高い第2導電型のコンタクト領域とを有し、
前記第1閾値を有する前記ゲートメサ部の上面における前記エミッタ領域に対する前記コンタクト領域の面積比は、前記第2閾値を有する前記ゲートメサ部の上面における前記エミッタ領域に対する前記コンタクト領域の面積比よりも小さい
請求項6に記載の半導体装置。 - 前記トランジスタ部は、前記ゲートトレンチ部と、ダミートレンチ部とを有し、
上面視において前記カソード領域と接する前記トランジスタ部の近接領域における前記ゲートトレンチ部の密度は、前記カソード領域からの距離が最も遠い領域における中央領域における前記ゲートトレンチ部の密度よりも高く、
前記第1閾値を有する前記ゲート構造部は、前記近接領域に設けられている
請求項1から7のいずれか一項に記載の半導体装置。 - 前記ダイオード部は、前記半導体基板の上面側において、キャリアのライフタイムが他の領域よりも低下した上面側ライフタイム制御領域を有し、
前記上面側ライフタイム制御領域は、上面視において前記カソード領域と接する前記トランジスタ部の近接領域まで延伸して設けられており、
前記第1閾値を有する前記ゲート構造部は、前記近接領域に設けられている
請求項1から7のいずれか一項に記載の半導体装置。 - 前記カソード領域は、上面視において長辺を有しており、
前記第1閾値を有する前記ゲート構造部は、前記カソード領域の前記長辺の中央と対向する位置に設けられており、前記長辺の両端と対向する位置には設けられていない
請求項1から9のいずれか一項に記載の半導体装置。 - 前記カソード領域は、上面視において長辺を有しており、
前記ゲートトレンチ部は、上面視において前記カソード領域の長辺と交差している
請求項1に記載の半導体装置。 - 前記半導体基板の上面の上方に設けられ、コンタクトホールを有する層間絶縁膜と、
前記層間絶縁膜の上方に設けられ、前記コンタクトホールによって前記半導体基板と接触するエミッタ電極と
を更に備え、
前記半導体基板の上面において前記ゲートトレンチ部は予め定められた延伸方向に延伸しており、
前記延伸方向において、前記第1閾値を有する前記ゲート構造部と、前記半導体基板の端辺との間に、前記延伸方向とは異なる方向に長手を有する前記コンタクトホールが配置されている
請求項1から11のいずれか一項に記載の半導体装置。 - 前記第1閾値は、前記第2閾値に比べて、0.1V以上0.5V以下低い
請求項1から12のいずれか一項に記載の半導体装置。
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