JP2020053428A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- JP2020053428A JP2020053428A JP2018178013A JP2018178013A JP2020053428A JP 2020053428 A JP2020053428 A JP 2020053428A JP 2018178013 A JP2018178013 A JP 2018178013A JP 2018178013 A JP2018178013 A JP 2018178013A JP 2020053428 A JP2020053428 A JP 2020053428A
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Abstract
Description
すなわち、従来の装置は、処理ブロック内の階層数を増加させることによって高さが高くなるのに対応して、処理ブロックとの間で基板を受け渡すキャリアブロックのタワー部の高さも高くする必要がある。しかしながら、キャリアブロックは、クリーンルームの天井を利用してキャリアを搬送するOHT(Overhead Hoist Transport:天井走行式無人搬送車とも呼ばれる)とキャリア載置部との間でキャリアの受け渡しを行うので、キャリアブロックのタワー部の高さを高くするとOHTと干渉する恐れある。したがって、キャリアブロックのタワー部の高さを高くすることができないので、処理ブロックの階層数を増加させても、キャリアブロックと処理ブロックとの間における基板の搬送効率が低くなるので、処理ブロックの階層数を増加させたにも関わらず、期待したほどスループットを向上させることができないという問題がある。
すなわち、請求項1に記載の発明は、基板に処理を行う基板処理装置において、基板を収納するキャリアを天井走行式無人搬送車との間で受け渡すためのキャリア載置部を少なくとも2台備え、キャリア載置部のキャリアから基板を取り出し、キャリア載置部のキャリアに基板を収納するため、水平方向への進退、水平面内での旋回、垂直方向への昇降が可能なアームを有し、前記各キャリア載置部に対して水平方向の位置が固定されたインデクサロボットを前記キャリア載置部ごとに備えたインデクサブロックと、前記インデクサブロックに隣接して配置されたブリッジブロックと、前記ブリッジブロックに隣接して配置され、少なくとも1つ以上の処理ユニットを備えた階層が積層された複数階層を有する処理ブロックと、を備え、前記インデクサブロックの高さが、前記処理ブロックの最上層未満であり、前記ブリッジブロックは、前記インデクサブロック側であって、前記インデクサロボットで基板を受け渡し可能な位置に配置され、基板を載置するための複数段の台を高さ方向に備えたバッファ部と、前記処理ブロック側であって、前記処理ブロックとの間で基板を受け渡し可能な位置に配置され、基板を載置するための複数段の台を、前記処理ブロックの階層方向に、前記処理ブロックにおける複数階層の最下層から最上層にわたって備えたパス部と、前記パス部との間で基板を受け渡すアームを有する2台のブリッジロボットを備えていることを特徴とするものである。
3 … インデクサブロック
5 … ブリッジブロック
7 … 処理ブロック
9 … ユーティリティブロック
W … 基板
11 … キャリア載置部
13 … 基台部
15 … 伸縮部
17 … 保持部
19 … アーム
21 … 基台部
23 … 伸縮部
25 … 保持部
27 … アーム
29 … 台
31 … ピン
33 … 支持柱
37 … 移動機構
39 … 伸縮部39
41 … 伸縮部
43 … 保持部
45 … アーム
47 … 台
49 … ピン
51 … 支持柱
C … キャリア
TID(TID1,TID2) … インデクサ用搬送ロボット
TU … 処理液タンク配備部
BT(BT1,BT2) … ブリッジ用搬送ロボット
BF … バッファ部
PS(PS1〜PS3) … パス部
BU … 熱処理ユニット
SU … 塗布ユニット
GBU1 … 第1の熱処理ユニット群
GBU2 … 第2の熱処理ユニット群
GBU3 … 第3の熱処理ユニット群
GSU1 … 第1の塗布ユニット群
GSU2 … 第2の塗布ユニット群
GSU3 … 第3の塗布ユニット群
TBS(TBS1〜TBS3) … 処理用搬送ロボット
61 … ポンプ及びフィルタ
Claims (9)
- 基板に処理を行う基板処理装置において、
基板を収納するキャリアを天井走行式無人搬送車との間で受け渡すためのキャリア載置部を少なくとも2台備え、キャリア載置部のキャリアから基板を取り出し、キャリア載置部のキャリアに基板を収納するため、水平方向への進退、水平面内での旋回、垂直方向への昇降が可能なアームを有し、前記各キャリア載置部に対して水平方向の位置が固定されたインデクサロボットを前記キャリア載置部ごとに備えたインデクサブロックと、
前記インデクサブロックに隣接して配置されたブリッジブロックと、
前記ブリッジブロックに隣接して配置され、少なくとも1つ以上の処理ユニットを備えた階層が積層された複数階層を有する処理ブロックと、
を備え、
前記インデクサブロックの高さが、前記処理ブロックの最上層未満であり、
前記ブリッジブロックは、
前記インデクサブロック側であって、前記インデクサロボットで基板を受け渡し可能な位置に配置され、基板を載置するための複数段の台を高さ方向に備えたバッファ部と、前記処理ブロック側であって、前記処理ブロックとの間で基板を受け渡し可能な位置に配置され、基板を載置するための複数段の台を、前記処理ブロックの階層方向に、前記処理ブロックにおける複数階層の最下層から最上層にわたって備えたパス部と、前記パス部との間で基板を受け渡すアームを有する2台のブリッジロボットを備えていることを特徴とする基板処理装置。 - 請求項1に記載の基板処理装置において、
前記処理ブロックは、前記処理ユニット及び前記パス部で基板を受け渡す1台の搬送ロボットを前記複数階層のうち所定階層数ごとに備え、
前記パス部は、前記複数階層のうち所定階層数ごとに分離して配置された複数個の分離パス部で構成されていることを特徴とする基板処理装置。 - 請求項2に記載の基板処理装置において、
前記各分離パス部のうち、上方に配置されている分離パス部は、前記複数階層に対して下方寄りに配置され、中央に配置されている分離パス部は、前記複数階層に対して中央に配置され、下方に配置されている分離パス部は、前記複数階層に対して上方寄りに配置されていることを特徴とする基板処理装置。 - 請求項2または3に記載の基板処理装置において、
前記処理ブロックは、前記所定階層数ごとに配置された前記搬送ロボット同士を仕切る間仕切りが省略されていることを特徴とする基板処理装置。 - 請求項1から4のいずれかに記載の基板処理装置において、
前記処理ユニットは、基板に処理液を供給する機能を備え、
下部に配置され、前記処理液を貯留する処理液タンクから前記各階層の処理ユニットに処理液を供給するポンプ及びフィルタは、前記複数階層の最上層よりも下方に配置されていることを特徴とする基板処理装置。 - 請求項1から5のいずれかに記載の基板処理装置において、
前記インデクサブロックは、前記各キャリア載置部に対向する位置に前記各インデクサロボットが配置されていることを特徴とする基板処理装置。 - 請求項1から5のいずれかに記載の基板処理装置において、
前記キャリア載置部は、少なくとも垂直方向に2台以上備えられ、
前記バッファ部の高さは、最上部の前記キャリア載置部に載置されたキャリアの上端以下であることを特徴とする基板処理装置。 - 請求項1から5のいずれかに記載の基板処理装置において、
前記キャリア載置部は、少なくとも垂直方向に2台以上備えられ、
前記バッファ部の高さは、最下部に配置されたキャリア載置部に載置されたキャリアの下端以上であることを特徴とする基板処理装置。 - 請求項1から5のいずれかに記載の基板処理装置において、
前記バッファ部の高さは、最上部のパス部の上端以下であり、かつ、最下部のパス部の下端以上であることを特徴とする基板処理装置。
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