JP2018186160A - 半導体素子 - Google Patents
半導体素子 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 235
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 76
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 68
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 230000015556 catabolic process Effects 0.000 abstract description 17
- 230000004888 barrier function Effects 0.000 description 42
- 238000000034 method Methods 0.000 description 16
- 238000002513 implantation Methods 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 230000004048 modification Effects 0.000 description 11
- 238000012986 modification Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- 239000012535 impurity Substances 0.000 description 8
- 238000002161 passivation Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000004590 computer program Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920002577 polybenzoxazole Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
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Abstract
【解決手段】
半導体素子100は、半導体基板と、前記半導体基板上に配置された炭化珪素半導体層と、前記炭化珪素半導体層内に配置された終端領域とを備える。前記終端領域は、前記炭化珪素半導体層の表面の一部を囲むように配置されたガードリング領域と、前記ガードリング領域とは離間して、前記ガードリング領域の周囲を囲むように配置された、複数のリングを含むFLR領域とを有する。前記終端領域は扇部を含み、前記扇部において、前記複数のリングのうち少なくとも1つのリングの内周および外周、並びに、前記ガードリング領域の内周および外周は同じ第1の曲率中心を有し、前記第1の曲率中心は、前記ガードリング領域の前記内周よりも内側に位置し、前記ガードリング領域の内周の曲率半径は50μm以下である。
【選択図】図2
Description
以下、図面を参照しながら、本開示の半導体素子の実施形態について説明する。本実施形態では、第1導電型がn型、第2導電型がp型である例について示すが、これに限定されない。本開示の実施形態において、第1導電型がp型、第2導電型がn型であってもよい。
図1Aから図13を参照して、本実施形態に係る半導体素子100を説明する。
次に、本実施形態に係る半導体素子100の製造方法について図5から図13を用いて説明する。図5から図13は、本実施形態に係る半導体素子100の製造方法の一部を示す断面図である。
以下、本実施形態の半導体素子の変形例を説明する。
101 半導体基板
102 ドリフト層
102B バッファ層
110 第2電極
111 絶縁膜
112 表面電極
113 裏面電極
114 保護膜
150 終端領域
151 ガードリング領域
152 FLR領域
159 第1電極
Claims (9)
- 主面及び裏面を有する第1導電型の半導体基板と、
前記半導体基板の前記主面上に配置された第1導電型の炭化珪素半導体層と、
前記炭化珪素半導体層内に配置された第2導電型の終端領域と、
前記炭化珪素半導体層上に配置され、前記炭化珪素半導体層とショットキー接合を形成する第1電極と、
前記半導体基板の前記裏面上に配置され、前記半導体基板とオーミック接合を形成する第2電極とを備え、
前記終端領域は、前記半導体基板の前記主面の法線方向から見て前記炭化珪素半導体層表面の一部を囲むように配置されており、
前記終端領域は、前記炭化珪素半導体層の表面に接する第2導電型のガードリング領域と、前記ガードリング領域とは離間して、前記ガードリング領域の周囲を囲むように配置された第2導電型の複数のリングを含むFLR領域とを有し、
前記第1電極は、前記炭化珪素半導体層と接する面を有し、
前記第1電極は、前記炭化珪素半導体層と接する前記面の縁部において、前記ガードリング領域と接し、
前記炭化珪素半導体層表面の法線方向から見て、前記終端領域は扇部を含み、
前記扇部において、前記複数のリングのうち少なくとも1つのリングの内周および外周、並びに、前記ガードリング領域の内周および外周は同じ第1の曲率中心を有し、前記第1の曲率中心は、前記ガードリング領域の前記内周よりも内側に位置し、前記ガードリング領域の内周の曲率半径は50μm以下である、半導体素子。 - 前記ガードリング領域の前記内周の曲率半径が10μm以上である、請求項1に記載の半導体素子。
- 前記ガードリング領域の前記内周の曲率半径が10μm以下である、請求項1に記載の半導体素子。
- 前記ガードリング領域の前記内周は、直角の角部を有する、請求項1または3に記載の半導体素子。
- 前記終端領域は、その内周および外周が直線で構成される少なくとも2つの直線部をさらに含み、
前記扇部は、前記少なくとも2つの直線部の端部を繋ぐように配置されている、請求項1から4のいずれかに記載の半導体素子。 - 主面及び裏面を有する第1導電型の半導体基板と、
前記半導体基板の前記主面上に配置された第1導電型の炭化珪素半導体層と、
前記炭化珪素半導体層内に配置された第2導電型の終端領域と、
前記炭化珪素半導体層上に配置され、前記炭化珪素半導体層とショットキー接合を形成する第1電極と、
前記半導体基板の前記裏面上に配置され、前記半導体基板とオーミック接合を形成する第2電極とを備え、
前記終端領域は、前記半導体基板の前記主面の法線方向から見て前記炭化珪素半導体層表面の一部を囲むように配置されており、
前記終端領域は、前記炭化珪素半導体層の表面に接する第2導電型のガードリング領域と、前記ガードリング領域とは離間して、前記ガードリング領域の周囲を囲むように配置された、第2導電型の複数のリングを含むFLR領域とを有し、
前記第1電極は、前記炭化珪素半導体層と接する面を有し、
前記第1電極は、前記炭化珪素半導体層と接する前記面の縁部において、前記ガードリング領域と接し、
前記炭化珪素半導体層表面の法線方向から見て、前記終端領域は扇部を含み、
前記扇部において、前記複数のリングのうち少なくとも1つのリングの内周および外周、並びに、前記ガードリング領域の外周は同じ第1の曲率中心を有し、前記第1の曲率中心は、前記ガードリング領域の内周に一致しているか、または、前記ガードリング領域内に位置する、半導体素子。 - 前記ガードリング領域の幅をW(μm)とするとき、
前記ガードリング領域の前記外周の曲率半径は、50+W(μm)以下である、請求項6に記載の半導体素子。 - 前記ガードリング領域の前記内周は、前記第1の曲率中心とは異なる第2の曲率中心を有し、前記炭化珪素半導体層表面の法線方向から見て、前記第2の曲率中心は、前記ガードリング領域の前記内周より内側に位置し、前記ガードリング領域の前記内周の曲率半径は10μm以下である、請求項6または7に記載の半導体素子。
- 前記終端領域は、その内周および外周が直線で構成される少なくとも2つの直線部をさらに含み、
前記扇部は、前記少なくとも2つの直線部の端部を繋ぐように配置されている、請求項6から8のいずれかに記載の半導体素子。
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JP2017086315A JP2018186160A (ja) | 2017-04-25 | 2017-04-25 | 半導体素子 |
US15/944,399 US10224436B2 (en) | 2017-04-25 | 2018-04-03 | Semiconductor device |
CN201810335339.5A CN108735720B (zh) | 2017-04-25 | 2018-04-13 | 半导体元件 |
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JP2017086315A JP2018186160A (ja) | 2017-04-25 | 2017-04-25 | 半導体素子 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020136479A (ja) * | 2019-02-19 | 2020-08-31 | パナソニックIpマネジメント株式会社 | 半導体素子 |
JP7400128B2 (ja) | 2020-06-11 | 2023-12-18 | 珠海格力▲電▼器股▲分▼有限公司 | Mpsダイオードデバイス及びその作製方法 |
JP7443926B2 (ja) | 2020-05-15 | 2024-03-06 | 株式会社デンソー | 半導体装置およびその製造方法 |
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JP7249921B2 (ja) * | 2019-09-20 | 2023-03-31 | 株式会社東芝 | 半導体装置 |
IT202000018127A1 (it) * | 2020-07-27 | 2022-01-27 | St Microelectronics Srl | Dispositivo mps scalabile basato su sic, metodo di fabbricazione del dispositivo mps e apparecchio elettronico comprendente il dispositivo mps |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004158817A (ja) * | 2002-09-09 | 2004-06-03 | Toyota Central Res & Dev Lab Inc | 半導体装置 |
JP2006196775A (ja) * | 2005-01-14 | 2006-07-27 | Nippon Inter Electronics Corp | Jbsおよびその製造方法ならびにショットキーバリアダイオード |
JP2014107408A (ja) * | 2012-11-28 | 2014-06-09 | Sanken Electric Co Ltd | 半導体装置 |
JP2014138048A (ja) * | 2013-01-16 | 2014-07-28 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置 |
JP2015188066A (ja) * | 2014-03-10 | 2015-10-29 | パナソニックIpマネジメント株式会社 | 半導体素子及びその製造方法 |
WO2016043247A1 (ja) * | 2014-09-17 | 2016-03-24 | 富士電機株式会社 | 半導体装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004095659A (ja) * | 2002-08-29 | 2004-03-25 | Sanyo Electric Co Ltd | 半導体装置 |
JP4375439B2 (ja) | 2007-05-30 | 2009-12-02 | 株式会社デンソー | ジャンクションバリアショットキーダイオードを備えた炭化珪素半導体装置 |
JP2011082315A (ja) * | 2009-10-07 | 2011-04-21 | Shindengen Electric Mfg Co Ltd | 半導体装置 |
JP5509908B2 (ja) * | 2010-02-19 | 2014-06-04 | 富士電機株式会社 | 半導体装置およびその製造方法 |
JP5806129B2 (ja) * | 2012-01-17 | 2015-11-10 | トヨタ自動車株式会社 | 半導体装置及びその製造方法 |
JP5939127B2 (ja) * | 2012-10-22 | 2016-06-22 | 住友電気工業株式会社 | 炭化珪素半導体装置 |
JP5943846B2 (ja) * | 2013-01-18 | 2016-07-05 | 三菱電機株式会社 | 炭化珪素半導体装置及びその製造方法 |
US9490328B2 (en) * | 2013-06-26 | 2016-11-08 | Hitachi, Ltd. | Silicon carbide semiconductor device and manufacturing method of the same |
JP2015079987A (ja) * | 2014-12-17 | 2015-04-23 | 株式会社日立製作所 | 半導体装置 |
US9773924B2 (en) * | 2015-04-22 | 2017-09-26 | Panasonic Intellectual Property Management Co., Ltd. | Semiconductor device having barrier region and edge termination region enclosing barrier region |
-
2017
- 2017-04-25 JP JP2017086315A patent/JP2018186160A/ja active Pending
-
2018
- 2018-04-03 US US15/944,399 patent/US10224436B2/en active Active
- 2018-04-13 CN CN201810335339.5A patent/CN108735720B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004158817A (ja) * | 2002-09-09 | 2004-06-03 | Toyota Central Res & Dev Lab Inc | 半導体装置 |
JP2006196775A (ja) * | 2005-01-14 | 2006-07-27 | Nippon Inter Electronics Corp | Jbsおよびその製造方法ならびにショットキーバリアダイオード |
JP2014107408A (ja) * | 2012-11-28 | 2014-06-09 | Sanken Electric Co Ltd | 半導体装置 |
JP2014138048A (ja) * | 2013-01-16 | 2014-07-28 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置 |
JP2015188066A (ja) * | 2014-03-10 | 2015-10-29 | パナソニックIpマネジメント株式会社 | 半導体素子及びその製造方法 |
WO2016043247A1 (ja) * | 2014-09-17 | 2016-03-24 | 富士電機株式会社 | 半導体装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020136479A (ja) * | 2019-02-19 | 2020-08-31 | パナソニックIpマネジメント株式会社 | 半導体素子 |
JP7113230B2 (ja) | 2019-02-19 | 2022-08-05 | パナソニックIpマネジメント株式会社 | 半導体素子 |
JP7443926B2 (ja) | 2020-05-15 | 2024-03-06 | 株式会社デンソー | 半導体装置およびその製造方法 |
JP7400128B2 (ja) | 2020-06-11 | 2023-12-18 | 珠海格力▲電▼器股▲分▼有限公司 | Mpsダイオードデバイス及びその作製方法 |
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