JP2018179262A - 真空ポンプ、磁気軸受装置及びロータ - Google Patents
真空ポンプ、磁気軸受装置及びロータ Download PDFInfo
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- JP2018179262A JP2018179262A JP2017083964A JP2017083964A JP2018179262A JP 2018179262 A JP2018179262 A JP 2018179262A JP 2017083964 A JP2017083964 A JP 2017083964A JP 2017083964 A JP2017083964 A JP 2017083964A JP 2018179262 A JP2018179262 A JP 2018179262A
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- vacuum pump
- bearing
- radial direction
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- 238000006073 displacement reaction Methods 0.000 claims description 16
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- 238000010168 coupling process Methods 0.000 description 4
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
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- 239000004065 semiconductor Substances 0.000 description 2
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- 238000013459 approach Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
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- 230000007423 decrease Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- 238000012545 processing Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/0408—Passive magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/0408—Passive magnetic bearings
- F16C32/0436—Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0459—Details of the magnetic circuit
- F16C32/0468—Details of the magnetic circuit of moving parts of the magnetic circuit, e.g. of the rotor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0474—Active magnetic bearings for rotary movement
- F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/50—Bearings
- F05B2240/51—Bearings magnetic
- F05B2240/511—Bearings magnetic with permanent magnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2260/00—Function
- F05B2260/96—Preventing, counteracting or reducing vibration or noise
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2210/00—Working fluids
- F05D2210/10—Kind or type
- F05D2210/12—Kind or type gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2240/00—Components
- F05D2240/50—Bearings
- F05D2240/51—Magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2233/00—Monitoring condition, e.g. temperature, load, vibration
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
10・・・ 筐体
11・・・ 吸気口
12・・・ 上方フランジ
20・・・ ロータ
21・・・ ロータシャフト
22・・・ 回転翼
23・・・ タッチダウン軸受
24・・・ ボス孔
25・・・ ボルト
26・・・ ロータフランジ
27・・・ シャフトフランジ
28・・・ アーマチャディスク
30・・・ 駆動モータ
31・・・ 回転子
32・・・ 固定子
40・・・ ステータコラム
41・・・ 排気口
42・・・ Oリング
50・・・ 固定翼
60・・・ アキシャル方向軸受
61・・・ アキシャル電磁石
62a、62b・・・永久磁石
63・・・ アキシャルセンサ
70・・・ ラジアル方向軸受
71・・・ 能動ラジアル軸受(第1のラジアル方向磁力発生手段)
72・・・ 受動ラジアル軸受(第2のラジアル方向磁力発生手段)
73・・・ ラジアル電磁石
74・・・ ラジアルセンサ
75・・・ コア
75a・・・凸部
75b・・・爪部
76・・・ (ラジアル電磁石の)磁極
77・・・ (ラジアルセンサの)磁極
G1・・・ ロータの重心
A ・・・ アキシャル方向
C ・・・ (コアの)周方向
R ・・・ ラジアル方向
Claims (5)
- ガスを排気するロータをラジアル方向に磁力で非接触支持するラジアル方向磁力発生手段と、前記ロータの前記ラジアル方向の変位を検出するラジアル方向変位検出手段と、を有する磁気軸受装置を備えた真空ポンプであって、
前記ラジアル方向磁力発生手段は、前記ガスの排気方向において、前記ロータの重心より排気側に2つ設けられていることを特徴とする真空ポンプ。 - 前記ガスの前記排気方向の吸気側に配置された第1のラジアル方向磁力発生手段は、前記ロータを能動的に支持し、
前記ガスの前記排気方向の排気側に配置された第2のラジアル方向磁力発生手段は、前記ロータを受動的に支持することを特徴とする請求項1記載の真空ポンプ。 - 前記第1のラジアル方向磁力発生手段の中心及び前記ラジアル方向変位検出手段の中心は、同一平面上に配置されていることを特徴とする請求項2記載の真空ポンプ。
- 請求項1から3のいずれか1項記載の真空ポンプに用いられることを特徴とする磁気軸受装置。
- 請求項1から3のいずれか1項記載の真空ポンプに用いられることを特徴とするロータ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017083964A JP6927735B2 (ja) | 2017-04-20 | 2017-04-20 | 真空ポンプ、磁気軸受装置及びロータ |
PCT/JP2018/015285 WO2018193944A1 (ja) | 2017-04-20 | 2018-04-11 | 真空ポンプ、磁気軸受装置及びロータ |
KR1020197029253A KR102530771B1 (ko) | 2017-04-20 | 2018-04-11 | 진공 펌프, 자기 베어링 장치 및 로터 |
EP18787569.5A EP3613987B1 (en) | 2017-04-20 | 2018-04-11 | Vacuum pump, magnetic bearing device, and rotor |
CN201880024595.0A CN110520627B (zh) | 2017-04-20 | 2018-04-11 | 真空泵、磁轴承装置及转子 |
US16/604,936 US11536280B2 (en) | 2017-04-20 | 2018-04-11 | Vacuum pump, magnetic bearing device, and rotor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017083964A JP6927735B2 (ja) | 2017-04-20 | 2017-04-20 | 真空ポンプ、磁気軸受装置及びロータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018179262A true JP2018179262A (ja) | 2018-11-15 |
JP6927735B2 JP6927735B2 (ja) | 2021-09-01 |
Family
ID=63856527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017083964A Active JP6927735B2 (ja) | 2017-04-20 | 2017-04-20 | 真空ポンプ、磁気軸受装置及びロータ |
Country Status (6)
Country | Link |
---|---|
US (1) | US11536280B2 (ja) |
EP (1) | EP3613987B1 (ja) |
JP (1) | JP6927735B2 (ja) |
KR (1) | KR102530771B1 (ja) |
CN (1) | CN110520627B (ja) |
WO (1) | WO2018193944A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023100813A1 (ja) * | 2021-12-01 | 2023-06-08 | エドワーズ株式会社 | 真空ポンプ |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7454928B2 (ja) * | 2019-08-23 | 2024-03-25 | エドワーズ株式会社 | 真空ポンプ及び真空ポンプに用いられる電磁石ユニット |
KR102371862B1 (ko) * | 2020-06-25 | 2022-03-08 | 숭실대학교 산학협력단 | 동축 와전류 변위 센서를 갖는 자기베어링 |
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JPH0646036B2 (ja) * | 1982-11-19 | 1994-06-15 | セイコー電子工業株式会社 | 軸流分子ポンプ |
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JP2002286036A (ja) * | 2001-03-27 | 2002-10-03 | Ebara Corp | 磁気軸受装置 |
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JPS5983828A (ja) | 1982-11-02 | 1984-05-15 | Seiko Instr & Electronics Ltd | 磁気軸受 |
JPH04236818A (ja) * | 1991-01-22 | 1992-08-25 | Ebara Corp | 回転体支持装置 |
JP2010216458A (ja) * | 2009-03-17 | 2010-09-30 | Em Oyo Gijutsu Kenkyusho:Kk | ターボ分子ポンプシステム |
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CN102242721A (zh) | 2011-06-21 | 2011-11-16 | 北京中科科仪技术发展有限责任公司 | 一种磁悬浮分子泵及其制造方法 |
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CN104895808B (zh) | 2014-03-04 | 2017-06-06 | 上海复谣真空科技有限公司 | 复合分子泵 |
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2017
- 2017-04-20 JP JP2017083964A patent/JP6927735B2/ja active Active
-
2018
- 2018-04-11 WO PCT/JP2018/015285 patent/WO2018193944A1/ja unknown
- 2018-04-11 US US16/604,936 patent/US11536280B2/en active Active
- 2018-04-11 EP EP18787569.5A patent/EP3613987B1/en active Active
- 2018-04-11 CN CN201880024595.0A patent/CN110520627B/zh active Active
- 2018-04-11 KR KR1020197029253A patent/KR102530771B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0646036B2 (ja) * | 1982-11-19 | 1994-06-15 | セイコー電子工業株式会社 | 軸流分子ポンプ |
JPH0710492U (ja) * | 1993-07-19 | 1995-02-14 | セイコー精機株式会社 | ターボ分子ポンプ |
JP2002286036A (ja) * | 2001-03-27 | 2002-10-03 | Ebara Corp | 磁気軸受装置 |
JP2016145555A (ja) * | 2015-02-09 | 2016-08-12 | 株式会社島津製作所 | ターボ分子ポンプ装置 |
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WO2023100813A1 (ja) * | 2021-12-01 | 2023-06-08 | エドワーズ株式会社 | 真空ポンプ |
Also Published As
Publication number | Publication date |
---|---|
KR20190141134A (ko) | 2019-12-23 |
EP3613987A1 (en) | 2020-02-26 |
KR102530771B1 (ko) | 2023-05-10 |
JP6927735B2 (ja) | 2021-09-01 |
EP3613987B1 (en) | 2022-08-31 |
WO2018193944A1 (ja) | 2018-10-25 |
CN110520627B (zh) | 2021-10-29 |
US20200158118A1 (en) | 2020-05-21 |
CN110520627A (zh) | 2019-11-29 |
EP3613987A4 (en) | 2020-12-23 |
US11536280B2 (en) | 2022-12-27 |
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