JP2018169198A - 静電容量測定用の測定器 - Google Patents
静電容量測定用の測定器 Download PDFInfo
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Abstract
Description
Claims (9)
- 静電容量測定用の測定器であって、
ベース基板と、
前記ベース基板のエッジに沿って設けられた第1電極を有する第1センサと、
前記ベース基板上に固定された一以上の第2センサであり、それぞれの一以上の第2電極を提供する、該一以上の第2センサと、
ベース基板上に搭載されており、前記第1センサ及び前記第2センサに接続された回路基板であり、前記第1電極及び前記一以上の第2電極に高周波信号を与え、該第1電極における電圧振幅から静電容量に応じた第1の測定値を取得し、該一以上の第2電極における電圧振幅から静電容量に応じた一以上の第2の測定値を取得するように構成された、該回路基板と、
を備え、
前記測定器は、該測定器内で固定されており、且つ、前記一以上の第2電極に対面する一以上の基準面を有する、
測定器。 - 前記一以上の第2センサとして、それぞれの二つの第2電極を提供する二つの第2センサを備え、
前記一以上の基準面として、前記二つの第2電極にそれぞれ対面する二つの基準面を備え、
前記二つの第2電極のうち一方の第2電極と前記二つの基準面のうち該一方の第2電極に対面する一方の基準面との間の第1の距離と、前記二つの第2電極のうち他方の第2電極と前記二つの基準面のうち該他方の第2電極に対面する他方の基準面との間の第2の距離は、互いに異なっている、
請求項1に記載の測定器。 - 前記回路基板は、
所定の環境下で前記一方の第2電極における電圧振幅から取得された前記第2の測定値である第1の基準値、及び、該所定の環境下で前記他方の第2電極における電圧振幅から取得された前記第2の測定値である第2の基準値を記憶するよう構成された記憶素子と、
前記一方の第2電極における電圧振幅から取得される前記第2の測定値と前記第1の基準値との間の第1の差、及び、前記他方の第2電極における電圧振幅から取得される前記第2の測定値と前記第2の基準値との間の第2の差のうち少なくとも一方から補正値を求めるように構成された演算器と、
を有する、
請求項2に記載の測定器。 - 前記演算器は、前記補正値として、前記第1の差と前記第2の差との平均値を算出するように構成されている、請求項3に記載の測定器。
- 前記第1電極における電圧振幅から求めることが可能な最大の測定値、前記一方の第2電極における電圧振幅から求めることが可能な最大の測定値、及び、前記他方の第2電極の電圧振幅から求めることが可能な最大の測定値は同一であり、
前記第1の距離は、前記最大の測定値の20%以上の前記第2の測定値が該一方の第2電極における電圧振幅から取得されるように設定されており、
前記第2の距離は、前記第1の距離よりも大きく、
前記演算器は、前記第1の測定値が前記最大の測定値の20%以上の値である場合に、前記第1の差を前記補正値として選択し、前記第1の測定値が前記最大の測定値の20%未満の値である場合に、前記第2の差を前記補正値として選択するように構成されている、
請求項3に記載の測定器。 - 前記第1の距離は、0.6mm以下である、請求項5に記載の測定器。
- 前記演算器は、前記第1の測定値を前記補正値によって修正するよう構成されている、請求項3〜6の何れか一項に記載の測定器。
- 前記一以上の第2センサとして、一つの第2センサを備え、
前記一以上の基準面として、一つの基準面を備え、
前記回路基板は、
所定の環境下で前記一つの第2センサの前記第2電極における電圧振幅から取得された前記第2の測定値である基準値を記憶するように構成された記憶素子と、
前記一つの第2センサの前記第2電極における電圧振幅から取得される前記第2の測定値及び前記基準値から補正値を求めるように構成された演算器と、
を有する、
請求項1に記載の測定器。 - 前記演算器は、前記第1の測定値を前記補正値によって修正するよう構成されている、
請求項8に記載の測定器。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017064814A JP6832207B2 (ja) | 2017-03-29 | 2017-03-29 | 静電容量測定用の測定器 |
TW107110417A TWI753140B (zh) | 2017-03-29 | 2018-03-27 | 靜電容量測定用之測定器 |
US15/938,662 US10837991B2 (en) | 2017-03-29 | 2018-03-28 | Electrostatic capacitance measuring device |
KR1020180035528A KR102465043B1 (ko) | 2017-03-29 | 2018-03-28 | 정전 용량 측정용 측정기 |
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