JP2017538864A - 処理チャンバにおいて基板をマスキングするためのマスク構成、基板上に層を堆積させるための装置、及び、処理チャンバにおいて基板をマスキングするためのマスク構成の位置を合わせる方法 - Google Patents
処理チャンバにおいて基板をマスキングするためのマスク構成、基板上に層を堆積させるための装置、及び、処理チャンバにおいて基板をマスキングするためのマスク構成の位置を合わせる方法 Download PDFInfo
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
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- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
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- H—ELECTRICITY
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- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
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Abstract
Description
Claims (15)
- 処理チャンバ内で基板をマスキングするためのマスク構成であって、
一又は複数のフレーム要素を有するマスクフレームであって、前記マスクフレームに接続可能なマスクデバイスを支持するよう構成された、マスクフレームと、
前記一又は複数のフレーム要素のうちの少なくとも1つのフレーム要素に接続可能な少なくとも1つのアクチュエータであって、前記少なくとも1つのフレーム要素に力を印加するよう構成されている、少なくとも1つのアクチュエータとを備える、マスク構成。 - 前記マスクフレームは、実質的に垂直な配向で前記マスクデバイスを支持するよう構成される、請求項1に記載のマスク構成。
- 前記一又は複数のフレーム要素は平面を画定し、前記少なくとも1つのアクチュエータは、前記平面に実質的に平行な方向に前記力を印加するよう構成され、詳細には、前記マスクフレームが前記実質的に垂直な配向である場合に、前記平面は垂直な平面である、請求項1又は2に記載のマスク構成。
- 前記少なくとも1つのフレーム要素は長軸方向延在部を有し、前記少なくとも1つのアクチュエータは、前記長軸方向延在部の方向に実質的に直角な方向に前記力を印加するよう構成される、請求項1から3のいずれか一項に記載のマスク構成。
- 前記マスクフレームが前記実質的に垂直な配向である場合、前記少なくとも1つのフレーム要素は水平フレーム要素である、請求項1から4のいずれか一項に記載のマスク構成。
- 前記少なくとも1つのフレーム要素は、第1フレーム要素と第2フレーム要素とを含み、前記少なくとも1つのアクチュエータは、前記第1フレーム要素及び前記第2フレーム要素に接続可能であり、前記少なくとも1つのアクチュエータは、前記第1フレーム要素及び前記第2フレーム要素に前記力を印加するよう構成され、かつ、詳細には、前記第1フレーム要素と前記第2フレーム要素とが平行に配設される、請求項1から5のいずれか一項に記載のマスク構成。
- 前記少なくとも1つのアクチュエータは、第1アクチュエータと第2アクチュエータとを含み、
前記第1アクチュエータは前記第1フレーム要素に接続可能であり、前記第1アクチュエータは、前記第1フレーム要素に第1の力を印加するよう構成され、
前記第2アクチュエータは前記第2フレーム要素に接続可能であり、前記第2アクチュエータは、前記第2フレーム要素に第2の力を印加するよう構成され、詳細には、前記第1の力と前記第2の力とが、反対方向を指向する、請求項6に記載のマスク構成。 - マスクフレーム支持体を更に含み、前記マスクフレームの前記一又は複数のフレーム要素は、前記マスクデバイスを支持するよう構成された第1面と、前記マスクフレーム支持体に面するよう構成された第2面とを提供し、前記マスクフレームは前記マスクフレーム支持体に接続可能である、請求項1から7のいずれか一項に記載のマスク構成。
- 前記第2面の表面が、一又は複数の凹部、及び/又は、一又は複数の突起又はスペーサを含み、かつ/或いは、
前記マスクフレーム支持体の表面が、一又は複数の凹部、及び/又は、一又は複数の突起又はスペーサを含む、請求項8に記載のマスク構成。 - 前記一又は複数の突起又はスペーサは、少なくとも1つの貫通孔を含み、かつ/或いは、
前記少なくとも1つのフレーム要素内、及び/又は前記マスクフレーム支持体内に、一又は複数の切り欠きが設けられ、詳細には、前記一又は複数の切り欠きが、前記一又は複数の突起又はスペーサを少なくとも部分的に囲む、請求項9に記載のマスク構成。 - 前記一又は複数の凹部、及び/又は、前記一又は複数の突起又はスペーサは、前記少なくとも1つのフレーム要素に設けられ、かつ/或いは、
前記一又は複数の凹部、及び/又は、前記一又は複数の突起又はスペーサは、前記マスクフレーム支持体の、前記少なくとも1つのフレーム要素に対応する領域に設けられる、請求項9又は10に記載のマスク構成。 - 基板上に層を堆積させるための装置であって、
内部で層を堆積させることに適合した処理チャンバと、
前記処理チャンバの中の、請求項1から11のいずれか一項に記載のマスク構成と、
前記層を形成する材料を堆積させるための堆積源とを備える、装置。 - 処理チャンバ内で基板をマスキングするためのマスク構成の位置を合わせる方法であって、
マスクデバイスを支持しているマスクフレームの少なくとも1つのフレーム要素に、力を印加することを含む、方法。 - 前記少なくとも1つのフレーム要素に前記力を印加することは、前記少なくとも1つのフレーム要素を押すこと又は引っ張ることを含む、請求項13に記載の方法。
- 前記マスクフレーム及び前記マスクデバイスが実質的に垂直な配向である場合、前記力は実質的に垂直な方向に印加される、請求項13又は14に記載の方法。
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PCT/EP2014/077257 WO2016091303A1 (en) | 2014-12-10 | 2014-12-10 | Mask arrangement for masking a substrate in a processing chamber |
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JP2019127543A Division JP2019206761A (ja) | 2019-07-09 | 2019-07-09 | 処理チャンバにおいて基板をマスキングするためのマスク構成 |
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Cited By (3)
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WO2020085140A1 (ja) * | 2018-10-23 | 2020-04-30 | 株式会社ジャパンディスプレイ | 蒸着方法 |
JP2020515708A (ja) * | 2018-04-03 | 2020-05-28 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | キャリアをデバイスに締結するための構成装置 |
JP2020535304A (ja) * | 2018-08-06 | 2020-12-03 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | マスクアライナを有する堆積装置、基板をマスクするためのマスク設備、及び基板をマスクするための方法 |
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US10934614B2 (en) * | 2016-03-23 | 2021-03-02 | Hon Hai Precision Industry Co., Ltd. | Vapor deposition mask, vapor deposition mask production method, and organic semiconductor element production method |
US20200251691A1 (en) * | 2017-03-17 | 2020-08-06 | Applied Materials, Inc. | Apparatus for vacuum processing of a substrate, system for vacuum processing of a substrate, and method for transportation of a substrate carrier and a mask carrier in a vacuum chamber |
CN109844163A (zh) * | 2017-09-26 | 2019-06-04 | 应用材料公司 | 用于使掩蔽装置非接触地悬浮的方法 |
WO2019063074A1 (en) * | 2017-09-27 | 2019-04-04 | Applied Materials, Inc. | MASK ARRANGEMENT FOR MASKING A SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND METHOD THEREOF |
US11047039B2 (en) * | 2018-01-08 | 2021-06-29 | Applied Materials, Inc. | Substrate carrier having hard mask |
CN111511956B (zh) * | 2018-06-20 | 2022-08-23 | 株式会社爱发科 | 防附着部件和真空处理装置 |
KR20200096361A (ko) * | 2019-02-01 | 2020-08-12 | 삼성디스플레이 주식회사 | 마스크 조립체, 이를 포함하는 표시 장치의 제조장치 및 표시 장치의 제조방법 |
TW202134774A (zh) * | 2019-12-05 | 2021-09-16 | 美商應用材料股份有限公司 | 光標處理系統 |
WO2021221648A1 (en) * | 2020-04-30 | 2021-11-04 | Applied Materials, Inc. | Method of adjusting a mask arrangement, processing system, and computer-readable medium |
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US11718904B2 (en) | 2023-08-08 |
US20190301002A1 (en) | 2019-10-03 |
KR102164588B1 (ko) | 2020-10-13 |
CN107002219A (zh) | 2017-08-01 |
TW201632645A (zh) | 2016-09-16 |
KR102019490B1 (ko) | 2019-09-06 |
EP3230488A1 (en) | 2017-10-18 |
KR20170092689A (ko) | 2017-08-11 |
WO2016091303A1 (en) | 2016-06-16 |
TWI639716B (zh) | 2018-11-01 |
CN107002219B (zh) | 2021-09-03 |
US20170342541A1 (en) | 2017-11-30 |
KR20190104464A (ko) | 2019-09-09 |
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