JP2017092435A - 消耗品のためのセンサおよびアジャスタ - Google Patents
消耗品のためのセンサおよびアジャスタ Download PDFInfo
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Abstract
Description
Claims (19)
- 処理チャンバで用いられる装置であって、
前記処理チャンバ内の消耗品と、
前記消耗品の質量を測定するために配置された秤と、
を備える、装置。 - 請求項1に記載の装置であって、さらに、前記秤との間を電気接続されたコントローラを備える、装置。
- 請求項2に記載の装置であって、さらに、前記秤によって測定された質量に基づいて前記消耗品を移動させるためのアクチュエータを備える、装置。
- 請求項3に記載の装置であって、前記秤は、圧電変換器であり、前記圧電変換器から測定された電流または電圧が、質量の決定に用いられる、装置。
- 請求項4に記載の装置であって、前記アクチュエータは、さらに、前記圧電変換器を含み、印加された電流または電圧が、前記アクチュエータに移動を提供する、装置。
- 請求項5に記載の装置であって、前記処理チャンバは、プラズマ処理チャンバである、装置。
- 請求項6に記載の装置であって、前記消耗品は、リング形状である、装置。
- 請求項7に記載の装置であって、前記消耗品のリング形状は、分割リング形状である、装置。
- 請求項7に記載の装置であって、前記消耗品は、エッジリングである、装置。
- 請求項9に記載の装置であって、前記秤は、さらに、有形のコンピュータ読み取り可能な媒体を備え、前記有形のコンピュータ読み取り可能な媒体は、
前記圧電変換器から電圧を測定するためのコンピュータ読み取り可能なコードと、
前記測定された電圧を質量の指標として用いるためのコンピュータ読み取り可能なコードと、を備える、装置。 - 請求項10に記載の装置であって、前記アクチュエータは、さらに、有形のコンピュータ読み取り可能な媒体を備え、前記有形のコンピュータ読み取り可能な媒体は、
印加電圧を決定するためのコンピュータ読み取り可能なコードと、
前記決定された印加電圧を前記圧電変換器に印加するためのコンピュータ読み取り可能なコードと、を備える、装置。 - 請求項2に記載の装置であって、前記秤は、圧電変換器であり、前記圧電変換器から測定された電流または電圧が、質量の決定に用いられる、装置。
- 請求項12に記載の装置であって、さらに、
前記圧電変換器に電気接続されたコントローラを備え、
前記コントローラは、
少なくとも1つのCPUと、
前記少なくとも1つのCPUに電気接続されたコンピュータ読み取り可能な媒体と、を備え、
前記コンピュータ読み取り可能な媒体は、
前記圧電変換器から電圧または電流を測定するためのコンピュータ読み取り可能なコードと、
前記測定された電圧または電流から印加電圧または印加電流を決定するためのコンピュータ読み取り可能なコードと、
前記決定済みの印加電圧または印加電流を前記圧電変換器に印加するためのコンピュータ読み取り可能なコードと、を備え、
前記印加された決定済みの印加電圧または印加電流は、前記処理チャンバ内の前記消耗品を移動させる、装置。 - 方法であって、
処理チャンバ内の少なくとも1つの消耗品の質量を測定する工程と、
前記処理チャンバを利用する工程と、
前記少なくとも1つの消耗品の質量の変化を測定する工程と、
前記少なくとも1つの消耗品の前記測定された質量変化に従って、前記少なくとも1つの消耗品を調整する工程と、
を備える、方法。 - 請求項14に記載の方法であって、さらに、前記少なくとも1つの消耗品の前記測定された質量変化に従って、前記少なくとも1つの消耗品を交換する工程を備える、方法。
- 請求項15に記載の方法であって、前記少なくとも1つの消耗品を調整する工程は、前記少なくとも1つの消耗品を移動させる工程を含む、方法。
- 請求項14に記載の方法であって、前記少なくとも1つの消耗品を調整する工程は、前記少なくとも1つの消耗品の前記測定された質量変化に従って、前記少なくとも1つの消耗品の垂直高さを調整する工程を含む、方法。
- 請求項14に記載の方法であって、前記少なくとも1つの消耗品の質量の変化を測定する工程は、圧電変換器から電圧または電流を測定する工程を含み、前記少なくとも1つの消耗品を調整する工程は、前記圧電変換器に電圧または電流を印加することで、前記少なくとも1つの消耗品の垂直高さを調整する工程を含む、方法。
- 装置であって、
プラズマ処理チャンバと、
前記処理チャンバ内の消耗品と、
前記消耗品の質量を測定すると共に、前記消耗品を移動させるためのアクチュエータとして機能するように配置された圧電変換器と、
前記圧電変換器に電気接続されたコントローラと、
を備え、
前記コントローラは、
少なくとも1つのCPUと、
前記少なくとも1つのCPUに電気接続されたコンピュータ読み取り可能な媒体と、を備え、
前記コンピュータ読み取り可能な媒体は、
前記圧電変換器から電圧または電流を測定するためのコンピュータ読み取り可能なコードと、
前記測定された電圧または電流から印加電圧または印加電流を決定するためのコンピュータ読み取り可能なコードと、
前記決定済みの印加電圧または印加電流を前記圧電変換器に印加するためのコンピュータ読み取り可能なコードと、を備え、
前記印加された決定済みの印加電圧または印加電流は、前記処理チャンバ内の前記消耗品を移動させる、装置。
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KR20240059609A (ko) | 2024-05-07 |
KR102660512B1 (ko) | 2024-04-23 |
JP6794124B2 (ja) | 2020-12-02 |
TWI692046B (zh) | 2020-04-21 |
KR20170053551A (ko) | 2017-05-16 |
US20170133283A1 (en) | 2017-05-11 |
SG10201601918VA (en) | 2017-06-29 |
CN106684013B (zh) | 2020-01-17 |
CN106684013A (zh) | 2017-05-17 |
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US10985078B2 (en) | 2021-04-20 |
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