JP2016516657A5 - - Google Patents

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Publication number: JP2016516657A5
Authority: JP; Japan
Prior art keywords: glass; glass sheet; glass sheets; interfaces; modified layer
Prior art date: 2014-03-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP2016501874A

Other languages

English (en)

Japanese (ja)

Other versions

JP2016516657A (ja

JP6186493B2 (ja

Filing date

2014-03-13

Publication date

2017-03-16

2013-10-07 Priority claimed from US14/047,251 external-priority patent/US9340443B2/en

2014-03-13 Application filed filed Critical

2014-03-13 Priority claimed from PCT/US2014/025537 external-priority patent/WO2014151353A1/en

2016-06-09 Publication of JP2016516657A publication Critical patent/JP2016516657A/ja

2017-03-16 Publication of JP2016516657A5 publication Critical patent/JP2016516657A5/ja

2017-08-23 Application granted granted Critical

2017-08-23 Publication of JP6186493B2 publication Critical patent/JP6186493B2/ja

Status Expired - Fee Related legal-status Critical Current

2034-03-13 Anticipated expiration legal-status Critical

Links

239000011521 glass Substances 0.000 claims description 43
210000002381 Plasma Anatomy 0.000 claims description 7
229920002313 fluoropolymer Polymers 0.000 claims description 6
239000004811 fluoropolymer Substances 0.000 claims description 6
230000004048 modification Effects 0.000 claims description 4
238000006011 modification reaction Methods 0.000 claims description 4
239000000203 mixture Substances 0.000 claims description 2
125000003118 aryl group Chemical group 0.000 claims 9
BLRPTPMANUNPDV-UHFFFAOYSA-N silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 8
229910000077 silane Inorganic materials 0.000 claims 8
238000000137 annealing Methods 0.000 claims 6
230000005484 gravity Effects 0.000 claims 3
PARWUHTVGZSQPD-UHFFFAOYSA-N Phenylsilane Chemical compound [SiH3]C1=CC=CC=C1 PARWUHTVGZSQPD-UHFFFAOYSA-N 0.000 claims 2
ZZNQQQWFKKTOSD-UHFFFAOYSA-N diethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OCC)(OCC)C1=CC=CC=C1 ZZNQQQWFKKTOSD-UHFFFAOYSA-N 0.000 claims 2
238000010030 laminating Methods 0.000 claims 2
238000006116 polymerization reaction Methods 0.000 claims 2
230000000717 retained Effects 0.000 claims 2
JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 claims 2
FFUAGWLWBBFQJT-UHFFFAOYSA-N Bis(trimethylsilyl)amine Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 claims 1
230000001351 cycling Effects 0.000 claims 1
-1 polytetrafluoroethylene Polymers 0.000 claims 1
229920001343 polytetrafluoroethylene Polymers 0.000 claims 1
239000004810 polytetrafluoroethylene Substances 0.000 claims 1
150000004756 silanes Chemical class 0.000 claims 1
239000000969 carrier Substances 0.000 description 7
238000000034 method Methods 0.000 description 3
230000032798 delamination Effects 0.000 description 2
229910052739 hydrogen Inorganic materials 0.000 description 2
239000001257 hydrogen Substances 0.000 description 2
201000001195 sepiapterin reductase deficiency Diseases 0.000 description 2
239000006185 dispersion Substances 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
125000004435 hydrogen atoms Chemical group [H]* 0.000 description 1
239000012528 membrane Substances 0.000 description 1
238000000527 sonication Methods 0.000 description 1
238000000391 spectroscopic ellipsometry Methods 0.000 description 1
238000009210 therapy by ultrasound Methods 0.000 description 1
238000004506 ultrasonic cleaning Methods 0.000 description 1

JP2016501874A 2013-03-15 2014-03-13 ガラスシートのバルクアニール Expired - Fee Related JP6186493B2 (ja)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
US201361791418P	2013-03-15	2013-03-15
US61/791,418		2013-03-15
US14/047,251 US9340443B2 (en)	2012-12-13	2013-10-07	Bulk annealing of glass sheets
US14/047,251		2013-10-07
PCT/US2014/025537 WO2014151353A1 (en)	2013-03-15	2014-03-13	Bulk annealing of glass sheets

Related Child Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2017147681A Division JP6434096B2 (ja)	2013-03-15	2017-07-31	ガラスシートのバルクアニール

Publications (3)

Publication Number	Publication Date
JP2016516657A JP2016516657A (ja)	2016-06-09
JP2016516657A5 true JP2016516657A5 (zh)	2017-03-16
JP6186493B2 JP6186493B2 (ja)	2017-08-23

Family

ID=51580938

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
JP2016501874A Expired - Fee Related JP6186493B2 (ja)	2013-03-15	2014-03-13	ガラスシートのバルクアニール
JP2017147681A Expired - Fee Related JP6434096B2 (ja)	2013-03-15	2017-07-31	ガラスシートのバルクアニール

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
JP2017147681A Expired - Fee Related JP6434096B2 (ja)	2013-03-15	2017-07-31	ガラスシートのバルクアニール

Country Status (6)

Country	Link
EP (1)	EP2969997A1 (zh)
JP (2)	JP6186493B2 (zh)
KR (1)	KR102239613B1 (zh)
CN (1)	CN105658594B (zh)
TW (2)	TWI594960B (zh)
WO (1)	WO2014151353A1 (zh)

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TWI617437B (zh)	2012-12-13	2018-03-11	康寧公司	促進控制薄片與載體間接合之處理
US10014177B2 (en)	2012-12-13	2018-07-03	Corning Incorporated	Methods for processing electronic devices
US9340443B2 (en)	2012-12-13	2016-05-17	Corning Incorporated	Bulk annealing of glass sheets
US10086584B2 (en)	2012-12-13	2018-10-02	Corning Incorporated	Glass articles and methods for controlled bonding of glass sheets with carriers
CN105658594B (zh) *	2013-03-15	2019-01-04	康宁股份有限公司	玻璃片的整体退火
US10510576B2 (en)	2013-10-14	2019-12-17	Corning Incorporated	Carrier-bonding methods and articles for semiconductor and interposer processing
CN106132688B (zh) *	2014-01-27	2020-07-14	康宁股份有限公司	用于薄片与载体的受控粘结的制品和方法
JP2017518954A (ja)	2014-04-09	2017-07-13	コーニングインコーポレイテッド	デバイスで改質された基体物品、およびそれを製造する方法
CN107635769B (zh) *	2015-05-19	2020-09-15	康宁股份有限公司	使片材与载体粘结的制品和方法
KR102524620B1 (ko)	2015-06-26	2023-04-21	코닝 인코포레이티드	시트 및 캐리어를 포함하는 방법들 및 물품들
TW201825623A (zh)	2016-08-30	2018-07-16	美商康寧公司	用於片材接合的矽氧烷電漿聚合物
TWI821867B (zh)	2016-08-31	2023-11-11	美商康寧公司	具以可控制式黏結的薄片之製品及製作其之方法
KR102346393B1 (ko) *	2017-06-19	2022-01-03	동우 화인켐 주식회사	터치센서를 포함하는 플렉시블 표시장치의 제조방법
JP7260523B2 (ja)	2017-08-18	2023-04-18	コーニングインコーポレイテッド	ポリカチオン性高分子を使用した一時的結合
US11331692B2 (en)	2017-12-15	2022-05-17	Corning Incorporated	Methods for treating a substrate and method for making articles comprising bonded sheets

Family Cites Families (16)

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US4397722A (en) *	1981-12-31	1983-08-09	International Business Machines Corporation	Polymers from aromatic silanes and process for their preparation
WO2004079826A1 (ja) *	1996-10-22	2004-09-16	Mitsutoshi Miyasaka	薄膜トランジスタの製造方法、及び表示装置と電子機器
US20050001201A1 (en) *	2003-07-03	2005-01-06	Bocko Peter L.	Glass product for use in ultra-thin glass display applications
US20050069713A1 (en) *	2003-09-30	2005-03-31	Rahul Gupta	Capillary coating method
WO2007129554A1 (ja) *	2006-05-08	2007-11-15	Asahi Glass Company, Limited	薄板ガラス積層体、薄板ガラス積層体を用いた表示装置の製造方法および、支持ガラス基板
AT508318B1 (de) *	2008-01-24	2022-07-15	Brewer Science Inc	Verfahren für eine vorübergehende montage eines bausteinwafers auf einem trägersubstrat
EP2273475A1 (en) *	2008-04-17	2011-01-12	Asahi Glass Company, Limited	Glass laminate, display panel with support, method for producing glass laminate and method for manufacturing display panel with support
JP5029523B2 (ja) *	2008-07-14	2012-09-19	旭硝子株式会社	ガラス積層体、支持体付き表示装置用パネル、表示装置用パネル、表示装置およびこれらの製造方法
TW201033000A (en) *	2009-01-09	2010-09-16	Asahi Glass Co Ltd	Glass laminate and manufacturing method therefor
US8697228B2 (en) *	2009-05-06	2014-04-15	Corning Incorporated	Carrier for glass substrates
US9847243B2 (en) *	2009-08-27	2017-12-19	Corning Incorporated	Debonding a glass substrate from carrier using ultrasonic wave
CN102576106B (zh) *	2009-10-20	2015-02-11	旭硝子株式会社	玻璃层叠体及其制造方法、显示面板的制造方法及利用该制造方法获得的显示面板
JP5641254B2 (ja) *	2010-02-03	2014-12-17	旭硝子株式会社	ガラス板の徐冷方法及びその装置
US20110250346A1 (en) *	2010-04-07	2011-10-13	Remington Jr Michael P	Adhesion of organic coatings on glass
JPWO2013008895A1 (ja) *	2011-07-12	2015-02-23	旭硝子株式会社	積層膜付きガラス基板の製造方法
CN105658594B (zh) *	2013-03-15	2019-01-04	康宁股份有限公司	玻璃片的整体退火

2014
- 2014-03-13 CN CN201480027673.4A patent/CN105658594B/zh not_active Expired - Fee Related
- 2014-03-13 EP EP14728700.7A patent/EP2969997A1/en not_active Withdrawn
- 2014-03-13 TW TW103109136A patent/TWI594960B/zh not_active IP Right Cessation
- 2014-03-13 WO PCT/US2014/025537 patent/WO2014151353A1/en active Application Filing
- 2014-03-13 JP JP2016501874A patent/JP6186493B2/ja not_active Expired - Fee Related
- 2014-03-13 TW TW106121917A patent/TWI679175B/zh not_active IP Right Cessation
- 2014-03-13 KR KR1020157029187A patent/KR102239613B1/ko active IP Right Grant
2017
- 2017-07-31 JP JP2017147681A patent/JP6434096B2/ja not_active Expired - Fee Related

Publication	Publication Date	Title
JP2016516657A5 (zh)	2017-03-16
JP2014146793A5 (zh)	2017-03-30
TWI667319B (zh)	2019-08-01	Adhesive sheet
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TWI679175B (zh)	2019-12-11	玻璃片之大量退火
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TW201529298A (zh)	2015-08-01	用於玻璃片與載具的受控接合的玻璃物件及方法
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