JP2011227093A - 反射面の形状測定方法及びシステム - Google Patents
反射面の形状測定方法及びシステム Download PDFInfo
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- JP2011227093A JP2011227093A JP2011149786A JP2011149786A JP2011227093A JP 2011227093 A JP2011227093 A JP 2011227093A JP 2011149786 A JP2011149786 A JP 2011149786A JP 2011149786 A JP2011149786 A JP 2011149786A JP 2011227093 A JP2011227093 A JP 2011227093A
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- 238000000034 method Methods 0.000 title claims abstract description 59
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
【解決手段】本発明は、反射面(14)で反射されるパターン(15)を有するパターンキャリア(2)と、反射面(14)に反射されたパターン(15)を画素ごとに視認するカメラ(1)とを有するシステムを較正する方法に関する。カメラ(1)とパターン(15)との位置及び向き、並びにカメラ(1)の画素(8)ごとの視認方向を較正するため、面積の広い2枚の平坦なミラー面(5、6)が平行な構成で用いられ、ミラー面(5、6)が液体によって生成される。
【選択図】図1
Description
3…測定対象物 4…トレイ
5、6…較正用ミラー面 7…世界座標系
8…画像、カメラ画素 9…マーカー
10…共通座標系 11…カバー領域
12…カメラの画像領域 13…システム
14…反射面 15…パターン
16…カメラの座標系 17…パターンの座標系
18…物体 19…交点
Claims (10)
- 反射面(14)の形状を測定するシステムを較正する方法であって、前記システムは、前記反射面(14)で反射されるパターン(15)を有するパターンキャリア(2)と、前記反射面(14)に反射された前記パターン(15)を画素ごとに視認するカメラ(1)とを有し、前記カメラ(1)と前記パターン(15)との位置及び向き、並びに前記カメラ(1)の画素(8)ごとの視認方向を較正するため、面積の広い2枚の平坦なミラー面(5、6)が平行な構成で用いられ、前記ミラー面(5、6)が液体によって生成されることを特徴とする方法。
- 請求項1に記載の方法であって、前記ミラー面(5、6)は、測定対象となる前記反射面(14)と比較可能な高さに配置されることを特徴とする方法。
- 請求項1又は請求項2に記載の方法であって、前記ミラー面(5、6)は、トレイ(4)内の前記液体の2つの異なる充填レベルによって及び/又は前記トレイ(4)を動かすことによって生成されることを特徴とする方法。
- 請求項1〜3のいずれか1項に記載の方法であって、前記パターンキャリア(2)及び前記カメラ(1)は共通の座標系(10)に較正されることを特徴とする方法。
- 請求項1〜4のいずれか1項に記載の方法であって、前記液体はグリセリンであることを特徴とする方法。
- 反射面(14)の形状を測定するためのシステムであって、反射面(14)で反射可能なパターン(15)を生成するための少なくとも1つのパターンキャリア(2)と、前記反射面(14)で反射される前記パターン(15)を画素毎に視認する少なくとも1つのカメラ(1)と、前記カメラの画像(8)を評価して形状決定及び/又は較正を行うための評価手段とを有するシステムにおいて、前記システムはさらに、面積の広い平坦なミラー面(5、6)を構成するための装置を有し、前記ミラー面(5、6)は液体によって形成されることを特徴とするシステム。
- 請求項6に記載のシステムであって、前記ミラー面(5、6)を構成するための前記装置はトレイ(4)であることを特徴とするシステム。
- 請求項6又は請求項7に記載のシステムであって、前記パターンキャリア(2)はフラットスクリーンモニターであることを特徴とするシステム。
- 請求項6〜8のいずれか1項に記載のシステムであって、複数のパターンキャリア(2)は四角形に配置され、カメラ(1)は前記パターンキャリア(2)の交点に配置されることを特徴とするシステム。
- 請求項6〜9のいずれか1項に記載のシステムであって、前記パターンキャリア(2)は前記反射面(14)に由来する空間角度をカバーするように配置されることを特徴とするシステム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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DE102006015792.3 | 2006-04-05 | ||
DE102006015792A DE102006015792A1 (de) | 2006-04-05 | 2006-04-05 | Verfahren und System zur Formmessung einer reflektierenden Oberfläche |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009503444A Division JP5334835B2 (ja) | 2006-04-05 | 2007-03-08 | 反射面の形状測定方法及びシステム |
Publications (2)
Publication Number | Publication Date |
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JP2011227093A true JP2011227093A (ja) | 2011-11-10 |
JP5623347B2 JP5623347B2 (ja) | 2014-11-12 |
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009503444A Active JP5334835B2 (ja) | 2006-04-05 | 2007-03-08 | 反射面の形状測定方法及びシステム |
JP2011149786A Active JP5623347B2 (ja) | 2006-04-05 | 2011-07-06 | 反射面の形状測定方法及びシステム |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009503444A Active JP5334835B2 (ja) | 2006-04-05 | 2007-03-08 | 反射面の形状測定方法及びシステム |
Country Status (10)
Country | Link |
---|---|
US (1) | US8064069B2 (ja) |
EP (2) | EP2040026B1 (ja) |
JP (2) | JP5334835B2 (ja) |
KR (2) | KR101318866B1 (ja) |
CN (2) | CN102305602B (ja) |
AT (2) | ATE468522T1 (ja) |
DE (3) | DE102006015792A1 (ja) |
ES (2) | ES2348902T3 (ja) |
TW (1) | TWI348018B (ja) |
WO (1) | WO2007115621A2 (ja) |
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JP2016105075A (ja) * | 2014-10-21 | 2016-06-09 | イスラ サーフィス ヴィズィオーン ゲーエムベーハー | 局所屈折率を決定する方法及びその装置 |
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WO2011158869A1 (ja) | 2010-06-15 | 2011-12-22 | 旭硝子株式会社 | 形状測定装置、形状測定方法、およびガラス板の製造方法 |
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2006
- 2006-04-05 DE DE102006015792A patent/DE102006015792A1/de not_active Withdrawn
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2007
- 2007-03-08 DE DE502007003867T patent/DE502007003867D1/de not_active Expired - Fee Related
- 2007-03-08 EP EP08022163A patent/EP2040026B1/de active Active
- 2007-03-08 AT AT08022163T patent/ATE468522T1/de active
- 2007-03-08 EP EP07711857A patent/EP2002203B1/de active Active
- 2007-03-08 US US12/295,470 patent/US8064069B2/en active Active
- 2007-03-08 KR KR1020127030593A patent/KR101318866B1/ko active IP Right Grant
- 2007-03-08 CN CN201110133405.9A patent/CN102305602B/zh not_active Expired - Fee Related
- 2007-03-08 DE DE502007004485T patent/DE502007004485D1/de active Active
- 2007-03-08 JP JP2009503444A patent/JP5334835B2/ja active Active
- 2007-03-08 WO PCT/EP2007/001999 patent/WO2007115621A2/de active Application Filing
- 2007-03-08 AT AT07711857T patent/ATE475062T1/de active
- 2007-03-08 ES ES07711857T patent/ES2348902T3/es active Active
- 2007-03-08 CN CN2007800122454A patent/CN101416022B/zh not_active Expired - Fee Related
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- 2007-04-02 TW TW096111631A patent/TWI348018B/zh not_active IP Right Cessation
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- 2008-11-05 KR KR1020087027187A patent/KR101266115B1/ko not_active IP Right Cessation
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Patent Citations (6)
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Publication number | Publication date |
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TWI348018B (en) | 2011-09-01 |
EP2040026A2 (de) | 2009-03-25 |
WO2007115621A3 (de) | 2007-12-06 |
JP2009532685A (ja) | 2009-09-10 |
US8064069B2 (en) | 2011-11-22 |
CN102305602B (zh) | 2014-10-01 |
TW200745505A (en) | 2007-12-16 |
EP2002203B1 (de) | 2010-07-21 |
DE102006015792A1 (de) | 2007-10-18 |
ES2348902T3 (es) | 2010-12-16 |
CN101416022A (zh) | 2009-04-22 |
KR101318866B1 (ko) | 2013-10-17 |
DE502007003867D1 (de) | 2010-07-01 |
KR20090031854A (ko) | 2009-03-30 |
EP2040026A3 (de) | 2009-04-01 |
ATE475062T1 (de) | 2010-08-15 |
JP5623347B2 (ja) | 2014-11-12 |
KR101266115B1 (ko) | 2013-05-27 |
WO2007115621A2 (de) | 2007-10-18 |
EP2040026B1 (de) | 2010-05-19 |
ATE468522T1 (de) | 2010-06-15 |
ES2360239T3 (es) | 2011-06-02 |
JP5334835B2 (ja) | 2013-11-06 |
EP2002203A2 (de) | 2008-12-17 |
DE502007004485D1 (de) | 2010-09-02 |
CN101416022B (zh) | 2012-05-23 |
CN102305602A (zh) | 2012-01-04 |
US20100060905A1 (en) | 2010-03-11 |
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