JP2011040182A - Manufacturing device of organic light-emitting panel and method for manufacturing organic light-emitting panel - Google Patents

Manufacturing device of organic light-emitting panel and method for manufacturing organic light-emitting panel Download PDF

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JP2011040182A
JP2011040182A JP2009184129A JP2009184129A JP2011040182A JP 2011040182 A JP2011040182 A JP 2011040182A JP 2009184129 A JP2009184129 A JP 2009184129A JP 2009184129 A JP2009184129 A JP 2009184129A JP 2011040182 A JP2011040182 A JP 2011040182A
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organic light
substrate
sealing
sealing substrate
space
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Keiichi Hori
恵一 堀
Mitsunori Oizumi
光典 大泉
Daisuke Komoda
大介 薦田
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CLIMB PRODUCTS CO Ltd
Mitsubishi Heavy Industries Ltd
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Mitsubishi Heavy Industries Ltd
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Priority to JP2009184129A priority Critical patent/JP2011040182A/en
Priority to CN2010102456114A priority patent/CN101997089B/en
Priority to TW099125974A priority patent/TWI436512B/en
Priority to KR1020100075690A priority patent/KR101169871B1/en
Publication of JP2011040182A publication Critical patent/JP2011040182A/en
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing device of an organic light-emitting panel and a method for manufacturing an organic light-emitting panel, in which bubbles do not intrude between an element substrate and a sealing substrate in bonding them, and without generation of displacement between the element substrate and the sealing substrate. <P>SOLUTION: A first space and a second space are to be vacuum by sealing a lower side vacuum vessel 1 and an upper side vacuum vessel 2, the sealing substrate 3 is raised to come in contact with the element substrate 4, gas of atmospheric pressure or higher is introduced into the first space, and the element substrate 4 and the sealing substrate 3 are put under pressure bonding by operating a differential pressure generated between the first space and the second space to the element substrate 4 through a diaphragm 8. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、有機発光パネルの製造装置及び有機発光パネルの製造方法に関する。   The present invention relates to an organic light emitting panel manufacturing apparatus and an organic light emitting panel manufacturing method.

有機ＥＬ（Ｅｌｅｃｔｒｏ Ｌｕｍｉｎｅｓｃｅｎｃｅ）は、極薄で面発光という形状、優れた色再現性やＵＶレスという光の質及び水銀レスで数年以内に蛍光灯より省エネになると予想される環境性能等から、環境にやさしい次世代照明として大いに期待されている。この有機ＥＬは、一般に、透明導電性膜パターニング済ガラス基板を用い、主に、洗浄工程、有機層成膜工程、カソード（陰極）成膜工程、封止工程を経て製造される。そして、有機ＥＬは、有機層等が大気中の水分や酸素に曝されると発光特性が劣化してしまうため、上述した封止工程において、有機層等を外気から遮断する封止構造を設ける必要がある。   Organic EL (Electro Luminescence) is extremely thin and has a surface emission shape, excellent color reproducibility, UV-less light quality and mercury-less environmental performance expected to save energy from fluorescent lamps within a few years. It is highly expected as an environmentally friendly next generation lighting. This organic EL is generally manufactured through a cleaning process, an organic layer film forming process, a cathode (cathode) film forming process, and a sealing process using a transparent conductive film patterned glass substrate. And since organic EL etc. will be exposed to the water | moisture content and oxygen in air | atmosphere, light emission characteristics will deteriorate, Therefore In the sealing process mentioned above, the sealing structure which interrupts | blocks an organic layer etc. from external air is provided. There is a need.

このため、例えば、下記特許文献１では、有機層等が成膜された素子基板と封止剤が配置された封止基板とを貼り合せることにより素子基板の有機層等を封止する方法が開示されている。また、下記特許文献２には、素子基板と封止基板の上部に弾性体のシートを設置し、素子基板と封止基板が設置された空間を排気することにより弾性体のシート作用する差圧によって素子基板と封止基板とを貼り合せる方法が開示されている。さらに、下記特許文献３，４には、減圧状態で素子基板と封止基板とを貼り合せる方法が開示されている。   Therefore, for example, in Patent Document 1 below, there is a method for sealing an organic layer or the like of an element substrate by bonding an element substrate on which an organic layer or the like is formed and a sealing substrate on which a sealing agent is disposed. It is disclosed. Further, in Patent Document 2 below, an elastic sheet is provided on the element substrate and the sealing substrate, and the differential pressure acting on the elastic sheet by evacuating the space in which the element substrate and the sealing substrate are installed. Discloses a method of bonding an element substrate and a sealing substrate together. Further, Patent Documents 3 and 4 below disclose a method of bonding an element substrate and a sealing substrate in a reduced pressure state.

特開２００６−８５９５７号公報JP 2006-85957 A 特開２００５−２７６７５４号公報JP 2005-276754 A 特開２００５−２４３４１３号公報JP 2005-243413 A 特開２００６−１７９３５２号公報JP 2006-179352 A

しかしながら、上記特許文献１，２に開示された従来の発光パネルの製造装置及び発光パネルの製造方法では、素子基板と封止基板の貼り合せ時に、素子基板と封止基板の間に気泡が混入してしまうという問題があった。また、上記特許文献１〜４に開示された従来の発光パネルの製造装置及び発光パネルの製造方法では、素子基板と封止基板の貼り合せ時に、素子基板と封止基板にずれが生じてしまうという問題があった。   However, in the conventional light emitting panel manufacturing apparatus and the light emitting panel manufacturing method disclosed in Patent Documents 1 and 2, bubbles are mixed between the element substrate and the sealing substrate when the element substrate and the sealing substrate are bonded. There was a problem of doing. In addition, in the conventional light emitting panel manufacturing apparatus and the light emitting panel manufacturing method disclosed in Patent Documents 1 to 4, a deviation occurs between the element substrate and the sealing substrate when the element substrate and the sealing substrate are bonded together. There was a problem.

以上のことから、本発明は、素子基板と封止基板の貼り合せ時に、素子基板と封止基板の間に気泡が混入することがなく、かつ素子基板と封止基板にずれが生じることがない有機発光パネルの製造装置及び有機発光パネルの製造方法を提供することを目的とする。   From the above, in the present invention, bubbles are not mixed between the element substrate and the sealing substrate when the element substrate and the sealing substrate are bonded, and the element substrate and the sealing substrate may be displaced. An object of the present invention is to provide an organic light emitting panel manufacturing apparatus and an organic light emitting panel manufacturing method.

上記の課題を解決する第１の発明に係る有機発光パネルの製造装置は、
単一又は複数領域に有機発光素子が設けられた素子基板と、有機発光素子に対応する領域に封止材を配置した封止基板とを真空減圧下で貼り合せることにより前記有機発光素子を封止する有機発光パネルの製造装置であって、
下側真空容器と、
前記下側真空容器に開閉可能に取り付けられた上側真空容器と、
前記上側真空容器の開口部に設けられた弾性体のシートと、
前記下側真空容器内に前記封止材を上側とし前記封止基板の位置を規制する受け座である封止基板用受け座と、
前記有機発光素子を下側として前記封止基板の上方に離間し、かつ前記素子基板と前記封止基板との相対位置を規制する受け座である素子基板用受け座と、
前記封止基板を下側より吸着固定し昇降可能な昇降テーブルと、
前記シートによって仕切られた前記上側真空容器内の第１の空間及び前記下側真空容器内の第２の空間の気体をそれぞれ吸排気可能な吸排気手段と、
前記下側真空容器及び前記上側真空容器を密閉して、前記第１の空間と前記第２の空間を真空とし、前記昇降テーブルを上昇させて前記封止基板と前記素子基板とを接触させ、前記第１の空間に大気圧又は大気圧以上の気体を導入して、前記第１の空間と前記第２の空間との間に生じた差圧を前記シートを介して前記素子基板に作用させることにより前記素子基板と前記封止基板とを圧着するよう制御する制御手段と
を備える
ことを特徴とする。 An apparatus for manufacturing an organic light-emitting panel according to the first invention for solving the above-described problems is as follows.
The organic light emitting device is sealed by bonding an element substrate provided with an organic light emitting device in a single region or a plurality of regions and a sealing substrate having a sealing material disposed in a region corresponding to the organic light emitting device, under a vacuum. An apparatus for manufacturing an organic light emitting panel,
A lower vacuum vessel;
An upper vacuum vessel attached to the lower vacuum vessel so as to be openable and closable;
An elastic sheet provided in the opening of the upper vacuum vessel;
A sealing substrate receiving seat that is a receiving seat that regulates the position of the sealing substrate with the sealing material on the upper side in the lower vacuum container;
An element substrate receiving seat that is a receiving seat that is spaced apart above the sealing substrate with the organic light emitting element as a lower side and regulates a relative position between the element substrate and the sealing substrate;
A lifting table that can be lifted and lowered by adsorbing and fixing the sealing substrate from below;
Intake / exhaust means capable of intake / exhaust gas in the first space in the upper vacuum vessel and the second space in the lower vacuum vessel partitioned by the sheet;
Sealing the lower vacuum vessel and the upper vacuum vessel, making the first space and the second space vacuum, raising the lifting table to bring the sealing substrate and the element substrate into contact with each other, A gas at atmospheric pressure or higher than atmospheric pressure is introduced into the first space, and a differential pressure generated between the first space and the second space is applied to the element substrate via the sheet. And a control means for controlling to crimp the element substrate and the sealing substrate.

上記の課題を解決する第２の発明に係る有機発光パネルの製造装置は、第１の発明に係る有機発光パネルの製造装置において、
前記昇降テーブルは前記封止基板を加熱可能な加熱手段を備える
ことを特徴とする。 An apparatus for manufacturing an organic light-emitting panel according to a second invention for solving the above-described problems is an apparatus for manufacturing an organic light-emitting panel according to the first invention.
The lifting table includes a heating unit capable of heating the sealing substrate.

上記の課題を解決する第３の発明に係る有機発光パネルの製造方法は、
単一又は複数領域に有機発光素子が設けられた素子基板と、有機発光素子に対応する領域に封止材を配置した封止基板とを真空減圧下で貼り合せることにより前記有機発光素子を封止する有機発光パネルの製造方法であって、
下側真空容器と、
前記下側真空容器に開閉可能に取り付けられた上側真空容器と、
前記上側真空容器の開口部に設けられた弾性体のシートと、
前記シートによって仕切られた上側真空容器内の第１の空間及び下側真空容器内の第２の空間の気体をそれぞれ吸排気可能な吸排気手段と
を備える有機発光パネルの製造装置において、
前記下側真空容器内に前記封止材を上側とし前記封止基板の位置を規制し、
前記有機発光素子を下側として前記封止基板の上方に離間し、かつ前記素子基板と前記封止基板との相対位置を規制し、
前記封止基板を昇降可能とした上で、
前記下側真空容器及び前記上側真空容器を密閉して、前記第１の空間と前記第２の空間を真空とし、
前記封止基板を上昇させて前記素子基板と接触させ、
前記第１の空間に大気圧又は大気圧以上の気体を導入して、前記第１の空間と前記第２の空間との間に生じた差圧を前記シートを介して前記素子基板に作用させることにより前記素子基板と前記封止基板とを圧着する
ことを特徴とする。 The manufacturing method of the organic light emitting panel according to the third invention for solving the above-mentioned problems is as follows.
The organic light emitting device is sealed by bonding an element substrate provided with an organic light emitting device in a single region or a plurality of regions and a sealing substrate having a sealing material disposed in a region corresponding to the organic light emitting device, under a vacuum. A method of manufacturing an organic light emitting panel that stops,
A lower vacuum vessel;
An upper vacuum vessel attached to the lower vacuum vessel so as to be openable and closable;
An elastic sheet provided in the opening of the upper vacuum vessel;
In an apparatus for manufacturing an organic light-emitting panel, comprising an intake / exhaust means capable of intake and exhaust gas in a first space in an upper vacuum vessel and a second space in a lower vacuum vessel partitioned by the sheet,
Regulating the position of the sealing substrate with the sealing material on the upper side in the lower vacuum container,
Separating the organic light emitting element from the lower side above the sealing substrate, and regulating the relative position of the element substrate and the sealing substrate;
After allowing the sealing substrate to move up and down,
Sealing the lower vacuum container and the upper vacuum container, and making the first space and the second space vacuum,
Raising the sealing substrate to contact the element substrate,
A gas at atmospheric pressure or higher than atmospheric pressure is introduced into the first space, and a differential pressure generated between the first space and the second space is applied to the element substrate via the sheet. Thus, the element substrate and the sealing substrate are pressure-bonded.

上記の課題を解決する第４の発明に係る有機発光パネルの製造方法は、第３の発明に係る有機発光パネルの製造方法において、
前記封止基板を加熱する
ことを特徴とする。 A method for manufacturing an organic light emitting panel according to a fourth aspect of the present invention for solving the above-described problem is the method for manufacturing an organic light emitting panel according to the third aspect of the present invention.
The sealing substrate is heated.

本発明によれば、素子基板と封止基板の貼り合せ時に、素子基板と封止基板の間に気泡が混入することがなく、かつ素子基板と封止基板にずれが生じることがない有機発光パネルの製造装置及び有機発光パネルの製造方法を提供することができる。   According to the present invention, when the element substrate and the sealing substrate are bonded together, there is no air bubble mixing between the element substrate and the sealing substrate, and no deviation occurs between the element substrate and the sealing substrate. A panel manufacturing apparatus and an organic light emitting panel manufacturing method can be provided.

本発明に係る有機発光パネルの製造装置の構成を断面により示した模式図である。It is the schematic diagram which showed the structure of the manufacturing apparatus of the organic light emission panel which concerns on this invention by the cross section. 本発明に係る有機発光パネルの製造装置における素子基板及び封止基板の受け座の構成を示した斜視図である。It is the perspective view which showed the structure of the receiving seat of the element board | substrate and the sealing substrate in the manufacturing apparatus of the organic light emitting panel which concerns on this invention. 本発明に係る有機発光パネルの製造方法を示した模式図である。It is the schematic diagram which showed the manufacturing method of the organic light emission panel which concerns on this invention. 図３に続く本発明に係る有機発光パネルの製造方法を示した模式図である。It is the schematic diagram which showed the manufacturing method of the organic light emitting panel which concerns on this invention following FIG. 本発明に係る有機発光パネルの製造方法を示したフロー図である。It is the flowchart which showed the manufacturing method of the organic light emission panel which concerns on this invention.

以下、本発明に係る有機発光パネルの製造装置及び有機発光パネルの製造方法を実施するための形態について、図面を参照しながら説明する。
はじめに、本発明に係る有機発光パネルの製造装置の構成について説明する。
図１は、本発明に係る有機発光パネルの製造装置の構成を断面により示した模式図である。 Hereinafter, embodiments for carrying out an organic light emitting panel manufacturing apparatus and an organic light emitting panel manufacturing method according to the present invention will be described with reference to the drawings.
First, the configuration of the organic light emitting panel manufacturing apparatus according to the present invention will be described.
FIG. 1 is a schematic view showing a cross section of the structure of an organic light emitting panel manufacturing apparatus according to the present invention.

図１に示すように、本発明に係る有機発光パネルの製造装置は、下側真空容器１と上側真空容器２を備えている。上側の真空容器２はヒンジ１１により下側の真空容器１に開閉可能なように取り付けられている。上側の真空容器２の開口部には弾性体のシートであるダイアフラム８が設置されている。   As shown in FIG. 1, the organic light emitting panel manufacturing apparatus according to the present invention includes a lower vacuum container 1 and an upper vacuum container 2. The upper vacuum vessel 2 is attached to the lower vacuum vessel 1 by a hinge 11 so that it can be opened and closed. A diaphragm 8, which is an elastic sheet, is installed in the opening of the upper vacuum vessel 2.

下側の真空容器１の内部には封止基板３の位置を規制する封止基板用受け座５が設置されている。封止基板用受け座５は、封止基板５に予め配置された封止材を上側として封止基板５を支持する。   A sealing substrate receiving seat 5 for restricting the position of the sealing substrate 3 is installed inside the lower vacuum container 1. The sealing substrate receiving seat 5 supports the sealing substrate 5 with the sealing material arranged in advance on the sealing substrate 5 as an upper side.

封止基板用受け座５の上には素子基板４の位置を規制する素子基板用受け座６が設置されている。素子基板用受け座６は、素子基板４に予め配置された有機発光素子を下側として封止基板３の上方に離間し、かつ素子基板４と封止基板３との相対位置を規制するように素子基板４を支持する。   An element substrate receiving seat 6 for restricting the position of the element substrate 4 is installed on the sealing substrate receiving seat 5. The element substrate receiving seat 6 is spaced above the sealing substrate 3 with the organic light emitting element previously disposed on the element substrate 4 as the lower side, and regulates the relative position between the element substrate 4 and the sealing substrate 3. The element substrate 4 is supported.

封止基板３の下方には、封止基板３を下側より吸着固定して昇降することが可能な昇降テーブル７が設置されている。このように、昇降テーブル７に封止基板３を吸着固定するため、封止基板３を上昇させる際に封止基板３がずれてしまうことはない。また、昇降テーブル７には封止基板５を加熱可能な加熱手段であるヒータ７ａが設置されている。   Below the sealing substrate 3, an elevating table 7 capable of moving up and down by adsorbing and fixing the sealing substrate 3 from below is installed. Thus, since the sealing substrate 3 is suction-fixed to the lifting table 7, the sealing substrate 3 is not displaced when the sealing substrate 3 is raised. The elevating table 7 is provided with a heater 7a that is a heating means capable of heating the sealing substrate 5.

ここで、本発明に係る有機発光パネルの製造装置における封止基板用受け座５、素子基板用受け座６及び昇降テーブル７の構成について説明する。
図２は、本発明に係る有機発光パネルの製造装置における素子基板及び封止基板の受け座の構成を示した斜視図である。 Here, the configurations of the sealing substrate receiving seat 5, the element substrate receiving seat 6 and the lifting table 7 in the organic light emitting panel manufacturing apparatus according to the present invention will be described.
FIG. 2 is a perspective view showing the configuration of the element substrate and the receiving seat of the sealing substrate in the organic light emitting panel manufacturing apparatus according to the present invention.

図２に示すように、本実施例に係る有機発光パネルの製造装置においては、封止基板用受け座５は図２中に破線で示す封止基板３の四隅の部分を封止基板用受け座５の封止基板受け面５ａにより支持している。封止基板用受け座５の封止基板３の角部が位置する部分は丸角となっている。このため、封止基板３の封止基板用受け座５への載置が容易になっている。このような構造により、封止基板用受け座５は封止基板３の位置を規制している。   As shown in FIG. 2, in the manufacturing apparatus of the organic light emitting panel according to the present embodiment, the sealing substrate receiving seat 5 has four corner portions of the sealing substrate 3 indicated by broken lines in FIG. The seat 5 is supported by a sealing substrate receiving surface 5a. A portion where the corner of the sealing substrate 3 of the sealing substrate receiving seat 5 is located is a round corner. For this reason, it is easy to place the sealing substrate 3 on the sealing substrate receiving seat 5. With such a structure, the sealing substrate receiving seat 5 regulates the position of the sealing substrate 3.

素子基板用受け座６は、図２中に破線で示す素子基板４の２辺の部分を素子基板用受け座６の素子基板受け面６ａにより支持している。素子基板用受け座６の素子基板４の角部が位置する部分は丸角となっている。このため、素子基板４の素子基板用受け座６への載置が容易になっている。このような構造により、素子基板用受け座６は素子基板４の位置を規制している。   The element substrate receiving seat 6 supports the two sides of the element substrate 4 indicated by broken lines in FIG. 2 by the element substrate receiving surface 6 a of the element substrate receiving seat 6. A portion where the corner portion of the element substrate 4 of the element substrate receiving seat 6 is located is a rounded corner. For this reason, it is easy to place the element substrate 4 on the element substrate receiving seat 6. With such a structure, the element substrate receiving seat 6 regulates the position of the element substrate 4.

昇降テーブル７は、昇降テーブル７を上昇させたときに封止基板用受け座５と緩衝しないように封止基板用受け座５に対応した形状となっており、昇降テーブル７の上面が素子基板４のほぼ全面で支えることができるようになっている。このため、封止基板３と素子基板４とを確実に貼り合せることができる。   The lifting table 7 has a shape corresponding to the sealing substrate receiving seat 5 so as not to be buffered with the sealing substrate receiving seat 5 when the lifting table 7 is raised, and the upper surface of the lifting table 7 is the element substrate. 4 can be supported on almost the entire surface. For this reason, the sealing substrate 3 and the element substrate 4 can be bonded together reliably.

また、図１に示すように、上側真空容器２には、上側真空容器２とダイアフラム８とにより形成される第１の空間の気体を脱気し、第１の空間に気体を導入する給排気手段である給排気装置９が設置されている。また、下側真空容器１には、下側真空容器１とダイアフラム８とにより形成される第２の空間の気体を脱気し、第２の空間に気体を導入する給排気手段である給排気装置１０が設置されている。   Further, as shown in FIG. 1, the upper vacuum vessel 2 is supplied and exhausted by degassing the gas in the first space formed by the upper vacuum vessel 2 and the diaphragm 8 and introducing the gas into the first space. An air supply / exhaust device 9 as means is installed. Further, the lower vacuum vessel 1 is a supply / exhaust unit that is a supply / exhaust unit for degassing the gas in the second space formed by the lower vacuum vessel 1 and the diaphragm 8 and introducing the gas into the second space. A device 10 is installed.

さらに、本発明に係る有機発光パネルの製造装置は、後述する有機発光パネルの製造方法に基づき昇降テーブル７や給排気装置９，１０等を制御する制御手段である制御装置１２を備えている。
以上が本発明に係る有機発光パネルの製造装置の構成である。 Further, the organic light emitting panel manufacturing apparatus according to the present invention includes a control device 12 which is a control means for controlling the lifting table 7, the air supply / exhaust devices 9, 10 and the like based on the method of manufacturing the organic light emitting panel described later.
The above is the configuration of the organic light emitting panel manufacturing apparatus according to the present invention.

次に、本発明に係る有機発光パネルの製造方法について説明する。
図３，４は、本発明に係る有機発光パネルの製造方法を示した模式図である。なお、図３，４においては、有機発光パネルの製造方法を説明するために有機発光パネルの製造装置の構成を簡略化して示している。また、図５は、本発明に係る有機発光パネルの製造方法を示したフロー図である。 Next, the manufacturing method of the organic light emitting panel according to the present invention will be described.
3 and 4 are schematic views showing a method for manufacturing an organic light emitting panel according to the present invention. 3 and 4, the configuration of the organic light emitting panel manufacturing apparatus is shown in a simplified manner in order to explain the method of manufacturing the organic light emitting panel. FIG. 5 is a flowchart showing a method for manufacturing an organic light emitting panel according to the present invention.

図５に示すように、はじめに、ステップＰ１において、図３中に（ａ）で示すように、封止基板３を封止基板用受け座５へ載置する。
次に、ステップＰ２において、図３中に（ｂ）で示すように、素子基板４を素子基板用受け座６へ載置する。
このように、封止基板３と素子基板４を規制可能な封止基板用受け座５及び素子基板用受け座６に載置することにより、封止基板３と素子基板４の正確な位置合せが可能となる。 As shown in FIG. 5, first, in step P1, as shown by (a) in FIG. 3, the sealing substrate 3 is placed on the sealing substrate receiving seat 5. As shown in FIG.
Next, in step P2, the element substrate 4 is placed on the element substrate receiving seat 6 as shown in FIG.
In this way, the sealing substrate 3 and the element substrate 4 are placed on the sealing substrate receiving seat 5 and the element substrate receiving seat 6 that can be regulated, so that the sealing substrate 3 and the element substrate 4 can be accurately aligned. Is possible.

次に、ステップＰ３において、図３中に（ｃ）で示すように、昇降テーブル７を封止基板３に接触するまで上昇させる。
次に、ステップＰ４において、図３中に（ｃ）で示した状態で、昇降テーブル７により封止基板３を吸着固定し、昇降テーブル７のヒータ７ａにより封止基板３を加熱する。このように、ヒータ７ａにより封止基板３を加熱することにより、封止基板３に配置した封止材を軟化させて接着を容易とするとともに、封止材の脱ガスを行うことにより、封止性能の向上が可能となる。 Next, in step P3, as shown by (c) in FIG. 3, the elevating table 7 is raised until it comes into contact with the sealing substrate 3.
Next, in step P4, in the state shown in FIG. 3C, the sealing substrate 3 is sucked and fixed by the elevating table 7, and the sealing substrate 3 is heated by the heater 7a of the elevating table 7. Thus, heating the sealing substrate 3 with the heater 7a softens the sealing material disposed on the sealing substrate 3 to facilitate adhesion, and degassing the sealing material results in sealing. The stopping performance can be improved.

次に、ステップＰ５において、図３中に（ｄ）で示すように、上側真空容器２を閉じる。
次に、ステップＰ６において、図３中に（ｄ）で示した状態で、下側真空容器１内、すなわち第１の空間の気体を給排気装置９により真空脱気し、同時に上側真空容器２内、すなわち第２の空間の気体を吸排気装置１０により真空脱気する。このように、封止基板３と素子基板４の貼り合せ時に、封止基板３と素子基板４を離隔して、かつ真空雰囲気とすることにより、封止基板３と素子基板４の間に気泡の混入のない貼り合せ基板を製造することが可能となる。 Next, in step P5, as shown by (d) in FIG. 3, the upper vacuum vessel 2 is closed.
Next, in step P6, in the state shown by (d) in FIG. 3, the gas in the lower vacuum vessel 1, that is, the gas in the first space is evacuated by the air supply / exhaust device 9, and at the same time the upper vacuum vessel 2 The gas in the inside, that is, the second space is vacuum deaerated by the intake / exhaust device 10. As described above, when the sealing substrate 3 and the element substrate 4 are bonded to each other, the sealing substrate 3 and the element substrate 4 are separated from each other and a vacuum atmosphere is provided, whereby bubbles are formed between the sealing substrate 3 and the element substrate 4. It becomes possible to manufacture a bonded substrate free from contamination.

次に、ステップＰ７において、図４中に（ｅ）で示すように、昇降テーブル７により封止基板３が素子基板４と接触するまで上昇させる。本実施形態に係る有機発光パネルの製造装置によれば、封止基板３は昇降テーブル７に吸着固定された状態で素子基板４と接触するまで上昇させるため、封止基板３と素子基板４との相対位置にずれが生じることを抑制することができる。   Next, in step P7, as shown in FIG. 4E, the elevating table 7 raises the sealing substrate 3 until it comes into contact with the element substrate 4. According to the organic light emitting panel manufacturing apparatus according to the present embodiment, the sealing substrate 3 is raised until it comes into contact with the element substrate 4 while being adsorbed and fixed to the lifting table 7. It is possible to suppress the occurrence of deviation in the relative position.

なお、封止基板３と素子基板４とを接触させる際、封止基板３の上昇量を可能な限り小さくして封止基板３と素子基板４とを接触させることにより、封止基板３の上昇にともない封止基板３と素子基板４との相対位置にずれが生じることをより一層抑制することができる。   When the sealing substrate 3 and the element substrate 4 are brought into contact with each other, the rising amount of the sealing substrate 3 is made as small as possible so that the sealing substrate 3 and the element substrate 4 are brought into contact with each other. A shift in the relative position between the sealing substrate 3 and the element substrate 4 due to the rise can be further suppressed.

次に、ステップＰ８において、図４中に（ｆ）で示すように、上側真空容器２内、すなわち第１の空間に大気圧の気体を吸排気装置９により導入して、第１の空間と第２の空間との間に生じた差圧を図４（ｆ）中に破線で示す矢印のようにダイアフラム８を介して素子基板４に作用させることにより、素子基板４と封止基板３とを圧着する。なお、ここでは、第１の空間に大気導入することとしたが、大気圧以上の気体を導入するようにしてもよい。この場合、素子基板４に作用する圧力をより大きくすることができ、導入する気体の圧力により素子基板４に作用する圧力を適宜調節することもできる。   Next, in step P8, as shown by (f) in FIG. 4, an atmospheric pressure gas is introduced into the upper vacuum vessel 2, that is, the first space by the intake / exhaust device 9, and the first space and By causing the differential pressure generated between the second space and the element substrate 4 to act on the element substrate 4 through the diaphragm 8 as indicated by the broken line in FIG. Crimp the. Here, the atmosphere is introduced into the first space, but a gas having an atmospheric pressure or higher may be introduced. In this case, the pressure acting on the element substrate 4 can be further increased, and the pressure acting on the element substrate 4 can be appropriately adjusted by the pressure of the introduced gas.

なお、本実施形態においては、ステップＰ７において、昇降テーブル７により封止基板３が素子基板４と接触するまで上昇させ、ステップＰ８において、素子基板４と封止基板３とを圧着させることとしたが、これらを同時に行うようにしてもよい。   In this embodiment, in step P7, the lifting table 7 raises the sealing substrate 3 until it comes into contact with the element substrate 4, and in step P8, the element substrate 4 and the sealing substrate 3 are pressure-bonded. However, these may be performed simultaneously.

次に、ステップＰ９において、図４中に（ｇ）で示すように、下側真空容器１内、すなわち第２の空間に大気圧の気体を吸排気装置１０により導入、すなわち下側真空容器１を大気開放する。
次に、ステップＰ１０において、図４中に（ｈ）で示すように、上側真空容器２を開ける。 Next, in step P9, as shown by (g) in FIG. 4, atmospheric pressure gas is introduced into the lower vacuum container 1, that is, the second space, by the intake / exhaust device 10, that is, the lower vacuum container 1 To the atmosphere.
Next, in step P10, the upper vacuum container 2 is opened as shown by (h) in FIG.

次に、ステップＰ１１において、図４中に（ｈ）で示した状態で、昇降テーブル７による封止基板３の吸着固定を解除し、昇降テーブル７を下降させる。
最後に、ステップＰ１２において、図４中に（ｈ）で示した状態で、封止基板３と素子基板４とを張り合わせた貼り合せ基板を取り出す。
以上が本発明に係る有機発光パネルの製造方法である。 Next, in step P11, in the state indicated by (h) in FIG. 4, the suction fixing of the sealing substrate 3 by the lifting table 7 is released, and the lifting table 7 is lowered.
Finally, in Step P12, in the state indicated by (h) in FIG. 4, the bonded substrate obtained by bonding the sealing substrate 3 and the element substrate 4 is taken out.
The above is the manufacturing method of the organic light emitting panel according to the present invention.

以上説明したように、本発明に係る有機発光パネルの製造装置及び有機発光パネルの製造方法によれば、封止基板３と素子基板４の貼り合せ時に、封止基板３と素子基板４を離隔して、かつ真空雰囲気とするため、気泡の混入のない貼り合せ基板を製造することが可能となる。   As described above, according to the organic light emitting panel manufacturing apparatus and the organic light emitting panel manufacturing method of the present invention, the sealing substrate 3 and the element substrate 4 are separated from each other when the sealing substrate 3 and the element substrate 4 are bonded together. And since it is set as a vacuum atmosphere, it becomes possible to manufacture the bonded substrate in which a bubble does not mix.

また、封止基板３と素子基板４を規制可能な封止基板用受け座５及び素子基板用受け座６に載置し、封止基板３は昇降テーブル７に吸着固定して上昇させるため、正確に封止基板３と素子基板４の位置合せが可能となる。   Further, since the sealing substrate 3 and the element substrate 4 are placed on the sealing substrate receiving seat 5 and the element substrate receiving seat 6 that can be regulated, and the sealing substrate 3 is lifted by being fixed to the lifting table 7, The sealing substrate 3 and the element substrate 4 can be accurately aligned.

また、昇降テーブル７にヒーター７ａを設置して、封止材を配置した封止基板３を加熱することにより、封止材を軟化させて接着を容易とするとともに、封止材の脱ガスを行うことにより、封止性能の向上が可能となる。   In addition, by installing a heater 7a on the lifting table 7 and heating the sealing substrate 3 on which the sealing material is disposed, the sealing material is softened to facilitate adhesion, and the sealing material is degassed. By doing so, the sealing performance can be improved.

本発明は、例えば、単一又は複数領域に有機発光素子が設けられた素子基板と、有機発光素子に対応する領域に封止材を配置した封止基板とを真空減圧下で貼り合せることにより前記有機発光素子を封止する有機発光パネルの製造装置及び有機発光パネルの製造方法において利用することが可能である。   The present invention, for example, by laminating an element substrate provided with organic light emitting elements in a single region or a plurality of regions and a sealing substrate in which a sealing material is disposed in a region corresponding to the organic light emitting elements, under vacuum and reduced pressure. It can be used in an organic light emitting panel manufacturing apparatus and an organic light emitting panel manufacturing method for sealing the organic light emitting element.

１ 下側真空容器
２ 上側真空容器
３ 封止基板
４ 素子基板
５ 封止基板用受け座
５ａ 封止基板受け面
６ 素子基板用受け座
６ａ 素子基板受け面
７ 昇降テーブル
７ａ ヒータ
８ ダイアフラム
９，１０ 給排気装置
１１ ヒンジ
１２ 制御装置 DESCRIPTION OF SYMBOLS 1 Lower vacuum vessel 2 Upper vacuum vessel 3 Sealing substrate 4 Element substrate 5 Sealing substrate receiving seat 5a Sealing substrate receiving surface 6 Element substrate receiving seat 6a Element substrate receiving surface 7 Lifting table 7a Heater 8 Diaphragms 9, 10 Air supply / exhaust device 11 Hinge 12 Control device

Claims (4)

単一又は複数領域に有機発光素子が設けられた素子基板と、有機発光素子に対応する領域に封止材を配置した封止基板とを真空減圧下で貼り合せることにより前記有機発光素子を封止する有機発光パネルの製造装置であって、
下側真空容器と、
前記下側真空容器に開閉可能に取り付けられた上側真空容器と、
前記上側真空容器の開口部に設けられた弾性体のシートと、
前記下側真空容器内に前記封止材を上側とし前記封止基板の位置を規制する受け座である封止基板用受け座と、
前記有機発光素子を下側として前記封止基板の上方に離間し、かつ前記素子基板と前記封止基板との相対位置を規制する受け座である素子基板用受け座と、
前記封止基板を下側より吸着固定し昇降可能な昇降テーブルと、
前記シートによって仕切られた前記上側真空容器内の第１の空間及び前記下側真空容器内の第２の空間の気体をそれぞれ吸排気可能な吸排気手段と、
前記下側真空容器及び前記上側真空容器を密閉して、前記第１の空間と前記第２の空間を真空とし、前記昇降テーブルを上昇させて前記封止基板と前記素子基板とを接触させ、前記第１の空間に大気圧又は大気圧以上の気体を導入して、前記第１の空間と前記第２の空間との間に生じた差圧を前記シートを介して前記素子基板に作用させることにより前記素子基板と前記封止基板とを圧着するよう制御する制御手段と
を備える
ことを特徴とする有機発光パネルの製造装置。 The organic light emitting device is sealed by bonding an element substrate provided with an organic light emitting device in a single region or a plurality of regions and a sealing substrate having a sealing material disposed in a region corresponding to the organic light emitting device, under a vacuum. An apparatus for manufacturing an organic light emitting panel,
A lower vacuum vessel;
An upper vacuum vessel attached to the lower vacuum vessel so as to be openable and closable;
An elastic sheet provided in the opening of the upper vacuum vessel;
A sealing substrate receiving seat that is a receiving seat that regulates the position of the sealing substrate with the sealing material on the upper side in the lower vacuum container;
An element substrate receiving seat that is a receiving seat that is spaced apart above the sealing substrate with the organic light emitting element as a lower side and regulates a relative position between the element substrate and the sealing substrate;
A lifting table that can be lifted and lowered by adsorbing and fixing the sealing substrate from below;
Intake / exhaust means capable of intake / exhaust gas in the first space in the upper vacuum vessel and the second space in the lower vacuum vessel partitioned by the sheet;
Sealing the lower vacuum vessel and the upper vacuum vessel, making the first space and the second space vacuum, raising the lifting table to bring the sealing substrate and the element substrate into contact with each other, A gas at atmospheric pressure or higher than atmospheric pressure is introduced into the first space, and a differential pressure generated between the first space and the second space is applied to the element substrate via the sheet. An organic light-emitting panel manufacturing apparatus, comprising: a control unit configured to control the element substrate and the sealing substrate to be pressure-bonded. 前記昇降テーブルは前記封止基板を加熱可能な加熱手段を備える
ことを特徴とする請求項１に記載の有機発光パネルの製造装置。 The apparatus for manufacturing an organic light emitting panel according to claim 1, wherein the elevating table includes a heating unit capable of heating the sealing substrate. 単一又は複数領域に有機発光素子が設けられた素子基板と、有機発光素子に対応する領域に封止材を配置した封止基板とを真空減圧下で貼り合せることにより前記有機発光素子を封止する有機発光パネルの製造方法であって、
下側真空容器と、
前記下側真空容器に開閉可能に取り付けられた上側真空容器と、
前記上側真空容器の開口部に設けられた弾性体のシートと、
前記シートによって仕切られた上側真空容器内の第１の空間及び下側真空容器内の第２の空間の気体をそれぞれ吸排気可能な吸排気手段と
を備える有機発光パネルの製造装置において、
前記下側真空容器内に前記封止材を上側とし前記封止基板の位置を規制し、
前記有機発光素子を下側として前記封止基板の上方に離間し、かつ前記素子基板と前記封止基板との相対位置を規制し、
前記封止基板を昇降可能とした上で、
前記下側真空容器及び前記上側真空容器を密閉して、前記第１の空間と前記第２の空間を真空とし、
前記封止基板を上昇させて前記素子基板と接触させ、
前記第１の空間に大気圧又は大気圧以上の気体を導入して、前記第１の空間と前記第２の空間との間に生じた差圧を前記シートを介して前記素子基板に作用させることにより前記素子基板と前記封止基板とを圧着する
ことを特徴とする有機発光パネルの製造方法。 The organic light emitting device is sealed by bonding an element substrate provided with an organic light emitting device in a single region or a plurality of regions and a sealing substrate having a sealing material disposed in a region corresponding to the organic light emitting device, under a vacuum. A method of manufacturing an organic light emitting panel that stops,
A lower vacuum vessel;
An upper vacuum vessel attached to the lower vacuum vessel so as to be openable and closable;
An elastic sheet provided in the opening of the upper vacuum vessel;
In an apparatus for manufacturing an organic light-emitting panel, comprising an intake / exhaust means capable of intake and exhaust gas in a first space in an upper vacuum vessel and a second space in a lower vacuum vessel partitioned by the sheet,
Regulating the position of the sealing substrate with the sealing material on the upper side in the lower vacuum container,
Separating the organic light emitting element from the lower side above the sealing substrate, and regulating the relative position of the element substrate and the sealing substrate;
After allowing the sealing substrate to move up and down,
Sealing the lower vacuum container and the upper vacuum container, and making the first space and the second space vacuum,
Raising the sealing substrate to contact the element substrate,
A gas at atmospheric pressure or higher than atmospheric pressure is introduced into the first space, and a differential pressure generated between the first space and the second space is applied to the element substrate via the sheet. Thus, the element substrate and the sealing substrate are pressure-bonded to each other. 前記封止基板を加熱する
ことを特徴とすることを特徴とする請求項３に記載の有機発光パネルの製造方法。 The method of manufacturing an organic light emitting panel according to claim 3, wherein the sealing substrate is heated.
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JP2015079587A (en) * 2013-10-15 2015-04-23 常陽工学株式会社 Sealing apparatus, sealing method, and functional material device
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