JP2010045386A - 移動中のコンベヤから直接的に基板キャリアをアンロードする基板キャリアハンドラー - Google Patents
移動中のコンベヤから直接的に基板キャリアをアンロードする基板キャリアハンドラー Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/60—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type
- B65G47/61—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type for articles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Intermediate Stations On Conveyors (AREA)
Abstract
【解決手段】第1の態様において、基板キャリアを連続的に搬送するコンベアにより基板ロードステーションがサービスされる。基板ロードステーションの一部分である基板キャリアハンドラーは、コンベアの移動中にコンベアと基板キャリアを交換するように動作する。キャリア交換手順は、基板キャリアハンドラーのエンドエフェクターを、コンベアの速度に実質的に一致する速度で移動することを含む。多数の他の態様も提供される。
【選択図】図2A
Description
2002年8月31日出願の「Method and Apparatus for Using Wafer Carrier Movement to ActuateWafer Carrier Door Opening/Closing」と題する米国プロビジョナル特許出願第60/407,339号(代理人Docket No. 6976/L);
2002年8月31日出願の「Method and Apparatus for Unloading Wafer Carriers from Wafer CarrierTransport Systems」と題する米国プロビジョナル特許出願第60/407,474号(代理人Docket No. 7024/L);
2002年8月31日出願の「Method and Apparatus for Supplying Wafers to a Processing Tool」と題する米国プロビジョナル特許出願第60/407,336号(代理人Docket No. 7096/L);
2002年8月31日出願の「End Effector Having Mechanism For Reorienting A Wafer CarrierBetween Vertical And Horizontal Orientations」と題する米国プロビジョナル特許出願第60/407,452号(代理人Docket No.7097/L);
2002年8月31日出願の「Wafer Loading Station with Docking Grippers at Docking Stations」と題する米国プロビジョナル特許出願第60/407,337号(代理人Docket No. 7099/L);
2002年8月31日出願の「Wafer Carrier Door having Door Latching and Wafer Clamping Mechanism」と題する米国プロビジョナル特許出願第60/407,340号(代理人Docket No. 7156/L);
2003年1月27日出願の「Method and Apparatus for Transporting Wafer Carriers」と題する米国プロビジョナル特許出願第60/443,087号(代理人Docket No. 7163/L);
2003年1月27日出願の「Overhead Transfer Flange and Support for Suspending Wafer Carrier」と題する米国プロビジョナル特許出願第60/443,153号(代理人Docket No. 8092/L);
2003年1月27日出願の「Systems and Methods for Transferring Wafer Carriers BetweenProcessing Tools」と題する米国プロビジョナル特許出願第60/443,001号(代理人Docket No. 8201/L);及び
2003年1月27日出願の「Apparatus and Method for Storing and Loading Wafer Carriers」と題する米国プロビジョナル特許出願第60/443,115号(代理人Docket No. 8202/L)。
本発明の他の特徴及び態様は、実施形態の以下の詳細な説明、特許請求の範囲及び添付図面から完全に明らかとなろう。
ステップ319では、基板キャリアハンドラー215は、エンドエフェクター225に支持されたターゲット基板キャリア207をドッキングステーション203(図2A)の1つへ搬送する。或いは又、ロードステーション201が1つ以上の保管棚又は他の保管位置(例えば、基板キャリアを保管するための図2Aに仮想線で示された保管棚239)を含む場合には、基板キャリアハンドラー215は、ターゲット基板キャリア207を保管位置の1つへ搬送する。(他の及び/又はより多くの保管位置が使用されてもよい。)
図3のプロセスは、次いで、ステップ321で終了する。
図6Aに示すように、エンドエフェクター225は、コンベア231と実質的に一致する速度で移動されており、ターゲット基板キャリア207のフランジ402は、ターゲット基板キャリア207をロードすべきキャリア係合部材401の下で且つ若干後方にある。このように、以下に述べるようにコンベア231へターゲット基板キャリア207を移送する間に、キャリア係合部材401によりフランジ402が妨げられないようにしてターゲット基板キャリア207を持ち上げることができる。一般に、ターゲット基板キャリア207のフランジ402は、ターゲット基板キャリア207をロードすべきキャリア係合部材401と、このターゲット基板キャリア207をロードすべきキャリア係合部材401に続くキャリア係合部材(及び/又はそこに配置された基板キャリア)とに接触しないようにして、ターゲット基板キャリア207を持ち上げることのできるいかなる位置に配置することもできる。
フェクター225の運動学的ピン229がターゲット基板キャリア207の底面の特徴部407から解離されるようにする。ステップ517の結果の一例が図6Eに示されている。
る。
たり/そこにロードしたりすることができる。
Claims (15)
- 基板キャリアを処理ツールの第1ロードポートへ搬送するための基板キャリアハンドラーであって、垂直ガイド、該垂直ガイドに結合された水平ガイド、及び上記基板キャリアを支持すると共に上記垂直ガイドに対して垂直方向に且つ上記水平ガイドに対して水平方向に移動するエンドエフェクターを含む基板キャリアハンドラーと、
上記基板キャリアハンドラーに接続されたコントローラであって、上記基板キャリアハンドラーの上記エンドエフェクターが、上記基板キャリアハンドラーに隣接配置された基板キャリアコンベアから上記基板キャリアを解離させるように、上記基板キャリアハンドラーを制御するよう動作するコントローラと、
を備えた基板を処理ツールへ供給する装置。 - 上記基板キャリアハンドラーは、一対の垂直ガイドを備え、
上記水平ガイドは、上記一対の垂直ガイドに沿って垂直に移動され、更に、
上記エンドエフェクターは、上記水平ガイドに沿って水平に移動される、請求項1に記載の装置。 - 上記コントローラは、上記基板キャリアが上記基板キャリアコンベアにより搬送されて移動している間に上記基板キャリアハンドラーの上記エンドエフェクターが上記基板キャリアコンベアから上記基板キャリアを解離させるように、上記基板キャリアハンドラーを制御するよう更に動作する、請求項1に記載の装置。
- 基板キャリアを移送する方法であって、
基板キャリアを処理ツールのロードポートへ搬送するための基板キャリアハンドラーを備えた基板ロードステーションに隣接配置された基板キャリアコンベアで基板キャリアを搬送するステップと、
上記基板ロードステーションの上記基板キャリアハンドラーのエンドエフェクターを使用して、上記基板キャリアが上記基板キャリアコンベアにより搬送されて移動している間に上記基板キャリアコンベアから上記基板キャリアを解離させるステップと、
を備えた方法。 - 上記基板ロードステーションの上記基板キャリアハンドラーの上記エンドエフェクターを使用して、上記基板キャリアを解離させる上記ステップは、上記基板キャリアを上記基板キャリアコンベアから解離させる少なくとも一部分の間に上記基板キャリアの移動に実質的に一致するように上記エンドエフェクターを移動させる段階を含む、請求項4に記載の方法。
- 上記基板キャリアの移動に実質的に一致するように上記エンドエフェクターを移動させる上記段階は、上記基板キャリアを上記基板キャリアコンベアから解離させる少なくとも一部分の間に上記基板キャリアの速度に実質的に一致するように上記エンドエフェクターを移動させる工程を含む、請求項5に記載の方法。
- 上記基板キャリアの移動に実質的に一致するように上記エンドエフェクターを移動させる上記段階は、上記基板キャリアを上記基板キャリアコンベアから解離させる少なくとも一部分の間に水平方向に沿った上記基板キャリアのスピード及び位置に実質的に一致するように上記エンドエフェクターを移動させる工程を含む、請求項5に記載の方法。
- 上記基板キャリアを解離させる上記ステップは、上記基板キャリアの底面に接触するように上記エンドエフェクターを持ち上げる段階を含む、請求項4に記載の方法。
- 基板キャリアを処理ツールの第1ロードポートへ搬送するための基板キャリアハンドラーであって、上記基板キャリアを支持するためのエンドエフェクターを含む基板キャリアハンドラーと、
上記基板キャリアハンドラーに接続されたコントローラであって、上記基板キャリアが基板キャリアコンベアにより搬送されているときに上記基板キャリアの移動に実質的に一致するように上記基板キャリアハンドラーの上記エンドエフェクターを水平方向に移動させ、上記エンドエフェクターを持ち上げて、上記基板キャリアに係合させると共に、上記基板キャリアを上記基板キャリアコンベアから解離させ、更に、上記基板キャリアを上記第1ロードポートへ搬送するように、上記基板キャリアハンドラーを制御するよう動作するコントローラと、
を備えた基板を処理ツールへ供給する装置。 - 基板キャリアが基板キャリアコンベアにより搬送されるときに上記基板キャリアの移動に実質的に一致するように基板キャリアハンドラーのエンドエフェクターを水平方向に移動させるステップと、
上記エンドエフェクターを持ち上げて、上記基板キャリアに係合すると共に、上記基板キャリアを上記基板キャリアコンベアから解離させるステップと、
上記基板キャリアをロードポートへ搬送するステップと、
を備えた基板キャリアハンドラーを操作する方法。 - 基板キャリアを処理ツールの第1ロードポートへ搬送するための基板キャリアハンドラーであって、上記基板キャリアを支持するためのエンドエフェクターを含む基板キャリアハンドラーと、
上記基板キャリアハンドラーに接続されたコントローラであって、基板キャリアコンベアのスピードを決定し、上記基板キャリアコンベアのスピードに基づいて上記エンドエフェクターに対する第1運動プロフィールを決定し、該第1運動プロフィールを使用して、上記基板キャリアコンベアから上記基板キャリアを解離する少なくとも一部分の間に上記エンドエフェクターの運動を制御することにより、上記基板キャリアが移動している間に上記基板キャリアハンドラーの上記エンドエフェクターが上記基板キャリアコンベアから上記基板キャリアを解離させるように、上記基板キャリアハンドラーを制御するよう動作するコントローラと、
を備えた基板を処理ツールへ供給する装置。 - 基板キャリアをロードポートへ搬送するための基板キャリアハンドラーを備えた基板ロードステーションに隣接配置された基板キャリアコンベアで基板キャリアを搬送するステップと、
上記基板キャリアコンベアのスピードを決定するステップと、
上記基板キャリアコンベアのスピードに基づいて上記基板キャリアハンドラーのエンドエフェクターに対する第1運動プロフィールを決定するステップと、
上記第1運動プロフィールを使用して、上記基板キャリアコンベアから上記基板キャリアを解離させる少なくとも一部分の間に上記エンドエフェクターの移動を制御するステップと、
を備えた基板キャリアの移送方法。 - 基板を支持すると共に、該基板を処理ツールの第1ロードポートへ搬送するためのエンドエフェクターと、
上記エンドエフェクターに接続されたコントローラであって、上記基板がコンベアによって搬送されて移動している間に上記エンドエフェクターが上記基板を移動中のコンベアから解離させるように、上記エンドエフェクターを制御するよう動作するコントローラと、
を備えた基板を処理ツールへ供給する装置。 - 基板を支持すると共に、該基板を処理ツールのロードポートへ搬送するためのエンドエフェクターを備えた基板ロードステーションに隣接配置されたコンベアで基板を搬送するステップと、
上記基板ロードステーションの上記エンドエフェクターを使用して、上記基板が上記コンベアにより搬送されて移動している間に上記基板を上記コンベアから解離させるステップと、
を備えた基板を移送する方法。 - 基板キャリアを処理ツールの第1ロードポートへ搬送するための基板キャリアハンドラーであって、上記基板キャリアを支持するためのエンドエフェクターを含む基板キャリアハンドラーと、
上記基板キャリアハンドラーに接続されたコントローラであって、基板キャリアコンベアが移動している間に上記基板キャリアハンドラーの上記エンドエフェクターが上記基板キャリアコンベアへ上記基板キャリアを移送するように、上記基板キャリアハンドラーを制御するよう動作するコントローラと、
を備えた装置。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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US40746302P | 2002-08-31 | 2002-08-31 | |
US60/407463 | 2002-08-31 | ||
US44300403P | 2003-01-27 | 2003-01-27 | |
US60/443004 | 2003-01-27 |
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JP2003309124A Division JP4845337B2 (ja) | 2002-08-31 | 2003-09-01 | 基板を処理ツールへ供給する装置、基板キャリアを移送する方法、およびコンピュータ読み取り可能な記録媒体 |
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JP2010045386A true JP2010045386A (ja) | 2010-02-25 |
JP4871985B2 JP4871985B2 (ja) | 2012-02-08 |
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JP2003309124A Expired - Fee Related JP4845337B2 (ja) | 2002-08-31 | 2003-09-01 | 基板を処理ツールへ供給する装置、基板キャリアを移送する方法、およびコンピュータ読み取り可能な記録媒体 |
JP2009235278A Expired - Fee Related JP4871985B2 (ja) | 2002-08-31 | 2009-10-09 | 移動中のコンベヤから直接的に基板キャリアをアンロードする基板キャリアハンドラー |
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JP2003309124A Expired - Fee Related JP4845337B2 (ja) | 2002-08-31 | 2003-09-01 | 基板を処理ツールへ供給する装置、基板キャリアを移送する方法、およびコンピュータ読み取り可能な記録媒体 |
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US (4) | US7243003B2 (ja) |
EP (1) | EP1396874A3 (ja) |
JP (2) | JP4845337B2 (ja) |
KR (1) | KR101047090B1 (ja) |
CN (2) | CN101217126B (ja) |
TW (1) | TWI324582B (ja) |
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- 2003-09-01 KR KR1020030060776A patent/KR101047090B1/ko active IP Right Grant
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US20070274813A1 (en) | 2007-11-29 |
CN100552870C (zh) | 2009-10-21 |
US7359767B2 (en) | 2008-04-15 |
EP1396874A3 (en) | 2005-01-12 |
TW200416187A (en) | 2004-09-01 |
US7243003B2 (en) | 2007-07-10 |
US20060259196A1 (en) | 2006-11-16 |
US20070061042A1 (en) | 2007-03-15 |
KR20040020828A (ko) | 2004-03-09 |
CN101217126A (zh) | 2008-07-09 |
CN101217126B (zh) | 2011-04-27 |
US7346431B2 (en) | 2008-03-18 |
EP1396874A2 (en) | 2004-03-10 |
JP4845337B2 (ja) | 2011-12-28 |
TWI324582B (en) | 2010-05-11 |
KR101047090B1 (ko) | 2011-07-07 |
US7792608B2 (en) | 2010-09-07 |
CN1495850A (zh) | 2004-05-12 |
JP2004134765A (ja) | 2004-04-30 |
JP4871985B2 (ja) | 2012-02-08 |
US20040081538A1 (en) | 2004-04-29 |
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