JP2009010387A - 垂直型シーモスイメージセンサーの製造方法 - Google Patents
垂直型シーモスイメージセンサーの製造方法 Download PDFInfo
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- JP2009010387A JP2009010387A JP2008167868A JP2008167868A JP2009010387A JP 2009010387 A JP2009010387 A JP 2009010387A JP 2008167868 A JP2008167868 A JP 2008167868A JP 2008167868 A JP2008167868 A JP 2008167868A JP 2009010387 A JP2009010387 A JP 2009010387A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 238000000137 annealing Methods 0.000 claims abstract description 78
- 238000000034 method Methods 0.000 claims abstract description 30
- 150000004767 nitrides Chemical class 0.000 claims abstract description 19
- 238000002161 passivation Methods 0.000 claims abstract description 5
- 230000001681 protective effect Effects 0.000 claims description 48
- 229910052751 metal Inorganic materials 0.000 claims description 43
- 239000002184 metal Substances 0.000 claims description 42
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 12
- 239000010410 layer Substances 0.000 claims 2
- 239000011241 protective layer Substances 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 27
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 13
- 239000001257 hydrogen Substances 0.000 description 13
- 229910052739 hydrogen Inorganic materials 0.000 description 13
- 239000003989 dielectric material Substances 0.000 description 9
- 229910052581 Si3N4 Inorganic materials 0.000 description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- OQPDWFJSZHWILH-UHFFFAOYSA-N [Al].[Al].[Al].[Ti] Chemical compound [Al].[Al].[Al].[Ti] OQPDWFJSZHWILH-UHFFFAOYSA-N 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 229910021324 titanium aluminide Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical compound [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14645—Colour imagers
- H01L27/14647—Multicolour imagers having a stacked pixel-element structure, e.g. npn, npnpn or MQW elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Abstract
【解決手段】暗漏れ特性(dark leakage characteristics)の他、誘電物質にひびが入るサーキュラ欠陥(circular defect)も改善するために、高温ダブルアニール(double−anneal)工程と追加的な他の保護窒化膜(passivation nitride)を選択的に適用し、垂直型CMOSイメージセンサーの品質と信頼性を保障する。
【選択図】図3B
Description
Claims (9)
- シリコンエピ層に少なくとも一つのカラーフォトダイオードを形成する段階と、
前記カラーフォトダイオードが形成されたエピ層にトランジスタを形成する段階と、
前記形成されたトランジスタの上部に少なくとも一つの金属ラインを形成する段階と、
前記形成された金属ラインのうち最上位金属層まで形成された後に保護膜を形成する段階と、
前記保護膜の形成後に高温でアニールする段階と、
前記保護膜上に最上位保護膜を形成する段階と、
を含むことを特徴とする垂直型シーモスイメージセンサーの製造方法。 - 前記保護膜は、保護酸化膜(passivation oxide)であることを特徴とする、請求項1に記載の垂直型シーモスイメージセンサーの製造方法。
- 前記アニールは、400乃至435℃の温度を維持しながら実施することを特徴とする、請求項1に記載の垂直型シーモスイメージセンサーの製造方法。
- 前記最上位保護膜の形成後に高温で最終アニールする段階をさらに含むことを特徴とする、請求項1に記載の垂直型シーモスイメージセンサーの製造方法。
- 前記最終アニールは、前記保護膜の形成後に実施されるアニールよりも高い温度で実施することを特徴とする、請求項4に記載の垂直型シーモスイメージセンサーの製造方法。
- 前記最終アニールは、435乃至450℃の温度を維持しながら実施することを特徴とする、請求項4に記載の垂直型シーモスイメージセンサーの製造方法。
- 前記最上位保護膜は、保護窒化膜であることを特徴とする、請求項1に記載の垂直型シーモスイメージセンサーの製造方法。
- 前記最上位保護膜は、SiON保護膜であることを特徴とする、請求項1に記載の垂直型シーモスイメージセンサーの製造方法。
- 前記最上位保護膜は、SiN保護膜であることを特徴とする、請求項1に記載の垂直型シーモスイメージセンサーの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070062701A KR100875163B1 (ko) | 2007-06-26 | 2007-06-26 | 수직형 씨모스 이미지 센서 제조 방법 |
KR10-2007-0062701 | 2007-06-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009010387A true JP2009010387A (ja) | 2009-01-15 |
JP4975685B2 JP4975685B2 (ja) | 2012-07-11 |
Family
ID=40149251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008167868A Active JP4975685B2 (ja) | 2007-06-26 | 2008-06-26 | 垂直型シーモスイメージセンサーの製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7754557B2 (ja) |
JP (1) | JP4975685B2 (ja) |
KR (1) | KR100875163B1 (ja) |
CN (1) | CN101335237B (ja) |
DE (1) | DE102008029865A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014120569A (ja) * | 2012-12-14 | 2014-06-30 | Canon Inc | 光電変換装置の製造方法 |
JP2016213305A (ja) * | 2015-05-07 | 2016-12-15 | キヤノン株式会社 | 光電変換装置の製造方法 |
US9530819B2 (en) | 2014-08-06 | 2016-12-27 | Renesas Electronics Corporation | Manufacturing method of semiconductor integrated circuit device |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5135073B2 (ja) | 2008-06-18 | 2013-01-30 | 出光興産株式会社 | 有機薄膜トランジスタ |
JP2016207831A (ja) | 2015-04-22 | 2016-12-08 | キヤノン株式会社 | 光電変換装置の製造方法 |
CN107665900B (zh) * | 2017-05-31 | 2020-11-13 | 上海华力微电子有限公司 | Uts图像传感器的制备方法 |
CN108133944B (zh) * | 2017-12-20 | 2021-05-21 | 上海华力微电子有限公司 | 一种通过增加热处理过程改善cis白色像素点的方法 |
CN109065556A (zh) * | 2018-08-08 | 2018-12-21 | 上海华力微电子有限公司 | 一种通过优化sab制程改善cis白色像素的方法 |
CN112997272B (zh) * | 2018-11-20 | 2024-03-29 | 长江存储科技有限责任公司 | 外延层和3d nand存储器的形成方法、退火设备 |
Citations (5)
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JP2003188368A (ja) * | 2001-12-14 | 2003-07-04 | Sony Corp | 固体撮像装置の製造方法 |
JP2003204055A (ja) * | 2002-01-09 | 2003-07-18 | Sony Corp | 固体撮像装置およびその製造方法 |
JP2003282856A (ja) * | 2001-11-16 | 2003-10-03 | Hynix Semiconductor Inc | 暗電流を減少させたイメージセンサの製造方法 |
JP2006148046A (ja) * | 2004-11-24 | 2006-06-08 | Hynix Semiconductor Inc | 半導体素子の製造方法 |
JP2007243100A (ja) * | 2006-03-13 | 2007-09-20 | Iwate Toshiba Electronics Co Ltd | 固体撮像装置およびその製造方法 |
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US7148796B2 (en) * | 2003-04-14 | 2006-12-12 | American Power Conversion Corporation | Environmental monitoring device |
US6852565B1 (en) | 2003-07-10 | 2005-02-08 | Galaxcore, Inc. | CMOS image sensor with substrate noise barrier |
US7105906B1 (en) * | 2003-11-19 | 2006-09-12 | National Semiconductor Corporation | Photodiode that reduces the effects of surface recombination sites |
US7001852B2 (en) | 2004-04-30 | 2006-02-21 | Freescale Semiconductor, Inc. | Method of making a high quality thin dielectric layer |
US20060023107A1 (en) * | 2004-08-02 | 2006-02-02 | Bolken Todd O | Microelectronic imagers with optics supports having threadless interfaces and methods for manufacturing such microelectronic imagers |
KR100685892B1 (ko) * | 2005-06-07 | 2007-02-26 | 동부일렉트로닉스 주식회사 | 씨모스 이미지 센서 및 그 제조방법 |
US7279694B2 (en) * | 2005-09-13 | 2007-10-09 | Higher Way Electronics Co., Ltd. | Optical output system with auto optical power control for optical mouse |
KR100793647B1 (ko) | 2005-12-13 | 2008-01-11 | 스카이크로스 인코포레이티드 | 외장형 dmb 단말기 안테나의 힌지 장치 |
-
2007
- 2007-06-26 KR KR1020070062701A patent/KR100875163B1/ko active IP Right Grant
-
2008
- 2008-06-24 DE DE102008029865A patent/DE102008029865A1/de not_active Withdrawn
- 2008-06-25 US US12/146,360 patent/US7754557B2/en active Active
- 2008-06-26 JP JP2008167868A patent/JP4975685B2/ja active Active
- 2008-06-26 CN CN2008101262326A patent/CN101335237B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2003282856A (ja) * | 2001-11-16 | 2003-10-03 | Hynix Semiconductor Inc | 暗電流を減少させたイメージセンサの製造方法 |
JP2003188368A (ja) * | 2001-12-14 | 2003-07-04 | Sony Corp | 固体撮像装置の製造方法 |
JP2003204055A (ja) * | 2002-01-09 | 2003-07-18 | Sony Corp | 固体撮像装置およびその製造方法 |
JP2006148046A (ja) * | 2004-11-24 | 2006-06-08 | Hynix Semiconductor Inc | 半導体素子の製造方法 |
JP2007243100A (ja) * | 2006-03-13 | 2007-09-20 | Iwate Toshiba Electronics Co Ltd | 固体撮像装置およびその製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014120569A (ja) * | 2012-12-14 | 2014-06-30 | Canon Inc | 光電変換装置の製造方法 |
US9530819B2 (en) | 2014-08-06 | 2016-12-27 | Renesas Electronics Corporation | Manufacturing method of semiconductor integrated circuit device |
JP2016213305A (ja) * | 2015-05-07 | 2016-12-15 | キヤノン株式会社 | 光電変換装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20090004770A1 (en) | 2009-01-01 |
CN101335237B (zh) | 2010-09-22 |
CN101335237A (zh) | 2008-12-31 |
US7754557B2 (en) | 2010-07-13 |
DE102008029865A1 (de) | 2009-01-22 |
JP4975685B2 (ja) | 2012-07-11 |
KR100875163B1 (ko) | 2008-12-22 |
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