JP2009005024A5 - - Google Patents

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Publication number: JP2009005024A5
Authority: JP; Japan
Prior art keywords: film; arm portion; fork vibrator; tuning fork; electrode film
Prior art date: 2007-06-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP2007163088A

Other languages

English (en)

Japanese (ja)

Other versions

JP2009005024A (ja

JP5067035B2 (ja

Filing date

2007-06-20

Publication date

2010-07-29

2007-06-20 Application filed filed Critical

2007-06-20 Priority to JP2007163088A priority Critical patent/JP5067035B2/ja

2007-06-20 Priority claimed from JP2007163088A external-priority patent/JP5067035B2/ja

2009-01-08 Publication of JP2009005024A publication Critical patent/JP2009005024A/ja

2010-07-29 Publication of JP2009005024A5 publication Critical patent/JP2009005024A5/ja

2012-11-07 Application granted granted Critical

2012-11-07 Publication of JP5067035B2 publication Critical patent/JP5067035B2/ja

Status Active legal-status Critical Current

2027-06-20 Anticipated expiration legal-status Critical

Links

239000004065 semiconductor Substances 0.000 claims 2
XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 2
229910017083 AlN Inorganic materials 0.000 claims 1
229910013641 LiNbO 3 Inorganic materials 0.000 claims 1
PIGFYZPCRLYGLF-UHFFFAOYSA-N aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims 1
229910052451 lead zirconate titanate Inorganic materials 0.000 claims 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
229910052710 silicon Inorganic materials 0.000 claims 1
239000010703 silicon Substances 0.000 claims 1
229910052814 silicon oxide Inorganic materials 0.000 claims 1

JP2007163088A 2007-06-20 2007-06-20 音叉型振動子、発振器 Active JP5067035B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP2007163088A JP5067035B2 (ja)	2007-06-20	2007-06-20	音叉型振動子、発振器

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2007163088A JP5067035B2 (ja)	2007-06-20	2007-06-20	音叉型振動子、発振器

Publications (3)

Publication Number	Publication Date
JP2009005024A JP2009005024A (ja)	2009-01-08
JP2009005024A5 true JP2009005024A5 (de)	2010-07-29
JP5067035B2 JP5067035B2 (ja)	2012-11-07

Family

ID=40320939

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2007163088A Active JP5067035B2 (ja)	2007-06-20	2007-06-20	音叉型振動子、発振器

Country Status (1)

Country	Link
JP (1)	JP5067035B2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2010187195A (ja) *	2009-02-12	2010-08-26	Epson Toyocom Corp	振動片、振動片の製造方法および振動子
JP5369741B2 (ja) *	2009-02-12	2013-12-18	セイコーエプソン株式会社	振動片および振動子
JP5622173B2 (ja) *	2010-07-29	2014-11-12	セイコーエプソン株式会社	振動片、振動子、発振器、および電子機器
US8581669B2 (en)	2011-02-02	2013-11-12	Seiko Epson Corporation	Vibrator element, vibrator, oscillator, and electronic apparatus
JP5685962B2 (ja)	2011-02-02	2015-03-18	セイコーエプソン株式会社	振動片、振動子、発振器及び電子機器
JP5790226B2 (ja) *	2011-07-15	2015-10-07	株式会社村田製作所	圧電薄膜素子の製造方法
JP6482169B2 (ja)	2013-07-19	2019-03-13	セイコーエプソン株式会社	振動片、振動子、発振器、電子機器及び移動体
JP6245265B2 (ja) *	2013-09-20	2017-12-13	株式会社村田製作所	振動装置及びその製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58150317A (ja) *	1982-03-02	1983-09-07	Citizen Watch Co Ltd	長さたて振動子
JPH0666631B2 (ja) *	1983-10-25	1994-08-24	シチズン時計株式会社	水晶振動子
JPS60126907A (ja) *	1983-12-12	1985-07-06	Nippon Telegr & Teleph Corp <Ntt>	単一応答複合圧電振動素子
JPH09105U (ja) *	1991-10-29	1997-02-25	東洋通信機株式会社	ガス圧力センサ
JPH085382A (ja) *	1994-06-23	1996-01-12	Nippondenso Co Ltd	角速度センサ
JPH11257965A (ja) *	1998-03-09	1999-09-24	Hitachi Ltd	角速度検出センサ
JP3514224B2 (ja) *	1999-11-11	2004-03-31	株式会社村田製作所	圧電共振子、フィルタ及び電子機器
JP3514222B2 (ja) *	1999-11-17	2004-03-31	株式会社村田製作所	圧電共振子、電子部品及び電子機器
JP2003051732A (ja) *	2001-08-08	2003-02-21	Murata Mfg Co Ltd	圧電共振子、フィルタおよび電子通信機器
JP4862639B2 (ja) *	2001-10-31	2012-01-25	有限会社ピエデック技術研究所	水晶振動子とその製造方法と水晶ユニットの製造方法
JP3896585B2 (ja) *	2001-12-18	2007-03-22	株式会社大真空	音叉型圧電振動子
JP2004251663A (ja) *	2003-02-18	2004-09-09	Fujitsu Media Device Kk	角速度センサ
US7362198B2 (en) *	2003-10-30	2008-04-22	Avago Technologies Wireless Ip (Singapore) Pte. Ltd	Pass bandwidth control in decoupled stacked bulk acoustic resonator devices
JP2007024810A (ja) *	2005-07-21	2007-02-01	Matsushita Electric Ind Co Ltd	角速度センサ素子およびその製造方法
JP2007096900A (ja) *	2005-09-29	2007-04-12	Seiko Epson Corp	圧電振動片および圧電デバイス

2007
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Publication	Publication Date	Title
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JP2009005023A5 (de)	2010-07-29
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US20180254403A1 (en)	2018-09-06	Interdigitated electrode patterned multi-layered piezoelectric laminate structure
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JP2010028535A5 (de)	2011-09-01
JP5067035B2 (ja)	2012-11-07	音叉型振動子、発振器
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JP2011228980A5 (de)	2013-04-18
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JP2017220560A5 (de)	2018-03-22
JP2007005778A5 (de)	2009-03-26
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JP2010187195A (ja)	2010-08-26	振動片、振動片の製造方法および振動子
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