JP2007321775A - Mounting table of gas vessel - Google Patents

Mounting table of gas vessel Download PDF

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JP2007321775A
JP2007321775A JP2006149207A JP2006149207A JP2007321775A JP 2007321775 A JP2007321775 A JP 2007321775A JP 2006149207 A JP2006149207 A JP 2006149207A JP 2006149207 A JP2006149207 A JP 2006149207A JP 2007321775 A JP2007321775 A JP 2007321775A
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gas container
gas
mounting table
gas vessel
mounting
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Makoto Sakane
誠 坂根
Takashi Yoshida
吉田　　隆
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Taiyo Nippon Sanso Corp
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Taiyo Nippon Sanso Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a mounting table of a gas vessel which prevents condensation from being generated on the outer surface of the vessel by a temperature drop of the gas vessel caused by evaporation heat when feeding a liquefied gas filling the gas vessel while performing vaporization, and enables cost reduction and space saving by suppressing an increase in the number of parts. <P>SOLUTION: A blowing fan 12 for feeding air toward the bottom of a gas vessel 20 is provided at the center of a gas vessel mounting part 11 for supporting the gas vessel 20 filled with a liquefied gas. While a suction passage 14 communicating with the outside of a mounting table is provided at the lower place of the blowing fan, a discharge passage for discharging gas fed toward the bottom of the gas vessel from the blowing fan to the outer peripheral side of the gas vessel is disposed between the top surface of the gas vessel mounting part and the bottom of the gas vessel. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、ガス容器の載置台に係り、詳しくは、充填されている液化ガスを気化させて供給するガス容器を載置するための載置台に関する。   The present invention relates to a mounting table for a gas container, and more particularly, to a mounting table for mounting a gas container that vaporizes and supplies a filled liquefied gas.

半導体製造分野等で使用されているＷＦ６，ＣｌＦ３，ＢＣｌ３，ＳｉＨ２Ｃｌ２，ＣＯ２，ＳＦ６，Ｎ２Ｏのようなガスは、通常、ガスシリンダやガスボンベ等の可搬式のガス容器内に液化ガスとして充填貯留されており、それをガス容器内で蒸発させながら気化ガスとしてガス消費先に供給されている。このようにガス容器内の液化ガスを気化させながら供給する場合、気化熱によって容器温度が低下し、容器外面に結露が発生することがあった。発生した結露を放置しておくと、容器外面を流れ落ちて載置台や床面を汚染するだけでなく、載置台に設けられているロードセルの故障の原因ともなる。このため、結露が発生したときには人手によって拭き取るようにしているが、手間が掛かるとともにガスの供給に支障を来すこともあった。 Gases such as WF 6 , ClF 3 , BCl 3 , SiH 2 Cl 2 , CO 2 , SF 6 , and N 2 O used in the semiconductor manufacturing field are usually portable gases such as gas cylinders and gas cylinders. The container is filled and stored as a liquefied gas, and is supplied to a gas consumer as a vaporized gas while evaporating it in the gas container. In this way, when the liquefied gas in the gas container is supplied while being vaporized, the container temperature may be lowered by the heat of vaporization and condensation may occur on the outer surface of the container. If the generated condensation is left unattended, it not only flows down the outer surface of the container and contaminates the mounting table and the floor surface, but also causes a failure of the load cell provided on the mounting table. For this reason, when dew condensation occurs, it is wiped manually. However, it takes time and may interfere with gas supply.

一方、ガス容器の底面に向けて熱媒体、例えば加熱空気を噴出することにより、ガス容器内の液化ガスを加熱して安定した状態で液化ガスの気化を行えるようにしたガス容器の載置台が知られている（例えば、特許文献１参照。）。
特開平２００３−２２７５９７号公報 On the other hand, there is a gas container mounting table in which a liquefied gas can be vaporized in a stable state by heating the liquefied gas in the gas container by ejecting a heating medium, for example, heated air, toward the bottom surface of the gas container. It is known (for example, refer to Patent Document 1).
Japanese Patent Application Laid-Open No. 2003-227597

載置台から加熱空気を噴出することにより、容器外面の結露は防止できるが、上述のものでは、シリンダーキャビネットの外部に設置した加熱装置から載置台に加熱空気を送る配管が必要となり、部品点数が増加してコストが嵩み、また、加熱装置を設置するためのスペースも必要となっていた。   By ejecting heated air from the mounting table, condensation on the outer surface of the container can be prevented.However, in the above, piping that sends heated air from the heating device installed outside the cylinder cabinet to the mounting table is required, and the number of parts is reduced. The cost has increased and the space for installing the heating device has been required.

そこで本発明は、ガス容器に充填した液化ガスを気化させながら供給する際に、気化熱によりガス容器の温度が低下して容器外面に結露が発生することを防止するとともに、部品点数の増加を抑えて低コスト化と省スペース化とを図ることのできるガス容器の載置台を提供することを目的としている。   Therefore, the present invention prevents the temperature of the gas container from being lowered by the heat of vaporization and causing condensation on the outer surface of the container when the liquefied gas filled in the gas container is vaporized, and increases the number of parts. An object of the present invention is to provide a gas container mounting table that can be reduced in cost and space saving.

上記目的を達成するため、本発明のガス容器の載置台は、液化ガスが充填されているガス容器を載置するガス容器の載置台において、前記ガス容器を支持するガス容器載置部の中央部に、前記ガス容器の底面に向けて送風する送風ファンを設け、該送風ファンの下方に、載置台外部に連通する吸気路を設けるとともに、ガス容器載置部の上面とガス容器の底面との間に、前記送風ファンからガス容器の底面に向けて送風されたガスをガス容器の外周側に排出する排気路を設けたことを特徴としている。   In order to achieve the above object, the gas container mounting table of the present invention is a gas container mounting table for mounting a gas container filled with a liquefied gas, and the center of the gas container mounting part that supports the gas container. A ventilation fan that blows air toward the bottom surface of the gas container, and an intake passage that communicates with the outside of the mounting table, and an upper surface of the gas container mounting portion and a bottom surface of the gas container. An exhaust path for discharging the gas blown from the blower fan toward the bottom surface of the gas container is provided on the outer peripheral side of the gas container.

前記ガス容器載置部は、前記送風ファンが設けられた中央開口部と、該中央開口部の外側に設けられ、前記ガス容器の底面よりも大径の凹状部と、該凹状部の底面から鉛直方向に突出し、前記ガス容器の底面を支持する複数の放射状リブとを備え、該複数の放射状リブ間に前記排気路が形成されていることを特徴としている。   The gas container mounting portion includes a central opening provided with the blower fan, a concave portion having a larger diameter than the bottom surface of the gas container, and a bottom surface of the concave portion. And a plurality of radial ribs protruding vertically and supporting the bottom surface of the gas container, wherein the exhaust passage is formed between the plurality of radial ribs.

前記ガス容器載置部の上面に、前記排気路から排出されたガスをガス容器の外周面に沿って上昇させる排気ガイドを設けたことを特徴とし、さらに、前記吸気路にガス加熱手段を設けたことを特徴としている。   An exhaust guide for raising the gas exhausted from the exhaust passage along the outer peripheral surface of the gas container is provided on the upper surface of the gas container placement portion, and further, a gas heating means is provided in the intake passage It is characterized by that.

本発明のガス容器の載置台によれば、送風ファンによってガス容器の底面に送風することにより、ガス容器外面の温度低下を抑制して結露の発生を防止できる。特に、載置台内に送風ファンを一体に組み込んだので、部品点数を削減でき、外部配管も不要となり、コストの低減を図ることができる。また、排気ガイドを設けることによってガス容器外面全体に送風することができ、ガス容器外面の結露をより確実に防止できる。さらに、吸気路にガス加熱手段を設けることにより、ガス容器外面の温度低下をより効果的に抑制できる。   According to the mounting table of the gas container of the present invention, by blowing air to the bottom surface of the gas container by the blower fan, it is possible to suppress the temperature drop on the outer surface of the gas container and prevent the occurrence of condensation. In particular, since the blower fan is integrated into the mounting table, the number of parts can be reduced, external piping is not required, and the cost can be reduced. Further, by providing the exhaust guide, air can be blown over the entire outer surface of the gas container, and condensation on the outer surface of the gas container can be prevented more reliably. Furthermore, by providing the gas heating means in the intake passage, the temperature drop on the outer surface of the gas container can be more effectively suppressed.

図１及び図２は本発明のガス容器の載置台の一形態例を示すもので、図１は載置台の正面図、図２は載置台の斜視図である。このガス容器の載置台１０は、ガス容器を載置するガス容器載置部１１と、該ガス容器載置部１１の中央部に設けられた送風ファン１２と、該送風ファン１２の下方に設けられた通気路１３と、ガス容器載置部１１の上面に開口して前記通気路１３に連通する吸気口１４と、ガス容器載置部１１の上面に設けられた凹状部１５とを備えている。   1 and 2 show an example of a mounting table for a gas container according to the present invention. FIG. 1 is a front view of the mounting table, and FIG. 2 is a perspective view of the mounting table. The gas container mounting table 10 includes a gas container mounting unit 11 on which the gas container is mounted, a blower fan 12 provided at the center of the gas container mount unit 11, and a lower side of the blower fan 12. The air passage 13, the air inlet 14 that opens to the upper surface of the gas container mounting portion 11 and communicates with the air passage 13, and the concave portion 15 provided on the upper surface of the gas container mounting portion 11. Yes.

ガス容器載置部１１は、長方形状の上板１１ａの一側に前記吸気口１４を設けるとともに、上板１１ａの中央部に前記凹状部１５を設けたものであって、凹状部１５は、上板１１ａに平行な仕切板１１ｂと、同心円上に配設された内周板１１ｃ及び外周板１１ｄとに囲まれたリングに形成されている。内周板１１ｃの直径はガス容器の底面よりも小径に形成され、外周板１１ｄの直径はガス容器の底面よりも大径に形成されている。また、凹状部１５内には内周板１１ｃから外周板１１ｄに向けて放射状に延設される複数の放射状リブ１６が上板１１ａと同じ高さに突設されている。   The gas container mounting portion 11 is provided with the intake port 14 on one side of the rectangular upper plate 11a and the concave portion 15 at the center of the upper plate 11a. It is formed in a ring surrounded by a partition plate 11b parallel to the upper plate 11a and an inner peripheral plate 11c and an outer peripheral plate 11d arranged concentrically. The diameter of the inner peripheral plate 11c is formed smaller than the bottom surface of the gas container, and the diameter of the outer peripheral plate 11d is formed larger than the bottom surface of the gas container. In addition, a plurality of radial ribs 16 extending radially from the inner peripheral plate 11c toward the outer peripheral plate 11d protrude in the concave portion 15 at the same height as the upper plate 11a.

内周板１１ｃに囲まれたガス容器載置部１１の中央部分には、前記仕切板１１ｂの下方に設けられた前記通気路１３に連通する中央開口部１７が形成されており、この中央開口部１７内に前記送風ファン１２が装着されている。また、ガス容器載置部１１の下部には、該ガス容器載置部１１の外周部分を支持するように、ガス容器の重量を測定するためのロードセル１８が設けられている。   A central opening 17 communicating with the air passage 13 provided below the partition plate 11b is formed in the central portion of the gas container mounting portion 11 surrounded by the inner peripheral plate 11c. The blower fan 12 is mounted in the portion 17. A load cell 18 for measuring the weight of the gas container is provided at the lower part of the gas container mounting part 11 so as to support the outer peripheral part of the gas container mounting part 11.

このように形成した載置台１０は、ガス容器をガス容器載置部１１に載置して送風ファン１２を作動させると、吸気口１４から通気路１３に吸い込まれた載置台外部のガス（空気）が中央開口部１７を通り、ガス容器の底面に向けて送風される。送風ファン１２からガス容器の底面に向けて送風されたガスは、前記凹状部１５の放射状リブ１６間に形成された空間からなる排気路を通ってガス容器の外周側に排出される。   The mounting table 10 formed in this way, when the gas container is mounted on the gas container mounting unit 11 and the blower fan 12 is operated, the gas (air) outside the mounting table sucked into the air passage 13 from the intake port 14. ) Passes through the central opening 17 and is blown toward the bottom of the gas container. The gas blown toward the bottom surface of the gas container from the blower fan 12 is discharged to the outer peripheral side of the gas container through an exhaust passage formed by a space formed between the radial ribs 16 of the concave portion 15.

これにより、ガス容器に充填されている液化ガスを気化させながらガス消費先に供給する際に、気化熱によって容器温度が低下することがあっても、このガス容器の温度低下を極力抑制し、ガス容器に結露が発生することを防止できる。また、送風ファン１２を載置台１０に内蔵させていることから、送風ファン１２と載置台１０とを繋ぐ配管が不要となるので部品点数の増加を抑制し、コストの低減を図ることができるとともに、載置台外部に送風機や加熱装置を設ける必要もないので、省スペース化を図ることもできる。また、配管を介して送風する場合に比べて圧力損失を小さくできるので、小型の送風ファンを使用することができる。   Thereby, when supplying the gas consumption destination while vaporizing the liquefied gas filled in the gas container, even if the container temperature may decrease due to the heat of vaporization, the temperature decrease of the gas container is suppressed as much as possible, It is possible to prevent condensation from occurring in the gas container. In addition, since the blower fan 12 is built in the mounting table 10, piping that connects the blower fan 12 and the mounting table 10 becomes unnecessary, so that an increase in the number of parts can be suppressed and cost can be reduced. Since it is not necessary to provide a blower or a heating device outside the mounting table, space can be saved. Moreover, since a pressure loss can be made small compared with the case where it ventilates via piping, a small ventilation fan can be used.

なお、本形態例では、送風ファン１２からガス容器の底面に向けて送風されたガスをガス容器の外周側に排出する排気路を、凹状部１５内の放射状リブ１６間に形成された流路断面積の大きな空間としたが、ガス容器載置部１１の上面とガス容器の底面との間にガスが流通可能な空間を設ければ排気路として利用することができる。例えば、ガス容器載置部１１の上面に凹凸、例えば放射状の溝を設けてもよく、放射状リブ１６を設けずに凹状部１５の上部開口を多孔板やスリットを有する蓋状部材、あるいは、グレーチング等で覆うようにしてもよい。また、通気路１３及び吸気口１４の形状は任意であり、吸気口１４を複数箇所に設けたり、載置台１０の側面や底面のロードセル１８間に設けこともできる。   In this embodiment, an exhaust path for discharging the gas blown from the blower fan 12 toward the bottom surface of the gas container to the outer peripheral side of the gas container is a flow path formed between the radial ribs 16 in the concave portion 15. Although the space has a large cross-sectional area, it can be used as an exhaust passage if a space through which gas can flow is provided between the upper surface of the gas container mounting portion 11 and the bottom surface of the gas container. For example, unevenness, for example, a radial groove may be provided on the upper surface of the gas container mounting portion 11, and the upper opening of the concave portion 15 is not provided with the radial rib 16, but a lid-like member having a perforated plate or a slit, or a grating. Etc. may be covered. In addition, the shape of the air passage 13 and the air inlet 14 is arbitrary, and the air inlets 14 can be provided at a plurality of locations, or between the load cells 18 on the side surface and the bottom surface of the mounting table 10.

図３は、本発明の他の形態例を示す要部断面正面図である。なお、以下の説明において、前記形態例と同様の構成部分には同一の番号を付してその詳細な説明は省略する。本形態例の載置台１０は、ガス容器載置部１１の上面で、凹状部１５の外周側に、ガス容器２０の周囲を覆う排気ガイド１９を設置している。排気ガイド１９は、ガス容器２０の出し入れを考慮して半割状の筒体を組み合わせたもので、ガス容器２０の外周面２０ａとの間にガスが流通可能な隙間ができるように形成され、送風ファン１２によってガス容器底面側に供給されたガスを、排気路となっている凹状部１５の外周からガス容器２０と排気ガイド１９との間を、ガス容器の外周面に沿って上昇させるようにしている。   FIG. 3 is a cross-sectional front view of an essential part showing another embodiment of the present invention. In the following description, the same components as those in the above-described embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. In the mounting table 10 of this embodiment, an exhaust guide 19 that covers the periphery of the gas container 20 is provided on the outer peripheral side of the concave portion 15 on the upper surface of the gas container mounting portion 11. The exhaust guide 19 is a combination of halved cylinders in consideration of taking in and out of the gas container 20, and is formed so as to create a gap through which gas can flow between the outer peripheral surface 20a of the gas container 20, The gas supplied to the bottom surface of the gas container by the blower fan 12 is raised along the outer peripheral surface of the gas container between the gas container 20 and the exhaust guide 19 from the outer periphery of the concave portion 15 serving as an exhaust path. I have to.

これにより、送風ファン１２によって送風されたガスを、ガス容器２０の底面からガス容器外面全体に送風することができ、気化熱によるガス容器２０の温度低下を効果的に抑制し、ガス容器２０に結露が発生することを有効に防止することができる。なお、この場合、吸気口１４が排気ガイド１９の外側に位置するように排気ガイド１９の径を設定することが好ましい。   Thus, the gas blown by the blower fan 12 can be blown from the bottom surface of the gas container 20 to the entire outer surface of the gas container, effectively suppressing the temperature drop of the gas container 20 due to heat of vaporization. It is possible to effectively prevent the occurrence of condensation. In this case, it is preferable to set the diameter of the exhaust guide 19 so that the intake port 14 is located outside the exhaust guide 19.

また、前記通気路１３にヒーターや熱交換機等のガス加熱手段を設ければ、送風ファン１２によって温風を供給することができ、ガス容器２０に結露が発生することをより確実に防止することができる。   In addition, if gas heating means such as a heater or a heat exchanger is provided in the air passage 13, hot air can be supplied by the blower fan 12, and it is possible to more reliably prevent condensation from occurring in the gas container 20. Can do.

図４は、前記排気ガイド１９を設けた本発明の載置台１０をシリンダーキャビネット３０の底部に配置した一形態例を示す一部断面正面図である。このシリンダーキャビネット３０は、天井部に排気装置３１が設けられるとともに、側壁下部に通気口３２が設けられ、キャビネット３０内のガスを排気装置３１から常時排気して図示しない除害装置を介して外部に排出している。このような排気装置３１を有するシリンダーキャビネット３０では、排気装置３１によってキャビネット内が常に負圧状態に保持され、ガス容器２０内の有害ガスが漏れ出した場合でも、有害ガスがシリンダーキャビネット３０を設置した室内に流出しないようにしている。   FIG. 4 is a partial cross-sectional front view showing an embodiment in which the mounting table 10 of the present invention provided with the exhaust guide 19 is arranged at the bottom of the cylinder cabinet 30. The cylinder cabinet 30 is provided with an exhaust device 31 at the ceiling and a vent 32 at the lower portion of the side wall. The gas in the cabinet 30 is always exhausted from the exhaust device 31 and is externally connected through an abatement device not shown. Is discharged. In the cylinder cabinet 30 having such an exhaust device 31, the inside of the cabinet is always kept in a negative pressure state by the exhaust device 31, and even when harmful gas in the gas container 20 leaks, the harmful gas is installed in the cylinder cabinet 30. To prevent it from flowing into the room.

したがって、前述の特許文献１に記載されたような載置台では、キャビネット内に外部からの加熱空気が導入されるため、排気装置３１の排気能力を、キャビネット内への加熱空気の導入量を考慮して増大させる必要があり、さらに、排気系統の配管系、除害装置等も風量の増加に対応させなければならず、大幅なコストアップが避けられない。   Therefore, in the mounting table as described in the above-mentioned Patent Document 1, since heated air from the outside is introduced into the cabinet, the exhaust capacity of the exhaust device 31 is considered in consideration of the amount of heated air introduced into the cabinet. In addition, the piping system of the exhaust system, the abatement device and the like must be adapted to the increase in the air volume, and a significant increase in cost is inevitable.

一方、本発明の載置台１０は、載置台上面に設けた吸気口１３からキャビネット内のガス（空気）を吸い込んで中央開口部１６から吹き出す循環方式となっているため、通常の排気装置３１をそのまま使用することができ、僅かなコストで結露防止を図ることができる。なお、本形態例において、排気ガイド１９は省略することもできる。   On the other hand, the mounting table 10 of the present invention has a circulation system that sucks gas (air) in the cabinet from the air inlet 13 provided on the upper surface of the mounting table and blows it out from the central opening 16. It can be used as it is, and condensation can be prevented at a small cost. In the present embodiment, the exhaust guide 19 can be omitted.

本発明の第１形態例を示すガス容器の載置台の正面図である。It is a front view of the mounting base of the gas container which shows the 1st form example of this invention. 同じく斜視図である。It is a perspective view similarly. 本発明の第２形態例を示すガス容器の載置台の要部断面正面図である。It is a principal part cross-sectional front view of the mounting base of the gas container which shows the 2nd form example of this invention. 排気ガイドを設けた本発明の載置台をシリンダーキャビネットの底面に配置した一形態例を示す一部断面正面図である。It is a partial cross section front view which shows one example which has arrange | positioned the mounting base of this invention which provided the exhaust guide to the bottom face of a cylinder cabinet.

符号の説明Explanation of symbols

１０…載置台、１１…ガス容器載置部、１１ａ…上板、１１ｂ…仕切板、１１ｃ…内周板、１１ｄ…外周板、１２…送風ファン、１３…通気路、１４…吸気口、１５…凹状部、１６…放射状リブ、１７…中央開口部、１８…ロードセル、１９…排気ガイド、２０…ガス容器、２０ａ…外周面、３０…シリンダーキャビネット   DESCRIPTION OF SYMBOLS 10 ... Mounting stand, 11 ... Gas container mounting part, 11a ... Upper plate, 11b ... Partition plate, 11c ... Inner peripheral plate, 11d ... Outer peripheral plate, 12 ... Blower fan, 13 ... Air flow path, 14 ... Intake port, 15 DESCRIPTION OF SYMBOLS ... Concave part, 16 ... Radial rib, 17 ... Center opening, 18 ... Load cell, 19 ... Exhaust guide, 20 ... Gas container, 20a ... Outer peripheral surface, 30 ... Cylinder cabinet

Claims (4)

液化ガスが充填されているガス容器を載置するガス容器の載置台において、前記ガス容器を支持するガス容器載置部の中央部に、前記ガス容器の底面に向けて送風する送風ファンを設け、該送風ファンの下方に、載置台外部に連通する吸気路を設けるとともに、ガス容器載置部の上面とガス容器の底面との間に、前記送風ファンからガス容器の底面に向けて送風されたガスをガス容器の外周側に排出する排気路を設けたことを特徴とするガス容器の載置台。 In the gas container mounting table for mounting the gas container filled with the liquefied gas, a blower fan that blows air toward the bottom surface of the gas container is provided at the center of the gas container mounting part that supports the gas container. An air intake passage communicating with the outside of the mounting table is provided below the air blowing fan, and air is blown from the air blowing fan toward the bottom surface of the gas container between the upper surface of the gas container mounting portion and the bottom surface of the gas container. The gas container mounting table is provided with an exhaust passage for discharging the gas to the outer peripheral side of the gas container. 前記ガス容器載置部は、前記送風ファンが設けられた中央開口部と、該中央開口部の外側に設けられ、前記ガス容器の底面よりも大径の凹状部と、該凹状部の底面から鉛直方向に突出し、前記ガス容器の底面を支持する複数の放射状リブとを備え、該複数の放射状リブ間に前記排気路が形成されていることを特徴とする請求項１記載のガス容器の載置台。 The gas container mounting portion includes a central opening provided with the blower fan, a concave portion having a larger diameter than the bottom surface of the gas container, and a bottom surface of the concave portion. The gas container according to claim 1, further comprising a plurality of radial ribs protruding in a vertical direction and supporting a bottom surface of the gas container, wherein the exhaust passage is formed between the plurality of radial ribs. Stand. 前記ガス容器載置部の上面に、前記排気路から排出されたガスをガス容器の外周面に沿って上昇させる排気ガイドを設けたことを特徴とする請求項１又は２記載のガス容器の載置台。 3. The gas container mounting according to claim 1, wherein an exhaust guide is provided on the upper surface of the gas container mounting portion to raise the gas discharged from the exhaust passage along the outer peripheral surface of the gas container. Stand. 前記吸気路にガス加熱手段を設けたことを特徴とする請求項１乃至３いずれか１項記載のガス容器の載置台。 The gas container mounting table according to any one of claims 1 to 3, wherein a gas heating means is provided in the intake passage.
JP2006149207A 2006-05-30 2006-05-30 Mounting table of gas vessel Pending JP2007321775A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013096456A (en) * 2011-10-28 2013-05-20 Taiyo Nippon Sanso Corp Gas supply unit
JP2017067470A (en) * 2015-09-28 2017-04-06 株式会社タツノ Calibration device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6433316B1 (en) * 2001-07-09 2002-08-13 James Sigety Apparatus and method for heating a pressurized container
JP2003227597A (en) * 2002-02-01 2003-08-15 Nippon Sanso Corp Gas supplying device and method
WO2003081124A1 (en) * 2002-03-27 2003-10-02 Compagnie Des Gaz De Petrole Primagaz Ventilator device for supplying liquefied petroleum gas, in particular onboard a motor vehicle

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6433316B1 (en) * 2001-07-09 2002-08-13 James Sigety Apparatus and method for heating a pressurized container
JP2003227597A (en) * 2002-02-01 2003-08-15 Nippon Sanso Corp Gas supplying device and method
WO2003081124A1 (en) * 2002-03-27 2003-10-02 Compagnie Des Gaz De Petrole Primagaz Ventilator device for supplying liquefied petroleum gas, in particular onboard a motor vehicle

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013096456A (en) * 2011-10-28 2013-05-20 Taiyo Nippon Sanso Corp Gas supply unit
JP2017067470A (en) * 2015-09-28 2017-04-06 株式会社タツノ Calibration device

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