JP2010210172A - Temperature/humidity conditioner - Google Patents

Temperature/humidity conditioner Download PDF

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JP2010210172A
JP2010210172A JP2009057879A JP2009057879A JP2010210172A JP 2010210172 A JP2010210172 A JP 2010210172A JP 2009057879 A JP2009057879 A JP 2009057879A JP 2009057879 A JP2009057879 A JP 2009057879A JP 2010210172 A JP2010210172 A JP 2010210172A
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air
temperature
humidified water
water storage
heat exchange
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Shinichiro Sakami
慎一朗 酒見
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Espec Corp
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Espec Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a temperature/humidity conditioner capable of reducing work burden in maintenance of a humidification water storage section. <P>SOLUTION: In this temperature/humidity conditioning device, a humidifying section 6 has a humidification pan 12 detachably disposed in an air-conditioning chamber 2b for storing the humidification water, and a heat exchange enhancing section 16 disposed over the inside and outside of the humidification pan 12 at a position to be kept into contact with the air flowing from a processing chamber 2a to the air-conditioning chamber 2b, and constituted to generate heat pump phenomenon for evaporating working fluid sealed therein, inside of a part disposed outside of the humidification pan 12, and condensing the evaporated working fluid inside of a part disposed inside of the humidification pan 12. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、調温調湿装置に関するものである。   The present invention relates to a temperature and humidity control apparatus.

従来、処理対象物を収容する室内の温湿度を目標の温湿度に調整することが可能な調温調湿装置が知られており、このような調温調湿装置の一例が下記特許文献１に開示されている。   Conventionally, a temperature and humidity control apparatus capable of adjusting the temperature and humidity in a room that accommodates an object to be processed to a target temperature and humidity is known, and an example of such a temperature and humidity control apparatus is described in Patent Document 1 below. Is disclosed.

この特許文献１に開示された調温調湿装置では、試験槽内に処理対象物を収容する試験室と、空気の温湿度を目標の温湿度に調整するための空調室とが設けられており、その空調室内において空気の温湿度を加湿部と吸熱部と加熱器とによって調整するとともに、その空気をファンによって空調室と試験室との間で循環させることで試験室内の温湿度を調整するようになっている。そして、この調温調湿装置において、前記加湿部は、試験槽内の空調室の床面に形成された凹部からなる加湿水収容部と、その加湿水収容部に収容された加湿水を加熱するヒータとによって構成されており、ヒータで加湿水を蒸発させることによって空気の加湿を行うようになっている。   In the temperature and humidity control apparatus disclosed in Patent Document 1, a test chamber for storing a processing object in a test tank and an air conditioning chamber for adjusting the temperature and humidity of air to a target temperature and humidity are provided. In the air conditioning room, the temperature and humidity of the air are adjusted by the humidifier, heat absorber, and heater, and the temperature and humidity in the test room are adjusted by circulating the air between the air conditioner and the test room using a fan. It is supposed to be. And in this temperature control apparatus, the said humidification part heats the humidification water accommodation part which consists of a recessed part formed in the floor surface of the air-conditioning room in a test tank, and the humidification water accommodated in the humidification water accommodation part The heater is configured such that air is humidified by evaporating the humidified water with the heater.

特開２００８−２０３２１１号公報JP 2008-202111 A

しかしながら、上記特許文献１の構成では、加湿水収容部が試験槽の床面に一体的に形成されているため、その加湿水収容部の清掃等のメンテナンスを試験槽内で行わざるを得ず、そのメンテナンス作業が煩雑になるという問題点がある。   However, in the configuration of Patent Document 1, since the humidified water storage portion is integrally formed on the floor surface of the test tank, maintenance such as cleaning of the humidified water storage section must be performed in the test tank. There is a problem that the maintenance work becomes complicated.

この発明は、上記の課題を解決するためになされたものであり、その目的は、加湿水収容部のメンテナンスにかかる作業負担を軽減することが可能な調温調湿装置を提供することである。   This invention was made in order to solve said subject, The objective is to provide the temperature control apparatus which can reduce the work burden concerning the maintenance of a humidification water accommodating part. .

上記目的を達成するために、この発明の調温調湿装置は、処理対象物が収められる処理室と、前記処理室内の空気の温湿度を目標の温湿度に調整するための空調室とを有する処理槽と、前記処理室と前記空調室との間で空気を循環させる送風部と、前記空調室内の空気を加湿するための加湿部と、前記処理槽内の空間の空気を調温するための調温部とを備えた調温調湿装置であって、前記加湿部は、前記空調室内に着脱可能に配置され、加湿水を溜める容器からなる加湿水収容部と、前記処理室から前記空調室へ流れ込んだ空気が接触する位置で前記加湿水収容部の内外に跨るように設けられ、内部に封入された作動流体が前記加湿水収容部の外部に配置された側と前記加湿水収容部の内部に配置された側とのうち一方側の内部で蒸発するとともにその蒸発した作動流体が他方側の内部で凝縮するヒートパイプ現象を生じさせ得るように構成された熱交換促進部とを有する。   In order to achieve the above object, a temperature and humidity control apparatus according to the present invention includes a processing chamber in which an object to be processed is stored, and an air conditioning chamber for adjusting the temperature and humidity of the air in the processing chamber to a target temperature and humidity. A processing tank, a blower that circulates air between the processing chamber and the air-conditioning chamber, a humidifying unit for humidifying the air in the air-conditioning chamber, and temperature of the air in the processing tank A humidity control apparatus including a temperature control unit for the humidification water storage unit configured to be detachably disposed in the air-conditioning chamber and configured to store humidification water, and the treatment chamber. The working fluid enclosed inside and outside the humidified water storage part at a position where the air flowing into the air-conditioning room comes into contact, and the side of the humidified water storage part disposed outside the humidified water storage part and the humidified water When evaporating inside one side of the side arranged inside the housing part Its evaporated working fluid to be having a heat exchange promoting unit configured to give rise to heat-pipe phenomenon of condensation inside the other side.

この調温調湿装置では、加湿部の加湿水収容部が空調室内に着脱可能に配置される容器からなるため、空調室から処理槽の外部へ加湿水収容部を取り出してそのメンテナンスを行うことができる。このため、従来のように加湿水収容部が試験槽の床面に一体的に形成されていて試験槽内でその加湿水収容部のメンテナンスを行わなければならない場合に比べて、加湿水収容部のメンテナンスにかかる作業負担を軽減することができる。   In this temperature and humidity control apparatus, the humidified water storage section of the humidifying section is made of a container that is detachably disposed in the air conditioning chamber, so that the humidified water storage section is taken out from the air conditioning chamber to the outside of the treatment tank and the maintenance is performed. Can do. For this reason, compared with the case where the humidified water accommodating part is integrally formed on the floor surface of the test tank as in the prior art and the humidified water accommodating part must be maintained in the test tank, the humidified water accommodating part The work burden of maintenance can be reduced.

ところで、従来のように試験槽の床面の一部を凹ませることによって加湿水収容部が形成される場合には、空気が加湿水収容部内の水面上を流れやすいことから、例えば、槽内を高温高湿条件に調整する場合、すなわち槽内の温度を加湿水の温度よりも高温に設定した場合に槽内を循環する空気の加湿が促進される。これに対し、加湿水収容部を、その外面に処理室から空調室へ流れ込んだ空気が接触する位置で空調室内に配置した場合には、空調室へ流れ込んだ空気が加湿水収容部の外面に沿う方向に流れるため、加湿水と空気の流れとが接触しにくく、空気の加湿が促進されにくい。しかしながら、本発明では、作動流体が内部に封入されるとともにヒートパイプ現象を生じさせ得るように構成された熱交換促進部が、処理室から空調室へ流れ込んだ空気が接触する位置で加湿水収容部の内外に跨るように設けられているため、処理室内から空調室に流れ込む空気が加湿水収容部に溜められた加湿水よりも昇温されると熱交換促進部にヒートパイプ現象が生じ、空調室に流れ込んだ空気の熱が熱交換促進部により加湿水へ搬送されて加湿水の蒸発が促進される。この熱交換促進部の熱搬送による加湿水の蒸発の促進によって、空気の加湿が促進され、その結果、上記した空気が加湿水収容部の外面に沿う方向に流れることに起因する空気の加湿しにくさをカバーすることができる。   By the way, when the humidified water storage part is formed by denting a part of the floor surface of the test tank as in the prior art, the air easily flows on the water surface in the humidified water storage part. Is adjusted to a high temperature and high humidity condition, that is, when the temperature in the tank is set higher than the temperature of the humidified water, the humidification of the air circulating in the tank is promoted. On the other hand, when the humidified water storage part is arranged in the air conditioning room at a position where the air flowing into the air conditioning room from the processing chamber contacts the outer surface, the air flowing into the air conditioning room is placed on the outer surface of the humidified water storage part. Since it flows in the direction along, the humidified water and the air flow are unlikely to come into contact with each other, and the humidification of the air is not easily promoted. However, in the present invention, the heat exchange facilitator configured to enclose the working fluid and cause the heat pipe phenomenon is contained in the humidified water at a position where the air flowing from the processing chamber to the air conditioning chamber contacts. Since the air flowing into the air conditioning chamber from the processing chamber is heated more than the humidified water stored in the humidified water storage unit, a heat pipe phenomenon occurs in the heat exchange promoting unit. The heat of the air that has flowed into the air conditioning chamber is conveyed to the humidified water by the heat exchange promoting unit, and the evaporation of the humidified water is promoted. The humidification of the humidified water by the heat transfer of the heat exchange promoting portion promotes the humidification of the air, and as a result, the air humidified due to the above-described air flowing in the direction along the outer surface of the humidified water accommodating portion. Can cover the bitterness.

さらに、本願発明者は、鋭意検討した結果、ヒートパイプ現象を生じ得る熱交換促進部を温度差のある２つの空間に跨って配置すると、熱交換促進部のうち高温側の空間に配置された部分の内部で作動流体が蒸発し、その作動流体が蒸発する箇所の温度がその高温側の空間の露点に略等しくなることを見出した。従って、本発明では、処理室内の温度を上げる過程で処理室から空調室に流れ込む空気の温度が上昇して熱交換促進部にヒートパイプ現象が発生すると、熱交換促進部のうち加湿水収容部の外部に配置された部分で作動流体が蒸発し、この作動流体が蒸発する箇所の温度が処理室の空気の露点に略等しくなる。その後、この熱交換促進部により加湿水収容部に溜められた加湿水へ熱が搬送されてその加湿水の温度が処理室内の空気の露点付近まで上昇すると、熱交換促進部にヒートパイプ現象が生じなくなり、熱の搬送が停止される。すなわち、本発明では、加湿水収容部に溜められた加湿水の温度を処理室内の空気の露点付近に保持して、加湿水を蒸発可能な状態に保つことができる。   Furthermore, as a result of earnest study, the inventor of the present application has arranged a heat exchange promoting part that can cause a heat pipe phenomenon across two spaces having a temperature difference, and is arranged in a space on the high temperature side of the heat exchange promoting part. It has been found that the working fluid evaporates inside the portion, and the temperature at which the working fluid evaporates is approximately equal to the dew point of the space on the high temperature side. Therefore, in the present invention, when the temperature of the air flowing from the processing chamber to the air conditioning chamber rises in the process of raising the temperature in the processing chamber and a heat pipe phenomenon occurs in the heat exchange promoting portion, the humidified water accommodating portion in the heat exchange promoting portion. The working fluid evaporates at a portion disposed outside the chamber, and the temperature at the location where the working fluid evaporates becomes substantially equal to the dew point of the air in the processing chamber. Thereafter, when heat is transferred to the humidified water stored in the humidified water storage unit by the heat exchange promoting unit and the temperature of the humidified water rises to near the dew point of the air in the processing chamber, a heat pipe phenomenon occurs in the heat exchange promoting unit. No longer occurs and heat transfer is stopped. That is, in the present invention, the temperature of the humidified water stored in the humidified water storage unit can be maintained near the dew point of the air in the processing chamber, and the humidified water can be kept in a vaporizable state.

なお、熱交換促進部が設けられていない場合には、処理室から空調室に流れ込んだ空気と加湿水との加湿水収容部の壁部を介した熱交換により、それらの温度がいずれ平衡状態となるが、本発明のような熱交換促進部が設けられていることによって、処理室から空調室に流れ込んだ空気と加湿水との熱交換が素早く行われるため、加湿水の温度をより早く処理室の空気の露点付近にして加湿水をより早く蒸発可能な状態にすることができる。   In addition, when the heat exchange promotion part is not provided, those temperatures will eventually be in an equilibrium state due to heat exchange through the wall of the humidified water storage part between the humidified water and the air flowing into the air conditioning room from the processing chamber. However, since the heat exchange promoting portion as in the present invention is provided, the heat exchange between the air flowing from the processing chamber into the air conditioning chamber and the humidified water is performed quickly, so that the temperature of the humidified water is increased more quickly. The humidified water can be evaporated more quickly near the dew point of the air in the processing chamber.

また、低温の加湿水の温度を処理室の空気の露点まで上昇させて空気の加湿を開始する場合、もしくは、処理室を高温高湿状態に維持するために加湿水の温度低下に抗してその加湿水の温度を処理室の露点付近に維持しようとする場合には、ヒータで加湿水を加熱することも考えられる。これに対して、本発明では処理室から空調室に流れ込んだ空気の熱を熱交換促進部によって加湿水に供給することができるため、そのようなヒータによる加熱を行うことなく、もしくは、ヒータによる加熱量を低減して、上記空気の加湿の開始もしくは加湿水の温度を処理室の露点付近に維持することができる。このため、本発明では、ヒータによる加湿水の加熱にかかるエネルギー及びそのコストを削減することができる。   In addition, when the humidification of air is started by raising the temperature of the low-temperature humidified water to the dew point of the air in the processing chamber, or in order to keep the processing chamber in a high temperature and high humidity state, In order to maintain the temperature of the humidified water near the dew point of the processing chamber, it is conceivable to heat the humidified water with a heater. On the other hand, in the present invention, the heat of the air flowing from the processing chamber to the air conditioning chamber can be supplied to the humidified water by the heat exchange promoting unit, so that heating by such a heater is performed or by the heater. By reducing the amount of heating, the start of humidification of the air or the temperature of the humidified water can be maintained near the dew point of the processing chamber. For this reason, in this invention, the energy concerning the heating of humidification water by a heater, and its cost can be reduced.

上記調温調湿装置において、前記熱交換促進部のうち前記加湿水収容部の外部に配置された側の端部は、前記加湿水収容部の内部に配置された側の端部よりも低い位置に配置されていてもよい。   In the temperature control apparatus, an end portion of the heat exchange promoting portion disposed on the outside of the humidified water storage portion is lower than an end portion disposed on the inside of the humidified water storage portion. It may be arranged at a position.

熱交換促進部のうち加湿水収容部の外部に配置された側の端部と加湿水収容部の内部に配置された側の端部とが同じ高さに配置されている場合でも、処理室内の空気を加湿水よりも昇温させた場合に、熱交換促進部のうち加湿水収容部の外部に配置された部分で作動流体が蒸発するとともにその作動流体の蒸気が熱交換促進部のうち加湿水収容部の内部に配置された部分で凝縮してヒートパイプ現象が生じるが、本構成のように熱交換促進部のうち加湿水収容部の外部に配置された側の端部を加湿水収容部の内部に配置された側の端部よりも低い位置に配置すれば、熱交換促進部の内部での作動流体の蒸発と凝縮の循環をより効率よく行わせることができ、当該熱交換促進部による加湿水への熱搬送の効率を向上させることができる。その結果、より素早く加湿水を加熱して空気の加湿を行うことができる。   Even in the case where the end on the side arranged outside the humidified water storage part and the end on the side arranged inside the humidified water storage part in the heat exchange promoting part are arranged at the same height, When the temperature of the air is raised from the humidified water, the working fluid evaporates at the portion of the heat exchange promoting portion arranged outside the humidifying water storage portion and the vapor of the working fluid is out of the heat exchange promoting portion. The heat pipe phenomenon is caused by condensation at the portion arranged inside the humidified water storage unit, but the end of the heat exchange promotion unit on the side arranged outside the humidified water storage unit as in this configuration is humidified water. If it is arranged at a position lower than the end portion on the side arranged inside the housing part, the working fluid can be evaporated and condensed in the heat exchange promoting part more efficiently. The efficiency of heat transfer to the humidified water by the promotion unit can be improved. As a result, the humidified water can be heated more quickly to humidify the air.

上記調温調湿装置において、前記熱交換促進部は、前記加湿水収容部に複数設けられ、この各熱交換促進部のうち前記加湿水収容部の外部に配置された部分は、それぞれ板状に形成されているとともに互いに平行かつ所定間隔で並んで配置されていてもよい。   In the temperature and humidity control apparatus, a plurality of the heat exchange promotion units are provided in the humidified water storage unit, and portions of the heat exchange promotion units arranged outside the humidification water storage unit are respectively plate-shaped. And may be arranged in parallel with each other at a predetermined interval.

この構成のように、加湿水収容部に熱交換促進部が複数設けられていれば、熱交換促進部が１つしか設けられていない場合に比べて、加湿水収容部に溜められた加湿水全体をより早く昇温させることができる。ところで、このように熱交換促進部を複数設ける構成としては、複数の棒状の熱交換促進部を加湿水収容部の所定の壁部から突出するように設ける構成も考えられる。しかし、この場合には、加湿水収容部の壁部に接触する空気の流れは乱流の状態であり、その乱流の状態の空気から各熱交換促進部のうち加湿水収容部の外部に配置された部分へ付与される熱量はそれぞれ異なってしまう。これに対して、本構成のように、各熱交換促進部のうち加湿水収容部の外部に配置された部分がそれぞれ板状に形成されているとともに互いに平行かつ所定間隔で並んで配置されていれば、処理室から空調室に流れ込んで加湿水収容部の外面に接触する空気がこれら熱交換促進部によって整流され、その整流された空気から各熱交換促進部に付与される熱量が均一化される。その結果、各熱交換促進部によって加湿水へ搬送される熱量が均一化されるため、加湿水収容部に溜められた加湿水全体をより均一に昇温させることができる。従って、この構成では、加湿水収容部に溜められた加湿水全体をより早くかつより均一に昇温させることができる。   If a plurality of heat exchange promoting portions are provided in the humidified water storage unit as in this configuration, the humidified water stored in the humidified water storage unit is compared to the case where only one heat exchange promoting unit is provided. The whole temperature can be raised more quickly. By the way, as a structure in which a plurality of heat exchange promotion parts are provided in this way, a structure in which a plurality of rod-like heat exchange promotion parts are provided so as to protrude from a predetermined wall part of the humidified water storage part is also conceivable. However, in this case, the air flow that contacts the wall of the humidified water storage section is in a turbulent state, and the air in the turbulent flow state is outside the humidified water storage section in each heat exchange promoting section. The amount of heat applied to the arranged parts will be different. On the other hand, as in the present configuration, portions of each heat exchange promoting portion arranged outside the humidifying water storage portion are each formed in a plate shape and are arranged in parallel with each other at a predetermined interval. If so, the air that flows into the air conditioning chamber from the processing chamber and contacts the outer surface of the humidified water storage unit is rectified by these heat exchange promotion units, and the amount of heat applied to each heat exchange promotion unit from the rectified air is made uniform Is done. As a result, the amount of heat transferred to the humidified water by each heat exchange promoting unit is made uniform, so that the entire humidified water stored in the humidified water storage unit can be heated more uniformly. Therefore, with this configuration, the entire humidified water stored in the humidified water storage unit can be heated more quickly and more uniformly.

上記調温調湿装置において、前記熱交換促進部は、前記加湿水収容部の壁部を貫通して設けられ、この熱交換促進部が設けられた前記壁部は、断熱材を備えていることが好ましい。   In the above-described temperature and humidity control apparatus, the heat exchange promoting part is provided through the wall of the humidified water storage part, and the wall provided with the heat exchange promoting part includes a heat insulating material. It is preferable.

この構成のように、熱交換促進部が貫通して設けられた加湿水収容部の壁部が断熱材を備えていれば、その壁部を挟んで加湿水収容部の内外で温度差を確実に保持することができ、その壁部を貫通する熱交換促進部に確実にヒートパイプ現象を生じさせることができる。   If the wall of the humidified water storage part provided with the heat exchange promoting part penetrating as in this configuration is provided with a heat insulating material, the temperature difference between the inside and outside of the humidified water storage part is reliably ensured across the wall part. The heat pipe phenomenon can be surely generated in the heat exchange promoting portion that penetrates the wall portion.

上記調温調湿装置において、前記熱交換促進部のうち前記加湿水収容部の外部に配置された側の端部と前記加湿水収容部の内部に配置された側の端部とは、同じ高さに配置されていてもよい。   In the above-described temperature control apparatus, the end on the side of the heat exchange promoting unit that is disposed outside the humidified water storage unit and the end of the side disposed inside the humidified water storage unit are the same. It may be arranged at a height.

この構成のように、熱交換促進部のうち加湿水収容部の外部に配置された側の端部と加湿水収容部の内部に配置された側の端部とが同じ高さに配置されている場合でも、処理室内の空気の温度を加湿水よりも上昇させる過程において熱交換促進部のうち加湿水収容部の外部に配置された部分で作動流体が蒸発するとともにその蒸発した作動流体が熱交換促進部のうち加湿水収容部の内部に配置された部分で凝縮するヒートパイプ現象が生じ、この熱交換促進部によって処理室から空調室に流れ込んだ空気から加湿水へ熱が搬送されて、加湿水の昇温が促進される。さらに、この構成では、処理室内の温度を加湿水よりも降下させる場合には、熱交換促進部のうち加湿水収容部の内部に配置された部分で作動流体が蒸発するとともにその蒸発した作動流体が熱交換促進部のうち加湿水収容部の外部に配置された部分で凝縮するヒートパイプ現象が生じ、この熱交換促進部によって加湿水収容部に溜められた加湿水から加湿水収容部の外部へ熱が搬送されて、加湿水の降温が促進される。従って、この構成では、処理室の温度と湿度を共に上昇させる場合に、処理室の空気の昇温を利用して加湿水を素早く昇温させ、加湿部による空気の加湿をより早く行わせることができるとともに、処理室の温度と湿度を共に降下させる場合に、処理室の空気の降温を利用して加湿水を素早く降温させ、加湿部による空気の加湿をより早く低減させることができる。   As in this configuration, the end on the side arranged outside the humidified water storage part and the end on the side arranged inside the humidified water storage part in the heat exchange promoting part are arranged at the same height. Even in the case where the temperature of the air in the processing chamber is raised above the humidified water, the working fluid evaporates at the portion of the heat exchange promoting portion arranged outside the humidifying water storage portion and the evaporated working fluid is heated. The heat pipe phenomenon that condenses in the portion arranged inside the humidification water storage part of the exchange promotion part occurs, heat is transferred from the air flowing from the processing chamber to the air conditioning room by this heat exchange promotion part to the humidification water, Increase in temperature of humidified water is promoted. Further, in this configuration, when the temperature in the processing chamber is lowered below the humidified water, the working fluid evaporates at the portion disposed inside the humidified water storage portion of the heat exchange promoting portion, and the evaporated working fluid The heat pipe phenomenon that condenses in the part of the heat exchange promoting part arranged outside the humidifying water accommodating part occurs, and the outside of the humidifying water accommodating part is generated from the humidified water stored in the humidifying water accommodating part by the heat exchange promoting part. Heat is transferred to the water, and the temperature drop of the humidified water is promoted. Therefore, in this configuration, when both the temperature and humidity of the processing chamber are increased, the humidification water is quickly heated using the temperature increase of the air in the processing chamber, and the humidification of the air by the humidifying unit is performed more quickly. In addition, when both the temperature and humidity of the processing chamber are lowered, the humidified water can be quickly lowered using the temperature drop of the air in the processing chamber, and the humidification of the air by the humidifying unit can be reduced more quickly.

また、本発明による調温調湿装置は、処理対象物が収められる処理室と、前記処理室内の空気の温湿度を目標の温湿度に調整するための空調室とを有する処理槽と、前記処理室と前記空調室との間で空気を循環させる送風部と、前記空調室内の空気を加湿するための加湿部と、前記処理槽内の空間の空気を調温するための調温部とを備えた調温調湿装置であって、前記加湿部は、前記空調室内に着脱可能に配置され、加湿水を溜める容器からなる加湿水収容部を有し、前記加湿水収容部は、作動流体が封入された構成であり、かつ、前記封入された作動流体が当該加湿水収容部のうち前記処理室から前記空調室へ流れ込んだ空気が接触する外面寄りの領域と当該加湿水収容部の内面寄りの領域とのいずれか一方の領域で蒸発するとともにその蒸発した作動流体が他方の領域で凝縮するヒートパイプ現象を生じ得るように構成されている。   Further, the temperature and humidity control apparatus according to the present invention includes a processing chamber having a processing chamber in which an object to be processed is stored, and an air conditioning chamber for adjusting the temperature and humidity of the air in the processing chamber to a target temperature and humidity, A blower that circulates air between the processing chamber and the air-conditioning chamber, a humidifying portion for humidifying the air in the air-conditioning chamber, and a temperature control portion for adjusting the temperature of the air in the space in the processing tank; A humidity control apparatus comprising: the humidifying unit is detachably disposed in the air-conditioning chamber, and includes a humidifying water storage unit including a container for storing humidifying water, and the humidifying water storage unit is operated A fluid-sealed configuration, and a region near the outer surface of the humidified water storage unit where the air that has flowed from the processing chamber into the air-conditioning chamber is in contact with the humidified water storage unit. Evaporate in one of the areas closer to the inner surface and Issued working fluid is configured to give rise to heat-pipe phenomenon is condensed in the other region.

この調温調湿装置では、加湿部の加湿水収容部が空調室内に着脱可能に配置されているので、上記した調温調湿装置と同様の作用により加湿水収容部のメンテナンスにかかる作業負担を軽減することができる。また、この調温調湿装置では、加湿水収容部が、その内部に封入された作動流体が当該加湿水収容部のうち処理室から空調室へ流れ込んだ空気が接触する外面寄りの領域と当該加湿水収容部の内面寄りの領域とのいずれか一方の領域で蒸発するとともにその蒸発した作動流体が他方の領域で凝縮するヒートパイプ現象を生じ得るように構成されているため、処理室内から空調室に流れ込む空気が加湿水収容部に溜められた加湿水よりも昇温されると加湿水収容部においてヒートパイプ現象が生じ、空調室に流れ込んだ空気の熱が加湿水収容部の外面側から内面側へ搬送されて加湿水の蒸発が促進される。これにより、空気の加湿が促進され、その結果、空気が加湿水収容部の外面に沿う方向に流れることに起因する空気の加湿しにくさをカバーすることができる。   In this temperature and humidity control apparatus, the humidifying water storage section of the humidification section is detachably disposed in the air conditioning room, so the work burden on the maintenance of the humidification water storage section is the same as that of the temperature control apparatus described above. Can be reduced. Further, in this temperature control apparatus, the humidifying water storage unit includes a working fluid sealed inside the humidifying water storage unit and a region near the outer surface where the air flowing into the air conditioning chamber from the processing chamber comes into contact with the humidifying water storage unit. Since it is configured to evaporate in one of the areas near the inner surface of the humidified water storage section and cause the heat pipe phenomenon in which the evaporated working fluid condenses in the other area, air conditioning from the processing chamber When the temperature of the air flowing into the chamber is higher than that of the humidified water stored in the humidified water storage unit, a heat pipe phenomenon occurs in the humidified water storage unit, and the heat of the air flowing into the air conditioning chamber is generated from the outer surface side of the humidified water storage unit. Evaporation of humidified water is promoted by being conveyed to the inner surface side. Thereby, humidification of the air is promoted, and as a result, it is possible to cover the difficulty of humidifying the air due to the air flowing in the direction along the outer surface of the humidified water accommodating portion.

また、この構成では、上記した調温調湿装置の熱交換促進部と同様の原理により、加湿水収容部のうち作動流体が蒸発する箇所の温度が処理室の空気の露点に略等しくなる。このため、加湿水収容部による熱搬送によって加湿水の温度が処理室の空気の露点付近まで上昇すると、加湿水収容部においてヒートパイプ現象が生じなくなって熱搬送が停止され、その結果、加湿水収容部に溜められた加湿水の温度を処理室内の空気の露点付近に保持して、加湿水を蒸発可能な状態に保つことができる。   Moreover, in this structure, the temperature of the location where a working fluid evaporates among humidification water accommodation parts becomes substantially equal to the dew point of the air of a process chamber by the principle similar to the heat exchange promotion part of the above-mentioned temperature control humidity control apparatus. For this reason, when the temperature of the humidified water rises to the vicinity of the dew point of the air in the processing chamber by heat transfer by the humidified water storage unit, the heat pipe phenomenon does not occur in the humidified water storage unit, and the heat transfer is stopped. The temperature of the humidified water stored in the housing portion can be maintained near the dew point of the air in the processing chamber, so that the humidified water can be kept in a vaporizable state.

また、加湿水収容部がヒートパイプ現象を生じ得るように構成されていることによって、処理室から空調室に流れ込んだ空気と加湿水との熱交換が素早く行われるため、加湿水の温度をより早く処理室の空気の露点付近にして加湿水をより早く蒸発可能な状態にすることができる。また、ヒートパイプ現象が生じる加湿水収容部による熱搬送によって、処理室から空調室に流れ込んだ空気の熱を利用して加湿水を昇温させることが可能であるため、加湿部においてヒータによる加湿水の加熱にかかるエネルギー及びそのコストを削減することができる。   In addition, since the humidified water storage unit is configured to cause a heat pipe phenomenon, heat exchange between the air flowing from the processing chamber into the air conditioning chamber and the humidified water is performed quickly, so that the temperature of the humidified water is further increased. It is possible to quickly bring the humidified water into a state where it can be evaporated near the dew point of the air in the processing chamber. In addition, since the humidified water can be heated using the heat of the air flowing from the processing chamber to the air-conditioning chamber by the heat transfer by the humidified water storage section where the heat pipe phenomenon occurs, the humidification by the heater is performed in the humidification section. Energy and cost for heating water can be reduced.

上記調温調湿装置において、前記加湿水収容部は、その底面と前記空調室内の床面との間に間隙が形成される位置に配置され、当該加湿水収容部の底壁が前記ヒートパイプ現象を生じ得るように構成されていてもよい。   In the above temperature and humidity control apparatus, the humidified water storage unit is disposed at a position where a gap is formed between a bottom surface thereof and a floor surface of the air conditioning chamber, and the bottom wall of the humidified water storage unit is the heat pipe. You may be comprised so that a phenomenon may arise.

また、上記調温調湿装置において、前記加湿水収容部の側壁が前記ヒートパイプ現象を生じ得るように構成されていてもよい。   Moreover, in the said temperature control apparatus, the side wall of the said humidification water accommodating part may be comprised so that the said heat pipe phenomenon can produce.

以上説明したように、本発明によれば、加湿水収容部のメンテナンスにかかる作業負担を軽減することができる。また、本発明によれば、ヒータによる加湿水の加熱にかかるエネルギー及びそのコストを削減することができる。   As described above, according to the present invention, it is possible to reduce the work burden on maintenance of the humidified water storage unit. Moreover, according to this invention, the energy concerning the heating of humidification water by a heater and its cost can be reduced.

本発明の第１実施形態による調温調湿装置の処理槽内の構造を示す図である。It is a figure which shows the structure in the processing tank of the temperature control apparatus by 1st Embodiment of this invention. 図１に示した調温調湿装置に用いる加湿部の縦断面図である。It is a longitudinal cross-sectional view of the humidification part used for the temperature control apparatus shown in FIG. ヒートパイプ現象が生じているヒートパイプにおいて作動流体が蒸発している箇所の外面温度がどのような温度となるかを実験した結果を示す図である。It is a figure which shows the result of having experimented what kind of temperature the outer surface temperature of the location where the working fluid is evaporating in the heat pipe in which the heat pipe phenomenon has occurred. 本発明の第２実施形態による調温調湿装置の加湿部近傍の構造を示す図である。It is a figure which shows the structure of the humidification part vicinity of the temperature control apparatus by 2nd Embodiment of this invention. 本発明の第１実施形態の第１変形例による調温調湿装置の加湿部の縦断面図である。It is a longitudinal cross-sectional view of the humidification part of the temperature control apparatus by the 1st modification of 1st Embodiment of this invention. 本発明の第１実施形態の第２変形例による調温調湿装置の加湿部を処理室側から見た図である。It is the figure which looked at the humidification part of the temperature control apparatus by the 2nd modification of 1st Embodiment of this invention from the process chamber side. 図６に示した加湿部のＶＩＩ−ＶＩＩ線に沿った断面図である。It is sectional drawing along the VII-VII line of the humidification part shown in FIG. 本発明の第１実施形態の第３変形例による調温調湿装置の加湿部近傍の構造を示す図である。It is a figure which shows the structure of the humidification part vicinity of the temperature control humidity control apparatus by the 3rd modification of 1st Embodiment of this invention. 本発明の第１実施形態の第４変形例による調温調湿装置の加湿部近傍の構造を示す図である。It is a figure which shows the structure of the humidification part vicinity of the temperature control humidity control apparatus by the 4th modification of 1st Embodiment of this invention. 本発明の第２実施形態の第１変形例による調温調湿装置の加湿皿の縦断面図である。It is a longitudinal cross-sectional view of the humidifying tray of the temperature control apparatus by the 1st modification of 2nd Embodiment of this invention. 本発明の第２実施形態の第２変形例による調温調湿装置の加湿皿の縦断面図である。It is a longitudinal cross-sectional view of the humidification pan of the temperature control humidity control apparatus by the 2nd modification of 2nd Embodiment of this invention.

以下、本発明の実施形態を図面を参照して説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

（第１実施形態）
まず、図１及び図２を参照して、本発明の第１実施形態による調温調湿装置の構成について説明する。 (First embodiment)
First, with reference to FIG.1 and FIG.2, the structure of the temperature control apparatus by 1st Embodiment of this invention is demonstrated.

この第１実施形態による調温調湿装置は、後述する処理室２ａ内の温湿度を所定の温湿度に設定してその処理室２ａ内に収容した処理対象物をその所定の温湿度環境下に置くために用いられるものであり、このような調温調湿装置としては環境試験装置や恒温恒湿槽等が挙げられる。この調温調湿装置は、図１に示すように、処理槽２と、送風部４と、加湿部６と、調温部８とを備えている。   The temperature control and humidity control apparatus according to the first embodiment sets a temperature and humidity in a processing chamber 2a, which will be described later, to a predetermined temperature and humidity, and allows a processing object stored in the processing chamber 2a to be stored in the predetermined temperature and humidity environment. Such a temperature control device includes an environmental test device, a constant temperature and humidity chamber, and the like. As shown in FIG. 1, the temperature control apparatus includes a processing tank 2, a blower unit 4, a humidification unit 6, and a temperature control unit 8.

処理槽２は、その内部の空間を密閉可能に構成された箱状に形成されており、当該処理槽２は、その内部に処理室２ａと空調室２ｂとを有している。この処理室２ａと空調室２ｂとは仕切壁２ｃによって仕切られており、この仕切壁２ｃの上側には、処理室２ａと空調室２ｂとを連通させる上側連通部２ｄが設けられ、仕切壁２ｃの下側には、処理室２ａと空調室２ｂとを連通させる下側連通部２ｅが設けられている。   The processing tank 2 is formed in a box shape configured to be able to seal the internal space, and the processing tank 2 includes a processing chamber 2a and an air conditioning chamber 2b therein. The processing chamber 2a and the air conditioning chamber 2b are partitioned by a partition wall 2c, and an upper communication portion 2d for communicating the processing chamber 2a and the air conditioning chamber 2b is provided above the partition wall 2c, and the partition wall 2c. On the lower side, a lower communication portion 2e is provided for communicating the processing chamber 2a and the air conditioning chamber 2b.

処理室２ａは、処理対象物が収められる空間であり、この処理室２ａ内の温湿度が目標の温湿度に調整される。この処理室２ａ内には、空気の温度を検出する図略の空気温度検出部が設けられている。   The processing chamber 2a is a space in which a processing object is stored, and the temperature and humidity in the processing chamber 2a are adjusted to a target temperature and humidity. An unillustrated air temperature detector for detecting the temperature of air is provided in the processing chamber 2a.

空調室２ｂは、処理室２ａ内の空気の温湿度を目標の温湿度に調整するために設けられており、この空調室２ｂ内に送風部４、加湿部６及び調温部８が設置されている。   The air conditioning chamber 2b is provided to adjust the temperature and humidity of the air in the processing chamber 2a to a target temperature and humidity, and the air blowing unit 4, the humidifying unit 6, and the temperature control unit 8 are installed in the air conditioning chamber 2b. ing.

送風部４は、空調室２ｂの上部に設けられている。この送風部４は、空気を送風するファンからなり、処理室２ａと空調室２ｂとの間で空気を循環させる。送風部４によって送風された空気は、空調室２ｂから上側連通部２ｄを通じて処理室２ａへ流れる。これに伴い処理室２ａの空気は、処理室２ａから下側連通部２ｅを通じて空調室２ｂ内に流れ込む。このようにして処理室２ａと空調室２ｂとの間で空気が循環する。   The ventilation part 4 is provided in the upper part of the air-conditioning room 2b. The blower unit 4 includes a fan that blows air, and circulates air between the processing chamber 2a and the air conditioning chamber 2b. The air blown by the blower 4 flows from the air conditioning chamber 2b to the processing chamber 2a through the upper communication portion 2d. Accordingly, the air in the processing chamber 2a flows into the air conditioning chamber 2b from the processing chamber 2a through the lower communication portion 2e. In this way, air circulates between the processing chamber 2a and the air conditioning chamber 2b.

加湿部６は、空調室２ｂの下部に設けられており、空調室２ｂ内の空気を加湿する。   The humidification part 6 is provided in the lower part of the air conditioning chamber 2b, and humidifies the air in the air conditioning chamber 2b.

具体的には、この加湿部６は、図２に示すように、加湿皿１２と、ヒータ１４と、熱交換促進部１６と、加湿水温度検出部１８とを有する。   Specifically, as shown in FIG. 2, the humidifying unit 6 includes a humidifying dish 12, a heater 14, a heat exchange promoting unit 16, and a humidified water temperature detecting unit 18.

加湿皿１２は、加湿水を溜める容器であり、本発明の加湿水収容部の概念に含まれる。この加湿皿１２は、空調室２ｂ内に着脱可能に配置されている。具体的には、この加湿皿１２は、空調室２ｂ内の床面２ｇ上に載置されており、その空調室２ｂから処理槽２の外部へ取り出せるようになっている。そして、加湿皿１２は、空調室２ｂの床面２ｇ上に配設される底壁１２ａと、その底壁１２ａの周縁部からそれぞれ立ち上げられる側壁１２ｂとを有する。加湿皿１２は、処理室２ａから空調室２ｂに流れ込んだ空気がその各側壁１２ｂのうちの１つの側壁１２ｃに接触する位置に配置されている。この側壁１２ｃは、本発明の壁部の概念に含まれるものである。この第１実施形態では、側壁１２ｃが下側連通部２ｅに面するように配置されており、下側連通部２ｅを通って処理室２ａから空調室２ｂへ流れ込んだ空気が側壁１２ｃの外面に略垂直に当たるようになっている。加湿皿１２の各側壁１２ｂ（１２ｃ）は、断熱材を備えた断熱壁からなる。また、加湿皿１２は、その上部に開口１２ｄを有しており、この開口１２ｄを通じて、加湿皿１２に溜められた加湿水が蒸発可能となっている。そして、加湿部６では、この加湿水を蒸発させることによって空気を加湿する。   The humidifying tray 12 is a container for storing humidified water, and is included in the concept of the humidified water storage unit of the present invention. The humidifying tray 12 is detachably disposed in the air conditioning chamber 2b. Specifically, the humidifying tray 12 is placed on the floor surface 2g in the air conditioning chamber 2b and can be taken out of the processing tank 2 from the air conditioning chamber 2b. And the humidification dish 12 has the bottom wall 12a arrange | positioned on the floor surface 2g of the air-conditioning room 2b, and the side wall 12b each raised from the peripheral part of the bottom wall 12a. The humidifying tray 12 is disposed at a position where the air flowing into the air conditioning chamber 2b from the processing chamber 2a contacts one of the side walls 12c. The side wall 12c is included in the concept of the wall portion of the present invention. In this 1st Embodiment, the side wall 12c is arrange | positioned so that the lower side communication part 2e may be faced, and the air which flowed into the air-conditioning room 2b from the process chamber 2a through the lower side communication part 2e on the outer surface of the side wall 12c It hits almost vertically. Each side wall 12b (12c) of the humidifying tray 12 is composed of a heat insulating wall provided with a heat insulating material. Further, the humidifying dish 12 has an opening 12d in the upper part thereof, and the humidified water stored in the humidifying dish 12 can be evaporated through the opening 12d. And in the humidification part 6, air is humidified by evaporating this humidified water.

ヒータ１４は、加湿皿１２に溜められた加湿水を加熱して蒸発させるためのものであり、その一部が加湿水中に漬かるように加湿皿１２内に配設されている。   The heater 14 is for heating and evaporating the humidified water stored in the humidifying tray 12, and a part of the heater 14 is disposed in the humidifying tray 12 so as to be immersed in the humidified water.

熱交換促進部１６は、処理室２ａから空調室２ｂへ流入する空気と加湿皿１２に溜められた加湿水との熱交換を促進させるものである。この熱交換促進部１６は、直棒状のヒートパイプからなり、処理室２ａから空調室２ｂに流れ込んだ空気が接触する位置で加湿皿１２の前記側壁１２ｃを貫通して当該加湿皿１２の内外に跨って設けられている。   The heat exchange promoting unit 16 promotes heat exchange between the air flowing from the processing chamber 2 a to the air conditioning chamber 2 b and the humidified water stored in the humidifying tray 12. This heat exchange promoting part 16 is composed of a straight rod-like heat pipe, and penetrates the side wall 12c of the humidifying dish 12 at a position where air flowing into the air conditioning room 2b from the processing chamber 2a comes into contact with the inside and outside of the humidifying dish 12. It is provided across.

具体的には、加湿皿１２の前記側壁１２ｃに貫通孔１２ｆが形成されており、熱交換促進部１６のヒートパイプは、この貫通孔１２ｆに挿通された状態で側壁１２ｃに固定されている。そして、貫通孔１２ｆは、側壁１２ｃの外面側に位置する部分が内面側に位置する部分よりも低くなるように傾斜した孔に形成されており、この貫通孔１２ｆに挿通された熱交換促進部１６は、加湿皿１２の外部に配置された側の端部が加湿皿１２の内部に配置された側の端部よりも低い位置に位置するように傾斜した姿勢で配置されている。そして、熱交換促進部１６のうち加湿皿１２内に配置された部分は、加湿水中に漬かっている。また、貫通孔１２ｆに挿通された熱交換促進部１６とその貫通孔１２ｆの内面との間の隙間は、図略のシール材によって塞がれて加湿水が漏出しないようになっている。   Specifically, a through hole 12f is formed in the side wall 12c of the humidifying tray 12, and the heat pipe of the heat exchange promoting portion 16 is fixed to the side wall 12c while being inserted into the through hole 12f. And the through-hole 12f is formed in the hole inclined so that the part located in the outer surface side of the side wall 12c may become lower than the part located in the inner surface side, The heat exchange promotion part inserted in this through-hole 12f 16 is arrange | positioned with the attitude | position inclined so that the edge part by the side arrange | positioned outside the humidification dish 12 may be located in a position lower than the edge part by the side arrange | positioned inside the humidification dish 12. FIG. And the part arrange | positioned in the humidification tray 12 among the heat exchange promotion parts 16 is immersed in humidification water. Further, the gap between the heat exchange promoting portion 16 inserted through the through hole 12f and the inner surface of the through hole 12f is blocked by a seal material (not shown) so that the humidified water does not leak out.

熱交換促進部１６のヒートパイプの内部には、純水からなる作動流体が封入されている。この熱交換促進部１６のヒートパイプは、空調室２ｂに流れ込んだ処理室２ａの空気の温度が加湿皿１２に溜められた加湿水の温度よりも高い場合に、加湿皿１２の外部に配置された側の端部近傍の内部で作動流体が蒸発するとともにその蒸発した作動流体の蒸気が加湿皿１２内に配置された側の端部近傍の内部で凝縮するヒートパイプ現象を生じるように構成されている。   A working fluid made of pure water is sealed inside the heat pipe of the heat exchange promoting unit 16. The heat pipe of the heat exchange promoting unit 16 is arranged outside the humidifying dish 12 when the temperature of the air in the processing chamber 2a flowing into the air conditioning chamber 2b is higher than the temperature of the humidifying water stored in the humidifying dish 12. The working fluid evaporates in the vicinity of the end portion on the other side, and the vapor of the evaporated working fluid condenses inside the vicinity of the end portion on the side disposed in the humidifying dish 12 to generate a heat pipe phenomenon. ing.

加湿水温度検出部１８は、加湿皿１２内に設けられており、加湿皿１２に溜められた加湿水の温度を検出するものである。   The humidifying water temperature detecting unit 18 is provided in the humidifying dish 12 and detects the temperature of the humidifying water stored in the humidifying dish 12.

調温部８は、空調室２ｂ内に設けられており、その空調室２ｂの空気の温度を調整する。この調温部８は、加熱部８ａと、冷却部８ｂとによって構成されている。   The temperature adjustment unit 8 is provided in the air conditioning room 2b and adjusts the temperature of the air in the air conditioning room 2b. The temperature control unit 8 includes a heating unit 8a and a cooling unit 8b.

加熱部８ａは、空気を加熱するものであり、空調室２ｂ内において送風部４の下側に設けられている。冷却部８ｂは、空気を冷却するものであり、例えば蒸気圧縮式の冷凍機によって構成されている。この冷却部８ｂは、空調室２ｂ内において加熱部８ａの下側でかつ加湿部６の上側に設けられている。そして、この調温部８では、前記空気温度検出部による検出結果に基づいて加熱部８ａの加熱能力と冷却部８ｂの冷却能力とをそれぞれ調整することによって空気の温度を調整するようになっている。また、冷却部８ｂは、除湿機を兼ねており、この冷却部８ｂの除湿能力と前記加湿部６の加湿能力とをそれぞれ調整することによって空気の湿度を調整するようになっている。   The heating unit 8a heats air and is provided below the air blowing unit 4 in the air conditioning chamber 2b. The cooling unit 8b cools the air, and is constituted by, for example, a vapor compression refrigerator. The cooling unit 8b is provided below the heating unit 8a and above the humidifying unit 6 in the air conditioning chamber 2b. And in this temperature control part 8, based on the detection result by the said air temperature detection part, the temperature of air is adjusted by adjusting the heating capability of the heating part 8a, and the cooling capability of the cooling part 8b, respectively. Yes. The cooling unit 8b also serves as a dehumidifier, and adjusts the humidity of the air by adjusting the dehumidifying capability of the cooling unit 8b and the humidifying capability of the humidifying unit 6, respectively.

次に、本発明の第１実施形態による調温調湿装置の動作について説明する。   Next, the operation of the temperature and humidity control apparatus according to the first embodiment of the present invention will be described.

この第１実施形態による調温調湿装置では、前記空気温度検出部により検出される処理室２ａ内の空気の温度と前記加湿水温度検出部１８により検出される加湿水の温度とに基づいて処理室２ａ内の空気の温度と加湿水の温度との高低が判断される。   In the temperature and humidity control apparatus according to the first embodiment, based on the temperature of the air in the processing chamber 2a detected by the air temperature detector and the temperature of the humidified water detected by the humidified water temperature detector 18. The level of the temperature of the air in the processing chamber 2a and the temperature of the humidified water is determined.

そして、処理室２ａ内の空気の温度が加湿水の温度よりも低く、その処理室２ａ内を加湿水よりも高温に設定するとともにその処理室２ａ内を加湿する場合、例えば処理室２ａを高温高湿条件に調整する場合には、まず、空調室２ｂ内で加熱部８ａによって空気が加熱され、その加熱された空気が送風部４によって処理室２ａへ送られることにより処理室２ａ内の温度が加湿水の温度よりも上げられる。そして、加湿水よりも温度が上昇した処理室２ａ内の空気は、空調室２ｂ内に流れ込んで加湿皿１２の側壁１２ｃに当たり、その後、側壁１２ｃに沿って空調室２ｂ内を上方へ流れる。   When the temperature of the air in the processing chamber 2a is lower than the temperature of the humidified water and the processing chamber 2a is set to a temperature higher than that of the humidifying water and the processing chamber 2a is humidified, for example, the processing chamber 2a is heated to a high temperature. In the case of adjusting to a high humidity condition, first, air is heated by the heating unit 8a in the air conditioning chamber 2b, and the heated air is sent to the processing chamber 2a by the blower unit 4 so that the temperature in the processing chamber 2a is increased. Is raised above the temperature of the humidified water. Then, the air in the processing chamber 2a whose temperature is higher than that of the humidified water flows into the air conditioning chamber 2b, hits the side wall 12c of the humidifying tray 12, and then flows upward along the side wall 12c in the air conditioning chamber 2b.

この際、前記側壁１２ｃを挟んで加湿皿１２の内外で温度差が生じ、それに伴って、熱交換促進部１６にヒートパイプ現象が生じる。具体的には、熱交換促進部１６のうち加湿皿１２の外部に配置された側の端部近傍の内部で作動流体が蒸発するとともに、その蒸発した作動流体が熱交換促進部１６のうち加湿皿１２内に配置された側の端部近傍の内部で凝縮し、この作動流体の蒸発と凝縮の循環が熱交換促進部１６の内部で生じる。このヒートパイプ現象が生じることによって、処理室２ａの空気の熱が熱交換促進部１６を介して加湿皿１２に溜められた加湿水に供給されて加湿水が加熱される。これにより、加湿水の蒸発が促進されて空気が加湿される。   At this time, a temperature difference occurs between the inside and outside of the humidifying pan 12 with the side wall 12c interposed therebetween, and accordingly, a heat pipe phenomenon occurs in the heat exchange promoting portion 16. Specifically, the working fluid evaporates inside the heat exchange promoting unit 16 in the vicinity of the end located on the outside of the humidifying tray 12, and the evaporated working fluid is humidified in the heat exchange promoting unit 16. Condensation occurs in the vicinity of the end portion on the side arranged in the dish 12, and evaporation and condensation of the working fluid occur inside the heat exchange promotion unit 16. Due to the occurrence of this heat pipe phenomenon, the heat of the air in the processing chamber 2a is supplied to the humidified water stored in the humidifying tray 12 via the heat exchange promoting portion 16 to heat the humidified water. Thereby, evaporation of humidification water is accelerated | stimulated and air is humidified.

そして、ヒートパイプ現象が生じている熱交換促進部１６では、加湿皿１２の外部に配置された部分において作動流体が蒸発している箇所の外面温度が処理室２ａから空調室２ｂに流れ込んだ空気の露点、すなわち処理室２ａ内の空気の露点に略等しくなる。この現象は、本願発明者が行ったヒートパイプの作動流体が蒸発している箇所の温度を実測する実験の結果から判明したものである。この実験は、恒温恒湿槽において、ヒートパイプを断熱壁で仕切られた槽内の空間と槽外の空間とに跨るようにその断熱壁を貫通させて設置し、槽内の空間を槽外の空間よりも高温にしてヒートパイプに完全にヒートパイプ現象が生じている条件で行った。この実験において、ヒートパイプのうち槽内に配置された部分で作動流体が蒸発する箇所の外面温度を温度センサによって実測するとともに、恒温恒湿槽の装置側で槽内の温度及び相対湿度を測定し、さらに、この測定した槽内の温度及び相対湿度から槽内の空気の露点を算出した。これらの測定結果及び算出結果の経時変化が図３に示されている。この図３に示す結果から、ヒートパイプ現象が生じているヒートパイプにおいて作動流体が蒸発する部分の外面温度は、槽内の空気の露点、すなわち高温側の空間の露点に略等しくなることが判る。   And in the heat exchange promotion part 16 in which the heat pipe phenomenon has occurred, the outer surface temperature of the portion where the working fluid is evaporated in the portion arranged outside the humidifying tray 12 flows into the air conditioning chamber 2b from the processing chamber 2a. Is substantially equal to the dew point of the air in the processing chamber 2a. This phenomenon has been found from the results of experiments conducted by the inventors of the present application to actually measure the temperature at the location where the working fluid of the heat pipe has evaporated. In this constant temperature and humidity chamber, the heat pipe is installed through the heat insulating wall so as to straddle the space inside the tank partitioned by the heat insulating wall and the space outside the tank. The heat pipe was completely heated and the heat pipe phenomenon occurred completely. In this experiment, the surface temperature of the part where the working fluid evaporates in the part of the heat pipe that is disposed in the tank is measured by a temperature sensor, and the temperature and relative humidity in the tank are measured on the device side of the constant temperature and humidity chamber. Furthermore, the dew point of the air in the tank was calculated from the measured temperature and relative humidity in the tank. The time course of these measurement results and calculation results is shown in FIG. From the results shown in FIG. 3, it can be seen that the outer surface temperature of the portion where the working fluid evaporates in the heat pipe in which the heat pipe phenomenon occurs is substantially equal to the dew point of the air in the tank, that is, the dew point of the space on the high temperature side. .

このように熱交換促進部１６のうち作動流体が蒸発する箇所の外面温度が処理室２ａの空気の露点に略等しくなった後、上記のように熱交換促進部１６により加湿皿１２に溜められた加湿水へ熱が搬送されてその加湿水の温度が処理室２ａ内の空気の露点に略等しい温度まで上昇すると、熱交換促進部１６にヒートパイプ現象が生じなくなり、熱の搬送が停止される。すなわち、加湿水の温度は、熱交換促進部１６の機能により処理室２ａ内の空気の露点付近に保持され、蒸発可能な状態に保たれる。   As described above, after the outer surface temperature of the portion where the working fluid evaporates in the heat exchange promoting portion 16 becomes substantially equal to the dew point of the air in the processing chamber 2a, the heat exchange promoting portion 16 accumulates in the humidifying tray 12 as described above. When heat is transferred to the humidified water and the temperature of the humidified water rises to a temperature substantially equal to the dew point of the air in the processing chamber 2a, the heat pipe phenomenon does not occur in the heat exchange promoting part 16, and the heat transfer is stopped. The That is, the temperature of the humidified water is maintained in the vicinity of the dew point of the air in the processing chamber 2a by the function of the heat exchange promoting unit 16, and is kept in an evaporable state.

なお、空気の加湿を急ぐ場合、すなわち処理室２ａの湿度を急速に上昇させる場合には、上記熱交換促進部１６による熱搬送に加えてヒータ１４により加湿水を加熱し、加湿水の蒸発をより促進させる。   In addition, when the humidification of the air is urgently, that is, when the humidity of the processing chamber 2a is rapidly increased, the humidification water is heated by the heater 14 in addition to the heat transfer by the heat exchange promoting unit 16 to evaporate the humidification water. Promote more.

また、処理室２ａ内を高温低湿条件に調整する場合、すなわち処理室２ａ内を加湿水よりも高温に設定するとともに低湿状態にする場合には、上記と同様にして加熱部８ａによって空気が加熱されて処理室２ａ内が加湿水よりも高い温度まで昇温され、このことが前記空気温度検出部による検出温度と前記加湿水温度検出部１８による検出温度とから判断される。このように処理室２ａ内が加湿水よりも高い温度まで昇温されると、上記と同様に熱交換促進部１６にヒートパイプ現象が生じ、その熱交換促進部１６による熱搬送によって加湿水の蒸発が促進されて空気が加湿されるが、冷却部８ｂによってその空気が除湿され、空調室２ｂから処理室２ａへ送風される空気は低湿状態とされる。このときヒータ１４は稼働されない。   When the inside of the processing chamber 2a is adjusted to a high temperature and low humidity condition, that is, when the inside of the processing chamber 2a is set to a temperature higher than that of the humidified water and is set to a low humidity state, the air is heated by the heating unit 8a in the same manner as described above. Then, the temperature in the processing chamber 2a is raised to a temperature higher than the humidified water, and this is determined from the temperature detected by the air temperature detector and the temperature detected by the humidified water temperature detector 18. As described above, when the temperature in the processing chamber 2a is raised to a temperature higher than the humidified water, a heat pipe phenomenon occurs in the heat exchange promoting unit 16 as described above, and the humidified water is transported by the heat exchange promoting unit 16 as described above. Evaporation is promoted to humidify the air, but the air is dehumidified by the cooling unit 8b, and the air blown from the air conditioning chamber 2b to the processing chamber 2a is in a low humidity state. At this time, the heater 14 is not operated.

また、処理室２ａを低温高湿条件に調整する場合、すなわち処理室２ａ内を加湿水よりも低温に設定するとともにその処理室２ａ内を高湿状態にする場合には、冷却部８ｂによって空気が冷却されて処理室２ａ内が加湿水よりも低い温度まで降温され、このことが前記空気温度検出部による検出温度と前記加湿水温度検出部１８による検出温度とから判断される。そして、このように処理室２ａ内の空気の温度が加湿水の温度よりも低い温度にまで下げられた場合には、熱交換促進部１６にヒートパイプ現象は生じず、ヒータ１４が稼働されてそのヒータ１４により加湿水が加熱される。これにより、加湿水の蒸発が促進されて空調室２ｂから処理室２ａへ送風される空気が加湿され、処理室２ａが高湿状態にされる。   When the processing chamber 2a is adjusted to a low temperature and high humidity condition, that is, when the processing chamber 2a is set to a temperature lower than the humidified water and the processing chamber 2a is set to a high humidity state, the cooling unit 8b Then, the temperature in the processing chamber 2a is lowered to a temperature lower than that of the humidified water, which is determined from the temperature detected by the air temperature detector and the temperature detected by the humidified water temperature detector 18. When the temperature of the air in the processing chamber 2a is lowered to a temperature lower than the temperature of the humidified water as described above, the heat pipe phenomenon does not occur in the heat exchange promoting part 16, and the heater 14 is operated. The humidified water is heated by the heater 14. Thereby, evaporation of humidified water is promoted, the air blown from the air conditioning chamber 2b to the processing chamber 2a is humidified, and the processing chamber 2a is brought into a high humidity state.

また、処理室２ａを低温低湿条件に調整する場合、すなわち処理室２ａ内を加湿水よりも低温に設定するとともにその処理室２ａ内を低湿状態にする場合には、前記低温高湿条件の場合と同様にして冷却部８ｂにより空気が冷却されて処理室２ａ内が加湿水よりも低い温度まで降温され、このことが前記空気温度検出部による検出温度と前記加湿水温度検出部１８による検出温度とから判断される。そして、このように処理室２ａ内の空気の温度が加湿水の温度よりも低い温度にまで下げられた場合には、熱交換促進部１６にヒートパイプ現象は生じない。また、ヒータ１４は稼働されず、加湿水は空気によって冷やされて蒸発が抑制されるため、空調室２ｂから処理室２ａへ送風される空気は低湿状態とされる。   Further, when the processing chamber 2a is adjusted to a low temperature and low humidity condition, that is, when the processing chamber 2a is set to a temperature lower than the humidified water and the processing chamber 2a is set to a low humidity state, In the same manner as described above, air is cooled by the cooling unit 8b and the temperature in the processing chamber 2a is lowered to a temperature lower than that of the humidified water. This is the detected temperature by the air temperature detecting unit and the detected temperature by the humidified water temperature detecting unit 18. It is judged from. And when the temperature of the air in the processing chamber 2a is lowered to a temperature lower than the temperature of the humidified water in this way, the heat pipe phenomenon does not occur in the heat exchange promoting part 16. Further, the heater 14 is not operated, and the humidified water is cooled by the air and the evaporation is suppressed, so that the air blown from the air conditioning chamber 2b to the processing chamber 2a is in a low humidity state.

以上説明したように、第１実施形態では、加湿部６の加湿皿１２が空調室２ｂ内に着脱可能に配置されるため、空調室２ｂから処理槽２の外部へ加湿皿１２を取り出してそのメンテナンスを行うことができる。このため、従来のように加湿水収容部が試験槽の床面に一体的に形成されていて試験槽内でその加湿水収容部のメンテナンスを行わなければならない場合に比べて、加湿皿１２のメンテナンスにかかる作業負担を軽減することができる。   As described above, in the first embodiment, since the humidifying tray 12 of the humidifying unit 6 is detachably disposed in the air conditioning chamber 2b, the humidifying tray 12 is taken out from the air conditioning chamber 2b to the outside of the processing tank 2. Maintenance can be performed. For this reason, compared with the case where the humidification water accommodating part is integrally formed in the floor surface of a test tank like the conventional, and the maintenance of the humidification water accommodating part must be performed in a test tank, The workload for maintenance can be reduced.

また、従来のように試験槽の床面の一部を凹ませることによって加湿水収容部が形成される場合には、空気が加湿皿１２内の水面上を流れやすいことから、例えば、槽内を高温高湿条件に調整する場合、すなわち槽内の温度を加湿水の温度よりも高温に設定した場合に、槽内を循環する空気の加湿が促進される。これに対し、加湿皿１２を、その側壁１２ｃの外面に処理室２ａから空調室２ｂへ流れ込んだ空気が接触する位置で空調室２ｂ内に配置した場合には、空調室２ｂへ流れ込んだ空気が加湿皿１２の側壁１２ｃの外面に沿う方向に流れるため、加湿水と空気の流れとが接触しにくく、空気の加湿が促進されにくい。しかしながら、第１実施形態では、熱交換促進部１６が、処理室２ａから空調室２ｂへ流れ込んだ空気が接触する位置で加湿皿１２の内外に跨るように設けられているため、処理室２ａから空調室２ｂに流れ込む空気が加湿皿１２に溜められた加湿水よりも昇温されると熱交換促進部１６にヒートパイプ現象が生じ、空調室２ｂに流れ込んだ空気の熱が熱交換促進部１６により加湿水へ搬送されて加湿水の蒸発が促進される。これにより、空気の加湿が促進され、その結果、空気が加湿皿１２の側壁１２ｃの外面に沿う方向に流れることに起因する空気の加湿しにくさをカバーすることができる。   Further, when the humidified water storage portion is formed by recessing a part of the floor surface of the test tank as in the prior art, since air easily flows on the water surface in the humidifying dish 12, for example, in the tank Is adjusted to a high temperature and high humidity condition, that is, when the temperature in the tank is set higher than the temperature of the humidified water, humidification of the air circulating in the tank is promoted. On the other hand, when the humidifying tray 12 is disposed in the air conditioning chamber 2b at a position where the air flowing into the air conditioning chamber 2b from the processing chamber 2a contacts the outer surface of the side wall 12c, the air flowing into the air conditioning chamber 2b is Since it flows in the direction along the outer surface of the side wall 12c of the humidifying tray 12, it is difficult for the humidified water and the air flow to come into contact with each other, and the humidification of the air is not easily promoted. However, in 1st Embodiment, since the heat exchange promotion part 16 is provided so that it may straddle the inside and outside of the humidification dish 12 in the position where the air which flowed into the air-conditioning room 2b from the processing room 2a contacts, from the processing room 2a When the temperature of the air flowing into the air conditioning chamber 2 b is raised from the humidified water stored in the humidifying tray 12, a heat pipe phenomenon occurs in the heat exchange promoting unit 16, and the heat of the air flowing into the air conditioning chamber 2 b is heat exchange promoting unit 16. Is conveyed to the humidified water to promote the evaporation of the humidified water. Thereby, humidification of the air is promoted, and as a result, it is possible to cover the difficulty of humidifying the air due to the air flowing in the direction along the outer surface of the side wall 12c of the humidifying tray 12.

また、第１実施形態では、ヒートパイプ現象が生じている熱交換促進部１６のうち加湿皿１２の外部に配置された部分において作動流体が蒸発する箇所の外面温度が処理室２ａの空気の露点に略等しくなるため、この熱交換促進部１６により加湿皿１２に溜められた加湿水へ熱が搬送されてその加湿水の温度が処理室２ａ内の空気の露点付近まで上昇すると、熱交換促進部１６にヒートパイプ現象が生じなくなり、熱の搬送が停止される。従って、第１実施形態では、加湿皿１２に溜められた加湿水の温度を処理室２ａ内の空気の露点付近に保持して、加湿水を蒸発可能な状態に保つことができる。   Moreover, in 1st Embodiment, the outer surface temperature of the location where a working fluid evaporates in the part arrange | positioned outside the humidification dish 12 among the heat exchange promotion parts 16 in which the heat pipe phenomenon has arisen is the dew point of the air of the process chamber 2a. Therefore, when the heat is transferred to the humidified water stored in the humidifying tray 12 by the heat exchange promoting unit 16 and the temperature of the humidified water rises to near the dew point of the air in the processing chamber 2a, the heat exchange is promoted. The heat pipe phenomenon does not occur in the portion 16, and the heat transfer is stopped. Therefore, in the first embodiment, the temperature of the humidified water stored in the humidifying tray 12 can be maintained near the dew point of the air in the processing chamber 2a, and the humidified water can be kept in a vaporizable state.

また、第１実施形態のような熱交換促進部１６が設けられていることによって、処理室２ａの空気と加湿水との熱交換が素早く行われるため、熱交換促進部１６が設けられていない場合に比べて、加湿水の温度をより早く処理室２ａ内の空気の露点付近にして加湿水をより早く蒸発可能な状態にすることができる。   Moreover, since the heat exchange promotion part 16 as in the first embodiment is provided, heat exchange between the air in the processing chamber 2a and the humidified water is quickly performed, and thus the heat exchange promotion part 16 is not provided. Compared to the case, the temperature of the humidified water can be set earlier to the vicinity of the dew point of the air in the processing chamber 2a so that the humidified water can be evaporated more quickly.

また、第１実施形態では、処理室２ａの空気の熱を熱交換促進部１６によって加湿水に供給して加湿水を加熱することができるため、ヒータ１４による加熱量を低減もしくはヒータ１４による加熱を停止させても空気の加湿を開始することができるとともに加湿水の温度を処理室２ａの露点付近に維持することができる。このため、第１実施形態では、ヒータ１４による加湿水の加熱にかかるエネルギー及びそのコストを削減することができる。   In the first embodiment, since the heat of the air in the processing chamber 2a can be supplied to the humidified water by the heat exchange promoting unit 16 to heat the humidified water, the heating amount by the heater 14 is reduced or the heating by the heater 14 is performed. Even when the operation is stopped, the humidification of the air can be started and the temperature of the humidified water can be maintained near the dew point of the processing chamber 2a. For this reason, in 1st Embodiment, the energy concerning the heating of humidification water by the heater 14, and its cost can be reduced.

また、第１実施形態では、熱交換促進部１６のうち加湿皿１２の外部に配置された側の端部が加湿皿１２の内部に配置された側の端部よりも低い位置に配置されているため、熱交換促進部１６のうち加湿皿１２の外部に配置された側の端部と加湿皿１２の内部に配置された側の端部とが同じ高さに配置されている場合に比べて、熱交換促進部１６の内部での作動流体の蒸発と凝縮の循環をより効率よく行わせることができる。その結果、熱交換促進部１６による加湿水への熱搬送の効率を向上させることができ、より素早く加湿水を加熱して空気の加湿を行うことができる。   Moreover, in 1st Embodiment, the edge part by the side arrange | positioned outside the humidification dish 12 among the heat exchange promotion parts 16 is arrange | positioned in the position lower than the edge part by the side arrange | positioned inside the humidification dish 12. FIG. Therefore, compared with the case where the end part of the heat exchange promotion part 16 on the side arranged outside the humidifying dish 12 and the end part on the side arranged inside the humidifying dish 12 are arranged at the same height. Thus, the working fluid can be more efficiently circulated and evaporated in the heat exchange promoting portion 16. As a result, the efficiency of heat transfer to the humidified water by the heat exchange promoting unit 16 can be improved, and the humidified water can be heated more quickly to humidify the air.

また、第１実施形態では、熱交換促進部１６が貫通するように設けられた加湿皿１２の側壁１２ｃが断熱材を備えた断熱壁からなるので、その側壁１２ｃを挟んで加湿皿１２の内外で温度差を確実に保持することができ、熱交換促進部１６に確実にヒートパイプ現象を生じさせることができる。   Moreover, in 1st Embodiment, since the side wall 12c of the humidification dish 12 provided so that the heat exchange promotion part 16 might penetrate consists of a heat insulation wall provided with the heat insulating material, the inside and outside of the humidification dish 12 on both sides of the side wall 12c Thus, the temperature difference can be reliably maintained, and the heat pipe phenomenon can be surely generated in the heat exchange promoting portion 16.

（第２実施形態）
次に、図４を参照して、本発明の第２実施形態による調温調湿装置について説明する。 (Second Embodiment)
Next, with reference to FIG. 4, the temperature control apparatus by 2nd Embodiment of this invention is demonstrated.

この第２実施形態による調温調湿装置では、上記第１実施形態と異なり、加湿部６が前記熱交換促進部１６を備えておらず、加湿皿１２自体がヒートパイプ現象を生じ得るように構成されている。   In the temperature and humidity control apparatus according to the second embodiment, unlike the first embodiment, the humidifying unit 6 does not include the heat exchange promoting unit 16, and the humidifying dish 12 itself can cause a heat pipe phenomenon. It is configured.

具体的には、この第２実施形態による加湿部６の加湿皿１２は、図４に示すように、その底壁１２ａ及び側壁１２ｂが中空に形成されており、その内部に作動流体が封入されている。そして、この加湿皿１２は、空調室２ｂ内に着脱可能に配置されており、空調室２ｂ内の床面２ｇ上に設置された支持部材３０上に載置されている。この加湿皿１２は、支持部材３０によって支持されて空調室２ｂ内の床面２ｇから上方に離間した位置で水平に配置されている。   Specifically, as shown in FIG. 4, the humidifying tray 12 of the humidifying unit 6 according to the second embodiment has a bottom wall 12 a and a side wall 12 b that are hollow, and a working fluid is enclosed therein. ing. And this humidification dish 12 is arrange | positioned so that attachment or detachment is possible in the air conditioning chamber 2b, and is mounted on the support member 30 installed on the floor surface 2g in the air conditioning chamber 2b. The humidifying tray 12 is supported by the support member 30 and is horizontally disposed at a position spaced upward from the floor surface 2g in the air conditioning chamber 2b.

支持部材３０は、載置部３０ａと、脚部３０ｂとを有している。載置部３０ａは、その上に加湿皿１２が載置される部分であり、水平に配置されている。この載置部３０ａは、多孔板や網目状の部材からなり、上下に貫通する多数の孔部３０ｃが設けられている。この載置部３０ａの各孔部３０ｃを通じて上下に通気可能となっている。脚部３０ｂは、載置部３０ａを空調室２ｂ内の床面２ｇから上方に離間させた状態で支えるものであり、載置部３０ａのうち互いに離間し、かつ、その載置部３０ａの端縁近傍に位置する４箇所にそれぞれ取り付けられてその載置部３０ａを床面２ｇ上で水平に支えている。   The support member 30 has a placement portion 30a and leg portions 30b. The placing portion 30a is a portion on which the humidifying tray 12 is placed, and is placed horizontally. The mounting portion 30a is made of a perforated plate or a net-like member, and is provided with a large number of holes 30c penetrating vertically. It is possible to vent up and down through each hole 30c of the mounting portion 30a. The leg portion 30b supports the mounting portion 30a in a state of being spaced upward from the floor surface 2g in the air-conditioning chamber 2b. The leg portions 30b are spaced apart from each other in the mounting portion 30a and end of the mounting portion 30a. It is attached to each of four locations located in the vicinity of the edge and horizontally supports the placement portion 30a on the floor surface 2g.

この第２実施形態による調温調湿装置の上記以外の構成は、上記第１実施形態による調温調湿装置の構成と同様である。   The other configuration of the temperature control device according to the second embodiment is the same as the configuration of the temperature control device according to the first embodiment.

そして、この第２実施形態の調温調湿装置において、処理室２ａ内の空気の温度が加湿皿１２に溜められた加湿水の温度よりも低く、その処理室２ａ内を加湿水よりも高温に設定するとともにその処理室２ａ内を加湿する場合には、加湿水よりも温度の高い空気が処理室２ａから空調室２ｂへ流れ込み、その空気は、加湿皿１２と仕切壁２ｃとの間を通って上方へ流れる一方、支持部材３０の脚部３０ｂの間を通って載置部３０ａの下方の空間にも流れる。   And in the temperature control apparatus of this 2nd Embodiment, the temperature of the air in the process chamber 2a is lower than the temperature of the humidification water stored in the humidification dish 12, and the inside of the process chamber 2a is higher than humidification water. When the inside of the processing chamber 2a is humidified, air having a temperature higher than that of the humidified water flows from the processing chamber 2a to the air conditioning chamber 2b, and the air flows between the humidifying tray 12 and the partition wall 2c. While passing through and upward, it passes between the leg portions 30b of the support member 30 and also flows into the space below the placement portion 30a.

この載置部３０ａの下方の空間に流れ込んだ空気の一部は、載置部３０ａに設けられた多数の孔部３０ｃを通って加湿皿１２の底面に接触する。それによって、加湿皿１２にヒートパイプ現象が生じ、加湿皿１２のうち特に底壁１２ａの内部において、当該加湿皿１２の外面（底面）寄りの領域で作動流体が蒸発するとともに、その蒸発した作動流体が当該加湿皿１２の内面（加湿水と接触する面）寄りの領域で凝縮し、この作動流体の蒸発と凝縮の循環が加湿皿１２の内部で生じる。このヒートパイプ現象が生じることによって、処理室２ａから空調室２ｂに流れ込んだ空気の熱が加湿皿１２によりその加湿皿１２に溜められた加湿水へ搬送されて加湿水が加熱される。これにより、加湿水の蒸発が促進されて空調室２ｂの空気が加湿される。   Part of the air that has flowed into the space below the mounting portion 30a comes into contact with the bottom surface of the humidifying dish 12 through a large number of holes 30c provided in the mounting portion 30a. As a result, a heat pipe phenomenon occurs in the humidifying tray 12, and the working fluid evaporates in the area near the outer surface (bottom surface) of the humidifying tray 12 in the humidifying tray 12, particularly in the bottom wall 12a. The fluid condenses in a region near the inner surface of the humidifying dish 12 (the surface in contact with the humidifying water), and the circulation of evaporation and condensation of the working fluid occurs inside the humidifying dish 12. When this heat pipe phenomenon occurs, the heat of the air flowing from the processing chamber 2a to the air conditioning chamber 2b is transferred to the humidified water stored in the humidifying tray 12 by the humidifying tray 12, and the humidified water is heated. Thereby, evaporation of humidification water is accelerated | stimulated and the air of the air-conditioning room 2b is humidified.

この第２実施形態の調温調湿装置において処理室２ａの温湿度を調整する際の上記以外の動作は、上記第１実施形態の調温調湿装置において前記熱交換促進部１６でのヒートパイプ現象を加湿皿１２でのヒートパイプ現象に置き換えた場合の動作と同様である。   In the temperature and humidity control apparatus of the second embodiment, the operation other than the above when adjusting the temperature and humidity of the processing chamber 2a is the heat in the heat exchange promoting unit 16 in the temperature control and humidity apparatus of the first embodiment. The operation is the same as when the pipe phenomenon is replaced with the heat pipe phenomenon in the humidifying tray 12.

以上説明したように、この第２実施形態では、加湿皿１２が空調室２ｂ内に着脱可能に配置されているため、上記第１実施形態と同様、加湿皿１２のメンテナンスにかかる作業負担を軽減することができる。   As described above, in the second embodiment, since the humidifying tray 12 is detachably disposed in the air conditioning chamber 2b, the work load on the maintenance of the humidifying tray 12 is reduced as in the first embodiment. can do.

そして、この第２実施形態では、上記第１実施形態における前記熱交換促進部１６のヒートパイプ現象の代わりに加湿皿１２におけるヒートパイプ現象が同様に作用し、そのヒートパイプ現象に起因する上記第１実施形態の効果と同様の効果を得ることができる。   And in this 2nd Embodiment, the heat pipe phenomenon in the humidification dish 12 acts similarly instead of the heat pipe phenomenon of the said heat exchange promotion part 16 in the said 1st Embodiment, The said 1st resulting from the heat pipe phenomenon The same effect as that of the embodiment can be obtained.

なお、今回開示された実施形態は、すべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した実施形態の説明ではなく特許請求の範囲によって示され、さらに特許請求の範囲と均等の意味及び範囲内でのすべての変更が含まれる。   The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiments but by the scope of claims for patent, and further includes meanings equivalent to the scope of claims for patent and all modifications within the scope.

例えば、図５に示す上記第１実施形態の第１変形例のように、熱交換促進部１６は、水平に延びる姿勢で配置されていてもよい。すなわち、熱交換促進部１６のうち加湿皿１２の外部に配置された側の端部と加湿皿１２の内部に配置された側の端部とは、同じ高さに配置されていてもよい。   For example, as in the first modification of the first embodiment shown in FIG. 5, the heat exchange promotion unit 16 may be arranged in a posture that extends horizontally. That is, the end of the heat exchange promoting unit 16 on the side arranged outside the humidifying dish 12 and the end of the side arranged inside the humidifying dish 12 may be arranged at the same height.

この第１変形例のような構成であっても、処理室２ａの空気の温度を加湿水の温度よりも高い温度に設定した場合には、熱交換促進部１６のうち加湿皿１２の外部に配置された側の部分の内部で作動流体が蒸発するとともにその蒸発した作動流体が熱交換促進部１６のうち加湿皿１２の内部に配置された部分の内部で凝縮するヒートパイプ現象が生じ、この熱交換促進部１６によって処理室２ａから空調室２ｂへ流れる空気から加湿水へ熱が搬送されて、加湿水の昇温が促進される。   Even if it is the structure like this 1st modification, when the temperature of the air of the process chamber 2a is set to the temperature higher than the temperature of humidification water, it is outside the humidification pan 12 in the heat exchange promotion part 16. The working fluid evaporates inside the portion on the arranged side, and the evaporated working fluid condenses inside the portion arranged in the humidifying tray 12 in the heat exchange promoting portion 16, and this phenomenon occurs. Heat is transferred from the air flowing from the processing chamber 2a to the air conditioning chamber 2b to the humidified water by the heat exchange promoting unit 16, and the temperature rise of the humidified water is promoted.

さらに、この第１変形例では、処理室２ａ内の温度を降下させる場合に、処理室２ａの空気の温度を加湿水の温度よりも低い温度に設定すると、熱交換促進部１６のうち加湿皿１２の内部に配置された部分で作動流体が蒸発するとともにその蒸発した作動流体が熱交換促進部１６のうち加湿皿１２の外部に配置された部分で凝縮するヒートパイプ現象が生じ、この熱交換促進部１６によって加湿皿１２に溜められた加湿水から外部へ熱が搬送されて、加湿水の降温が促進される。従って、この第１変形例では、処理室２ａの温度と湿度を共に上昇させる場合に、処理室２ａの空気の昇温を利用して加湿水を素早く昇温させ、加湿部６による空気の加湿をより早く行わせることができるとともに、処理室２ａの温度と湿度を共に降下させる場合に、処理室２ａの空気の降温を利用して加湿水を素早く降温させ、加湿部６による空気の加湿をより早く低減させることができる。   Furthermore, in this first modified example, when the temperature in the processing chamber 2a is lowered, if the temperature of the air in the processing chamber 2a is set to a temperature lower than the temperature of the humidifying water, the humidifying dish in the heat exchange promoting part 16 A heat pipe phenomenon occurs in which the working fluid evaporates at a portion disposed inside the heat exchanger 12 and the evaporated working fluid condenses at a portion disposed outside the humidifying tray 12 in the heat exchange promoting portion 16. Heat is transferred to the outside from the humidified water stored in the humidifying tray 12 by the promoting unit 16, and the temperature drop of the humidified water is promoted. Therefore, in this first modification, when both the temperature and humidity of the processing chamber 2a are increased, the humidified water is quickly heated using the temperature increase of the air in the processing chamber 2a, and the humidification of the air by the humidifying unit 6 is performed. In the case where both the temperature and humidity of the processing chamber 2a are lowered, the temperature of the processing chamber 2a is used to quickly cool the humidified water, and the humidifying unit 6 humidifies the air. It can be reduced more quickly.

また、図６及び図７に示す上記第１実施形態の第２変形例のように、板状に形成された複数の熱交換促進部２０が加湿皿１２の側壁１２ｃに設けられていてもよい。   Moreover, the several heat exchange promotion part 20 formed in plate shape may be provided in the side wall 12c of the humidification dish 12 like the 2nd modification of the said 1st Embodiment shown in FIG.6 and FIG.7. .

具体的には、この第２変形例による熱交換促進部２０は、中空の平板状に形成されたヒートレーンからなり、その内部に作動流体が封入されている。処理室２ａから空調室２ｂに流れ込んだ空気が接触する加湿皿１２の側壁１２ｃには、上下方向に延びるとともに加湿皿１２の内外を貫通する細長い貫通孔１２ｈが水平方向に所定間隔で複数形成されており、この各貫通孔１２ｈに熱交換促進部２０のヒートレーンがそれぞれ挿通されて加湿皿１２の内外に跨るように設けられている。これにより、各熱交換促進部２０のうち加湿皿１２の外部に配置された部分及び加湿皿１２内に配置された部分は、立てられた姿勢で配置されているとともに、互いに平行かつ所定間隔で水平方向に並んで配置されている。   Specifically, the heat exchange promoting unit 20 according to the second modified example includes a heat lane formed in a hollow flat plate shape, and a working fluid is sealed therein. A plurality of elongate through holes 12h extending in the vertical direction and penetrating the inside and outside of the humidifying dish 12 are formed at predetermined intervals in the horizontal direction on the side wall 12c of the humidifying dish 12 with which the air flowing into the air conditioning chamber 2b from the processing chamber 2a contacts. The heat lanes of the heat exchange promoting part 20 are respectively inserted into the through holes 12h so as to straddle the inside and outside of the humidifying dish 12. Thereby, the part arrange | positioned outside the humidification dish 12 among each heat exchange promotion part 20 and the part arrange | positioned in the humidification dish 12 are arrange | positioned in the standing attitude | position, and are mutually parallel and with a predetermined space | interval. They are arranged side by side in the horizontal direction.

この第２変形例のように、熱交換促進部２０が、処理室２ａから空調室２ｂに流れ込んだ空気が接触する加湿皿１２の側壁１２ｃに複数設けられていれば、熱交換促進部が１つしか設けられていない場合に比べて、加湿皿１２に溜められた加湿水全体をより早く昇温させることができる。   If a plurality of heat exchange promoting portions 20 are provided on the side wall 12c of the humidifying tray 12 that comes into contact with the air flowing into the air conditioning chamber 2b from the processing chamber 2a as in the second modification, the heat exchange promoting portion 1 Compared with the case where only one is provided, the entire humidified water stored in the humidifying tray 12 can be heated more quickly.

ところで、熱交換促進部を複数設ける構成としては、上記第１実施形態のような直棒状の熱交換促進部１６を加湿皿１２の側壁１２ｃから突出するように複数設けてもよい。しかし、この場合には、加湿皿１２の側壁１２ｃに接触する空気の流れは乱流の状態であり、その乱流の状態の空気から各熱交換促進部１６のうち加湿皿１２の外部に配置された部分へ付与される熱量はそれぞれ異なってしまう。   By the way, as a structure which provides two or more heat exchange promotion parts, you may provide two or more so that the straight-bar-shaped heat exchange promotion part 16 like the said 1st Embodiment may protrude from the side wall 12c of the humidification dish 12. As shown in FIG. However, in this case, the air flow contacting the side wall 12c of the humidifying tray 12 is in a turbulent state, and is arranged outside the humidifying tray 12 in each heat exchange promoting portion 16 from the turbulent air. The amount of heat applied to the applied portions will be different.

これに対して、この第２変形例のように各熱交換促進部２０のうち加湿皿１２の外部に配置された部分がそれぞれ板状に形成されているとともに互いに平行かつ所定間隔で並んで配置されていれば、処理室２ａから空調室２ｂに流れ込んで加湿皿１２の側壁１２ｃに接触する空気がこれらの熱交換促進部２０によって整流され、その整流された空気から各熱交換促進部２０に付与される熱量が均一化される。その結果、各熱交換促進部２０によって加湿水へ搬送される熱量が均一化されるため、加湿皿１２に溜められた加湿水全体をより均一に昇温させることができる。従って、この第２変形例では、加湿皿１２に溜められた加湿水全体をより早くかつより均一に昇温させることができる。   On the other hand, as in the second modified example, portions of each heat exchange promoting portion 20 arranged outside the humidifying dish 12 are each formed in a plate shape and arranged in parallel with each other at a predetermined interval. If this is done, the air that flows into the air conditioning chamber 2b from the processing chamber 2a and contacts the side wall 12c of the humidifying tray 12 is rectified by these heat exchange promoting portions 20, and the rectified air is passed to each heat exchange promoting portion 20 The amount of heat applied is made uniform. As a result, since the amount of heat transferred to the humidified water by each heat exchange promoting unit 20 is made uniform, the entire humidified water stored in the humidifying tray 12 can be heated more uniformly. Therefore, in this second modification, the entire humidified water stored in the humidifying tray 12 can be heated more quickly and more uniformly.

また、加湿皿１２を載置する面は、空調室２ｂ内の床面２ｇに限られない。例えば、図８に示す上記第１実施形態の第３変形例のように、空調室２ｂ内に支持部材４０が設置されていてその支持部材４０の上面に加湿皿１２が載置されていてもよい。従って、加湿皿１２は、空調室２ｂの床面２ｇから持ち上げられた状態で下側連通部２ｅから上側にずれた位置に配置されていてもよい。なお、加湿皿１２を床面２ｇから持ち上げた位置で載置するための載置面を形成する支持部材としては、床面２ｇ上に設置する台状のものに限らず、空調室２ｂを囲む処理槽２の内壁面に固定された棚状のものであってもよい。   Further, the surface on which the humidifying tray 12 is placed is not limited to the floor surface 2g in the air conditioning chamber 2b. For example, as in the third modification of the first embodiment shown in FIG. 8, the support member 40 is installed in the air conditioning chamber 2b, and the humidifying tray 12 is placed on the upper surface of the support member 40. Good. Therefore, the humidifying tray 12 may be disposed at a position shifted upward from the lower communication portion 2e while being lifted from the floor surface 2g of the air conditioning chamber 2b. In addition, as a supporting member which forms the mounting surface for mounting the humidification dish 12 in the position lifted from the floor surface 2g, it is not restricted to the trapezoid thing installed on the floor surface 2g, The air-conditioning room 2b is enclosed. A shelf shape fixed to the inner wall surface of the treatment tank 2 may be used.

また、図９に示す上記第１実施形態の第４変形例のように、熱交換促進部１６は、加湿皿１２の底壁１２ａを貫通して当該加湿皿１２の内外に跨って設けられていてもよい。なお、この第４変形例における底壁１２ａは、本発明の壁部の概念に含まれるものである。   Moreover, like the 4th modification of the said 1st Embodiment shown in FIG. 9, the heat exchange promotion part 16 penetrates the bottom wall 12a of the humidifying tray 12, and is provided ranging over the inside and outside of the said humidifying tray 12. As shown in FIG. May be. In addition, the bottom wall 12a in this 4th modification is included in the concept of the wall part of this invention.

具体的には、この第４変形例では、空調室２ｂ内の床面２ｇ上に設置された支持部材３０上に加湿皿１２が載置されることにより、床面２ｇから上方に離間した位置に加湿皿１２が配置されている。加湿皿１２の底壁１２ａには、上下に貫通する複数の貫通孔１２ｊがそれぞれ離間した位置に設けられており、その各貫通孔１２ｊにヒートパイプからなる熱交換促進部１６が上下方向に延びる状態でそれぞれ挿嵌されて固定されている。   Specifically, in the fourth modification, the humidifying tray 12 is placed on the support member 30 installed on the floor surface 2g in the air conditioning chamber 2b, so that the position is spaced upward from the floor surface 2g. The humidifying tray 12 is arranged in the. The bottom wall 12a of the humidifying tray 12 is provided with a plurality of through holes 12j extending vertically so as to be spaced apart from each other, and a heat exchange promoting portion 16 made of a heat pipe extends vertically in each through hole 12j. Each state is inserted and fixed.

支持部材３０は、脚部３０ｂと、載置部３０ｅとを有している。脚部３０ｂは、上記第２実施形態の支持部材３０の脚部３０ｂと同様のものであり、載置部３０ｅを空調室２ｂ内の床面２ｇから上方に離間させた状態で水平に支えている。載置部３０ｅは、平板状に形成されており、その上に加湿皿１２が載置される。この載置部３０ｅのうち加湿皿１２の底壁１２ａから下方に突出する各熱交換促進部１６に対応する位置に上下に貫通する挿通孔３０ｆがそれぞれ設けられている。   The support member 30 has a leg portion 30b and a placement portion 30e. The leg portion 30b is the same as the leg portion 30b of the support member 30 of the second embodiment, and horizontally supports the mounting portion 30e while being spaced upward from the floor surface 2g in the air conditioning chamber 2b. Yes. The mounting part 30e is formed in a flat plate shape, and the humidifying tray 12 is mounted thereon. Insertion holes 30f penetrating vertically are respectively provided at positions corresponding to the heat exchange promoting portions 16 projecting downward from the bottom wall 12a of the humidifying tray 12 in the placement portion 30e.

そして、載置部３０ｅの各挿通孔３０ｆに各熱交換促進部１６のうち加湿皿１２の外部に位置する部分が挿通されている。すなわち、各熱交換促進部１６のうち加湿皿１２の外部に位置する部分は、載置部３０ｅの挿通孔３０ｆを通って載置部３０ｅの下方の空間に突出している。この第４変形例では、処理室２ａ内の空気が加湿皿１２に溜められた加湿水よりも昇温されて、その空気が空調室２ｂに流れ込むと、この空気の一部は、支持部材３０の脚部３０ｂの間を通って載置部３０ｅの下方の空間にも流れ、その載置部３０ｅの下方の空間に突出した各熱交換促進部１６に接触する。それによって、各熱交換促進部１６にヒートパイプ現象が生じ、各熱交換促進部１６のうち加湿皿１２の底壁１２ａから下方に突出した部分の内部で作動流体が蒸発するとともに、その蒸発した作動流体が各熱交換促進部１６のうち加湿皿１２内に位置する部分の内部で凝縮する。なお、この第４変形例の場合、各熱交換促進部１６に確実にヒートパイプ現象を生じさせるために加湿皿１２の底壁１２ａは断熱材を備えた断熱壁であることが好ましい。また、載置部３０ｅは、網状等に形成されたものであってもよい。   And the part located in the exterior of the humidification dish 12 among each heat exchange promotion part 16 is penetrated by each insertion hole 30f of the mounting part 30e. That is, the part located in the exterior of the humidification pan 12 among each heat exchange promotion part 16 protrudes in the space below the mounting part 30e through the insertion hole 30f of the mounting part 30e. In the fourth modified example, when the air in the processing chamber 2a is heated to a temperature higher than the humidified water stored in the humidifying tray 12, and the air flows into the air conditioning chamber 2b, a part of the air is supported by the support member 30. It flows between the leg portions 30b and also flows into the space below the placement portion 30e, and comes into contact with each heat exchange promotion portion 16 protruding into the space below the placement portion 30e. As a result, a heat pipe phenomenon occurs in each heat exchange promoting portion 16, and the working fluid evaporates inside the portion of each heat exchange promoting portion 16 that protrudes downward from the bottom wall 12 a of the humidifying tray 12. The working fluid condenses inside the portion located in the humidifying tray 12 in each heat exchange promoting portion 16. In the case of the fourth modified example, the bottom wall 12a of the humidifying tray 12 is preferably a heat insulating wall provided with a heat insulating material in order to cause each heat exchange promoting portion 16 to reliably generate a heat pipe phenomenon. Further, the mounting portion 30e may be formed in a net shape or the like.

また、加湿水を溜める加湿水収容部は、上記した平型の加湿皿１２以外の形状のものであってもよい。例えば、内部に加湿水を収容するタンクのようなものであって加湿水が蒸発してそのタンクの外部に放散可能な開口が設けられているようなものを加湿水収容部として用いてもよい。   Further, the humidified water storage section for storing the humidified water may have a shape other than the flat humidifying dish 12 described above. For example, a tank that contains humidified water inside and that has an opening that allows the humidified water to evaporate and dissipate outside the tank may be used as the humidified water containing portion. .

また、加湿皿１２の側壁１２ｃ（１２ｂ）及び／又は底壁１２ａは、断熱材を備えていなくてもよい。   Further, the side wall 12c (12b) and / or the bottom wall 12a of the humidifying tray 12 may not include a heat insulating material.

また、図１０に示す上記第２実施形態の第１変形例のように、加湿皿１２の中空状に形成された底壁１２ａが、その上面側から加湿水を溜める空間に突出してその内部の空間が当該底壁１２ａ内の空間と繋がっている内側凸部１２ｍを備えていてもよい。これにより、加湿皿１２において上記第２実施形態で示したヒートパイプ現象が生じたときにその内側凸部１２ｍ内でも作動流体の凝縮が生じ、加湿皿１２に溜められた加湿水に対する加湿皿１２の伝熱面積を増やすことができるので、加湿水への伝熱効率を向上することができる。さらに、図１１に示す上記第２実施形態の第２変形例のように、加湿皿１２の中空状の底壁１２ａが、前記内側凸部１２ｍに加えて、その下面側から下方に突出してその内部の空間が当該底壁１２ａ内の空間と繋がっている外側凸部１２ｎを備えていてもよい。この外側凸部１２ｎにより、処理室２ａから空調室２ｂに流れ込んだ空気の熱をより効率的に加湿皿１２の底壁１２ａに与えることができる。また、加湿皿１２の中空状の底壁１２ａが、内側凸部１２ｍを備えておらず、外側凸部１２ｎのみを備えていてもよい。   Moreover, like the 1st modification of the said 2nd Embodiment shown in FIG. 10, the bottom wall 12a formed in the hollow shape of the humidification dish 12 protrudes in the space which accumulates humidified water from the upper surface side, and the inside The space may include an inner convex portion 12m connected to the space in the bottom wall 12a. As a result, when the heat pipe phenomenon shown in the second embodiment occurs in the humidifying tray 12, the working fluid condenses even in the inner convex portion 12 m, and the humidifying tray 12 with respect to the humidified water stored in the humidifying tray 12. Therefore, the heat transfer efficiency to the humidified water can be improved. Further, as in the second modification of the second embodiment shown in FIG. 11, the hollow bottom wall 12a of the humidifying tray 12 projects downward from the lower surface side in addition to the inner convex portion 12m. The inner space may include an outer convex portion 12n connected to the space in the bottom wall 12a. By the outer convex portion 12n, the heat of the air flowing into the air conditioning chamber 2b from the processing chamber 2a can be more efficiently applied to the bottom wall 12a of the humidifying tray 12. Moreover, the hollow bottom wall 12a of the humidifying tray 12 may not include the inner convex portion 12m but may include only the outer convex portion 12n.

また、加湿皿１２をヒートパイプ現象が生じ得るように構成する場合において、加湿皿の一部のみをヒートパイプ現象が生じ得るように構成してもよい。例えば、加湿皿の底壁のみを中空にしてその内部に作動流体を封入したり、加湿皿の側壁のみを中空にしてその内部に作動流体を封入したりしてもよい。   Further, when the humidifying tray 12 is configured so that the heat pipe phenomenon can occur, only a part of the humidifying tray may be configured so that the heat pipe phenomenon can occur. For example, only the bottom wall of the humidifying dish may be hollowed and the working fluid may be enclosed therein, or only the side wall of the humidifying dish may be hollowed and the working fluid may be enclosed therein.

また、加湿皿１２をヒートパイプ現象が生じ得るように構成する場合において、熱交換を促進するためのフィンを加湿皿１２から外側へ突出するように設けてもよく、また、熱交換を促進するためのフィンを加湿皿１２から内側の加湿水を溜める空間へ突出するように設けてもよい。   Further, when the humidifying tray 12 is configured so that the heat pipe phenomenon can occur, fins for promoting heat exchange may be provided so as to protrude outward from the humidifying tray 12, and heat exchange is promoted. The fins may be provided so as to protrude from the humidifying tray 12 to a space for storing the humidified water inside.

また、上記第２実施形態において、支持部材３０の載置部３０ａの下方に上向きに送風するファンを設置して、載置部３０ａの下方に流れ込んだ空気をこのファンで上向きに送風することにより、その空気が加湿皿１２の底面に良好に当たるようにしてもよい。   Moreover, in the said 2nd Embodiment, the fan which ventilates upwards below the mounting part 30a of the supporting member 30 is installed, and the air which flowed below the mounting part 30a is ventilated upward with this fan. The air may strike the bottom surface of the humidifying tray 12 satisfactorily.

また、処理槽のうち処理室が設けられた部分と空調室が設けられた部分とが別体に構成されているとともに、その処理室と空調室とがダクトで接続されており、処理室と空調室との間でダクトを通じて空気が流通可能となっていてもよい。   In addition, the portion of the processing tank in which the processing chamber is provided and the portion in which the air conditioning chamber is provided are configured separately, and the processing chamber and the air conditioning chamber are connected by a duct. Air may be circulated through the duct with the air conditioning room.

また、上記作動流体は、純水以外の液体であってもよい。   The working fluid may be a liquid other than pure water.

２ 処理槽
２ａ 処理室
２ｂ 空調室
２ｇ 床面（所定の面）
４ 送風部
６ 加湿部
８ 調温部
１２ 加湿皿（加湿水収容部）
１２ａ 底壁（壁部）
１２ｂ 側壁
１２ｃ 側壁（壁部）
１６、２０ 熱交換促進部 2 Processing tank 2a Processing chamber 2b Air-conditioning chamber 2g Floor (predetermined surface)
4 Blower 6 Humidifier 8 Temperature Controller 12 Humidifier (humidified water storage)
12a Bottom wall (wall)
12b Side wall 12c Side wall (wall part)
16, 20 Heat exchange promotion part

Claims (8)

処理対象物が収められる処理室と、前記処理室内の空気の温湿度を目標の温湿度に調整するための空調室とを有する処理槽と、前記処理室と前記空調室との間で空気を循環させる送風部と、前記空調室内の空気を加湿するための加湿部と、前記処理槽内の空間の空気を調温するための調温部とを備えた調温調湿装置であって、
前記加湿部は、前記空調室内に着脱可能に配置され、加湿水を溜める容器からなる加湿水収容部と、前記処理室から前記空調室へ流れ込んだ空気が接触する位置で前記加湿水収容部の内外に跨るように設けられ、内部に封入された作動流体が前記加湿水収容部の外部に配置された側と前記加湿水収容部の内部に配置された側とのうち一方側の内部で蒸発するとともにその蒸発した作動流体が他方側の内部で凝縮するヒートパイプ現象を生じさせ得るように構成された熱交換促進部とを有する、調温調湿装置。 A processing tank having a processing chamber in which a processing object is stored, an air conditioning chamber for adjusting the temperature and humidity of the air in the processing chamber to a target temperature and humidity, and air between the processing chamber and the air conditioning chamber A temperature and humidity control apparatus comprising a circulating air blowing unit, a humidifying unit for humidifying the air in the air-conditioned room, and a temperature adjusting unit for adjusting the temperature of the air in the processing tank,
The humidifying unit is detachably disposed in the air-conditioning chamber, and the humidifying water storage unit includes a humidifying water storage unit including a container for storing humidified water, and the humidified water storage unit at a position where the air flowing into the air-conditioning chamber from the processing chamber comes into contact. The working fluid, which is provided so as to straddle the inside and outside, is evaporated inside one side of the side disposed outside the humidified water storage unit and the side disposed inside the humidified water storage unit. And a heat exchange promoting unit configured to cause a heat pipe phenomenon in which the evaporated working fluid condenses inside the other side. 前記熱交換促進部のうち前記加湿水収容部の外部に配置された側の端部は、前記加湿水収容部の内部に配置された側の端部よりも低い位置に配置されている、請求項１に記載の調温調湿装置。   The end of the heat exchange promoting part on the side disposed outside the humidified water storage part is disposed at a position lower than the end on the side disposed inside the humidified water storage part. Item 2. The temperature and humidity control apparatus according to Item 1. 前記熱交換促進部は、前記加湿水収容部に複数設けられ、この各熱交換促進部のうち前記加湿水収容部の外部に配置された部分は、それぞれ板状に形成されているとともに互いに平行かつ所定間隔で並んで配置されている、請求項１又は２に記載の調温調湿装置。   A plurality of the heat exchange promoting portions are provided in the humidified water storage portion, and portions of the heat exchange promoting portions arranged outside the humidified water storage portion are formed in a plate shape and are parallel to each other. And the temperature control apparatus of Claim 1 or 2 arrange | positioned along with the predetermined space | interval. 前記熱交換促進部は、前記加湿水収容部の壁部を貫通して設けられ、この熱交換促進部が設けられた前記壁部は、断熱材を備えている、請求項１〜３のいずれか１項に記載の調温調湿装置。   The said heat exchange promotion part is penetrated and provided in the wall part of the said humidification water accommodating part, The said wall part in which this heat exchange promotion part was provided is equipped with the heat insulating material. The temperature-control humidity control apparatus of Claim 1. 前記熱交換促進部のうち前記加湿水収容部の外部に配置された側の端部と前記加湿水収容部の内部に配置された側の端部とは、同じ高さに配置されている、請求項１に記載の調温調湿装置。   Of the heat exchange promoting part, the end part on the side arranged outside the humidified water storage part and the end part on the side arranged inside the humidified water storage part are arranged at the same height. The temperature control humidity control apparatus of Claim 1. 処理対象物が収められる処理室と、前記処理室内の空気の温湿度を目標の温湿度に調整するための空調室とを内部に有する処理槽と、前記処理室と前記空調室との間で空気を循環させる送風部と、前記空調室内の空気を加湿するための加湿部と、前記処理槽内の空間の空気を調温するための調温部とを備えた調温調湿装置であって、
前記加湿部は、前記空調室内に着脱可能に配置され、加湿水を溜める容器からなる加湿水収容部を有し、
前記加湿水収容部は、作動流体が封入された構成であり、かつ、前記封入された作動流体が当該加湿水収容部のうち前記処理室から前記空調室へ流れ込んだ空気が接触する外面寄りの領域と当該加湿水収容部の内面寄りの領域とのいずれか一方の領域で蒸発するとともにその蒸発した作動流体が他方の領域で凝縮するヒートパイプ現象を生じ得るように構成されている、調温調湿装置。 Between a processing chamber in which a processing object is stored, an air conditioning chamber for adjusting the temperature and humidity of the air in the processing chamber to a target temperature and humidity, and between the processing chamber and the air conditioning chamber A temperature and humidity control apparatus comprising: a blower that circulates air; a humidifier that humidifies air in the air-conditioned room; and a temperature controller that regulates the temperature of the air in the processing tank. And
The humidifying unit is detachably disposed in the air-conditioning chamber, and has a humidifying water storage unit including a container for storing humidifying water,
The humidified water storage unit is configured to enclose a working fluid, and the sealed working fluid is close to the outer surface where the air that has flowed from the processing chamber to the air conditioning chamber in the humidified water storage unit contacts. The temperature control is configured to evaporate in any one of the region and the region closer to the inner surface of the humidified water storage portion and to cause a heat pipe phenomenon in which the evaporated working fluid condenses in the other region. Humidity control device. 前記加湿水収容部は、その底面と前記空調室内の床面との間に間隙が形成される位置に配置され、当該加湿水収容部の底壁が前記ヒートパイプ現象を生じ得るように構成されている、請求項６に記載の調温調湿装置。   The humidified water storage unit is disposed at a position where a gap is formed between a bottom surface of the humidified water storage unit and a floor surface of the air conditioning chamber, and the bottom wall of the humidified water storage unit is configured to generate the heat pipe phenomenon. The temperature and humidity control apparatus according to claim 6. 前記加湿水収容部の側壁が前記ヒートパイプ現象を生じ得るように構成されている、請求項６に記載の調温調湿装置。   The temperature control apparatus according to claim 6, wherein a side wall of the humidified water storage unit is configured to cause the heat pipe phenomenon.
JP2009057879A 2009-03-11 2009-03-11 Temperature/humidity conditioner Pending JP2010210172A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2708811A1 (en) 2012-09-13 2014-03-19 WEISS UMWELTTECHNIK GmbH Method for setting the humidity in a closed chamber
JP2016001147A (en) * 2014-06-12 2016-01-07 エスペック株式会社 Dew condensation testing device and dew condensation testing method
CN110686349A (en) * 2019-09-03 2020-01-14 珠海格力电器股份有限公司 Selectable automatic humidification control method, automatic humidification control system and air conditioner

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2708811A1 (en) 2012-09-13 2014-03-19 WEISS UMWELTTECHNIK GmbH Method for setting the humidity in a closed chamber
JP2016001147A (en) * 2014-06-12 2016-01-07 エスペック株式会社 Dew condensation testing device and dew condensation testing method
DE102015109250B4 (en) * 2014-06-12 2019-05-29 Espec Corp. Dewing test apparatus and dew formation test method
CN110686349A (en) * 2019-09-03 2020-01-14 珠海格力电器股份有限公司 Selectable automatic humidification control method, automatic humidification control system and air conditioner
CN110686349B (en) * 2019-09-03 2021-02-26 珠海格力电器股份有限公司 Selectable automatic humidification control method, automatic humidification control system and air conditioner

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