JP2007201339A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2007201339A JP2007201339A JP2006020521A JP2006020521A JP2007201339A JP 2007201339 A JP2007201339 A JP 2007201339A JP 2006020521 A JP2006020521 A JP 2006020521A JP 2006020521 A JP2006020521 A JP 2006020521A JP 2007201339 A JP2007201339 A JP 2007201339A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 69
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 239000010410 layer Substances 0.000 claims abstract description 60
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 37
- 229920005591 polysilicon Polymers 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000005468 ion implantation Methods 0.000 claims abstract description 21
- 239000011229 interlayer Substances 0.000 claims abstract description 13
- 150000002500 ions Chemical class 0.000 claims abstract description 7
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 11
- 238000002955 isolation Methods 0.000 claims description 6
- 230000003213 activating effect Effects 0.000 claims description 4
- 239000012535 impurity Substances 0.000 abstract description 9
- 238000000137 annealing Methods 0.000 abstract description 6
- 238000000059 patterning Methods 0.000 abstract description 5
- 238000007669 thermal treatment Methods 0.000 abstract 2
- -1 phosphorus ions Chemical class 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 229910052698 phosphorus Inorganic materials 0.000 description 7
- 239000011574 phosphorus Substances 0.000 description 7
- 230000001133 acceleration Effects 0.000 description 4
- 238000002513 implantation Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052785 arsenic Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- HAYXDMNJJFVXCI-UHFFFAOYSA-N arsenic(5+) Chemical compound [As+5] HAYXDMNJJFVXCI-UHFFFAOYSA-N 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/20—Resistors
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
【解決手段】 半導体基板1上の全面に層間絶縁膜9を形成し、その後当該層間絶縁膜9を選択的にエッチングし、ポリシリコン抵抗層4,ソース領域7及びドレイン領域8をそれぞれ一部露出させるコンタクトホール10,11を形成する。ポリシリコン抵抗層4上で隣り合うコンタクトホール間を抵抗素子の長さL1,L2と定義した上でポリシリコン抵抗層4のパターニング寸法を設定する。次に、コンタクトホール10を介して、イオン注入し、ポリシリコン抵抗層4上に低抵抗領域15a〜15c(高濃度に不純物が導入された領域)を形成する。次に、当該イオン注入後の熱処理(アニーリング)をソース領域・ドレイン領域の際の熱処理よりも低い温度で行う。
【選択図】 図3
Description
4 ポリシリコン抵抗層 5 ゲート電極 6 レジスト膜 7 ソース領域
8 ドレイン領域 9 層間絶縁膜 10 コンタクトホール
11 コンタクトホール 15a〜15c 低抵抗領域 16 金属配線
100 半導体基板 101 フィールド絶縁膜 102 ゲート絶縁膜
103 ポリシリコン抵抗層 104 ゲート電極 105 レジスト膜
106a〜106c 低抵抗領域 107 ソース領域 108 ドレイン領域
109 層間絶縁膜 115a〜115c 低抵抗領域
X,Y,X´,Y´,L1,L2 抵抗素子の長さ Z 拡散距離
Claims (4)
- 半導体基板の表面に絶縁膜を形成する工程と、
前記絶縁膜上に半導体抵抗層を形成する工程と、
前記半導体抵抗層を被覆する層間絶縁膜を形成する工程と、
前記層間絶縁膜に前記半導体抵抗層を一部露出させるコンタクトホールを形成する工程と、
前記コンタクトホールを介して前記半導体抵抗層にイオン注入し、前記半導体抵抗層に低抵抗領域を形成する工程と、を有することを特徴とする半導体装置の製造方法。 - 半導体抵抗層及びMOSトランジスタを同一半導体基板上に備えた半導体装置の製造方法において、
半導体基板の表面に素子分離絶縁膜と、前記MOSトランジスタのゲート絶縁膜を形成する工程と、
前記素子分離絶縁膜上に前記半導体抵抗層を形成する工程と、
前記ゲート絶縁膜上に前記MOSトランジスタのゲート電極を形成する工程と、
前記MOSトランジスタのソース領域及びドレイン領域を形成するための第1のイオン注入を行う工程と、
前記半導体抵抗層、前記ソース領域及び前記ドレイン領域を一部露出させるコンタクトホールを有する層間絶縁膜を形成する工程と、
前記コンタクトホールを介して第2のイオン注入を行い、前記半導体抵抗層上にコンタクト抵抗を下げるための低抵抗領域を形成する工程と、を有することを特徴とする半導体装置の製造方法。 - 前記第1のイオン注入によって注入されたイオンを活性化するための第1の熱処理をする工程と、
前記第1の熱処理よりも低い温度条件で、前記第2のイオン注入によって注入されたイオンを活性化するための第2の熱処理をする工程と、を有することを特徴とする請求項2に記載の半導体装置の製造方法。 - 前記半導体抵抗層がポリシリコン層から成ることを特徴とする請求項1乃至請求項3のいずれかに記載の半導体装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006020521A JP5010151B2 (ja) | 2006-01-30 | 2006-01-30 | 半導体装置の製造方法 |
TW095147850A TWI334219B (en) | 2006-01-30 | 2006-12-20 | Manufacturing method of semiconductor device |
KR1020070008834A KR100813389B1 (ko) | 2006-01-30 | 2007-01-29 | 반도체 장치의 제조 방법 |
US11/699,584 US7611957B2 (en) | 2006-01-30 | 2007-01-30 | Method of manufacturing semiconductor device |
CNB200710004746XA CN100490062C (zh) | 2006-01-30 | 2007-01-30 | 半导体装置的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006020521A JP5010151B2 (ja) | 2006-01-30 | 2006-01-30 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007201339A true JP2007201339A (ja) | 2007-08-09 |
JP5010151B2 JP5010151B2 (ja) | 2012-08-29 |
Family
ID=38322603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006020521A Expired - Fee Related JP5010151B2 (ja) | 2006-01-30 | 2006-01-30 | 半導体装置の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7611957B2 (ja) |
JP (1) | JP5010151B2 (ja) |
KR (1) | KR100813389B1 (ja) |
CN (1) | CN100490062C (ja) |
TW (1) | TWI334219B (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8492801B2 (en) * | 2007-05-11 | 2013-07-23 | System General Corp. | Semiconductor structure with high breakdown voltage and resistance |
CN102087998B (zh) * | 2009-12-04 | 2014-03-19 | 无锡华润上华半导体有限公司 | 双多晶结构器件及其制造方法 |
JP5601026B2 (ja) * | 2010-05-21 | 2014-10-08 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
CN102890195B (zh) * | 2011-07-20 | 2015-02-04 | 上海华虹宏力半导体制造有限公司 | 测试与衬底同型的有源区上接触孔电阻的方法 |
CN106033710B (zh) * | 2015-03-13 | 2019-10-15 | 北大方正集团有限公司 | 一种多晶电阻的制作方法 |
CN105023831B (zh) * | 2015-06-10 | 2018-08-21 | 上海华虹宏力半导体制造有限公司 | Cmos工艺中多晶硅电阻的制造方法 |
CN107919346B (zh) * | 2016-10-10 | 2019-12-31 | 北大方正集团有限公司 | 多晶硅电阻的制作方法 |
CN106952963B (zh) * | 2017-03-29 | 2019-07-05 | 京东方科技集团股份有限公司 | 一种薄膜晶体管及制作方法、阵列基板、显示装置 |
US11869762B2 (en) * | 2020-10-13 | 2024-01-09 | Alpha Power Solutions Limited | Semiconductor device with temperature sensing component |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02303154A (ja) * | 1989-05-18 | 1990-12-17 | Fujitsu Ltd | 半導体装置の製造方法 |
WO2005013368A1 (ja) * | 2003-07-31 | 2005-02-10 | Fujitsu Limited | 半導体装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05129294A (ja) | 1991-11-07 | 1993-05-25 | Matsushita Electron Corp | 半導体装置の製造方法 |
KR0183877B1 (ko) * | 1996-06-07 | 1999-03-20 | 김광호 | 불휘발성 메모리 장치 및 그 제조방법 |
US7112535B2 (en) * | 2003-09-30 | 2006-09-26 | International Business Machines Corporation | Precision polysilicon resistor process |
US7135361B2 (en) * | 2003-12-11 | 2006-11-14 | Texas Instruments Incorporated | Method for fabricating transistor gate structures and gate dielectrics thereof |
KR20050062122A (ko) * | 2003-12-19 | 2005-06-23 | 주식회사 하이닉스반도체 | 반도체장치의 제조방법 |
-
2006
- 2006-01-30 JP JP2006020521A patent/JP5010151B2/ja not_active Expired - Fee Related
- 2006-12-20 TW TW095147850A patent/TWI334219B/zh not_active IP Right Cessation
-
2007
- 2007-01-29 KR KR1020070008834A patent/KR100813389B1/ko not_active IP Right Cessation
- 2007-01-30 US US11/699,584 patent/US7611957B2/en active Active
- 2007-01-30 CN CNB200710004746XA patent/CN100490062C/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02303154A (ja) * | 1989-05-18 | 1990-12-17 | Fujitsu Ltd | 半導体装置の製造方法 |
WO2005013368A1 (ja) * | 2003-07-31 | 2005-02-10 | Fujitsu Limited | 半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20070078801A (ko) | 2007-08-02 |
TWI334219B (en) | 2010-12-01 |
CN101013664A (zh) | 2007-08-08 |
CN100490062C (zh) | 2009-05-20 |
TW200733348A (en) | 2007-09-01 |
KR100813389B1 (ko) | 2008-03-12 |
US20070178636A1 (en) | 2007-08-02 |
JP5010151B2 (ja) | 2012-08-29 |
US7611957B2 (en) | 2009-11-03 |
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