JP2007103454A - 薄板保持容器及び薄板保持容器用処理装置 - Google Patents
薄板保持容器及び薄板保持容器用処理装置 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D21/00—Nestable, stackable or joinable containers; Containers of variable capacity
- B65D21/02—Containers specially shaped, or provided with fittings or attachments, to facilitate nesting, stacking, or joining together
- B65D21/0201—Containers specially shaped, or provided with fittings or attachments, to facilitate nesting, stacking, or joining together stackable or joined together side-by-side
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/54—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles of special shape not otherwise provided for
- B65D85/544—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles of special shape not otherwise provided for for gramophone records
- B65D85/548—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles of special shape not otherwise provided for for gramophone records formed by folding or interconnecting of two or more blanks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
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Abstract
【解決手段】搬送、保管、処理等に用いるために複数の半導体ウエハWを保持する薄板保持容器11である。少なくとも1枚の半導体ウエハWを個別に保持した状態で複数枚積層された処理トレイ12と、この処理トレイ12を複数枚積層した状態でこれらを一体的に結合すると共に任意の位置で分割する結合機構(18,19)とを備えた。処理トレイ12は、その一側面に少なくとも1枚の半導体ウエハWを保持する一側固定保持部13を備えると共に他側面に他の処理トレイ12の上記一側固定保持部13と互いに嵌合することで外部環境と隔離して上記薄板を固定して保持する収納空間を形成する他側固定保持部14を備えた。これにより、半導体ウエハWの枚数に応じた枚数の処理トレイ12を積層して薄板保持容器11を構成した。
【選択図】 図1
Description
上記実施形態では、薄板として300mmの半導体ウエハWを例に説明したが、薄板の大小は問わないものである。例えば、小さい薄板として、直径1インチ程度の半導体ウエハWがある。大きい薄板では、縦120cm、横240cm程度の液晶用ガラス基板がある。さらに大きい寸法の薄板もあり得る。これらにおいても、本願発明を適用することにより、上記実施形態と同様の作用、効果を奏するものである。
Claims (8)
- 搬送、保管、処理等に用いるために1又は複数の薄板を保持する薄板保持容器であって、
少なくとも1枚の薄板を個別に保持した状態で複数枚積層された処理トレイと、
当該処理トレイを複数枚積層した状態でこれらを一体的に結合すると共に任意の位置で分割する結合機構とを備え、
上記処理トレイが、その一側面に少なくとも1枚の薄板を保持する一側固定保持部を備えると共に他側面に他の処理トレイの上記一側固定保持部と互いに嵌合することで外部環境と隔離して上記薄板を固定して保持する収納空間を形成する他側固定保持部を備え、
上記薄板の枚数に応じた枚数の上記処理トレイを積層して構成したことを特徴とする薄板保持容器。 - 請求項1に記載の薄板保持容器において、
上記一側固定保持部及び他側固定保持部が、互いに嵌合することで、上記収納空間内に収納された薄板を挟んで固定し、縦横斜めいずれの方向に配設されても上記一側固定保持部又は他側固定保持部のいずれか一方が蓋側、他方が容器側として機能して上記薄板を支持することを特徴とする薄板保持容器。 - 請求項1又は2に記載の薄板保持容器において、
上記結合機構が、上記各処理トレイの一側面に設けられた結合部と、他側面に設けられ上記結合部に結合される被結合部とから構成され、これら結合部と被結合部とが結合して固定されることで隣接する各処理トレイが互いに結合して全体を一体的に固定すると共に、任意の位置の結合部と被結合部とを切り離すことによりその位置で2つに分離できることを特徴とする薄板保持容器。 - 請求項1又は2に記載の薄板保持容器において、
上記結合機構が、上記各処理トレイを支持して案内するガイド手段と、当該ガイド手段で支持して案内される各処理トレイの全体を一体的に固定すると共に、任意の位置で2つに分離するクランプとを備えて構成されたことを特徴とする薄板保持容器。 - 請求項1ないし4のいずれか1項に記載の薄板保持容器において、
上記各処理トレイのうち両端に位置する各処理トレイに、処理装置に取り付けるための位置決め嵌合部が形成され、
上記各処理トレイの一側面を上にする場合に上記一側固定保持部が上記薄板を保持し、他側面を上にする場合に上記他側固定保持部が上記薄板を保持することを特徴とする薄板保持容器。 - 請求項1ないし5のいずれか1項に記載の薄板保持容器において、
上記各処理トレイの一側固定保持部と他側固定保持部との嵌合部分に上記収納空間を密封するシール材を設けたことを特徴とする薄板保持容器。 - 請求項1ないし6のいずれか1項に記載の薄板保持容器を載置する載置台と、
当該載置台に載置された薄板保持容器を任意の位置で分離して開く分離機構と、
当該分離機構で開いた部分に収納された薄板を出し入れする出し入れ機構とを備えて構成されたことを特徴とする薄板保持容器用処理装置。 - 請求項7に記載の薄板保持容器用処理装置において、
上記分離機構が、薄板保持容器の各処理トレイを任意の位置で分離する解除キーと、当該解除キーで分離した位置で処理トレイを持ち上げるリフト部とから構成されたことを特徴とする薄板保持容器用処理装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005288211A JP4789566B2 (ja) | 2005-09-30 | 2005-09-30 | 薄板保持容器及び薄板保持容器用処理装置 |
DE112006002594T DE112006002594T5 (de) | 2005-09-30 | 2006-09-20 | Behälter für dünne Platten und Bearbeitungseinrichtung für Behälter für dünne Platten |
PCT/JP2006/318582 WO2007040047A1 (ja) | 2005-09-30 | 2006-09-20 | 薄板保持容器及び薄板保持容器用処理装置 |
US11/992,588 US8480348B2 (en) | 2005-09-30 | 2006-09-20 | Thin plate container and processing apparatus for thin plate container |
CN2006800326230A CN101258589B (zh) | 2005-09-30 | 2006-09-20 | 薄板保持容器以及薄板保持容器用处理装置 |
KR1020087005378A KR20080050407A (ko) | 2005-09-30 | 2006-09-20 | 박판지지용기 및 박판지지용기용 처리장치 |
TW095136234A TWI387043B (zh) | 2005-09-30 | 2006-09-29 | 薄板保持容器及薄板保持容器用處理裝置 |
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JP2005288211A JP4789566B2 (ja) | 2005-09-30 | 2005-09-30 | 薄板保持容器及び薄板保持容器用処理装置 |
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JP2007103454A true JP2007103454A (ja) | 2007-04-19 |
JP4789566B2 JP4789566B2 (ja) | 2011-10-12 |
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US (1) | US8480348B2 (ja) |
JP (1) | JP4789566B2 (ja) |
KR (1) | KR20080050407A (ja) |
CN (1) | CN101258589B (ja) |
DE (1) | DE112006002594T5 (ja) |
TW (1) | TWI387043B (ja) |
WO (1) | WO2007040047A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009272349A (ja) * | 2008-04-30 | 2009-11-19 | Sumco Techxiv株式会社 | 保持容器及び保持容器ユニット |
CN106185138A (zh) * | 2015-07-20 | 2016-12-07 | 亚洲硅业(青海)有限公司 | 一种密闭式硅芯自动存取装置 |
KR20200045695A (ko) * | 2018-10-23 | 2020-05-06 | 삼성전자주식회사 | 캐리어 기판 및 이를 이용한 기판 처리 장치 |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4947631B2 (ja) * | 2006-07-19 | 2012-06-06 | ミライアル株式会社 | クッションシート付ウエハ収納容器 |
CN102067303B (zh) * | 2009-02-18 | 2012-11-28 | 株式会社爱发科 | 晶片搬送用托盘以及在该托盘上固定晶片的方法 |
TWI411563B (zh) * | 2009-09-25 | 2013-10-11 | Gudeng Prec Industral Co Ltd | 光罩盒 |
TWI389828B (zh) * | 2010-07-21 | 2013-03-21 | Gudeng Prec Industral Co Ltd | 具有感測器之光罩盒 |
US8925290B2 (en) * | 2011-09-08 | 2015-01-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Mask storage device for mask haze prevention and methods thereof |
KR102091892B1 (ko) | 2012-04-16 | 2020-03-20 | 로제 가부시키가이샤 | 수납 용기, 수납 용기의 셔터 개폐 유닛 및 이들을 사용한 웨이퍼 스토커 |
KR101378838B1 (ko) * | 2012-05-25 | 2014-03-31 | 한국기술교육대학교 산학협력단 | 실리콘 웨이퍼를 이용한 솔라 웨이퍼 트레이 |
US8939289B2 (en) * | 2012-12-14 | 2015-01-27 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Packing box for liquid crystal display panel and waterproof structure thereof |
KR20150017961A (ko) * | 2013-08-08 | 2015-02-23 | 삼성디스플레이 주식회사 | 기판 판별 장치, 기판 판별 방법 및 이를 이용한 플렉서블 표시 장치 제조 방법 |
WO2016181178A1 (en) * | 2015-05-11 | 2016-11-17 | Gebo Cermex Canada Inc. | Vertical accumulation in a treatment line |
US10573545B2 (en) * | 2016-06-28 | 2020-02-25 | Murata Machinery, Ltd. | Substrate carrier and substrate carrier stack |
US10643876B2 (en) * | 2016-06-28 | 2020-05-05 | Murata Machinery, Ltd. | Substrate carrier and substrate carrier stack |
KR20180001999A (ko) * | 2016-06-28 | 2018-01-05 | 테크-샘 아게 | 개선된 기판 스토리지 및 프로세싱 |
CN206203064U (zh) * | 2016-11-30 | 2017-05-31 | 京东方科技集团股份有限公司 | 包装托盘结构及基板包装结构 |
JP6990873B2 (ja) * | 2017-03-31 | 2022-02-03 | アキレス株式会社 | 半導体ウェハ容器 |
US10818530B1 (en) * | 2017-08-30 | 2020-10-27 | Murata Machinery, Ltd. | Substrate carriers with isolation membrane |
US11299348B1 (en) * | 2019-10-21 | 2022-04-12 | Amazon Technologies, Inc. | Container depalletizing systems and methods |
TWI767391B (zh) * | 2020-11-03 | 2022-06-11 | 群翊工業股份有限公司 | 自動化夾取堆合設備及其夾具 |
US20230000227A1 (en) | 2021-07-02 | 2023-01-05 | RW AW Collectibles LLC | Protective case for collectible cards |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63138984A (ja) * | 1986-11-27 | 1988-06-10 | 松下電子工業株式会社 | 半導体装置搬送用パレツト |
JPH04116135U (ja) * | 1991-03-27 | 1992-10-16 | 安藤電気株式会社 | 積み重ねたトレーによる分類収納機構 |
JPH0516984A (ja) * | 1991-07-10 | 1993-01-26 | Hitachi Ltd | 面実装型電子部品トレー |
JPH10147313A (ja) * | 1996-11-15 | 1998-06-02 | Sony Corp | トレー位置決め装置 |
JP2005197628A (ja) * | 2003-12-09 | 2005-07-21 | Renesas Technology Corp | 半導体装置の搬送方法および半導体装置の製造方法 |
Family Cites Families (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2623656A (en) * | 1950-02-23 | 1952-12-30 | Rudolph B Rottau | Picnic server |
US3511990A (en) * | 1967-06-26 | 1970-05-12 | Eastman Kodak Co | Radiographic film cassette having a resilient film release strip therein |
US3552548A (en) * | 1968-08-05 | 1971-01-05 | Fluroware Inc | Wafer storage and shipping container |
US3549018A (en) * | 1968-11-08 | 1970-12-22 | Banner Metals Inc | Plastic tray |
US3615006A (en) * | 1969-06-26 | 1971-10-26 | Ibm | Storage container |
US3695424A (en) | 1970-10-28 | 1972-10-03 | Eastman Kodak Co | Package for fragile articles |
US3719273A (en) * | 1971-01-11 | 1973-03-06 | Chisso Corp | Packing vessel for thin sheet materials |
DE2448853C3 (de) * | 1974-10-14 | 1985-12-05 | Agfa-Gevaert Ag, 5090 Leverkusen | Flanschloser, stapelbarer Wickelkern für ein Magnetband |
US4681221A (en) * | 1986-10-30 | 1987-07-21 | International Business Machines Corporation | Holder for plastic leaded chip carrier |
JPH04116135A (ja) | 1990-09-06 | 1992-04-16 | Sumitomo Metal Ind Ltd | 溶接部cod特性の優れた高張力鋼板 |
JP3089590B2 (ja) * | 1991-07-12 | 2000-09-18 | キヤノン株式会社 | 板状物収納容器およびその蓋開口装置 |
US5325966A (en) * | 1993-06-02 | 1994-07-05 | Chang Fu Ping | Tool box |
US5353946A (en) * | 1993-07-26 | 1994-10-11 | Church & Dwight Co., Inc. | Container with reclosable lid latch |
US5427265A (en) * | 1993-10-22 | 1995-06-27 | Dart Industries Inc. | Lunchbox with safety lock |
AUPM997994A0 (en) * | 1994-12-12 | 1995-01-12 | Walker, David Miller Hugh | Packing container |
US5544751A (en) * | 1995-05-03 | 1996-08-13 | Flambeau Products Corp. | Stacking connector for storage container |
USD383306S (en) * | 1996-01-22 | 1997-09-09 | Pennoyer Raymond P | First aid kit container |
JP2910684B2 (ja) | 1996-07-31 | 1999-06-23 | 日本電気株式会社 | ウエハー容器 |
US5848703A (en) * | 1997-10-20 | 1998-12-15 | R. H. Murphy Co., Inc. | Tray for integrated circuits |
USD418978S (en) * | 1998-11-05 | 2000-01-18 | Pennoyer Jr Raymond P | Travel case |
US6216873B1 (en) * | 1999-03-19 | 2001-04-17 | Asyst Technologies, Inc. | SMIF container including a reticle support structure |
JP2001261089A (ja) * | 2000-03-16 | 2001-09-26 | Toshiba Corp | 電子部品用トレイ |
US6581264B2 (en) | 2000-05-02 | 2003-06-24 | Shin-Etsu Polymer Co., Ltd. | Transportation container and method for opening and closing lid thereof |
US6837374B2 (en) * | 2001-07-15 | 2005-01-04 | Entegris, Inc. | 300MM single stackable film frame carrier |
KR100481307B1 (ko) * | 2001-11-08 | 2005-04-07 | 삼성전자주식회사 | 반도체 제조 설비의 카세트 테이블 |
US7304720B2 (en) * | 2002-02-22 | 2007-12-04 | Asml Holding N.V. | System for using a two part cover for protecting a reticle |
JP2004273867A (ja) | 2003-03-11 | 2004-09-30 | Okamoto Machine Tool Works Ltd | 極薄ウエハの搬出方法およびそれに用いる多段式収納カセット |
JP4601932B2 (ja) * | 2003-09-16 | 2010-12-22 | 大日本印刷株式会社 | 基板収納ケース |
JP4003882B2 (ja) * | 2003-09-26 | 2007-11-07 | シャープ株式会社 | 基板移載システム |
JP4681221B2 (ja) * | 2003-12-02 | 2011-05-11 | ミライアル株式会社 | 薄板支持容器 |
TWI276580B (en) * | 2003-12-18 | 2007-03-21 | Miraial Co Ltd | Lid unit for thin-plate supporting container |
JP2006103795A (ja) * | 2004-09-10 | 2006-04-20 | Nippon Valqua Ind Ltd | ガラス基板収納ケース、ガラス基板入替装置、ガラス基板管理装置、ガラス基板流通方法、シール部材及びこのシール部材を用いたシール構造 |
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US7528936B2 (en) * | 2005-02-27 | 2009-05-05 | Entegris, Inc. | Substrate container with pressure equalization |
US20060201958A1 (en) * | 2005-02-27 | 2006-09-14 | Tieben Anthony M | Mask container |
US7607543B2 (en) * | 2005-02-27 | 2009-10-27 | Entegris, Inc. | Reticle pod with isolation system |
JP4644035B2 (ja) * | 2005-05-25 | 2011-03-02 | ミライアル株式会社 | 枚葉収納容器 |
US20070068846A1 (en) * | 2005-09-29 | 2007-03-29 | Huang-Ting Hsiao | Wafer packing |
JP4903429B2 (ja) * | 2005-12-05 | 2012-03-28 | ミライアル株式会社 | 載置トレイ及び薄板保持容器 |
TWM300368U (en) * | 2006-03-28 | 2006-11-01 | Gudeng Prec Ind Co Ltd | Mask supporter for leading and position |
JP4947631B2 (ja) * | 2006-07-19 | 2012-06-06 | ミライアル株式会社 | クッションシート付ウエハ収納容器 |
JP5043475B2 (ja) * | 2007-03-05 | 2012-10-10 | ミライアル株式会社 | 半導体ウエハ収納容器 |
US8011503B2 (en) * | 2008-07-09 | 2011-09-06 | Hartman Erick V | Modular optical disc media storage system |
TWI344926B (en) * | 2008-12-05 | 2011-07-11 | Gudeng Prec Industral Co Ltd | Reticle pod |
-
2005
- 2005-09-30 JP JP2005288211A patent/JP4789566B2/ja not_active Expired - Fee Related
-
2006
- 2006-09-20 US US11/992,588 patent/US8480348B2/en not_active Expired - Fee Related
- 2006-09-20 CN CN2006800326230A patent/CN101258589B/zh not_active Expired - Fee Related
- 2006-09-20 KR KR1020087005378A patent/KR20080050407A/ko not_active Application Discontinuation
- 2006-09-20 DE DE112006002594T patent/DE112006002594T5/de not_active Withdrawn
- 2006-09-20 WO PCT/JP2006/318582 patent/WO2007040047A1/ja active Application Filing
- 2006-09-29 TW TW095136234A patent/TWI387043B/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63138984A (ja) * | 1986-11-27 | 1988-06-10 | 松下電子工業株式会社 | 半導体装置搬送用パレツト |
JPH04116135U (ja) * | 1991-03-27 | 1992-10-16 | 安藤電気株式会社 | 積み重ねたトレーによる分類収納機構 |
JPH0516984A (ja) * | 1991-07-10 | 1993-01-26 | Hitachi Ltd | 面実装型電子部品トレー |
JPH10147313A (ja) * | 1996-11-15 | 1998-06-02 | Sony Corp | トレー位置決め装置 |
JP2005197628A (ja) * | 2003-12-09 | 2005-07-21 | Renesas Technology Corp | 半導体装置の搬送方法および半導体装置の製造方法 |
Cited By (5)
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JP2009272349A (ja) * | 2008-04-30 | 2009-11-19 | Sumco Techxiv株式会社 | 保持容器及び保持容器ユニット |
CN106185138A (zh) * | 2015-07-20 | 2016-12-07 | 亚洲硅业(青海)有限公司 | 一种密闭式硅芯自动存取装置 |
CN106185138B (zh) * | 2015-07-20 | 2018-06-01 | 亚洲硅业(青海)有限公司 | 一种密闭式硅芯自动存取装置 |
KR20200045695A (ko) * | 2018-10-23 | 2020-05-06 | 삼성전자주식회사 | 캐리어 기판 및 이를 이용한 기판 처리 장치 |
KR102477355B1 (ko) | 2018-10-23 | 2022-12-15 | 삼성전자주식회사 | 캐리어 기판 및 이를 이용한 기판 처리 장치 |
Also Published As
Publication number | Publication date |
---|---|
DE112006002594T5 (de) | 2008-08-14 |
CN101258589A (zh) | 2008-09-03 |
US8480348B2 (en) | 2013-07-09 |
CN101258589B (zh) | 2012-10-10 |
WO2007040047A1 (ja) | 2007-04-12 |
JP4789566B2 (ja) | 2011-10-12 |
US20090297303A1 (en) | 2009-12-03 |
TWI387043B (zh) | 2013-02-21 |
KR20080050407A (ko) | 2008-06-05 |
TW200723434A (en) | 2007-06-16 |
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