JP2006305697A - Method and device for machining workpiece - Google Patents

Method and device for machining workpiece Download PDF

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JP2006305697A
JP2006305697A JP2005133488A JP2005133488A JP2006305697A JP 2006305697 A JP2006305697 A JP 2006305697A JP 2005133488 A JP2005133488 A JP 2005133488A JP 2005133488 A JP2005133488 A JP 2005133488A JP 2006305697 A JP2006305697 A JP 2006305697A
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workpiece
mounting table
workpieces
mounting
sizes
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Takao Iihama
孝雄 飯濱
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Taiyo Co Ltd
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Taiyo Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and a device for machining a workpiece, in which loading stand for a workpiece is reduced in weight to enhance working efficiency in replacement of the loading stand. <P>SOLUTION: The machining method of a workpiece is used for loading the workpiece 1 such as substrate of liquid crystal panel, etc. on the loading stand 4, and for machining or inspecting the workpiece 1. In the method, plural loading stands 4 for loading the workpiece 1 are applicable to any workpiece 1 with various shapes or sizes so as to machining or inspect workpieces 1 different in shape or size. These workpieces 1 with various shapes or sizes are loaded on two or more loading stands 4 light-weighted by forming holes 40 appropriately, and machined or inspected. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、液晶パネルなどの基板等のワークを加工したり検査したりするワークの製造方法およびワークの製造装置に関するものである。   The present invention relates to a workpiece manufacturing method and workpiece manufacturing apparatus for processing or inspecting a workpiece such as a substrate such as a liquid crystal panel.

従来、液晶パネルなどの基板等の平板状ワークの外周縁部を面取り加工するワークの面取り加工方法、あるいはワークの面取り加工装置として、特開平１０−１１８９０７号公報、特許第３４７００５７号公報、特開２００１−１３８１９５号公報、特開２００３−１８１７５１号公報などに記載されたものがあり、それらの主要部の概略構成は、図１に図示したものである。   Conventionally, as a work chamfering method or a work chamfering processing apparatus for chamfering the outer peripheral edge of a flat work such as a substrate such as a liquid crystal panel, Japanese Patent Application Laid-Open No. 10-118907, Japanese Patent No. 3470057, and Japanese Patent Application Laid-Open No. 3470057 are disclosed. There are what was described in 2001-138195 gazette, Unexamined-Japanese-Patent No. 2003-181751, etc., and the schematic structure of those principal parts is what was illustrated in FIG.

そして、ワーク１の面取り加工を行う際、ワーク１を載置台４に載置して、ワーク１を吸引方式などにより支持している。載置台４は移動装置５に取り付け固定している。   When the chamfering process is performed on the workpiece 1, the workpiece 1 is mounted on the mounting table 4, and the workpiece 1 is supported by a suction method or the like. The mounting table 4 is fixedly attached to the moving device 5.

また、異なる形状や大きさのワーク１を加工する際には、そのワーク１に対応した大きさの載置台４を通常用いており、複数の異なる形状や大きさのワーク１に対応した複数の載置台４を準備して、ワーク１の形状や大きさに合わせた載置台４を移動装置５にその都度取り付け固定している。   Further, when processing workpieces 1 having different shapes and sizes, a mounting table 4 having a size corresponding to the workpiece 1 is normally used, and a plurality of workpieces 1 having a plurality of different shapes and sizes are used. The mounting table 4 is prepared, and the mounting table 4 matched to the shape and size of the workpiece 1 is attached and fixed to the moving device 5 each time.

従って、複数の異なる形状や大きさのワーク１を加工する際には、ワーク１の形状や大きさに合わせた載置台４をその都度交換して移動装置５に取り付け固定する必要がある。   Therefore, when processing a plurality of workpieces 1 having different shapes and sizes, it is necessary to replace and mount the mounting table 4 according to the shape and size of the workpiece 1 to the moving device 5 each time.

しかしながら、載置台４を移動装置５から取り外し、別の載置台４を移動装置５に取り付け固定する場合には、載置台４の重量が重く、例えば通常４０Ｋｇ程度の場合が多いが、載置台４の取り外し取り付け作業は通常一人では作業することができず、複数の作業者が協力して作業する必要があり、作業工数も多くかかり大変である。また、重量を軽減するために、載置台４を分割して対応している場合もあるが、この場合には、載置台４のコストが高くなってしまうことや、載置台４の取り付け工数が多くかかってしまうこと、あるいは、載置台４の上面１２の平坦度が悪くなるなどの問題もある。
特開平１０−１１８９０７号公報 特許第３４７００５７号公報 特開２００１−１３８１９５号公報 特開２００３−１８１７５１号公報 However, when the mounting table 4 is detached from the moving device 5 and another mounting table 4 is attached and fixed to the moving device 5, the mounting table 4 is heavy, for example, usually about 40 kg. In general, it is impossible for one person to perform the detaching / attaching work, and it is necessary to work by a plurality of workers in cooperation with each other. Further, in order to reduce the weight, the mounting table 4 may be divided and handled. However, in this case, the cost of the mounting table 4 is increased and the mounting man-hour of the mounting table 4 is increased. There is also a problem that it takes a large amount or the flatness of the upper surface 12 of the mounting table 4 is deteriorated.
JP-A-10-118907 Japanese Patent No. 3470057 JP 2001-138195 A JP 2003-181751 A

解決しようとする課題は、ワークを載置する載置台を軽量化して、載置台を交換する作業効率を高めたワークの製造方法およびワークの製造装置を提供することである。   The problem to be solved is to provide a workpiece manufacturing method and a workpiece manufacturing apparatus in which the mounting table on which the workpiece is mounted is reduced in weight and the work efficiency of replacing the mounting table is increased.

本発明は、前記課題を解決するために、液晶パネルなどの基板等のワークを載置台に載置して加工したり検査したりするワークの製造方法で、前記ワークが異なる形状や大きさであっても、前記ワークを加工したり検査することができるように、前記異なる形状や大きさのワークに対応する前記ワークを載置する複数の載置台を用いて前記ワークを加工したり検査したりするワークの製造方法であって、前記載置台に適宜孔を設けて軽量化した前記複数の載置台に前記異なる形状や大きさのワークを載置してワークを加工したり検査することを特徴とするものである。   In order to solve the above-mentioned problems, the present invention provides a workpiece manufacturing method in which a workpiece such as a substrate such as a liquid crystal panel is mounted on a mounting table for processing or inspection, and the workpiece has a different shape or size. Even so, the workpiece can be processed and inspected using a plurality of mounting tables on which the workpieces corresponding to the workpieces of different shapes and sizes are mounted so that the workpiece can be processed and inspected. A method of manufacturing or inspecting a workpiece by placing the workpieces of different shapes and sizes on the plurality of mounting tables that are reduced in weight by appropriately providing holes in the mounting table. It is a feature.

また、液晶パネルなどの基板等のワークを載置台に載置して加工したり検査したりするワークの製造装置で、前記ワークが異なる形状や大きさであっても、前記ワークを加工したり検査することができるように、前記異なる形状や大きさのワークに対応する前記ワークを載置する複数の載置台を用いて前記ワークを加工したり検査したりするワークの製造装置であって、前記載置台に適宜孔を設けて軽量化した前記複数の載置台に前記異なる形状や大きさのワークを載置してワークを加工したり検査したりすることができるように構成したことを特徴とするものである。   In addition, a workpiece manufacturing apparatus for processing or inspecting a workpiece such as a substrate such as a liquid crystal panel mounted on a mounting table, and processing the workpiece even if the workpiece has a different shape or size In order to be able to inspect, a workpiece manufacturing apparatus that processes or inspects the workpiece using a plurality of mounting tables on which the workpieces corresponding to the workpieces of different shapes and sizes are mounted, The above-described mounting table is configured so that the workpiece can be processed or inspected by mounting the workpieces of different shapes and sizes on the plurality of mounting tables that are reduced in weight by appropriately providing holes. It is what.

本発明のワークの製造方法は、液晶パネルなどの基板等のワークを載置台に載置して加工したり検査したりするワークの製造方法で、ワークが異なる形状や大きさであっても、ワークを加工したり検査することができるように、異なる形状や大きさのワークに対応するワークを載置する複数の載置台を用いてワークを加工したり検査したりするワークの製造方法であって、載置台に適宜孔を設けて軽量化した複数の載置台に異なる形状や大きさのワークを載置してワークを加工したり検査するようにしたので、ワークを載置する載置台を軽量化することができ、載置台を交換する作業効率を高めたワークの製造方法を提供することができる。   The workpiece manufacturing method of the present invention is a workpiece manufacturing method for processing or inspecting a workpiece such as a substrate such as a liquid crystal panel mounted on a mounting table, even if the workpiece has a different shape or size, A workpiece manufacturing method in which a workpiece is machined and inspected using a plurality of mounting tables on which workpieces corresponding to workpieces of different shapes and sizes are mounted so that the workpiece can be machined and inspected. Since the workpieces with different shapes and sizes are mounted on the plurality of mounting tables that are reduced in weight by appropriately providing holes in the mounting table, the workpieces are processed and inspected. It is possible to provide a method for manufacturing a workpiece that can be reduced in weight and that has improved work efficiency for exchanging the mounting table.

本発明のワークの製造装置は、液晶パネルなどの基板等のワークを載置台に載置して加工したり検査したりするワークの製造装置で、前記ワークが異なる形状や大きさであっても、前記ワークを加工したり検査することができるように、前記異なる形状や大きさのワークに対応する前記ワークを載置する複数の載置台を用いて前記ワークを加工したり検査したりするワークの製造装置であって、前記載置台に適宜孔を設けて軽量化した前記複数の載置台に前記異なる形状や大きさのワークを載置してワークを加工したり検査したりすることができるように構成したものである。このように構成することにより、ワークを載置する載置台を軽量化することができ、載置台を交換する作業効率を高めたワークの製造装置を提供することができる。   The workpiece manufacturing apparatus of the present invention is a workpiece manufacturing apparatus for processing or inspecting a workpiece such as a substrate such as a liquid crystal panel mounted on a mounting table, even if the workpiece has a different shape or size. A workpiece that is processed or inspected using a plurality of mounting tables on which the workpieces corresponding to the workpieces of different shapes and sizes are mounted so that the workpiece can be processed or inspected. It is a manufacturing apparatus of this, Comprising: A workpiece | work of the said different shape and magnitude | size can be mounted on these mounting bases which provided the hole suitably in the above-mentioned mounting base, and reduced in weight, and a workpiece | work can be processed or inspected. It is comprised as follows. By comprising in this way, the mounting base which mounts a workpiece | work can be reduced in weight, and the manufacturing apparatus of the workpiece | work which raised the working efficiency which replaces | exchanges a mounting table can be provided.

図１は、本発明の一実施例の主要部概要構成を示す正面図である。   FIG. 1 is a front view showing a schematic configuration of main parts of one embodiment of the present invention.

本発明のワークの製造装置としての一実施例について、ワークの面取り加工装置について説明する。ワークの面取り加工装置は、図１に図示したように、液晶パネルなどの基板等の平板状ワーク１の外周縁部１１を面取り加工するワークの面取り加工装置であって、ワーク１を載置する載置台４は移動装置５に載置され、移動装置５は前後方向に移動可能に構成すると共に水平方向に回転可能に構成し、載置台４に載置されたワーク１の外周縁部１１に砥石２を当接して、ワーク１の上面１２および下面１３の外周縁部１１を面取り加工できるように構成したものである。   A workpiece chamfering apparatus according to an embodiment of the present invention as a workpiece manufacturing apparatus will be described. As shown in FIG. 1, the workpiece chamfering apparatus is a workpiece chamfering apparatus that chamfers the outer peripheral edge portion 11 of a flat workpiece 1 such as a substrate such as a liquid crystal panel. The mounting table 4 is mounted on the moving device 5, and the moving device 5 is configured to be movable in the front-rear direction and configured to be rotatable in the horizontal direction, and on the outer peripheral edge 11 of the workpiece 1 mounted on the mounting table 4. The grindstone 2 is brought into contact with the outer peripheral edge portion 11 of the upper surface 12 and the lower surface 13 of the workpiece 1 so as to be chamfered.

ワーク１を載置台４に載置し、ワーク１の外周縁部１１を面取り加工するワークの面取り加工装置について、以下に、より具体的に説明する。   A workpiece chamfering apparatus that places the workpiece 1 on the mounting table 4 and chamfers the outer peripheral edge 11 of the workpiece 1 will be described in more detail below.

ワークの面取り加工装置は、ワーク１を載置台４に搬入して位置決め固定を行う搬入工程と、載置台４に固定されたワーク１の位置寸法を測定してワーク１の外周縁部１１を面取り加工する加工条件を設定する測定工程と、ワーク１の外周縁部１１を面取り加工する加工工程と、外周縁部１１を面取り加工したワーク１を搬出する搬出工程とを有している。   The workpiece chamfering processing apparatus carries in the workpiece 1 to the mounting table 4 to perform positioning and fixing, and measures the position dimension of the workpiece 1 fixed to the mounting table 4 to chamfer the outer peripheral edge 11 of the workpiece 1. It has a measurement process for setting machining conditions to be machined, a machining process for chamfering the outer peripheral edge 11 of the work 1, and an unloading process for unloading the work 1 with the outer peripheral edge 11 chamfered.

そして、搬入工程で載置台４に位置決め固定されたワーク１を、載置台４と共に測定工程に移動させ、その後、載置台４を加工工程に移動させワーク１の外周縁部１１を面取り加工した後、ワーク１を載置した載置台４を搬出工程に移動させるように構成しており、搬入工程、測定工程、加工工程、搬出工程とは、載置台４が移動できるように、例えば、載置台４の下面に移動装置５を設け、移動装置５の下面に移動装置５を移動させるためのレールなどを設け、このレールに沿って移動装置５が移動できるように構成している。   After the workpiece 1 positioned and fixed on the mounting table 4 in the carry-in process is moved to the measurement process together with the mounting table 4, and then the mounting table 4 is moved to the machining process and the outer peripheral edge 11 of the workpiece 1 is chamfered. The loading table 4 on which the workpiece 1 is loaded is moved to the carry-out process, and the loading process, the measurement process, the processing process, and the carry-out process are performed, for example, so that the loading table 4 can move. The moving device 5 is provided on the lower surface of 4, and a rail or the like for moving the moving device 5 is provided on the lower surface of the moving device 5, and the moving device 5 is configured to move along the rail.

搬入工程で、ワーク１を載置台４に位置決め固定する場合には、ワーク１を吸引方式などにより載置台４に位置決め固定する。   When the work 1 is positioned and fixed on the mounting table 4 in the carrying-in process, the work 1 is positioned and fixed on the mounting table 4 by a suction method or the like.

測定工程では、載置台４に載置されたワーク１の面取り寸法を測定し、所望の面取り加工寸法にワーク１の外周縁部１１を面取り加工できるように、載置台４に固定されたワーク１の位置寸法を測定してワーク１の外周縁部１１を面取り加工する加工条件を設定する。   In the measurement process, the chamfering dimension of the workpiece 1 placed on the mounting table 4 is measured, and the workpiece 1 fixed to the mounting table 4 so that the outer peripheral edge 11 of the workpiece 1 can be chamfered to a desired chamfering dimension. The processing conditions for chamfering the outer peripheral edge portion 11 of the workpiece 1 are set by measuring the position dimension of the workpiece 1.

加工工程では、載置台４に載置されたワーク１の外周縁部１１に砥石２を当接してワーク１の外周縁部１１を面取り加工できるように構成し、砥石２をワーク１の外周縁部１１の上面１２および下面１３に当接して面取り加工を行うように構成している。   In the processing step, the grindstone 2 is brought into contact with the outer peripheral edge 11 of the work 1 placed on the mounting table 4 so that the outer peripheral edge 11 of the work 1 can be chamfered. The chamfering process is performed in contact with the upper surface 12 and the lower surface 13 of the part 11.

ワーク１の外周縁部１１を面取り加工する場合の一例としては、まず、ワーク１の両側面の外周縁部１１に砥石２を当接して、具体的には、図１に図示したように、左側の砥石２をワーク１の左側外周縁部１１の上面１２側に当接し、右側の砥石２をワーク１の右側外周縁部１１の下面１３側に当接して各々面取り加工を行い、次に、左側の砥石２をワーク１の左側外周縁部１１の下面１３側に当接し、右側の砥石２をワーク１の右側外周縁部１１の上面１２側に当接して各々面取り加工を行う。なお、ワーク１の左右の外周縁部１１の上面１２及び下面１３に各々砥石２を当接して、同時に面取り加工を行うように設定することもできる。面取り加工を行う際には、砥石２は駆動軸２１を回転中心にして回転し、載置台４に載置されたワーク１は前後方向に載置台４が移動することによりワーク１の左右の外周縁部１１を面取り加工することができる。   As an example in the case of chamfering the outer peripheral edge 11 of the work 1, first, the grindstone 2 is brought into contact with the outer peripheral edge 11 on both side faces of the work 1, and specifically, as illustrated in FIG. The left grindstone 2 is brought into contact with the upper surface 12 side of the left outer peripheral edge portion 11 of the workpiece 1 and the right grindstone 2 is brought into contact with the lower surface 13 side of the right outer peripheral edge portion 11 of the workpiece 1 to perform chamfering, respectively. The left grindstone 2 is brought into contact with the lower surface 13 side of the left outer peripheral edge 11 of the workpiece 1 and the right grindstone 2 is brought into contact with the upper surface 12 side of the right outer circumferential edge 11 of the workpiece 1 to perform chamfering. Note that the grindstone 2 may be brought into contact with the upper surface 12 and the lower surface 13 of the left and right outer peripheral edge portions 11 of the workpiece 1 so as to perform chamfering at the same time. When chamfering is performed, the grindstone 2 rotates around the drive shaft 21, and the workpiece 1 placed on the placement table 4 moves outside the left and right sides of the workpiece 1 by moving the placement table 4 in the front-rear direction. The peripheral edge portion 11 can be chamfered.

次に、ワーク１の前後方向の外周縁部１１に砥石２を当接して面取り加工を行うが、この際には、両側面の外周縁部１１を面取り加工したワーク１を載置した載置台４を９０度回転させた後、ワーク１の前後方向の外周縁部１１に砥石２を当接して面取り加工を行う。   Next, the grindstone 2 is brought into contact with the outer peripheral edge portion 11 in the front-rear direction of the work 1 to perform chamfering. In this case, the mounting table on which the work 1 having the chamfered outer peripheral edge portions 11 on both sides is placed. After rotating 4 by 90 degrees, the grindstone 2 is brought into contact with the outer peripheral edge 11 in the front-rear direction of the workpiece 1 to perform chamfering.

また、ワーク１の四箇所のコーナー部分の外周縁部１１に砥石２を当接して面取り加工を行う場合は、例えば、図１に図示した状態のワーク１を載置した載置台４を水平方向に右回り及び左回りに各々４５度程度回転させた状態でコーナー部分の外周縁部１１に砥石２を当接して面取り加工を行う。   When chamfering is performed by contacting the grindstone 2 with the outer peripheral edge 11 of the four corners of the workpiece 1, for example, the mounting table 4 on which the workpiece 1 in the state illustrated in FIG. Then, the grindstone 2 is chamfered by abutting the grindstone 2 on the outer peripheral edge portion 11 of the corner portion in a state of being rotated about 45 degrees clockwise and counterclockwise.

以上のように、ワーク１の両側面と前後方向および四箇所のコーナー部分の上面１２及び下面１３の外周縁部１１に砥石２を当接して面取り加工を行うことができるが、面取り加工のやり方は、砥石２を適宜設定することにより、種々のやり方を行うことができる。   As described above, the chamfering process can be performed by bringing the grindstone 2 into contact with the both side surfaces of the work 1, the front and rear direction, and the outer peripheral edge portions 11 of the upper surface 12 and the lower surface 13 of the four corner portions. Various methods can be performed by appropriately setting the grindstone 2.

また、本発明の面取り加工装置は、ワーク１の形状や大きさに合わせて加工条件を適宜設定できるように構成してあるので、多種のワーク１の面取り加工を行うことが出来る。   In addition, the chamfering apparatus of the present invention is configured so that the machining conditions can be appropriately set in accordance with the shape and size of the workpiece 1, so that various types of chamfering of the workpiece 1 can be performed.

次に、ワーク１が異なる形状や大きさであっても、ワーク１を加工したり検査することができるように、異なる形状や大きさのワーク１に対応するワーク１を載置する複数の載置台４を用いてワーク１を加工したり検査したりするワークの製造方法について説明する。なお、載置台４に適宜孔４０を設けて軽量化した複数の載置台４に異なる形状や大きさのワーク１を載置してワーク１を加工したり検査することができるようにするものである。   Next, even if the workpiece 1 has a different shape and size, a plurality of placements for placing the workpiece 1 corresponding to the workpiece 1 having a different shape and size so that the workpiece 1 can be processed or inspected. A method for manufacturing a workpiece in which the workpiece 1 is processed or inspected using the mounting table 4 will be described. It should be noted that the mounting table 4 is appropriately provided with holes 40 so that the workpieces 1 of different shapes and sizes can be mounted on the plurality of mounting tables 4 reduced in weight so that the workpiece 1 can be processed or inspected. is there.

ワーク１が異なる形状や大きさであるため、載置台４を変更する場合には、今まで使用していた載置台４を移動装置５から取り外し、次に加工したり検査するワーク１に対応する載置台４を移動装置５に取り付け固定した後、ワーク１を載置台４に取り付け固定してワーク１を加工したり検査する。   Since the workpiece 1 has a different shape and size, when the mounting table 4 is changed, the mounting table 4 used so far is removed from the moving device 5 and corresponds to the workpiece 1 to be processed or inspected next. After the mounting table 4 is attached and fixed to the moving device 5, the work 1 is attached and fixed to the mounting table 4, and the work 1 is processed or inspected.

載置台４に適宜孔４０を設けて軽量化した場合について説明する。従来との比較のため従来用いていた載置台４を図４に図示し、本発明で使用した載置台４を図２および図３に図示した。図２の載置台４をサンプルＡ、図３の載置台４をサンプルＢとする。   The case where the mounting table 4 is appropriately provided with holes 40 to reduce the weight will be described. For comparison with the prior art, the mounting table 4 conventionally used is shown in FIG. 4, and the mounting table 4 used in the present invention is shown in FIGS. The mounting table 4 in FIG. 2 is a sample A, and the mounting table 4 in FIG.

図４に図示した従来の載置台４の外形形状は、９０５ｍｍ（横）×５１４ｍｍ（縦）×３０ｍｍ（厚さ）の形状で、体積が約１４０００ｃｍ3、質量が約３９Ｋｇである。   The external shape of the conventional mounting table 4 shown in FIG. 4 is 905 mm (horizontal) × 514 mm (vertical) × 30 mm (thickness), has a volume of about 14000 cm 3 and a mass of about 39 kg.

図２に図示したサンプルＡの載置台４は、外形形状は従来の載置台４と同じとし、図２に図示したような孔を複数設けたものであり、体積が約４４００ｃｍ3、質量が約１２Ｋｇである。   The sample A mounting table 4 shown in FIG. 2 has the same external shape as the conventional mounting table 4 and is provided with a plurality of holes as shown in FIG. 2, with a volume of about 4400 cm 3 and a mass of about 12 kg. It is.

図３に図示したサンプルＢの載置台４は、外形形状は従来の載置台４と同じとし、図３に図示したような孔を複数設けたものであり、体積が約５１００ｃｍ3、質量が約１４Ｋｇである。   The mounting base 4 of the sample B shown in FIG. 3 has the same outer shape as the conventional mounting base 4 and has a plurality of holes as shown in FIG. 3, with a volume of about 5100 cm 3 and a mass of about 14 kg. It is.

次に、本発明の載置台４に孔４０を設けて軽量化したが、これにより載置台４の機械的強度が劣化しては困るので、載置台４の構造解析を行った。従来の載置台４とサンプルＡ、サンプルＢの載置台４各々に対して、載置台４の角部に所定の力を加え、その荷重と合成変位について調べた。荷重と合成変位との結果については、従来の載置台４に対する結果は図７に、サンプルＡの結果は図５に、サンプルＢの結果は図６に示した。   Next, although the mounting table 4 of the present invention is provided with a hole 40 to reduce the weight, it is difficult to deteriorate the mechanical strength of the mounting table 4, and thus structural analysis of the mounting table 4 was performed. A predetermined force was applied to the corners of the mounting table 4 with respect to the conventional mounting table 4 and each of the mounting tables 4 of Sample A and Sample B, and the load and the combined displacement were examined. Regarding the results of the load and the combined displacement, the results for the conventional mounting table 4 are shown in FIG. 7, the results of the sample A are shown in FIG. 5, and the results of the sample B are shown in FIG.

従来の載置台４については、荷重２Ｋｇｆで合成変位が０．０１１ｍｍ程度であり、サンプルＡでは、荷重２Ｋｇｆで合成変位が０．０１３ｍｍ程度であり、孔を設けたことによる機械的劣化はほとんどないことがわかる。サンプルＢでは、荷重２Ｋｇｆで合成変位が０．０３２ｍｍ程度であり、サンプルＡに比べ機械的劣化がやや大きいが、この載置台４を用いてワーク１の加工を行った場合には特に問題は発生しなかった。   The conventional mounting table 4 has a combined displacement of about 0.011 mm at a load of 2 kgf, and the sample A has a combined displacement of about 0.013 mm at a load of 2 kgf, and there is almost no mechanical deterioration due to the provision of holes. I understand that. In sample B, the composite displacement is about 0.032 mm at a load of 2 kgf, and the mechanical deterioration is slightly larger than in sample A. However, when the workpiece 1 is processed using this mounting table 4, there is a particular problem. I did not.

以上のように、載置台４に適宜孔４０を設けることにより、載置台４の重量を１／３程度に軽量化でき、載置台４の交換作業を非常に容易にすることができる。従って、ワーク１を載置する載置台４を軽量化して、載置台４を交換する作業効率を高めたワークの製造方法およびワークの製造装置を提供することができる。   As described above, by appropriately providing the hole 40 in the mounting table 4, the weight of the mounting table 4 can be reduced to about ３, and the replacement work of the mounting table 4 can be greatly facilitated. Therefore, it is possible to provide a workpiece manufacturing method and a workpiece manufacturing apparatus in which the mounting table 4 on which the workpiece 1 is mounted is reduced in weight, and the work efficiency for replacing the mounting table 4 is increased.

前述の説明では、ワークの面取り加工装置について詳述したが、他にワークのコーナー切断装置などの加工装置やワークの検査装置など、載置台４を交換して作業を行う製造装置全般に本発明を適用することができる。   In the above description, the workpiece chamfering processing apparatus has been described in detail. However, the present invention is generally applied to manufacturing apparatuses that perform work by exchanging the mounting table 4 such as a processing apparatus such as a workpiece corner cutting apparatus or a workpiece inspection apparatus. Can be applied.

本発明の一実施例に係わる主要部概要構成を示す正面図である。It is a front view which shows the principal part outline structure concerning one Example of this invention. 本発明の一実施例に用いる載置台を示す斜視図である。It is a perspective view which shows the mounting base used for one Example of this invention. 本発明の一実施例に用いる載置台を示す斜視図である。It is a perspective view which shows the mounting base used for one Example of this invention. 従来の載置台を示す斜視図である。It is a perspective view which shows the conventional mounting base. 本発明の一実施例に係わる構造解析結果を示すグラフである。It is a graph which shows the structural analysis result concerning one Example of this invention. 本発明の一実施例に係わる構造解析結果を示すグラフである。It is a graph which shows the structural analysis result concerning one Example of this invention. 従来の構造解析結果を示すグラフである。It is a graph which shows the conventional structural analysis result.

符号の説明Explanation of symbols

１ ワーク
４ 載置台
４０ 孔 1 Work 4 Mounting table 40 holes

Claims (2)

液晶パネルなどの基板等のワークを載置台に載置して加工したり検査したりするワークの製造方法で、前記ワークが異なる形状や大きさであっても、前記ワークを加工したり検査することができるように、前記異なる形状や大きさのワークに対応する前記ワークを載置する複数の載置台を用いて前記ワークを加工したり検査したりするワークの製造方法であって、前記載置台に適宜孔を設けて軽量化した前記複数の載置台に前記異なる形状や大きさのワークを載置してワークを加工したり検査することを特徴とするワークの製造方法。 A method for manufacturing a workpiece, such as a substrate such as a liquid crystal panel, which is mounted on a mounting table for processing or inspection. Even if the workpiece is of a different shape or size, the workpiece is processed or inspected. A method for manufacturing a workpiece, wherein the workpiece is processed or inspected using a plurality of mounting tables on which the workpieces corresponding to the workpieces having different shapes and sizes are mounted. A workpiece manufacturing method, wherein workpieces having different shapes and sizes are mounted on the plurality of mounting tables that are lightened by appropriately providing holes in the mounting table, and the workpieces are processed or inspected. 液晶パネルなどの基板等のワークを載置台に載置して加工したり検査したりするワークの製造装置で、前記ワークが異なる形状や大きさであっても、前記ワークを加工したり検査することができるように、前記異なる形状や大きさのワークに対応する前記ワークを載置する複数の載置台を用いて前記ワークを加工したり検査したりするワークの製造装置であって、前記載置台に適宜孔を設けて軽量化した前記複数の載置台に前記異なる形状や大きさのワークを載置してワークを加工したり検査したりすることができるように構成したことを特徴とするワークの製造装置。 A workpiece manufacturing apparatus that processes and inspects a workpiece such as a substrate such as a liquid crystal panel placed on a mounting table, and processes or inspects the workpiece even if the workpiece has a different shape or size. A workpiece manufacturing apparatus that processes or inspects the workpiece using a plurality of mounting tables on which the workpieces corresponding to the workpieces having different shapes and sizes are mounted, It is configured so that the workpiece can be processed or inspected by placing the workpieces of the different shapes and sizes on the plurality of mounting tables that are reduced in weight by appropriately providing holes in the mounting table. Work manufacturing equipment.
JP2005133488A 2005-04-28 2005-04-28 Method and device for machining workpiece Pending JP2006305697A (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05237734A (en) * 1992-02-28 1993-09-17 Hitachi Seiko Ltd Machining system having pallet changing method
JP2003249542A (en) * 2001-12-20 2003-09-05 Nikon Corp Substrate holder, aligner, and method of manufacturing device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05237734A (en) * 1992-02-28 1993-09-17 Hitachi Seiko Ltd Machining system having pallet changing method
JP2003249542A (en) * 2001-12-20 2003-09-05 Nikon Corp Substrate holder, aligner, and method of manufacturing device

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