KR101578876B1 - robot hand for transferring glass - Google Patents

robot hand for transferring glass Download PDF

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Publication number
KR101578876B1
KR101578876B1 KR1020150156506A KR20150156506A KR101578876B1 KR 101578876 B1 KR101578876 B1 KR 101578876B1 KR 1020150156506 A KR1020150156506 A KR 1020150156506A KR 20150156506 A KR20150156506 A KR 20150156506A KR 101578876 B1 KR101578876 B1 KR 101578876B1
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KR
South Korea
Prior art keywords
alignment
fastening
gap
hole
thickness
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KR1020150156506A
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Korean (ko)
Inventor
김상봉
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에스비로보텍 주식회사
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Priority to KR1020150156506A priority Critical patent/KR101578876B1/en
Application granted granted Critical
Publication of KR101578876B1 publication Critical patent/KR101578876B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

To improve an ability to manufacture and economic efficiency while maintaining precision of a robot hand used in loading and unloading a substrate; the present invention comprises: a fork part including a plurality of hollow fingers separated at preset intervals to load and transfer a substrate on an upper surface, and a fixing frame to connect one side of the hollow fingers; a plate type pad part inserted into an opening hole formed on one surface of the hollow fingers, having an alignment fixing means arranged selectively on an upper surface; and a gap supporting bolt including a screw extension part screwed to a coupling hole formed in the plate type pad part, and an alignment head part arranged on one side of the screw extension part formed in a thickness corresponding to a second interval between the upper surface of the plate type pad part and an inner surface of an edge of the opening hole such that the upper surface of the alignment supporting means and the upper surface of the fork part can be arranged with a preset first interval therebetween.

Description

[0001] The present invention relates to a robot hand for transferring glass,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a robot hand for transferring a substrate, and more particularly, to a robot hand for transferring substrates with improved manufacturability and economy while maintaining the precision of a robot hand used for loading / unloading a substrate.

In general, the substrate may be a flat panel display (FPD) such as a liquid crystal display (LCD), a plasma display panel (PDP), and an organic light emitting diode (OLED) Semiconductor wafers, photomask glass, and the like.

At this time, although the substrate as the flat panel display element and the substrate as the wafer for semiconductor are different from each other in terms of the material surface and the purpose thereof, the substrate is subjected to a series of processing steps such as exposure, development, etching, stripping, rinsing, The process is substantially similar, and the processes are progressed sequentially to produce the substrate.

Meanwhile, the substrate is manufactured by a substrate manufacturer and then supplied to a substrate processing company. When a substrate is supplied from a substrate manufacturer to a substrate processor, the substrate is loaded and transported in a loading box. A robot hand is provided on one side of the transfer device for transferring the substrate.

At this time, the robot hand is provided with a vacuum adsorption pad unit so as to minimize the damage of the substrate when the substrate is loaded / unloaded. In addition to the vacuum adsorption pad unit, the position and the weight of the substrate for stable loading / And a sensor pad unit for detecting the sensor pad unit.

Meanwhile, the conventional robot hand is provided with a fork portion extending in one direction with a plurality of finger portions on one side of the device for loading / unloading the substrate. The vacuum adsorption pad unit or the sensor pad unit is installed along the longitudinal direction of the finger unit.

In particular, Figure 1 is a schematic diagram showing a portion of a conventional substrate transfer robot hand. As shown in FIG. 1, the fingertip 2 is formed in a hollow shape, and an opening 2a is formed in a portion where the pad unit is fastened. The pad unit is inserted into the opening hole 2a and is fastened to the edge of the opening hole 2a by the fastening member 5.

At this time, the pad unit includes alignment fixing means 4 such as a vacuum adsorption unit to be attracted to and fixed to the substrate G, a sensing unit for detecting the position, weight, etc. of the substrate, And a pad portion 3 fastened to the inside of the opening hole 2a. The pad portion 3 includes a fixing surface portion 3a on which the aligning and fixing means 4 is substantially installed and a fastening step portion 4b on the outer side of the fixing surface portion 3a, (3b).

At this time, the fixing surface portion 3a is formed so as to be stepped lower than the coupling step jaw portion 3b so that the projection height of the alignment fixing means 4 exposed to the outside of the opening hole 2a is limited by a predetermined interval do. This is to prevent the alignment fixing means 4 provided on the fixing surface portion 3a from excessively protruding so that the substrate G mounted on the robot hand 1 is bent or broken.

The machining center is machined so that the fixing surface portion 3a is lowered at a predetermined step distance h0 from the upper surface of the clamping step portion 3b as described above.

In detail, the machining center means a multi-numerical control machine tool having an automatic changer or an automatic selection function of a tool and capable of performing various types of machining on two or more sides of the workpiece without preparation and replacement of the workpiece.

That is, in the conventional pad unit 3, a plate original corresponding to the thickness including the fastening step 3b is cut into a desired outer shape using the machining center, and the thickness of the alignment fixing means 4 is And one surface is milled at a depth corresponding to the step gap h0 calculated and considered.

However, such a machining method has a problem in that a machining process and a machining cost for machining using the machining center are increased in order to cut a thick plate plate. In addition, as described above, a thick material is needed to cut off the fixed surface portion 3a. Since the shattered pieces are difficult to be reused, excessive material is wasted and the overall cost for manufacturing the robotic hand 1 is increased There was a problem.

Korean Patent Publication No. 10-2005-0027497

In order to solve the above problems, the present invention provides a robot hand for transferring substrates, which has improved manufacturability and economic efficiency, while maintaining the precision of a robot hand used when loading / unloading a substrate.

According to an aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: a fork portion including a plurality of hollow fingers spaced apart from each other by a predetermined distance for loading and transporting a substrate on an upper surface thereof and a fixed frame connecting one side of the hollow fingers; A flat pad unit inserted into an opening formed in one surface of the hollow finger and having an alignment fixing means selectively provided on an upper surface thereof; And a screw fixing portion provided on one side of the screw extending portion, wherein an upper surface of the aligning and fixing means and an upper surface of the fork portion are arranged at a predetermined first interval, Shaped pad portion and an alignment head portion formed to have a thickness corresponding to a second gap between an upper surface of the pad portion and an inner surface of the opening hole rim.

Here, it is preferable that the second interval is set by comparing the thickness of the alignment fixing means with the first interval and the thickness of the aperture rim.

At this time, it is preferable that at least one washer is further provided between the alignment head part and the flat head part so as to complement the second gap which is selectively controlled according to the thickness of the alignment fixing part.

A through hole is formed in the opening hole at a position corresponding to the fastening hole, and the diameter of the through hole is narrowed toward the inner edge. The fastening head of the fastening member passing through the through hole and the one side of the gap supporting bolt Wherein the spacing support bolt has a fastening groove portion for fastening a fastening extension portion extending from the fastening head portion of the fastening member in one direction so that the inner edge of the fastening hole is clamped to fix the pad portion to the inside of the opening hole, It is preferably formed of a double fastening bolt formed.

Preferably, the screw extension extends longer than the thickness of the flat pad, and the upper and lower surfaces of the alignment head and the end surface of the screw extension correspond to one surface of the flat pad.

Through the above solution, the robot hand for transferring substrates according to the present invention provides the following effects.

First, a structure for supporting the second gap between the flat pad portion and the inner surface of the opening hole such that the fork portion and the alignment fixing means are disposed with a predetermined first gap, The present invention is not limited to the complicated and cumbersome process of cutting the metal plate, but is simple in that the spacer supporting bolts are fastened to a thin plate member capable of supporting the alignment fixing means, so that the manufacturing and economical efficiency can be remarkably improved.

Second, since the alignment head portion is formed to have a thickness corresponding to the second gap calculated by comparing the thickness of the alignment fixing means with the first gap and the thickness of the opening hole rim, The upper surface of the alignment head unit can be easily fixed to the inside of the aperture while being fixed to the pad unit.

Third, the gap supporting bolt has a double bolt structure in which a fastening groove portion for fastening the end portion of the fastening member to fix the gap between the flat pad portion and the inner surface of the opening hole and fix the pad unit inside the opening hole is formed Since only a minimum number of coupling holes are formed in the flat pad portion, the manufacturing time and process of the flat pad portion can be shortened and the durability can be remarkably improved.

Fourthly, even if clearance occurs due to the difference between the second gap adjusted according to the thickness of the alignment fixing means and the alignment head portion thickness of the gap supporting bolt prepared in advance, at least one of the washers is laminated, So that the working efficiency may be significantly improved.

1 is a schematic view showing a part of a conventional substrate transfer robot hand;
2 is a schematic view showing a robot hand for transferring a substrate according to an embodiment of the present invention;
Figure 3 is a projection view showing part A of Figure 2;
4 is a sectional view seen from the CD direction of Fig. 3;
5 is a schematic view showing a modification of Fig.
6 is a sectional view showing a portion B in Fig. 2;

Hereinafter, a robot hand for transferring substrates according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 2 is a schematic view showing a robot hand for transferring a substrate according to an embodiment of the present invention, FIG. 3 is a projection view showing part A of FIG. 2, and FIG. 4 is a sectional view taken along the line C-D of FIG.

2 to 4, the robot hand 100 for transferring a substrate according to the present invention includes a fork portion 10, a flat pad portion 20, and a spacing bolt 30. Here, the robot hand 100 for transferring a substrate is provided at one side of a transfer device (not shown) for transferring the substrate G. In detail, an arm portion (not shown) is extended to one side of the transfer device (not shown), and the robot hand 100 is fastened to the arm portion (not shown). The substrate G can be transported to a desired position as the arm portion (not shown) is driven back and forth, right and left, and up and down by a signal applied from a control unit of the transfer device (not shown).

The fork portion 10 includes a plurality of hollow fingers 11 spaced apart from each other at predetermined intervals and a fixed frame 12 connecting one side of the plurality of hollow fingers 11, desirable. At this time, the lengths and the number of the fingers 11 and the distance between the fingers 11 can be determined corresponding to the area of the substrate G to be transferred. The hollow fingers 11 are made of fiber reinforced plastics (FRP), which is lightweight and has the strength to support and support the substrate G, while being resistant to durability, salt resistance, corrosion resistance, workability, ) Of high strength synthetic resin material. The fixed frame 12 may be connected to the arm portion (not shown) to be driven in response to the signal.

It is preferable that the fork unit 10 is provided with at least one pad unit that can detect the position where the substrate is placed or fix the substrate to the fork unit 10 in a state where the substrate is loaded .

For example, the fork unit 10 may be provided with a plurality of vacuum adsorption pad units P1. Specifically, the vacuum adsorption pad unit P1 includes a vacuum adsorption unit and a pad unit, and drives the pneumatic cylinder provided in the vacuum adsorption unit to generate vacuum adsorption force between the lower surface of the substrate (G) and the vacuum adsorption unit So that the substrate can be fixed on the upper surface of the fork portion 10.

The fork unit 10 may include at least one sensor pad unit P2, P3, and P4. In detail, the sensor pad units P2, P3, and P4 include a sensing unit and a pad unit, and the sensing unit may include a sensing unit The edge position of the substrate G can be detected.

In other words, each of the above-mentioned pad units includes the pad unit and the alignment fixing unit 21 which is capable of aligning and fixing the substrate G to the correct position, such as the vacuum adsorption unit or the sensing unit, on one surface of the pad unit . The vacuum adsorption unit or the sensing unit may be selectively installed in the pad unit according to the purpose of each pad unit.

At this time, the alignment and fixing means 21 may be provided as devices having different thicknesses according to the structure. The pad unit is provided inside each of the hollow fingers 11 so that the interference by the alignment fixing means 21 can be minimized even if the substrate G is mounted on the upper surface of the fork unit 10. [ .

In detail, at least one orifice hole 13 is formed in the longitudinal direction of the hollow finger 11 for installing the pad unit. In addition, it is preferable that the plate-like pad unit 20 provided with the alignment fixing means 21 is inserted and fixed to the inside of the opening hole 13.

Here, the flat pad unit 20 may be formed as a flat plate substantially parallel to the upper and lower surfaces, and may be easily formed by cutting or pressing punching a thin disk plate corresponding to the predetermined contour 20e. In addition, since the flat pad 20 is provided only inside the opening 13 in a state where the aligning and fixing means 21 is installed, it is only required to be thick enough to hold the fixed state, It is remarkably economical.

At this time, the flat pad portion 20 is inserted into the hollow finger 11 through the opening hole 13, and at least two or more outer end sides thereof may be overlapped with the rim of the opening hole 13 It is preferable to form it into a shape having a shape. Accordingly, the plate-like pad portion 20 can be fixed to the inside of the rim of the opening hole 13 by the fastening member 50 described later.

The plate pad 20 may be fixed to the inside of the opening 13 with the alignment and fixing means 21 installed on the upper surface thereof or the plate pad 20 may be fixed to the opening 13 The alignment and fixing means 21 may be provided on the upper surface of the flat pad portion 20. At this time, the upper surface of the plate-like pad portion 20 and the upper surface of the opening portion 13 (h1) are arranged so that the upper surface of the alignment fixing means 21 and the upper surface of the fork portion 10 are disposed with a predetermined first interval h1, And a gap-supporting bolt 30 for supporting the second gap h2 between the inner surfaces of the rims. Here, the upper surface of the fork portion 10 and the upper surface of the hollow finger 11 are substantially equivalent to each other.

More specifically, the gap supporting bolt 30 includes a threaded portion 31 to be screwed into a fastening hole 22 formed in the flat pad portion 20, an alignment head portion 31 provided at one side of the threaded portion 31, (32). The alignment head portion 32 is formed to be larger than the diameter of the fastening hole 22 and larger than the diameter of the through hole 14 formed in the edge of the hole 13 described later. The lower surface 32b of the alignment head portion 32 is restrained in contact with the rim of the fastening hole 22 formed in the flat pad portion 20 and the upper surface 32a is in contact with the through hole 14, It can be restrained in contact with the inner rim 14a of the base member 14a. The alignment head portion 32 is positioned between the inner surface of the rim of the opening hole 13 and the upper surface of the flat pad portion 20 in a state where the gap supporting bolt 30 is fastened to the fastening hole 22, The gap can be stably supported.

At this time, it is preferable that the thickness of the alignment head portion 32 is formed to correspond to the second gap h2. The upper surface of the aligning head portion 32 is inserted into the opening hole 13 after inserting the flat pad portion 20 fastened with the gap supporting bolt 30 into the opening hole 13, The upper surface of the alignment fixing means 21 and the upper surface of the fork portion 10 may be disposed at a predetermined first interval h1 as long as they are tightly coupled to the inner surface.

Here, the second gap h2 is preferably set by comparing the thickness w1 of the alignment fixing means 21 with the first gap h1 and the thickness w2 of the rim of the aperture 13 Do. The lower surface of the substrate G and the upper surface of the aligning and fixing means 21 may be in close contact with each other or may be separated from each other by a predetermined width in some cases in a state where the substrate G is mounted on the upper surface of the fork portion 10. [ Respectively. For example, when the alignment fixing means 21 is provided as the vacuum adsorption portion, the upper surface of the vacuum adsorption portion and the lower surface of the substrate G are substantially in close contact with each other and can be selectively vacuum adsorbed by the pneumatic cylinder. Alternatively, when the alignment fixing unit 21 is provided as a sensing unit, the upper surface of the sensing unit and the lower surface of the substrate G may be spaced apart from each other by a predetermined width.

The first spacing h1 may be varied depending on the type and thickness of the alignment fixing means 21 provided on the flat pad portion 20. At this time, depending on the purpose, the lower end portion excluding the upper end corresponding to the first gap h1 may be inserted into the opening hole 13 depending on the thickness of each of the alignment fixing means. The flat pad portion 20 is preferably arranged to support the lower surface of the alignment fixing means 21 inserted into the opening hole 13.

At this time, a portion of the lower end of the alignment fixing means 21 inserted into the opening hole 13 except the thickness w2 of the edge of the opening hole 13 is set to the second gap h2 desirable.

That is, the present invention eliminates the complicated and cumbersome process of cutting the existing thick pad portion by the second gap h2 by using a machine such as a machining center, and is capable of supporting only the alignment fixture 21 And the gap-supporting bolts 30 are fastened to the thin flat-plate-like pads 20, so that the manufacturing and economical efficiency can be remarkably improved.

It is preferable that the thickness of the alignment fixing means 21 be set to be equal to or greater than the thickness of the fork portion 10 to which the pad unit is to be attached, more specifically the edge thickness (w2) The second interval h2 can be easily calculated by comparison with the interval h1. The spacing support bolt 30 having the alignment head portion 32 set to a thickness corresponding to the calculated second spacing h2 is inserted into the hole 22 formed in the flat pad portion 20, The pad unit can be fastened to the fork portion 10 according to the first gap h1 without a separate dimension aligning means.

The through hole 14 is formed in the edge of the opening 13 so that the through hole 14 is formed at a position corresponding to the fastening hole 22 formed in the flat pad 20. At this time, it is preferable that the through-hole 14 is formed to have a smaller diameter toward the inner edge 14a.

In addition, it is preferable that the gap-supporting bolt 30 is provided with a fastening groove 33 along the longitudinal direction thereof. It is preferable that the fastening groove portion 33 is provided with the fastening member 50 passing through the through hole 14 and fastened to the fastening groove portion 33 at an end thereof.

Here, the fastening member 50 includes a fastening extension portion 51 and a fastening head portion 52. When the fastening extension part 51 passes through the through hole 14 and is fastened to the fastening groove part 33, the lower surface of the fastening head part 52 is connected to the inner edge 14a of the through hole 14 . The inner edge 14a of the through hole 14 may be clamped between the fastening head 52 and the alignment head 32 in correspondence to the direction in which the fastening extension 51 is fastened. have.

That is, the gap supporting bolt 30 of the present invention supports the gap between the flat pad portion 20 and the inner surface of the opening hole 13, And may be formed in a bolt structure. Accordingly, only the minimum fastening hole 22 for fastening the gap supporting bolt 30 can be formed on the flat pad portion 20, so that the durability of the flat pad portion 20 can be remarkably improved have. In addition, since the time and process for drilling the holes to which the bolt members 30 and 50 are fastened are shortened, the productivity may be significantly improved.

On the other hand, FIG. 5 is a schematic view showing a modification of FIG. In the present modification, the basic configuration except for the washer 40 is the same as that of the above-described embodiment, so a detailed description of the same configuration will be omitted.

5, the alignment head portion 32 and the flat pad portion (not shown) are formed to complement the second gap h22 selectively adjusted according to the thickness w11 of the alignment fixing means 21. As shown in FIG. 5, 20 may be further provided with at least one washer 40.

The gap holding bolts 30 may be formed to have various thicknesses of the alignment head portion 32 corresponding to the second gap h22 changed according to the alignment fixing means 21. [ However, this is disadvantageous in that the gap supporting bolts 30 are used separately during the assembling process, so that the manufacturing time is increased, so that the productivity may be lowered.

For this purpose, the spacing support bolts 30 may be used in a standardized manner with the thickness of the alignment head portion 32 being substantially the most used for installing the pad unit. As a result, the work time of the operator is remarkably shortened, and the inconvenience of separately using the gap supporting bolts 30 according to each standard can be solved.

If the second gap h22 calculated according to the different thickness w11 of the alignment fixing means 21 is larger than the thickness of the alignment head portion 32 normalized, It is preferable that at least one washer 40 is further provided to support and support it. That is, if the second gap h22 is larger than the alignment head portion 32, the clearance between the second gap h22 and the flat pad portion 20 can be supported by the washer 40 have. Accordingly, even if a clearance is generated due to a difference between the second gap h22 and the thickness of the alignment head portion 32, the washer 40 can be used to easily and easily compensate for the gap. At this time, at least one or more washers 40 are provided according to the clearance width, and a plurality of the washers 40 may be stacked.

6 is a cross-sectional view showing a portion B in Fig.

2 to 6, the threaded portion 31 extends longer than the thickness of the planar pad portion 20, and the upper surface 32a and the lower surface 32b of the alignment head portion 32, It is preferable that the end face 31a of the threaded portion 31 corresponds to one side of the flat pad portion 20 in parallel with each other. The spacing support bolts 30 can support the gap between the inner surface of the aperture 13 and the flat pad 20 at intervals corresponding to the thickness of the alignment head 32, The end of the threaded portion 21 to be inserted into the fastening hole 22 may be supported by a protruded width.

4, if the second gap h2 corresponds to the thickness of the alignment head portion 32, the gap between the inner surface of the aperture 13 and the upper surface of the plate- Can be supported by the head portion (32).

5, if the second gap h22 adjusted according to the different thickness w11 of the alignment fixing means 21 is larger than the thickness of the alignment head portion 32 that has been standardized, The washer 40 may be provided between the alignment head portion 32 and the flat pad portion 20.

6, if the second gap h222 adjusted according to another thickness w211 of the alignment fixing means 221 is smaller than the thickness of the alignment head portion 32 that has been standardized, The end surface 31a of the opening 31 may be fastened to the inner surface of the opening 13 in a state of being closely supported.

That is, the second spacing (h2, h22, h22) varies depending on the thicknesses (w1, w11, w211) of the alignment fixing means 21 by a simple operation of changing the direction in which the interval adjusting bolts 30 are fastened The pad unit can be installed at a precise interval with the substrate G at all times.

The present invention is characterized in that between the flat pad portion 20 and the inner surface of the opening hole 13 is arranged such that the fork portion 10 and the alignment fixing means 21 are disposed at a predetermined first interval h1, The structure for supporting the second gap h2 is not a complicated and troublesome process of cutting the conventional thick original plate corresponding to each of the above intervals, but a thin plate member capable of supporting the alignment fixing means 21, Since the bolt 30 is fastened with a simple structure, the manufacturing and economical efficiency can be remarkably improved.

At this time, the alignment head part 32 compares the thickness w1 of the alignment fixing means 21 with the first gap h1 and the thickness w2 of the rim of the opening 13, 2 < / RTI > Accordingly, if the upper surface of the alignment head portion 32 is tightly fixed to the inside of the rim of the opening hole 13 while the gap supporting bolt 30 is fastened to the flat pad portion 20, The pad unit can be easily installed in correspondence with the first interval h1 without the dimension alignment means.

The spacing support bolt 30 may be formed of a material that supports the gap between the flat pad portion 20 and the inner surface of the opening hole 13, 50 are formed in a double bolt structure. Accordingly, since only the minimum number of the fastening holes 22 is formed in the flat pad portion 20, the manufacturing time and process of the flat pad portion 20 can be shortened and the durability can be remarkably improved.

The second spacing h2, h22 and h222 adjusted according to the thicknesses w1, w11 and w211 of the alignment fixing means 21 and 221 and the alignment head portion 32 of the gap supporting bolt 30, It is possible to easily and easily compensate and support by stacking at least one or more washers 40 between the alignment head portion 32 and the flat pad portion 20 even if clearances are somewhat generated due to the difference in thickness, Can be significantly improved.

As described above, the present invention is not limited to the above-described embodiments, and variations and modifications may be made by those skilled in the art without departing from the scope of the present invention. And these modifications fall within the scope of the present invention.

10: fork portion 11: hollow finger
12: stationary frame 13:
20: flat pad unit 21: alignment fixing means
22: fastening hole 30: spacer supporting bolt
31: threaded portion 32: alignment head portion
33: fastening groove portion 40: washer
50: fastening member 51: fastening extension
52: fastening head part 100; Substrate transfer robot hand

Claims (5)

A fork portion including a plurality of hollow fingers spaced apart from each other by a predetermined distance for loading and transporting a substrate on an upper surface thereof and a fixed frame connecting one side of the hollow fingers;
A flat pad unit inserted into an opening formed in one surface of the hollow finger and having an alignment fixing means selectively provided on an upper surface thereof; And
And a screw fixing portion provided on one side of the screw extending portion and having an upper surface and an upper surface of the fork portion spaced apart from each other by a predetermined first interval, And an alignment head portion having an alignment head portion formed at a thickness corresponding to a second gap between an upper surface of the pad portion and an inner surface of the opening hole rim. The method according to claim 1,
Wherein the second gap is set by comparing the thickness of the alignment fixing means with the first gap and the thickness of the opening hole rim. 3. The method of claim 2,
Wherein at least one washer is further provided between the alignment head portion and the flat pad portion so as to complement the second gap which is selectively controlled according to the thickness of the alignment fixing means. The method according to claim 1,
A through hole is formed in the opening hole at a position corresponding to the fastening hole, the through hole having a smaller diameter toward the inner edge,
Wherein the spacer bolt is fixed to the inside of the opening hole by clamping the inner edge of the through hole between the fastening head portion of the fastening member passing through the through hole and one side of the gap supporting bolt, Wherein the fastening bolt is formed as a double fastening bolt having a fastening groove portion which is fastened to a fastening extension portion extending from the fastening head portion of the fastening head portion to one side thereof along the length direction thereof. The method according to claim 1,
Wherein the screw extension extends longer than the thickness of the flat pad,
Wherein an upper surface and a lower surface of the alignment head portion and an end surface of the screw extension portion are parallel to one surface of the flat pad portion.
KR1020150156506A 2015-11-09 2015-11-09 robot hand for transferring glass KR101578876B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210037765A (en) * 2019-09-27 2021-04-07 주식회사 선익시스템 Robot hand
CN114426201A (en) * 2020-10-29 2022-05-03 合肥欣奕华智能机器股份有限公司 Substrate carrying robot and control method thereof

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Publication number Priority date Publication date Assignee Title
JPH11188681A (en) * 1997-12-24 1999-07-13 Canon Inc Hand for carrying substrate, and its adsorptive mechanism
JPH11322069A (en) * 1998-05-12 1999-11-24 Canon Inc Board carrying finger assembly
KR20050027497A (en) 2003-09-15 2005-03-21 엘지.필립스 엘시디 주식회사 Robot hand for transportinng glass
KR20140018694A (en) * 2012-08-03 2014-02-13 주식회사 에스에프에이 Robot for transporting weight and substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11188681A (en) * 1997-12-24 1999-07-13 Canon Inc Hand for carrying substrate, and its adsorptive mechanism
JPH11322069A (en) * 1998-05-12 1999-11-24 Canon Inc Board carrying finger assembly
KR20050027497A (en) 2003-09-15 2005-03-21 엘지.필립스 엘시디 주식회사 Robot hand for transportinng glass
KR20140018694A (en) * 2012-08-03 2014-02-13 주식회사 에스에프에이 Robot for transporting weight and substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210037765A (en) * 2019-09-27 2021-04-07 주식회사 선익시스템 Robot hand
KR102273287B1 (en) 2019-09-27 2021-07-07 (주)선익시스템 Robot hand
CN114426201A (en) * 2020-10-29 2022-05-03 合肥欣奕华智能机器股份有限公司 Substrate carrying robot and control method thereof
CN114426201B (en) * 2020-10-29 2024-07-05 合肥欣奕华智能机器股份有限公司 Substrate carrying robot and control method thereof

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