JP2005206371A - 天井走行車システム - Google Patents
天井走行車システム Download PDFInfo
- Publication number
- JP2005206371A JP2005206371A JP2004186312A JP2004186312A JP2005206371A JP 2005206371 A JP2005206371 A JP 2005206371A JP 2004186312 A JP2004186312 A JP 2004186312A JP 2004186312 A JP2004186312 A JP 2004186312A JP 2005206371 A JP2005206371 A JP 2005206371A
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- Prior art keywords
- traveling vehicle
- overhead traveling
- ceiling buffer
- load port
- buffer
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- 239000000872 buffer Substances 0.000 claims abstract description 112
- 230000002265 prevention Effects 0.000 claims description 21
- 241000282472 Canis lupus familiaris Species 0.000 description 16
- 230000003028 elevating effect Effects 0.000 description 8
- 239000000725 suspension Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C15/00—Safety gear
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C15/00—Safety gear
- B66C15/04—Safety gear for preventing collisions, e.g. between cranes or trolleys operating on the same track
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
Abstract
【構成】 天井走行車8の走行レール4の側方で、ロードポート52の反対側に天井バッファ24を設ける。天井バッファ24での物品の高さレベルは、走行中の天井走行車8での物品高さレベルよりもやや低いものとし、少なくとも人と干渉しない高さとする。
【効果】 ロードポートを連続して設けている場合でも天井バッファを設置でき、ロードポート用の停止制御で天井バッファに対して停止でき、天井走行車を走行させずに、天井バッファとロードポート間の移載ができる。
【選択図】 図1
Description
請求項2の発明での追加の課題は、ロードポートと天井バッファ間の移載を容易にし、かつロードポートへの停止制御機構を天井バッファへの停止制御に兼用できるようにすることにある。
請求項3の発明での追加の課題は、天井走行車と天井バッファ間の物品の移載を容易にすることにある。
なお処理装置は広義に解し、搬送する物品を加工する装置(狭義の処理装置)の他に、物品の検査装置などを含む。また天井バッファは、クリーンルームなどの建屋内の天井付近にあるバッファを意味し、必ずしも天井で支持されているバッファとの意味ではない。
(1) ロードポートとロードポートとの間に天井バッファを設ける余地がない場合でも、天井バッファを増設できる。この結果、天井走行車システムの搬送効率を改善できる。
(2) 天井バッファは人と干渉しない高さに設けることができ、特に天井バッファの高さを、天井走行車で搬送中の物品の底面よりやや低い高さとすると、天井バッファの下側に広いスペースをとることができ、また天井バッファと天井走行車間の移載時の、昇降台の昇降ストロークを短くできる。
(3) 天井バッファとロードポートを天井走行車の走行方向に沿ってほぼ同じ位置に配置すると、ロードポートへの停止制御用のドッグなどを用いて、天井バッファへの停止制御を行える。この結果、レールへのドッグの取付などを簡単にできる。またロードポートと天井バッファ間の移載時の、天井走行車の走行を不要にし、あるいはこの間の走行距離を僅かにできる。
(4) 天井バッファに位置決めピンを設けると、天井バッファがカセットを荷下ろしする際にガイドでき、しかも落下防止に有効である。また落下防止柵を設けると、地震時の落下なども確実に防止できる。
(5) 天井バッファに開口を設けると、クリーンエアの流れを遮断することがない。
(6) 天井バッファの材質を透明にする、もしくは天井バッファに開口を設けると、カセットの有無を簡単に目視できる。
4 走行レール
5 天井
6 給電レール
7 吊り下げボルト
8 天井走行車
9 床面
10 走行駆動部
12 非接触給電部
14 横送り部
16 昇降駆動部
18 昇降台
20 落下防止体
22 カセット
24 天井バッファ
26 落下防止柵
28 支持体
30 吊り下げボルト
31 位置決めピン
32 開口
33 端部板
34 リニアガイド
35 ラテラルドライブ
36 吊持材
37 ベルト
38,39 固定部
40,41 スプロケット
42 ボールネジ
43 ボールネジ駆動機構
44 フレーム
45,46 ドッグ
48 支柱
50 処理装置
52 ロードポート
54 出入口
72,82 天井走行車システム
78 支持体
Claims (3)
- 昇降台を昇降させて、走行レールの下方に設けた処理装置のロードポートに対して物品を移載すると共に、走行レールに沿って走行する天井走行車を備えたシステムにおいて、
前記走行レールの側方に、物品載置面が走行中の天井走行車での物品の底面よりも低くなるように、天井バッファを設け、
かつ前記昇降台を天井バッファ上まで横移動させるための手段を天井走行車に設けて、天井バッファ上と走行レール下方のロードポート上との間で物品を移載自在にしたことを特徴とする、天井走行車システム。 - 平面視でかつ走行レールの走行方向位置に関して、前記ロードポートとほぼ同じ位置で、天井走行車との間で物品を移載できるように、前記天井バッファを配置したことを特徴とする、請求項1の天井走行車システム。
- 前記天井バッファから上方へ突き出すように物品の落下防止手段を設けると共に、該落下防止手段の頂部の高さを、走行中の天井走行車での物品の底面よりやや低い高さとしたことを特徴とする、請求項1または2の天井走行車システム。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004186312A JP4045451B2 (ja) | 2003-12-26 | 2004-06-24 | 天井走行車システム |
TW093124689A TW200521051A (en) | 2003-12-26 | 2004-08-17 | Overhead traveling crane system |
KR1020040086186A KR100810530B1 (ko) | 2003-12-26 | 2004-10-27 | 천정주행차 시스템 |
EP04028271A EP1547943B1 (en) | 2003-12-26 | 2004-11-29 | Overhead travelling carriage system |
DE602004023366T DE602004023366D1 (de) | 2003-12-26 | 2004-11-29 | Schienenlaufwagensystem |
US11/004,886 US7441999B2 (en) | 2003-12-26 | 2004-12-07 | Overhead travelling carriage system |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003432431 | 2003-12-26 | ||
JP2004186312A JP4045451B2 (ja) | 2003-12-26 | 2004-06-24 | 天井走行車システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005206371A true JP2005206371A (ja) | 2005-08-04 |
JP4045451B2 JP4045451B2 (ja) | 2008-02-13 |
Family
ID=34554879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004186312A Expired - Lifetime JP4045451B2 (ja) | 2003-12-26 | 2004-06-24 | 天井走行車システム |
Country Status (6)
Country | Link |
---|---|
US (1) | US7441999B2 (ja) |
EP (1) | EP1547943B1 (ja) |
JP (1) | JP4045451B2 (ja) |
KR (1) | KR100810530B1 (ja) |
DE (1) | DE602004023366D1 (ja) |
TW (1) | TW200521051A (ja) |
Cited By (18)
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JP2007196865A (ja) * | 2006-01-26 | 2007-08-09 | Murata Mach Ltd | 搬送システム |
EP1944251A1 (en) | 2007-01-12 | 2008-07-16 | Murata Kikai Kabushiki Kaisha | Automated warehouse and method for controlling stacker crane in automated warehouse |
US7437999B2 (en) | 2005-04-05 | 2008-10-21 | Murata Kikai Kabushiki Kaisha | Overhead traveling vehicle system |
US7516859B2 (en) | 2006-11-27 | 2009-04-14 | Murata Machinery, Ltd. | Overhead traveling vehicle having lateral movement mechanism |
JP2009137740A (ja) * | 2007-12-10 | 2009-06-25 | Murata Mach Ltd | 天井バッファとその移設方法 |
US7578240B2 (en) | 2006-01-17 | 2009-08-25 | Murata Kikai Kabushiki Kaisha | Overhead traveling vehicle system and article storage method in the overhead traveling vehicle system |
EP2093795A1 (en) | 2008-02-20 | 2009-08-26 | Murata Machinery, Ltd. | Suspended platform for overhead traveling carriage |
US7637380B2 (en) | 2007-07-23 | 2009-12-29 | Muratec Automation Co., Ltd. | Transporting apparatus, transporting system, and elongation mechanism |
US7686176B2 (en) | 2007-03-09 | 2010-03-30 | Muratec Automation Co., Ltd. | Suspended type transporting carriage and transporting system |
JP2010165710A (ja) * | 2009-01-13 | 2010-07-29 | Murata Machinery Ltd | 天井搬送車 |
US7796049B2 (en) | 2006-11-02 | 2010-09-14 | Murata Machinery, Ltd. | Overhead traveling vehicle having ID reader |
JP2010215099A (ja) * | 2009-03-17 | 2010-09-30 | Murata Machinery Ltd | 天井搬送システムと物品の移載方法 |
WO2010150531A1 (ja) * | 2009-06-26 | 2010-12-29 | ムラテックオートメーション株式会社 | 保管庫 |
KR101127021B1 (ko) * | 2005-08-30 | 2012-03-26 | 가부시키가이샤 다이후쿠 | 물품 반송 설비 |
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JP4831521B2 (ja) | 2002-06-19 | 2011-12-07 | 村田機械株式会社 | 縦型輪状コンベヤ及びオーバーヘッドホイストを基にした半導体製造のためのマテリアルの自動化処理システム |
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Also Published As
Publication number | Publication date |
---|---|
US20050139564A1 (en) | 2005-06-30 |
JP4045451B2 (ja) | 2008-02-13 |
KR100810530B1 (ko) | 2008-03-10 |
US7441999B2 (en) | 2008-10-28 |
DE602004023366D1 (de) | 2009-11-12 |
KR20050066985A (ko) | 2005-06-30 |
TWI324129B (ja) | 2010-05-01 |
EP1547943B1 (en) | 2009-09-30 |
EP1547943A1 (en) | 2005-06-29 |
TW200521051A (en) | 2005-07-01 |
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