JP2002045775A - Coating apparatus - Google Patents
Coating apparatusInfo
- Publication number
- JP2002045775A JP2002045775A JP2000238174A JP2000238174A JP2002045775A JP 2002045775 A JP2002045775 A JP 2002045775A JP 2000238174 A JP2000238174 A JP 2000238174A JP 2000238174 A JP2000238174 A JP 2000238174A JP 2002045775 A JP2002045775 A JP 2002045775A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- sheet
- suction
- applying member
- conveyor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、枚葉被塗布部材の
表面に塗布液を塗布し、塗膜を形成する塗布装置に関す
るものであり、特にカラー液晶ディスプレイ用カラーフ
ィルタの製造に適した塗布装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus for forming a coating film by applying a coating liquid on a surface of a sheet-to-be-coated member, and more particularly to a coating apparatus suitable for manufacturing a color filter for a color liquid crystal display. Related to the device.
【０００２】[0002]
【従来の技術】従来、枚葉被塗布部材に塗布する塗布装
置として、遠心力で塗膜を形成するスピンコータ、ワイ
ヤ等で塗布液を引き伸ばして塗膜を形成するバーコー
タ、ロールに付着した塗布液を転写して塗膜を形成する
ロールコータ、塗布液の槽に付けて塗膜を形成するディ
ップコータ等が知られ、多方面で適用されている。2. Description of the Related Art Conventionally, as a coating apparatus for coating a single-wafer coated member, a spin coater for forming a coating film by centrifugal force, a bar coater for stretching a coating liquid by a wire or the like, and a coating liquid attached to a roll. A roll coater that transfers a coating film to form a coating film, and a dip coater that forms a coating film by attaching it to a coating solution tank, and the like are known and have been applied in various fields.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上記の
塗布装置のうち、スピンコータは塗布液を遠心力で飛ば
すため、塗布液の使用量が多くなり材料コストが嵩むと
いう問題があり、さらに塗布・乾燥等処理時間が長くな
り、生産能力上の問題もあるものである。However, among the above-mentioned coating apparatuses, the spin coater has a problem that the coating liquid is used by the centrifugal force, so that the amount of the coating liquid used increases and the material cost increases. The processing time is long, and there is a problem in production capacity.
【０００４】また、バーコータやロールコータは、塗布
等の処理時間は短いが、塗布膜とならない余分な塗布液
がでるため、より多くの塗布液の使用量を必要とし、よ
り多くの材料コスト上の問題が生じる方法である。A bar coater or a roll coater has a short processing time for coating or the like, but requires a larger amount of coating liquid to be used because an extra coating liquid that does not form a coating film is generated, and a greater material cost is required. This is a method that causes the problem.
【０００５】さらにまた、ディップコータは、両面塗布
を基本とする方法で片面塗布には不向きであり、そのた
め塗布に不必要な片面を覆う等の工程を要するという製
造工程上の問題のある方法である。Furthermore, the dip coater is a method based on double-sided coating, which is not suitable for single-sided coating, and therefore has a problem in the manufacturing process that requires a step of covering one side unnecessary for coating. is there.
【０００６】本発明は、かかる従来技術の問題点を解決
するものであり、その課題とするところは、枚葉被塗布
部材への片面塗布で塗布液の使用量が少なく、塗布等の
処理時間が短くかつ製造コストの嵩まない塗布装置を提
供することにある。The present invention has been made to solve the above-mentioned problems of the prior art, and it is an object of the present invention to reduce the amount of a coating liquid used for one-side coating on a sheet-to-be-coated member and to reduce the processing time for coating and the like. It is an object of the present invention to provide a coating apparatus which is short and has low production cost.
【０００７】[0007]
【課題を解決するための手段】本発明に於いて上記課題
を達成するために、まず請求項１の発明では、枚葉披塗
布部材の表面に連続して塗布する塗布手段と、複数の枚
葉披塗布部材を、隙間を空ける事無く連続して移動させ
る搬送手段と、隣り合った枚葉披塗布部材の厚さ方向の
段差が生じない様にするための吸引保持手段とを具備す
ることを特徴とする塗布装置としたものである。In order to achieve the above object, the present invention first provides a coating means for continuously coating a surface of a sheet applying member, and a plurality of sheets. Conveying means for continuously moving the leaf applying member without leaving a gap, and suction holding means for preventing a step in the thickness direction between adjacent sheet applying members from occurring. And a coating apparatus characterized by the following.
【０００８】また、請求項２の発明では、前記連続して
塗布する塗布手段は、ダイコータによることを特徴とす
る請求項１記載の塗布装置としたものである。Further, in the invention according to claim 2, the coating means for performing the continuous coating is a coating apparatus according to claim 1, wherein the coating means is a die coater.
【０００９】上記請求項２の発明によれば、連続して塗
布する塗布手段が、ダイコータによるので塗布等の処理
時間を短縮することができ、生産能力の向上に貢献する
塗布装置を提供できる。According to the second aspect of the present invention, since the coating means for performing continuous coating is a die coater, it is possible to shorten the processing time for coating and the like, and to provide a coating apparatus which contributes to an improvement in production capacity.
【００１０】また、請求項３の発明では、前記隙間を空
ける事無く連続して移動させる搬送手段は、少なくとも
上流側に枚葉披塗布部材を移動させるための駆動コンベ
アを、下流側に枚葉披塗布部材がお互いに押し合う様に
するための回転抵抗をもったコンベアを有し、それらコ
ンベアは、固定された平坦な吸引テーブルと駆動する搬
送用ベルトでなることを特徴とする請求項１または２記
載の塗布装置としたものである。[0010] In the invention according to claim 3, the conveying means for continuously moving the gap without leaving a gap includes a driving conveyor for moving the sheet applying member at least upstream, and a sheet conveyor at the downstream side. 2. A conveyor according to claim 1, further comprising a conveyor having a rotational resistance so that the application members are pressed against each other, said conveyor comprising a fixed flat suction table and a driving conveyor belt. Or the coating apparatus described in 2.
【００１１】上記請求項３の発明によれば、上流側に枚
葉披塗布部材を移動させるための駆動コンベアを、下流
側に枚葉披塗布部材がお互いに押し合う様にするための
回転抵抗をもったコンベアを設けることによって、複数
の枚葉披塗布部材を、隙間を空ける事無く連続して移動
させることができるので、塗布液に無駄のない塗布がで
き、材料コストの低減に寄与する塗布装置とすることが
できる。According to the third aspect of the present invention, the driving conveyor for moving the sheet applying member on the upstream side and the rotation resistance for pushing the sheet applying member against each other on the downstream side. By providing a conveyor having a plurality of sheets, a plurality of sheet applying members can be continuously moved without leaving a gap, so that the application liquid can be applied without wasting and the material cost is reduced. It can be a coating device.
【００１２】また、請求項４の発明では、前記吸引保持
手段は、枚葉披塗布部材を傷つけずに保持する表面と吸
引テーブルとの抵抗を減らす潤滑性裏面とでなる、かつ
該吸引テーブルからの吸引を枚葉披塗布部材に伝える複
数列の吸引孔が穿設された搬送用ベルトと、前記枚葉披
塗布部材の移動方向に吸引孔が穿設された複数本の吸引
溝を有する吸引テーブルとでなり、該複数本の吸引溝と
複数列の吸引孔が一致してなることを特徴とする請求項
１、２または３記載の塗布装置としたものである。Further, in the invention according to claim 4, the suction holding means comprises a front surface for holding the sheet applying member without damaging it and a lubricating back surface for reducing the resistance of the suction table. Having a plurality of rows of suction holes for transmitting suction to the sheet applying member, and a plurality of suction grooves having suction holes formed in the moving direction of the sheet applying member. 4. The coating apparatus according to claim 1, wherein the plurality of suction grooves are aligned with a plurality of rows of suction holes.
【００１３】上記請求項４の発明によれば、枚葉披塗布
部材の吸引保持手段を、吸引孔が穿設された複数本の吸
引溝を有する平坦な吸引テーブルと、該吸引テーブルか
らの吸引を枚葉披塗布部材に伝える複数列の吸引孔が穿
設された搬送用ベルトでなるコンベアとすることによっ
て、枚葉被塗布部材を吸引し、隣り合った枚葉披塗布部
材の厚さ方向の段差が生じない様にするので、枚葉披塗
布部材の厚さ方向の段差が無く、連続して移動する、つ
まり枚葉披塗布部材であるが連続した一枚の披塗布部材
と見なす事ができる。従って、従来のダイコータで枚葉
被塗布部材を塗布する場合は、１枚ごとに塗布と停止を
繰り返すため、塗布液の固まりができやすく、その塗布
膜に膜厚むらができやすい欠点があったが、このように
連続した披塗布部材への塗布であれば塗布液の固まりは
でき難いので、塗布膜に膜厚むらも生じ難く良好な品質
の塗布膜を得る塗布装置とすることができる。According to the fourth aspect of the present invention, the suction holding means for the sheet applying member is a flat suction table having a plurality of suction grooves formed with suction holes, and suction from the suction table. To a single-sheet applying member, the conveying belt is provided with a plurality of rows of suction holes, and the sheet-applied member is sucked, and the thickness direction of the adjacent single-sheet applying member is sucked. Since there is no step difference, there is no step in the thickness direction of the sheet applying member, and it moves continuously, that is, it is regarded as a single sheet applying member but a continuous sheet applying member. Can be. Therefore, when a conventional die coater is used to apply a single-wafer coated member, since coating and stopping are repeated for each sheet, there is a disadvantage that the coating liquid tends to be solidified and the coating film tends to have a non-uniform thickness. However, if the coating is performed on the coating member continuously as described above, it is difficult for the coating liquid to solidify, so that the coating film can be formed to obtain a good quality coating film without causing unevenness in the film thickness.
【００１４】また、請求項５の発明では、前記塗布手段
において、枚葉披塗布部材の端部を塗布するタイミング
が、ローダから１枚づつ送り出された枚葉披塗布部材が
前に送り出された枚葉披塗布部材に接触するタイミング
と一致するシーケンスを有することを特徴とする請求項
１、２、３または４記載の塗布装置としたものである。In the invention according to claim 5, in the applying means, the timing for applying the end of the sheet applying member is such that the sheet applying member sent out one by one from the loader is sent forward. 5. The coating apparatus according to claim 1, wherein the coating apparatus has a sequence that coincides with the timing of contact with the sheet-feed coating member.
【００１５】上記請求項５の発明によれば、ローダ（枚
葉披塗布部材が積みこまれたフィダー）から１枚づつ送
り出された枚葉披塗布部材が、前に送り出された枚葉披
塗布部材に接触したわずかな振動が塗布膜に影響したと
しても、接触するタイミングが枚葉披塗布部材の端部を
塗布するタイミングであれば、枚葉披塗布部材が製品と
なった際にその端部は使われる事のない部分なので、不
良品とならずに済む塗布装置とすることができる。According to the fifth aspect of the present invention, the single-sheet applying member delivered one by one from the loader (the feeder on which the single-sheet applying member is stacked) is applied to the single-sheet applying member which has been sent forward. Even if slight vibrations in contact with the member affect the coating film, if the contact timing is the timing to apply the end of the single-wafer coating member, the end of the single-wafer coating member becomes a product when it becomes a product. Since the part is a part that is not used, it is possible to provide a coating apparatus that does not need to be defective.
【００１６】[0016]
【発明の実施の形態】以下本発明の実施の形態を説明す
る。本発明の塗布装置は、図１の側面概略図に示すよう
に、ダイコータ（１）により披塗布部材（１０）の表面
に連続して塗布する塗布手段と、複数の枚葉披塗布部材
（１０）を、隙間を空ける事無く連続して移動させる搬
送手段と、隣り合った枚葉披塗布部材（１０）の厚さ方
向の段差が生じない様にするための吸引保持手段とを具
備するものである。Embodiments of the present invention will be described below. As shown in the schematic side view of FIG. 1, the coating apparatus of the present invention comprises a coating means for continuously coating the surface of a coating member (10) by a die coater (1), and a plurality of sheet coating members (10). ) Is continuously transported without leaving a gap, and suction holding means for preventing a step in the thickness direction of the adjacent sheet applying member (10) from being generated. It is.
【００１７】さらに本発明では、図１の側面概略図に示
すように、前記複数の枚葉披塗布部材（１０）を、隙間
を空ける事無く連続して移動させる搬送手段として、上
流側に枚葉披塗布部材を移動させるための駆動コンベア
（２２）を有し、下流側に枚葉披塗布部材がお互いに押
し合う様にするための回転抵抗をもったコンベア（２
４）を有するようにしたもので、それらコンベア（２
２、２４）の間に、さらに低回転抵抗をもったコンベア
（２６）を設けてもよい。Further, in the present invention, as shown in the schematic side view of FIG. 1, the conveying means for continuously moving the plurality of sheet applying members (10) without leaving a gap is provided on the upstream side as a conveying means. A conveyor (2) having a drive conveyor (22) for moving the leaf applying member and having a rotational resistance on the downstream side so that the sheet applying members are pressed against each other.
4) and the conveyors (2)
Between 2, 24), a conveyor (26) having a further lower rotational resistance may be provided.
【００１８】上記コンベア（２２、２４、２６）は、下
部に固定された平坦な吸引テーブル（４０）を有する搬
送用ベルト（３０）でなり、この搬送用ベルト（３０）
は、図３の上面拡大図に示すように、枚葉披塗布部材
（１０）の裏面を傷つけずに保持する表面と吸引テーブ
ル（４０）との抵抗を減らす潤滑性に優れる裏面とでな
り、かつこの吸引テーブル（４０）からの吸引を枚葉披
塗布部材（１０）に伝える複数列の吸引孔（３２）が穿
設され、この吸引テーブル（４０）は、枚葉披塗布部材
（１０）の移動方向（Ｐ）に吸引孔（４２）が穿設され
た複数本の吸引溝（４４）を有し、この複数本の吸引溝
（４４）と前記搬送用ベルト（３０）に穿設された複数
列の吸引孔（３２）が一致するようにした塗布装置であ
る。The conveyors (22, 24, 26) comprise a conveyor belt (30) having a flat suction table (40) fixed at the lower part, and the conveyor belt (30).
As shown in the enlarged top view of FIG. 3, the upper surface has a surface that holds the rear surface of the sheet applying member (10) without being damaged and a rear surface that is excellent in lubricity to reduce resistance of the suction table (40). Further, a plurality of rows of suction holes (32) for transmitting suction from the suction table (40) to the sheet applying member (10) are formed, and the suction table (40) is provided with the sheet applying member (10). And a plurality of suction grooves (44) having suction holes (42) formed in the moving direction (P) of the plurality of suction grooves (44), and formed in the plurality of suction grooves (44) and the transport belt (30). This is a coating device in which a plurality of rows of suction holes (32) match.
【００１９】また、本発明では、図２の上面概略図に示
すように、上記の塗布手段において枚葉披塗布部材（１
０）の端部（１０ａ）をダイコータ（１）で塗布するタ
イミングが、ローダ（６２）から１枚づつ送り出された
枚葉披塗布部材（１０）が、前に送り出された枚葉披塗
布部材（１０）に接触するタイミングと一致するシーケ
ンスを有する塗布装置（１００）としたものである。Further, in the present invention, as shown in the schematic top view of FIG.
The timing at which the end (10a) of (0) is applied by the die coater (1) is such that the sheet-feeding application member (10) sent out one by one from the loader (62) is used. This is a coating apparatus (100) having a sequence that coincides with the timing of contact with (10).
【００２０】本発明の塗布装置を構成する搬送用ベルト
（３０）としては金属ベルトが好適に使用できる。これ
は、塗布膜の厚さむらを無くすため金属ベルトが厚さを
均一にする加工がしやすいこと、コンベアとしての機能
を満足するための弾性を備えていること、エンドレスに
してつなぎ目の段差を無くす加工が可能なことという長
所があるからである。As the transport belt (30) constituting the coating apparatus of the present invention, a metal belt can be suitably used. This is because the metal belt is easy to work to make the thickness uniform to eliminate unevenness in the thickness of the coating film, it has elasticity to satisfy the function as a conveyor, and the endless step at the joint This is because there is an advantage that it can be eliminated.
【００２１】本発明の塗布装置を構成する吸引テーブル
（４０）としては含油金属真空定盤が好適に使用でき
る。これは、金属ベルト（搬送用ベルト（３０））との
摩擦を最小限にするための含油加工が可能なこと、枚葉
披塗布部材を吸着するための真空チャンバーと吸引孔の
加工がしやすいこと、塗布膜の厚さむらを無くすための
平坦な面を出す加工がしやすいことという長所を発揮す
る事ができる。As the suction table (40) constituting the coating apparatus of the present invention, an oil-containing metal vacuum platen can be suitably used. This is because oil impregnating processing for minimizing friction with the metal belt (conveying belt (30)) can be performed, and a vacuum chamber and a suction hole for adsorbing a single-sheet applying member can be easily processed. In addition, it is possible to exert an advantage that it is easy to form a flat surface for eliminating the thickness unevenness of the coating film.
【００２２】以下に本発明の塗布装置（１００）の１事
例を図面に基づいてより具体的に説明する。Hereinafter, one example of the coating apparatus (100) of the present invention will be described more specifically with reference to the drawings.
【００２３】図１は、本発明の塗布装置（１００）の１
事例を説明する側面概略図であり、図２は、その上面概
略図であり、図３は、そのうちの搬送部の拡大部分上面
図である。FIG. 1 shows one of the coating apparatuses (100) of the present invention.
FIG. 2 is a schematic side view illustrating an example, FIG. 2 is a schematic top view thereof, and FIG. 3 is an enlarged partial top view of a transport unit.
【００２４】まず、本発明の塗布装置（１００）は、図
１および図２に示すように、例えば枚葉被塗布部材（１
０）を供給するカセット（１３）とローダ（６２）でな
る枚葉被塗布部材供給部（７０）、ローラコンベア（１
６）と搬送ベルト（４０）とその搬送ベルト（４０）を
駆動する駆動プーリ（５２）、低回転抵抗プーリ（５
４）、回転抵抗プーリ（５６）と吸引テーブル（４０）
とからなる搬送部（７２）、ダイコータ（１）により枚
葉披塗布部材（１０）の表面に連続して塗布液を塗布す
る塗布部（７６）および塗布の終わった枚葉被塗布部材
（１０）を収納するカセット（１３）とアンローダ（６
４）とからなる収納部（７２）より構成されている。First, as shown in FIGS. 1 and 2, the coating apparatus (100) of the present invention comprises, for example, a single-wafer coating member (1).
0), a sheet-feeding-applied-member supply unit (70) including a loader (62) and a cassette (13), and a roller conveyor (1).
6), a conveyor belt (40), a drive pulley (52) for driving the conveyor belt (40), and a low rotation resistance pulley (5).
4), rotation resistance pulley (56) and suction table (40)
A coating unit (76) for continuously applying the coating liquid to the surface of the sheet applying member (10) by the die coater (1); ) And an unloader (6)
4).
【００２５】そこで本発明の上記塗布装置（１００）を
構成する搬送部（７４）では、まず上流側に枚葉披塗布
部材（１０）を移動させるための駆動コンベア（２２）
が有り、この駆動コンベア（２２）は、固定された吸引
テーブル（４０）とそれを包むように設けられた駆動プ
ーリ（５２）で走行される搬送ベルト（３０）でなり、
下流側に回転抵抗をもったコンベア（２４）が有り、こ
の回転抵抗をもったローラコンベア（２４）は、同様に
固定された吸引テーブル（４０）とそれを包むように設
けられた回転抵抗プーリ（５２）で走行される搬送ベル
ト（３０）でなり、これら駆動コンベア（２２）と回転
抵抗をもったローラコンベア（２４）の間に、低回転抵
抗プーリ（５４）と搬送ベルト（３０）と固定された吸
引テーブル（４０）でなる低回転抵抗コンベア（２６）
を設けたものである。Therefore, in the transport section (74) constituting the coating apparatus (100) of the present invention, first, the drive conveyor (22) for moving the sheet feeding coating member (10) to the upstream side.
The drive conveyor (22) comprises a fixed suction table (40) and a transport belt (30) running on a drive pulley (52) provided to wrap the suction table (40).
On the downstream side, there is a conveyor (24) having a rotational resistance, and the roller conveyor (24) having the rotational resistance includes a similarly fixed suction table (40) and a rotational resistance pulley ( 52), a low rotation resistance pulley (54) and a conveyor belt (30) fixed between the drive conveyor (22) and the roller conveyor (24) having rotational resistance. Low-rotational-resistance conveyor (26) consisting of a drawn suction table (40)
Is provided.
【００２６】このようなコンベア（２２、２６、２４）
の組み合わせにより、中間の低回転抵抗コンベア（２
６）および下流の回転抵抗をもったローラコンベア（２
４）上にある枚葉披塗布部材（１０）は上流にある駆動
コンベア（２２）上の枚葉披塗布部材（１０）に押され
て搬送れる。そのため隙間を空ける事無く連続して移動
させることができる。Such a conveyor (22, 26, 24)
The combination of the intermediate low rotation resistance conveyor (2
6) and a roller conveyor (2
4) The sheet applying member (10) on the upper side is pushed and conveyed by the sheet applying member (10) on the upstream drive conveyor (22). Therefore, it can be continuously moved without leaving a gap.
【００２７】また、本発明の塗布装置では、図３の拡大
上面図に示すように、平坦な面と吸引孔（４２）と吸引
溝（４２）を持つ吸引テーブル（４０）と、連続して移
動する枚葉披塗布部材（１０）との間に有る搬送用ベル
ト（３０）は、枚葉披塗布部材（１０）を傷つけずに保
持する面（表面で枚葉被塗布部材（１０）に接する面）
と、その裏に、吸引テーブル（４０）との抵抗を減らす
潤滑性面（裏面で吸引テーブル（４０）と接する面）
と、吸引テーブル（４０）からの吸引を枚葉披塗布部材
（１０）に伝える吸引孔（３２）が穿設されている。こ
の様な搬送用ベルト（３０）による吸引保持手段を持つ
ため、枚葉披塗布部材（１０）が吸引テーブル（４０）
の平坦な面に吸着されるので、枚葉披塗布部材（１０）
の持つそり、うねりを除去し、また搬送面からの浮きを
防ぐ事ができ、よって均一な厚さの塗布膜が得られる塗
布装置とすることができる。In the coating apparatus of the present invention, as shown in the enlarged top view of FIG. 3, a suction table (40) having a flat surface, suction holes (42) and suction grooves (42) is continuously provided. The conveying belt (30) between the moving sheet applying member (10) and the moving sheet applying member (10) holds the sheet applying member (10) intact without damaging the sheet applying member (10). Contact surface)
And a lubricating surface for reducing the resistance to the suction table (40) (the surface in contact with the suction table (40) on the back surface).
, And a suction hole (32) for transmitting suction from the suction table (40) to the sheet applying member (10). In order to have such a suction holding means by the conveyor belt (30), the sheet-feeding coating member (10) is connected to the suction table (40).
Is applied to the flat surface of the sheet, so that the sheet-fed coating member (10)
It is possible to remove the warp and undulation of the film and to prevent the film from floating from the conveying surface, thereby providing a coating apparatus capable of obtaining a coating film having a uniform thickness.
【００２８】また、本発明の塗布装置では、図３の拡大
上面図に示すように、平坦な面と吸引孔（４２）と吸引
溝（４２）を持つ吸引テーブル（４０）と、連続して移
動する枚葉披塗布部材（１０）との間に有る搬送用ベル
ト（３０）は、枚葉披塗布部材（１０）を傷つけずに保
持する面（表面で枚葉被塗布部材（１０）に接する面）
と、その裏に、吸引テーブル（４０）との抵抗を減らす
潤滑性面（裏面で吸引テーブル（４０）と接する面）
と、吸引テーブル（４０）からの吸引を枚葉披塗布部材
（１０）に伝える吸引孔（３２）が穿設されている。こ
の様な搬送用ベルト（３０）による吸引保持手段を持つ
ため、枚葉披塗布部材（１０）が吸引テーブル（４０）
の平坦な面に吸着されるので、枚葉披塗布部材（１０）
の持つそり、うねりを除去し、また搬送面からの浮きを
防ぐ事ができ、よって均一な厚さの塗布膜が得られる塗
布装置とすることができる。In the coating apparatus of the present invention, as shown in the enlarged top view of FIG. 3, a suction table (40) having a flat surface, suction holes (42) and suction grooves (42) is continuously provided. The conveying belt (30) between the moving sheet applying member (10) and the moving sheet applying member (10) holds the sheet applying member (10) intact without damaging the sheet applying member (10). Contact surface)
And a lubricating surface for reducing the resistance to the suction table (40) (the surface in contact with the suction table (40) on the back surface).
, And a suction hole (32) for transmitting suction from the suction table (40) to the sheet applying member (10). In order to have such a suction holding means by the conveyor belt (30), the sheet-feeding coating member (10) is connected to the suction table (40).
Is applied to the flat surface of the sheet, so that the sheet-fed coating member (10)
It is possible to remove the warp and undulation of the film and to prevent the film from floating from the conveying surface, thereby providing a coating apparatus capable of obtaining a coating film having a uniform thickness.
【００２９】さらにまた、本発明の塗布装置では、図２
に示すように、ローダ（６２）に収納されているカセッ
ト（１３）の中から枚葉披塗布部材（１０）をプッシャ
ー（１４）により押し出す。このようにして送り出され
た枚葉披塗布部材（１０）が、前に送り出された枚葉披
塗布部材（１０）に接触するタイミングと枚葉披塗布部
材（１０）の端部（１０ａ）を塗布するタイミングが一
致するようにしたシーケンスを搭載したもので、これに
より、ローダ（６２）から１枚づつ送り出された枚葉披
塗布部材（１０）２が、前に送り出された枚葉披塗布部
材（１０）に接触したわずかな振動が塗布膜に影響した
としても、枚葉披塗布部材（１０）が製品となった際に
端部（１０ａ）が使われる事はないので、その製品は不
良品とならない。Further, in the coating apparatus of the present invention, FIG.
As shown in (1), the sheet applying member (10) is pushed out of the cassette (13) stored in the loader (62) by the pusher (14). The timing at which the sheet feeding member (10) sent out in this way comes into contact with the sheet feeding member (10) sent before and the end (10a) of the sheet feeding member (10) are determined. This is provided with a sequence in which the application timing is matched, whereby the single-sheet application member (10) 2 sent out one by one from the loader (62) is applied to the single-sheet application previously sent. Even if a slight vibration in contact with the member (10) affects the coating film, the end (10a) is not used when the sheet-like coating member (10) becomes a product. Not defective.
【００３０】[0030]
【発明の効果】本発明は以上の構成であるから、下記に
示す如き効果がある。即ち、枚葉披塗布部材の表面に連
続して塗布する塗布手段と、複数の枚葉披塗布部材を、
隙間を空ける事無く連続して移動させる搬送手段と、隣
り合った枚葉披塗布部材の厚さ方向の段差が生じない様
にするための吸引保持手段とを具備する塗布装置におい
て、連続して塗布する塗布手段を、ダイコータによる塗
布とすることによって、塗布等の処理時間を短縮するこ
とができ、生産能力の向上に貢献する塗布装置を提供で
きる。As described above, the present invention has the following effects. That is, an application unit that continuously applies the surface of the single-sheet applying member, and a plurality of single-sheet applying members,
In a coating apparatus including a transport unit that continuously moves without leaving a gap, and a suction holding unit for preventing a step in the thickness direction between adjacent sheet-feeding coating members from occurring, the coating unit is continuously provided. By using a die coater as the application means for applying, it is possible to shorten the processing time for application and the like, and to provide an application apparatus that contributes to an improvement in production capacity.
【００３１】また、枚葉披塗布部材の搬送手段を、上流
側に枚葉披塗布部材を移動させるための駆動コンベア
と、下流側に枚葉披塗布部材がお互いに押し合う様にす
るための回転抵抗をもったコンベアとを設けた搬送手段
とすることによって、複数の枚葉披塗布部材を、隙間を
空ける事無く連続して移動させることができるので、塗
布液に無駄のない塗布ができ、材料コストの低減に寄与
する塗布装置とすることができる。Further, the conveying means of the sheet applying member is provided with a drive conveyor for moving the sheet applying member upstream and a sheet conveying member for pushing the sheet applying member against each other downstream. By using a conveyor provided with a conveyor having rotational resistance, a plurality of sheet applying members can be continuously moved without leaving a gap, so that the application liquid can be applied without waste. In addition, a coating device that contributes to a reduction in material cost can be provided.
【００３２】また、枚葉披塗布部材の吸引保持手段を、
吸引孔が穿設された複数本の吸引溝を有する平坦な吸引
テーブルと、該吸引テーブルからの吸引を枚葉披塗布部
材に伝える複数列の吸引孔が穿設された搬送用ベルトで
なるコンベアとすることによって、枚葉披塗布部材が吸
引テーブルの平坦な面に吸着され、枚葉披塗布部材の持
つそり、うねりを除去し、また搬送面からの浮きを防ぐ
ことができ、よって均一な厚さの塗布膜が得られる塗布
装置とすることができる。Further, the suction holding means for the sheet applying member is
A conveyor comprising a flat suction table having a plurality of suction grooves provided with suction holes, and a transport belt provided with a plurality of rows of suction holes for transmitting suction from the suction table to the sheet applying member. As a result, the sheet applying member is attracted to the flat surface of the suction table, thereby removing the warp and undulation of the sheet applying member and preventing the sheet from being lifted from the conveying surface. The coating apparatus can obtain a coating film having a thickness.
【００３３】さらにまた、枚葉披塗布部材の端部を塗布
するタイミングが、ローダから１枚づつ送り出された枚
葉披塗布部材が前に送り出された枚葉披塗布部材に接触
するタイミングと一致するシーケンスとすることによっ
て、ローダから１枚づつ送り出された枚葉披塗布部材
が、前に送り出された枚葉披塗布部材に接触したわずか
な振動で塗布膜に影響したとしても、枚葉披塗布部材が
製品となった際にその端部は使われる事のない部分なの
で、不良品とならずに済む塗布装置とすることができ
る。Further, the timing for applying the end of the sheet applying member coincides with the timing at which the sheet applying member delivered one by one from the loader comes into contact with the previously delivered sheet applying member. With this sequence, even if the single-sheet applying member sent out one by one from the loader affects the coating film by a slight vibration that comes in contact with the single-sheet applying member that has been sent earlier, Since the end portion of the coating member is not used when the product becomes a product, it is possible to provide a coating device that does not need to be rejected.
【００３４】従って本発明の塗布装置は、カラー液晶デ
ィスプレイ用カラーフィルタの製造等に好適であり、優
れた実用上の効果を発揮する。Therefore, the coating apparatus of the present invention is suitable for producing a color filter for a color liquid crystal display, etc., and exhibits excellent practical effects.
【図１】本発明の塗布装置の一実施の形態を側面で表し
た概略説明図である。FIG. 1 is a schematic explanatory view showing an embodiment of a coating apparatus according to the present invention in a side view.
【図２】本発明の塗布装置の一実施の形態を上面で表し
た概略説明図である。FIG. 2 is a schematic explanatory view showing one embodiment of a coating apparatus of the present invention from above.
【図３】本発明の塗布装置を構成する搬送部の一実施の
形態を説明するための拡大上面図である。FIG. 3 is an enlarged top view for explaining an embodiment of a transport unit constituting the coating apparatus of the present invention.
１‥‥ダイコータ １０‥‥枚葉被塗布部材 １０ａ‥‥枚葉被塗布部材の端部 １２，１４‥‥プッシャー １３‥‥カセット １６‥‥ローラコンベア ２２‥‥駆動コンベア ２４‥‥回転抵抗をもったコンベア ２６‥‥低回転抵抗をもったコンベア ３０‥‥搬送用ベルト ３２‥‥搬送用ベルトの吸引孔 ４０‥‥吸引テーブル ４２‥‥吸引テーブルの吸引孔 ４４‥‥吸引溝 ５２‥‥駆動プーリ ５４‥‥回転抵抗プーリ ５６‥‥低回転抵抗プーリ ６２‥‥ローダ ６４‥‥アンローダ ７０‥‥枚葉被塗布部材供給部 ７２‥‥枚葉被塗布部材収納部 ７４‥‥搬送部 ７６‥‥塗布部 １００‥‥塗布装置 Ｐ‥‥枚葉被塗布部材の走行方向 DESCRIPTION OF SYMBOLS 1 {Die coater 10} Single-wafer coated member 10a {End of single-wafer coated member 12, 14} Pusher 13} Cassette 16} Roller conveyor 22} Drive conveyor 24} Rotational resistance Conveyor 26 ‥‥ Conveyor with low rotation resistance 30 ‥‥ Conveyor belt 32 ‥‥ Suction hole of conveyor belt 40 ‥‥ Suction table 42 ‥‥ Suction hole of suction table 44 ‥‥ Suction groove 52 ‥‥ Drive pulley 54 ‥‥ Rotation resistance pulley 56 ‥‥ Low rotation resistance pulley 62 ‥‥ Loader 64 ‥‥ Unloader 70 ‥‥ Sheet-to-be-coated member supply unit 72 ‥‥ Sheet-to-be-coated member storage unit 74 ‥‥ Transportation unit 76 ‥‥ Section 100 {Coating device P} Running direction of single-wafer coated member
Claims (5)
塗布手段と、複数の枚葉披塗布部材を、隙間を空ける事
無く連続して移動させる搬送手段と、隣り合った枚葉披
塗布部材の厚さ方向の段差が生じない様にするための吸
引保持手段とを具備することを特徴とする塗布装置。1. A coating means for continuously applying a surface of a sheet applying member, a conveying means for continuously moving a plurality of sheet applying members without leaving a gap, and an adjacent sheet. A coating device comprising suction holding means for preventing a step in the thickness direction of the coating member from occurring.
ータによることを特徴とする請求項１記載の塗布装置。2. The coating apparatus according to claim 1, wherein said coating means for performing continuous coating is a die coater.
る搬送手段は、少なくとも上流側に枚葉披塗布部材を移
動させるための駆動コンベアを、下流側に枚葉披塗布部
材がお互いに押し合う様にするための回転抵抗をもった
コンベアを有し、それらコンベアは、固定された平坦な
吸引テーブルと駆動する搬送用ベルトでなることを特徴
とする請求項１または２記載の塗布装置。3. The conveying means for continuously moving the gap without leaving a gap, the driving means for moving the sheet applying member at least upstream, and the sheet applying member pushing each other downstream. 3. The coating apparatus according to claim 1, further comprising a conveyor having a rotating resistance for making the conveyor fit, the conveyor comprising a fixed flat suction table and a driving conveyor belt.
つけずに保持する表面と吸引テーブルとの抵抗を減らす
潤滑性裏面とでなる、かつ該吸引テーブルからのからの
吸引を枚葉披塗布部材に伝える複数列の吸引孔が穿設さ
れた搬送用ベルトと、前記枚葉披塗布部材の移動方向に
吸引孔が穿設された複数本の吸引溝を有する吸引テーブ
ルとでなり、該複数本の吸引溝と複数列の吸引孔が一致
してなることを特徴とする請求項１、２または３記載の
塗布装置。4. The suction holding means comprises a front surface for holding the sheet applying member without damaging it, and a lubricating back surface for reducing the resistance of the suction table. A conveying belt in which a plurality of rows of suction holes for transmitting to the coating member are formed, and a suction table having a plurality of suction grooves in which suction holes are formed in a moving direction of the sheet feeding member, 4. The coating apparatus according to claim 1, wherein the plurality of suction grooves are aligned with a plurality of rows of suction holes.
部を塗布するタイミングが、ローダから１枚づつ送り出
された枚葉披塗布部材が前に送り出された枚葉披塗布部
材に接触するタイミングと一致するシーケンスを有する
ことを特徴とする請求項１、２、３または４記載の塗布
装置。5. The timing of applying the end portion of the sheet applying member by the applying means is such that the sheet applying member delivered one by one from the loader comes into contact with the sheet applying member delivered forward. 5. The coating apparatus according to claim 1, wherein the coating apparatus has a sequence that coincides with the timing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000238174A JP2002045775A (en) | 2000-08-07 | 2000-08-07 | Coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000238174A JP2002045775A (en) | 2000-08-07 | 2000-08-07 | Coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002045775A true JP2002045775A (en) | 2002-02-12 |
Family
ID=18729917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000238174A Pending JP2002045775A (en) | 2000-08-07 | 2000-08-07 | Coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002045775A (en) |
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| JP2006289162A (en) * | 2005-04-06 | 2006-10-26 | Hitachi Plant Technologies Ltd | Coater |
| WO2007077720A1 (en) * | 2005-12-28 | 2007-07-12 | Gunze Limited | Enveloping device |
| JP2010516477A (en) * | 2007-01-26 | 2010-05-20 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | Method and system for laser processing of continuously moving sheet material |
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| JP2006289162A (en) * | 2005-04-06 | 2006-10-26 | Hitachi Plant Technologies Ltd | Coater |
| JP5014153B2 (en) * | 2005-12-28 | 2012-08-29 | グンゼ株式会社 | Envelope filling device |
| WO2007077720A1 (en) * | 2005-12-28 | 2007-07-12 | Gunze Limited | Enveloping device |
| US7770368B2 (en) | 2005-12-28 | 2010-08-10 | Gunze Limited | Enveloping device |
| KR101063990B1 (en) * | 2005-12-28 | 2011-09-08 | 군제 가부시키가이샤 | Envelope |
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| TWI451927B (en) * | 2007-01-26 | 2014-09-11 | Electro Scient Ind Inc | Methods and systems for laser processing continuously moving sheet material |
| JP2010516477A (en) * | 2007-01-26 | 2010-05-20 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | Method and system for laser processing of continuously moving sheet material |
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| KR20120016587A (en) * | 2010-08-16 | 2012-02-24 | 쥬가이로 고교 가부시키가이샤 | Double side coating device |
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