ITMI20111401A1 - Sensore inerziale e procedimento per la produzione di un sensoreinerziale - Google Patents
Sensore inerziale e procedimento per la produzione di un sensoreinerzialeInfo
- Publication number
- ITMI20111401A1 ITMI20111401A1 ITMI20111401A ITMI20111401A1 IT MI20111401 A1 ITMI20111401 A1 IT MI20111401A1 IT MI20111401 A ITMI20111401 A IT MI20111401A IT MI20111401 A1 ITMI20111401 A1 IT MI20111401A1
- Authority
- IT
- Italy
- Prior art keywords
- inertial sensor
- procedure
- production
- inertial
- sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
- B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0242—Gyroscopes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0154—Torsion bars
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0857—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring
- G01P2015/086—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring using a torsional suspension spring
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201010038809 DE102010038809A1 (de) | 2010-08-03 | 2010-08-03 | Inertialsensor und Verfahren zum Herstellen eines Inertialsensors |
Publications (1)
Publication Number | Publication Date |
---|---|
ITMI20111401A1 true ITMI20111401A1 (it) | 2012-02-04 |
Family
ID=44898797
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI20111401 ITMI20111401A1 (it) | 2010-08-03 | 2011-07-27 | Sensore inerziale e procedimento per la produzione di un sensoreinerziale |
Country Status (3)
Country | Link |
---|---|
US (1) | US8850890B2 (it) |
DE (1) | DE102010038809A1 (it) |
IT (1) | ITMI20111401A1 (it) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012223016B4 (de) | 2012-12-13 | 2024-05-02 | Robert Bosch Gmbh | Inertialsensor mit verringerter Querempfindlichkeit |
DE102013208824A1 (de) * | 2013-05-14 | 2014-11-20 | Robert Bosch Gmbh | Beschleunigungssensor |
DE102013212118A1 (de) * | 2013-06-25 | 2015-01-22 | Robert Bosch Gmbh | Sensorsystem mit zwei Inertialsensoren |
KR101565684B1 (ko) * | 2014-03-14 | 2015-11-03 | 삼성전기주식회사 | Mems 센서용 검출모듈 및 이를 포함하는 mems 센서 |
US10444015B2 (en) * | 2014-03-20 | 2019-10-15 | Kyocera Corporation | Sensor for detecting angular velocity |
DE102014225021B4 (de) | 2014-12-05 | 2023-01-19 | Robert Bosch Gmbh | Mikromechanisches Bauteil, Wafervorrichtung, Herstellungsverfahren für ein mikromechanisches Bauteil und Herstellungsverfahren für eine Wafervorrichtung |
DE102015207639B4 (de) * | 2015-04-27 | 2022-10-06 | Robert Bosch Gmbh | Seismisches Erfassungselement für einen mikromechanischen Sensor |
JP6691882B2 (ja) * | 2017-03-03 | 2020-05-13 | 株式会社日立製作所 | 加速度センサ |
JP2020030067A (ja) * | 2018-08-21 | 2020-02-27 | セイコーエプソン株式会社 | 物理量センサー、センサーデバイス、電子機器、および移動体 |
DE102018217841A1 (de) * | 2018-10-18 | 2020-04-23 | Robert Bosch Gmbh | Mikromechanischer Inertialsensor |
DE102018219546B3 (de) * | 2018-11-15 | 2019-09-12 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
DE102018222615B4 (de) * | 2018-12-20 | 2021-09-02 | Robert Bosch Gmbh | Bauelement mit einer optimierten mehrlagigen Torsionsfeder |
DE102020211303A1 (de) | 2020-09-09 | 2022-03-10 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanisches Bauteil für eine Sensorvorrichtung |
DE102020211923A1 (de) | 2020-09-23 | 2022-03-24 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanischer z-Inertialsensor |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4736629A (en) * | 1985-12-20 | 1988-04-12 | Silicon Designs, Inc. | Micro-miniature accelerometer |
JP2001117026A (ja) | 1999-10-19 | 2001-04-27 | Sony Corp | マイクロミラー装置及び光ディスク装置 |
US6831765B2 (en) | 2001-02-22 | 2004-12-14 | Canon Kabushiki Kaisha | Tiltable-body apparatus, and method of fabricating the same |
-
2010
- 2010-08-03 DE DE201010038809 patent/DE102010038809A1/de active Pending
-
2011
- 2011-07-27 IT ITMI20111401 patent/ITMI20111401A1/it unknown
- 2011-08-03 US US13/197,338 patent/US8850890B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20120031186A1 (en) | 2012-02-09 |
US8850890B2 (en) | 2014-10-07 |
DE102010038809A1 (de) | 2012-02-09 |
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