DE102013212915A8 - Trägheitssensor - Google Patents

Trägheitssensor Download PDF

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Publication number
DE102013212915A8
DE102013212915A8 DE102013212915.7A DE102013212915A DE102013212915A8 DE 102013212915 A8 DE102013212915 A8 DE 102013212915A8 DE 102013212915 A DE102013212915 A DE 102013212915A DE 102013212915 A8 DE102013212915 A8 DE 102013212915A8
Authority
DE
Germany
Prior art keywords
inertial sensor
inertial
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE102013212915.7A
Other languages
English (en)
Other versions
DE102013212915A1 (de
DE102013212915B4 (de
Inventor
Yuhua Zhang
Heewon JEONG
Kiyoko Yamanaka
Masahide Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Astemo Ltd
Original Assignee
Hitachi Automotive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Publication of DE102013212915A1 publication Critical patent/DE102013212915A1/de
Publication of DE102013212915A8 publication Critical patent/DE102013212915A8/de
Application granted granted Critical
Publication of DE102013212915B4 publication Critical patent/DE102013212915B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
DE102013212915.7A 2012-07-06 2013-07-03 Trägheitssensor Expired - Fee Related DE102013212915B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012152012A JP6002481B2 (ja) 2012-07-06 2012-07-06 慣性センサ
JP2012-152012 2012-07-06

Publications (3)

Publication Number Publication Date
DE102013212915A1 DE102013212915A1 (de) 2014-01-09
DE102013212915A8 true DE102013212915A8 (de) 2014-03-13
DE102013212915B4 DE102013212915B4 (de) 2020-01-16

Family

ID=49780829

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013212915.7A Expired - Fee Related DE102013212915B4 (de) 2012-07-06 2013-07-03 Trägheitssensor

Country Status (3)

Country Link
US (1) US9970956B2 (de)
JP (1) JP6002481B2 (de)
DE (1) DE102013212915B4 (de)

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WO2015042700A1 (en) 2013-09-24 2015-04-02 Motion Engine Inc. Mems components and method of wafer-level manufacturing thereof
WO2015013827A1 (en) 2013-08-02 2015-02-05 Motion Engine Inc. Mems motion sensor for sub-resonance angular rate sensing
US20160229684A1 (en) * 2013-09-24 2016-08-11 Motion Engine Inc. Mems device including support structure and method of manufacturing
WO2015103220A1 (en) * 2013-12-30 2015-07-09 Robert Bosch Gmbh Robust inertial sensors
WO2015154173A1 (en) 2014-04-10 2015-10-15 Motion Engine Inc. Mems pressure sensor
JP6285541B2 (ja) * 2014-04-28 2018-02-28 日立オートモティブシステムズ株式会社 加速度検出装置
WO2015184531A1 (en) 2014-06-02 2015-12-10 Motion Engine Inc. Multi-mass mems motion sensor
JP6655281B2 (ja) * 2014-08-19 2020-02-26 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6262629B2 (ja) * 2014-09-30 2018-01-17 株式会社日立製作所 慣性センサ
DE102014223314A1 (de) * 2014-11-14 2016-05-19 Robert Bosch Gmbh Wippeneinrichtung für einen mikromechanischen Z-Sensor
US11287486B2 (en) 2014-12-09 2022-03-29 Motion Engine, Inc. 3D MEMS magnetometer and associated methods
CA3220839A1 (en) 2015-01-15 2016-07-21 Motion Engine Inc. 3d mems device with hermetic cavity
US9840409B2 (en) * 2015-01-28 2017-12-12 Invensense, Inc. Translating Z axis accelerometer
US9952252B2 (en) * 2015-05-15 2018-04-24 Invensense, Inc. Offset rejection electrodes
US11231441B2 (en) * 2015-05-15 2022-01-25 Invensense, Inc. MEMS structure for offset minimization of out-of-plane sensing accelerometers
JP6662509B2 (ja) * 2015-12-28 2020-03-11 新日本無線株式会社 Ｍｅｍｓ素子
JP6401728B2 (ja) * 2016-03-18 2018-10-10 株式会社日立製作所 慣性センサおよびその製造方法
US10802040B2 (en) 2016-04-18 2020-10-13 Hitachi, Ltd. Acceleration sensor
US10247753B2 (en) * 2017-02-14 2019-04-02 Nxp Usa, Inc. MEMS device with off-axis shock protection
JP6691882B2 (ja) * 2017-03-03 2020-05-13 株式会社日立製作所 加速度センサ
JP2020030067A (ja) * 2018-08-21 2020-02-27 セイコーエプソン株式会社 物理量センサー、センサーデバイス、電子機器、および移動体
US11255873B2 (en) * 2018-09-12 2022-02-22 Analog Devices, Inc. Increased sensitivity z-axis accelerometer
JP6766861B2 (ja) * 2018-12-10 2020-10-14 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP7331498B2 (ja) * 2019-06-27 2023-08-23 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP2022014567A (ja) * 2020-07-07 2022-01-20 セイコーエプソン株式会社 慣性センサー及び慣性計測装置

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JPS5845706B2 (ja) 1976-07-07 1983-10-12 三菱製紙株式会社 有機電子写真フイルム
JPS544243A (en) 1977-06-13 1979-01-12 Nippon Kokan Kk Gas agitation of molten steel in ladle
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
JP2000019198A (ja) 1998-06-29 2000-01-21 Zexel Corp 加速度センサ
WO2000000832A1 (fr) 1998-06-29 2000-01-06 Zexel Corporation Procede de detection d'informations de base et multi-detecteur d'informations de base et detecteur d'acceleration montes dans une automobile
JP3966223B2 (ja) * 2003-05-15 2007-08-29 三菱電機株式会社 加速度センサ
WO2003044539A1 (fr) 2001-11-19 2003-05-30 Mitsubishi Denki Kabushiki Kaisha Accelerometre
JP2003240797A (ja) * 2002-02-18 2003-08-27 Mitsubishi Electric Corp 半導体加速度センサ
FI119299B (fi) * 2005-06-17 2008-09-30 Vti Technologies Oy Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi
JP4605087B2 (ja) * 2006-04-28 2011-01-05 パナソニック電工株式会社 静電容量式センサ
DE102006026880B4 (de) * 2006-06-09 2023-02-16 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor
DE102006048381A1 (de) * 2006-10-12 2008-04-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensor zur Erfassung von Beschleunigungen
US7578190B2 (en) 2007-08-03 2009-08-25 Freescale Semiconductor, Inc. Symmetrical differential capacitive sensor and method of making same
US8079262B2 (en) * 2007-10-26 2011-12-20 Rosemount Aerospace Inc. Pendulous accelerometer with balanced gas damping
WO2009125510A1 (ja) * 2008-04-11 2009-10-15 三菱電機株式会社 加速度センサ
DE102008043790B4 (de) 2008-11-17 2017-04-06 Robert Bosch Gmbh Mikromechanisches Bauelement
JP5527019B2 (ja) * 2010-05-28 2014-06-18 セイコーエプソン株式会社 物理量センサーおよび電子機器
US8539836B2 (en) * 2011-01-24 2013-09-24 Freescale Semiconductor, Inc. MEMS sensor with dual proof masses

Also Published As

Publication number Publication date
JP2014016175A (ja) 2014-01-30
DE102013212915A1 (de) 2014-01-09
DE102013212915B4 (de) 2020-01-16
JP6002481B2 (ja) 2016-10-05
US20140007685A1 (en) 2014-01-09
US9970956B2 (en) 2018-05-15

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R012 Request for examination validly filed
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R081 Change of applicant/patentee

Owner name: HITACHI ASTEMO, LTD., HITACHINAKA-SHI, JP

Free format text: FORMER OWNER: HITACHI AUTOMOTIVE SYSTEMS, LTD., HITACHINAKA-SHI, IBARAKI, JP

R082 Change of representative

Representative=s name: MERH-IP MATIAS ERNY REICHL HOFFMANN PATENTANWA, DE

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee