IT1401220B1 - Sensore e metodo di fabbricazione. - Google Patents

Sensore e metodo di fabbricazione.

Info

Publication number
IT1401220B1
IT1401220B1 ITTO2010A000616A ITTO20100616A IT1401220B1 IT 1401220 B1 IT1401220 B1 IT 1401220B1 IT TO2010A000616 A ITTO2010A000616 A IT TO2010A000616A IT TO20100616 A ITTO20100616 A IT TO20100616A IT 1401220 B1 IT1401220 B1 IT 1401220B1
Authority
IT
Italy
Prior art keywords
sensor
manufacturing
Prior art date
Application number
ITTO2010A000616A
Other languages
English (en)
Inventor
Massimo Monichino
Original Assignee
Metallux Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metallux Sa filed Critical Metallux Sa
Priority to ITTO2010A000616A priority Critical patent/IT1401220B1/it
Priority to RU2013101589/28A priority patent/RU2556751C2/ru
Priority to BR112013001053A priority patent/BR112013001053A2/pt
Priority to EP11751941.3A priority patent/EP2593764A1/en
Priority to US13/810,385 priority patent/US8815625B2/en
Priority to PCT/IB2011/053154 priority patent/WO2012007922A1/en
Priority to CN2011800446657A priority patent/CN103229033A/zh
Publication of ITTO20100616A1 publication Critical patent/ITTO20100616A1/it
Application granted granted Critical
Publication of IT1401220B1 publication Critical patent/IT1401220B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Fluid Pressure (AREA)
  • Laminated Bodies (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
ITTO2010A000616A 2010-07-15 2010-07-15 Sensore e metodo di fabbricazione. IT1401220B1 (it)

Priority Applications (7)

Application Number Priority Date Filing Date Title
ITTO2010A000616A IT1401220B1 (it) 2010-07-15 2010-07-15 Sensore e metodo di fabbricazione.
RU2013101589/28A RU2556751C2 (ru) 2010-07-15 2011-07-14 Датчик и способ его изготовления
BR112013001053A BR112013001053A2 (pt) 2010-07-15 2011-07-14 sensor e método de fabricação do mesmo
EP11751941.3A EP2593764A1 (en) 2010-07-15 2011-07-14 Sensor and method of manufacture thereof
US13/810,385 US8815625B2 (en) 2010-07-15 2011-07-14 Sensor and method of manufacture thereof
PCT/IB2011/053154 WO2012007922A1 (en) 2010-07-15 2011-07-14 Sensor and method of manufacture thereof
CN2011800446657A CN103229033A (zh) 2010-07-15 2011-07-14 传感器及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2010A000616A IT1401220B1 (it) 2010-07-15 2010-07-15 Sensore e metodo di fabbricazione.

Publications (2)

Publication Number Publication Date
ITTO20100616A1 ITTO20100616A1 (it) 2012-01-16
IT1401220B1 true IT1401220B1 (it) 2013-07-12

Family

ID=43530809

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2010A000616A IT1401220B1 (it) 2010-07-15 2010-07-15 Sensore e metodo di fabbricazione.

Country Status (7)

Country Link
US (1) US8815625B2 (it)
EP (1) EP2593764A1 (it)
CN (1) CN103229033A (it)
BR (1) BR112013001053A2 (it)
IT (1) IT1401220B1 (it)
RU (1) RU2556751C2 (it)
WO (1) WO2012007922A1 (it)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20120456A1 (it) * 2012-03-23 2013-09-24 Microtel Tecnologie Elettroniche S P A Sensore di pressione ceramico e relativo metodo di produzione, e trasduttore che incorpora un sensore di pressione ceramico
US10415964B2 (en) * 2014-05-30 2019-09-17 General Electric Company Methods for producing passive strain indicator on turbine components
US9410868B2 (en) * 2014-05-30 2016-08-09 General Electric Company Methods for producing strain sensors on turbine components
US9546928B2 (en) * 2014-05-30 2017-01-17 General Electric Company Methods for producing strain sensors on turbine components
EP3012596A1 (de) 2014-10-21 2016-04-27 wenglor fluid GmbH Messeinrichtung zur Bestimmung der Fließgeschwindigkeit eines Mediums in einem Rohr
CA2970077C (en) 2014-12-19 2022-03-01 Investigacion Tecnica Avanzada S.A. De C.V. Water and energy saving process for making whole wheat and whole gluten-free grain flour
US9583406B2 (en) * 2015-03-17 2017-02-28 Infineon Technologies Austria Ag System and method for dual-region singulation
ITUB20150460A1 (it) * 2015-04-16 2016-10-16 Metallux Sa Sensore per la rilevazione di una o piu' grandezze di un fluido, particolarmente un sensore di pressione
TW201641461A (zh) * 2015-04-28 2016-12-01 賀利氏貴金屬北美康舍霍肯有限責任公司 介電物帶組合物
FR3041431B1 (fr) * 2015-09-17 2019-04-05 Safran Electronics & Defense Capteur de pression, dispositif de mesure et systeme de mesure d'une pression comprenant un tel capteur
FR3041430B1 (fr) * 2015-09-17 2017-11-24 Sagem Defense Securite Dispositif de mesure et systeme de mesure d'une pression comprenant un tel capteur
CN109490033B (zh) * 2018-11-12 2020-11-03 中国石油大学(北京) 一种用于去除岩样中无机碳的预处理装置
US11385118B2 (en) 2018-12-07 2022-07-12 Vitesco Technologies USA, LLC Pressure sensor with external vertical electrical interconnection system
EP3671160B1 (de) * 2018-12-21 2024-07-31 Exentis Knowledge GmbH Formkörper sowie verfahren zur herstellung eines formkörpers
RU197682U1 (ru) * 2019-12-27 2020-05-21 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Томский государственный университет" (ТГУ, НИ ТГУ) Полупроводниковый датчик давления
CN111665165B (zh) * 2020-05-26 2021-09-24 中国地质大学（武汉） 一种基于感应电荷的天然气水合物密度传感器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5142915A (en) * 1990-07-06 1992-09-01 Siemens Automotive L.P. Method for fabrication of force sensing elements by laminating dielectric tape
US5285690A (en) * 1992-01-24 1994-02-15 The Foxboro Company Pressure sensor having a laminated substrate
US5634999A (en) 1994-09-06 1997-06-03 Ngk Insulators, Ltd. Method of producing ceramic diaphragm structure having convex diaphragm portion
US7600433B2 (en) * 2007-02-23 2009-10-13 Silicon Micro Sensors Gmbh Pressure sensor with roughened and treated surface for improving adhesive strength and method of manufacturing the sensor
US7513164B1 (en) * 2007-12-18 2009-04-07 Honeywell International Inc. Single diaphragm ATF differential pressure transducer

Also Published As

Publication number Publication date
EP2593764A1 (en) 2013-05-22
BR112013001053A2 (pt) 2016-05-24
WO2012007922A1 (en) 2012-01-19
CN103229033A (zh) 2013-07-31
RU2556751C2 (ru) 2015-07-20
US20130168785A1 (en) 2013-07-04
ITTO20100616A1 (it) 2012-01-16
RU2013101589A (ru) 2014-08-20
US8815625B2 (en) 2014-08-26

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