ITMI20120326A1 - Sensore di frequenza di rotazione - Google Patents

Sensore di frequenza di rotazione

Info

Publication number
ITMI20120326A1
ITMI20120326A1 ITMI20120326A ITMI20120326A1 IT MI20120326 A1 ITMI20120326 A1 IT MI20120326A1 IT MI20120326 A ITMI20120326 A IT MI20120326A IT MI20120326 A1 ITMI20120326 A1 IT MI20120326A1
Authority
IT
Italy
Prior art keywords
rotation frequency
frequency sensor
sensor
rotation
frequency
Prior art date
Application number
Other languages
English (en)
Inventor
Burkhard Kuhlmann
Daniel Christoph Meisel
Torsten Ohms
Robert Sattler
Rolf Scheben
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20120326A1 publication Critical patent/ITMI20120326A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
ITMI20120326 2011-03-30 2012-03-02 Sensore di frequenza di rotazione ITMI20120326A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201110006394 DE102011006394A1 (de) 2011-03-30 2011-03-30 Drehratensensor

Publications (1)

Publication Number Publication Date
ITMI20120326A1 true ITMI20120326A1 (it) 2012-10-01

Family

ID=46832813

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI20120326 ITMI20120326A1 (it) 2011-03-30 2012-03-02 Sensore di frequenza di rotazione

Country Status (5)

Country Link
US (1) US8943891B2 (it)
CN (1) CN102735229B (it)
DE (1) DE102011006394A1 (it)
IT (1) ITMI20120326A1 (it)
TW (1) TWI580928B (it)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2808295B1 (en) * 2013-05-31 2015-12-30 Tronics Microsystems S.A. MEMS-Sensor
DE102013212112A1 (de) * 2013-06-25 2015-01-08 Robert Bosch Gmbh Drehratensensor mit drei sensitiven Achsen und Verfahren zur Herstellung eines Drehratensensors
DE102014225844A1 (de) * 2014-12-15 2016-06-16 Robert Bosch Gmbh Verfahren zum Testen der Funktionalität eines Drehratensensors
US9689677B2 (en) 2015-06-19 2017-06-27 Nxp Usa, Inc. MEMS device with common mode rejection structure
DE102015213447A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh Drehratensensor mit minimierten Störbewegungen in der Antriebsmode
DE102015216460A1 (de) 2015-08-28 2017-03-02 Robert Bosch Gmbh Zweiachsiger ultrarobuster Drehratensensor für Automotive Anwendungen
DE102016213877A1 (de) * 2015-11-20 2017-05-24 Robert Bosch Gmbh Mikromechanischer Drehratensensor und Betriebsverfahren desselben
US10330476B2 (en) * 2017-07-12 2019-06-25 Nxp Usa, Inc. Angular rate sensor with in-phase motion suppression structure
DE102017213640A1 (de) * 2017-08-07 2019-02-07 Robert Bosch Gmbh Drehratensensor, Verfahren zur Herstellung eines Drehratensensors
DE102017216010A1 (de) 2017-09-12 2019-03-14 Robert Bosch Gmbh Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren
DE102018209512A1 (de) 2018-06-14 2019-12-19 Robert Bosch Gmbh Mikromechanisches System
DE102020202157A1 (de) 2020-02-19 2021-08-19 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren
DE102020202158A1 (de) 2020-02-19 2021-08-19 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren
DE102020203921A1 (de) 2020-03-26 2021-09-30 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauelement, aufweisend ein Substrat, eine seismische Masse und eine Aufhängung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10108196A1 (de) * 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
DE10108197A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
DE10203515A1 (de) * 2002-01-30 2003-08-07 Bosch Gmbh Robert Mikromechanischer Drehratensensor
EP1794543B1 (de) * 2004-09-27 2009-11-04 Contitemic Microelectronic GmbH Drehratensensor
DE102007060942A1 (de) * 2007-12-18 2009-06-25 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
CN101514897A (zh) * 2008-02-19 2009-08-26 同济大学 改进型音叉式微机械陀螺
CN101324434A (zh) * 2008-08-01 2008-12-17 北京航空航天大学 一种高性能谐振硅微机械陀螺
DE102009000743B4 (de) * 2009-02-10 2024-01-18 Robert Bosch Gmbh Vibrationskompensation für Drehratensensoren
DE102009027897B4 (de) * 2009-07-21 2023-07-20 Robert Bosch Gmbh Mikromechanischer Drehratensensor
DE102010061755A1 (de) * 2010-11-23 2012-05-24 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors

Also Published As

Publication number Publication date
US8943891B2 (en) 2015-02-03
US20120247206A1 (en) 2012-10-04
DE102011006394A1 (de) 2012-10-04
TWI580928B (zh) 2017-05-01
TW201300736A (zh) 2013-01-01
CN102735229A (zh) 2012-10-17
CN102735229B (zh) 2017-11-17

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