DK2766705T3 - Tryksensor - Google Patents

Tryksensor Download PDF

Info

Publication number
DK2766705T3
DK2766705T3 DK12780604T DK12780604T DK2766705T3 DK 2766705 T3 DK2766705 T3 DK 2766705T3 DK 12780604 T DK12780604 T DK 12780604T DK 12780604 T DK12780604 T DK 12780604T DK 2766705 T3 DK2766705 T3 DK 2766705T3
Authority
DK
Denmark
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Application number
DK12780604T
Other languages
English (en)
Inventor
Steven D Blankenship
Paul D Lucas
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Application granted granted Critical
Publication of DK2766705T3 publication Critical patent/DK2766705T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Fluid Pressure (AREA)
DK12780604T 2011-10-11 2012-10-11 Tryksensor DK2766705T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161545790P 2011-10-11 2011-10-11
PCT/US2012/059697 WO2013055882A1 (en) 2011-10-11 2012-10-11 Pressure sensor

Publications (1)

Publication Number Publication Date
DK2766705T3 true DK2766705T3 (da) 2019-10-28

Family

ID=47116417

Family Applications (1)

Application Number Title Priority Date Filing Date
DK12780604T DK2766705T3 (da) 2011-10-11 2012-10-11 Tryksensor

Country Status (9)

Country Link
US (1) US8887575B2 (da)
EP (1) EP2766705B1 (da)
JP (2) JP5826943B2 (da)
KR (2) KR101588725B1 (da)
CN (2) CN104145179B (da)
DK (1) DK2766705T3 (da)
SG (2) SG10201509452UA (da)
TW (1) TWI532982B (da)
WO (1) WO2013055882A1 (da)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8887575B2 (en) * 2011-10-11 2014-11-18 Mks Instruments, Inc. Pressure sensor
JP6002016B2 (ja) * 2012-11-30 2016-10-05 アズビル株式会社 静電容量型圧力センサ
JP2014126504A (ja) * 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
JP5993312B2 (ja) * 2013-01-16 2016-09-14 東京エレクトロン株式会社 圧力測定器及びその圧力測定器を備える基板処理装置
US9562820B2 (en) * 2013-02-28 2017-02-07 Mks Instruments, Inc. Pressure sensor with real time health monitoring and compensation
JP6231812B2 (ja) * 2013-08-09 2017-11-15 アズビル株式会社 静電容量型圧力センサ
JP6126545B2 (ja) * 2014-03-20 2017-05-10 アズビル株式会社 静電容量型圧力センサ
JP2016097033A (ja) * 2014-11-20 2016-05-30 キヤノン株式会社 静電容量型トランスデューサ、及び被検体情報取得装置
DE102014118616A1 (de) * 2014-12-15 2016-06-16 Endress + Hauser Gmbh + Co. Kg Druckmessaufnehmer
EP3368488A1 (en) * 2015-10-30 2018-09-05 Corning Incorporated A 3d shaped glass-based article, method and apparatus for producing the same
JP6608332B2 (ja) * 2016-05-23 2019-11-20 東京エレクトロン株式会社 成膜装置
JP6815221B2 (ja) * 2017-02-17 2021-01-20 アズビル株式会社 静電容量型圧力センサ
CN107505069B (zh) * 2017-10-17 2023-06-09 河北工业大学 一种基于电容式位移传感器的压力检测***
CN107843379B (zh) * 2017-12-13 2023-09-22 沈阳市传感技术研究所 装配式定电极的电容压力传感器
JP6981885B2 (ja) * 2018-01-23 2021-12-17 アズビル株式会社 静電容量型圧力センサの異常検知方法および装置
CN108593198A (zh) * 2018-04-23 2018-09-28 武汉华星光电技术有限公司 电容式隔膜真空计及干刻蚀设备腔体压力测试***
CN108760140A (zh) * 2018-07-26 2018-11-06 沈阳白云机械有限公司 压力检测仪
CN109746177B (zh) * 2019-03-12 2024-03-12 重庆大学 压电超声换能器及其工作方法
US11287342B2 (en) * 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
TWI783803B (zh) * 2021-12-01 2022-11-11 台灣電力股份有限公司 蒸汽壓力量測方法
CN114264403A (zh) * 2021-12-03 2022-04-01 北京晨晶精仪电子有限公司 真空规颗粒阻挡结构
KR102631601B1 (ko) * 2023-06-05 2024-02-02 주식회사 이너센서 접촉 연소식 가스 센서용 감지 소자 및 이를 포함하는 접촉 연소식 가스 센서

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US4499773A (en) 1983-04-28 1985-02-19 Dresser Industries, Inc. Variable capacitance pressure transducer
US4785669A (en) 1987-05-18 1988-11-22 Mks Instruments, Inc. Absolute capacitance manometers
JPH01262432A (ja) * 1988-04-12 1989-10-19 Nec Corp 隔膜容量型真空計
US4823603A (en) 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode
JPH0375500U (da) * 1989-11-27 1991-07-29
US5271277A (en) 1991-12-23 1993-12-21 The Boc Group, Inc. Capacitance pressure transducer
JP2815279B2 (ja) * 1993-03-30 1998-10-27 本田技研工業株式会社 圧力センサー
US5396803A (en) * 1993-07-07 1995-03-14 Tylan General, Inc. Dual balanced capacitance manometers for suppressing vibration effects
US5808206A (en) 1996-01-16 1998-09-15 Mks Instruments, Inc. Heated pressure transducer assembly
US5625152A (en) 1996-01-16 1997-04-29 Mks Instruments, Inc. Heated pressure transducer assembly
US5811685A (en) 1996-12-11 1998-09-22 Mks Instruments, Inc. Fluid pressure sensor with contaminant exclusion system
SE9700612D0 (sv) 1997-02-20 1997-02-20 Cecap Ab Sensorelement med integrerat referenstryck
US5942692A (en) 1997-04-10 1999-08-24 Mks Instruments, Inc. Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals
US5911162A (en) 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US5965821A (en) 1997-07-03 1999-10-12 Mks Instruments, Inc. Pressure sensor
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6029525A (en) 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design
US6568274B1 (en) 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
JP3260721B2 (ja) * 1999-04-02 2002-02-25 山形日本電気株式会社 ダイヤフラム真空計
TW418296B (en) * 1999-06-30 2001-01-11 Koninkl Philips Electronics Nv A low-pressure apparatus for carrying out steps in the manufacture of a device, a method of manufacturing a device making use of such an apparatus, and a pressure control valve
US6105436A (en) 1999-07-23 2000-08-22 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US6443015B1 (en) 1999-09-10 2002-09-03 Mks Instruments, Inc. Baffle for a capacitive pressure sensor
US6672171B2 (en) 2001-07-16 2004-01-06 Mks Instruments, Inc. Combination differential and absolute pressure transducer for load lock control
US6901808B1 (en) 2002-02-12 2005-06-07 Lam Research Corporation Capacitive manometer having reduced process drift
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
FR2859528B1 (fr) 2003-09-09 2006-01-06 Thales Sa Gyrometre micro-usine a double diapason et a detection dans le plan de la plaque usinee
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JP2005351744A (ja) * 2004-06-10 2005-12-22 Nabtesco Corp 静電容量型圧力センサ
JP4014006B2 (ja) * 2004-06-17 2007-11-28 株式会社山武 圧力センサ
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7000479B1 (en) 2005-05-02 2006-02-21 Mks Instruments, Inc. Heated pressure transducer
JP4989659B2 (ja) 2006-01-18 2012-08-01 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング ダイヤフラムを備える真空測定セル
JP5284959B2 (ja) 2006-08-09 2013-09-11 エム ケー エス インストルメンツ インコーポレーテッド 静電容量圧力変換器における電力損失を一定に制御するためのシステムおよび方法
US7706995B2 (en) 2007-04-16 2010-04-27 Mks Instr Inc Capacitance manometers and methods relating to auto-drift correction
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US8887575B2 (en) * 2011-10-11 2014-11-18 Mks Instruments, Inc. Pressure sensor

Also Published As

Publication number Publication date
US8887575B2 (en) 2014-11-18
JP2016029385A (ja) 2016-03-03
SG11201401275TA (en) 2014-05-29
CN105758579B (zh) 2019-06-11
JP5826943B2 (ja) 2015-12-02
TW201337229A (zh) 2013-09-16
KR20160012247A (ko) 2016-02-02
EP2766705B1 (en) 2019-08-28
CN104145179B (zh) 2016-11-09
KR20140088144A (ko) 2014-07-09
CN105758579A (zh) 2016-07-13
SG10201509452UA (en) 2015-12-30
US20130189160A1 (en) 2013-07-25
CN104145179A (zh) 2014-11-12
TWI532982B (zh) 2016-05-11
JP6063540B2 (ja) 2017-01-18
KR101849211B1 (ko) 2018-04-16
EP2766705A1 (en) 2014-08-20
WO2013055882A1 (en) 2013-04-18
KR101588725B1 (ko) 2016-01-26
JP2014528593A (ja) 2014-10-27

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