IT964961B - Procedimento per il deposito epitas siale di composti ternari del tipo iii v dalla fase liquida - Google Patents
Procedimento per il deposito epitas siale di composti ternari del tipo iii v dalla fase liquidaInfo
- Publication number
- IT964961B IT964961B IT6967872A IT6967872A IT964961B IT 964961 B IT964961 B IT 964961B IT 6967872 A IT6967872 A IT 6967872A IT 6967872 A IT6967872 A IT 6967872A IT 964961 B IT964961 B IT 964961B
- Authority
- IT
- Italy
- Prior art keywords
- epitas
- siale
- deposit
- procedure
- liquid phase
- Prior art date
Links
- 150000001875 compounds Chemical class 0.000 title 1
- 239000007791 liquid phase Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/10—Controlling or regulating
- C30B19/106—Controlling or regulating adding crystallising material or reactants forming it in situ to the liquid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02395—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02546—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02625—Liquid deposition using melted materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02628—Liquid deposition using solutions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7130542A FR2151171A5 (en) | 1971-08-23 | 1971-08-23 | Epitaxial gallium aluminium arsenide layer - from liquid phase soln of aluminium arsenide in gallium |
Publications (1)
Publication Number | Publication Date |
---|---|
IT964961B true IT964961B (it) | 1974-01-31 |
Family
ID=9082124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT6967872A IT964961B (it) | 1971-08-23 | 1972-08-19 | Procedimento per il deposito epitas siale di composti ternari del tipo iii v dalla fase liquida |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS4830691A (ja) |
AU (1) | AU4566672A (ja) |
DE (1) | DE2238664A1 (ja) |
FR (1) | FR2151171A5 (ja) |
IT (1) | IT964961B (ja) |
NL (1) | NL7211381A (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2251369B1 (ja) * | 1973-11-15 | 1978-02-10 | Radiotechnique Compelec | |
JPS5716487B2 (ja) * | 1974-07-01 | 1982-04-05 | ||
JPS524782A (en) * | 1975-06-30 | 1977-01-14 | Matsushita Electric Ind Co Ltd | Liquid phase epitaxial growth method |
JPS52135653A (en) * | 1976-05-10 | 1977-11-12 | Hitachi Ltd | Differential amplifier |
JPS55175239U (ja) * | 1979-06-04 | 1980-12-16 | ||
FR2519032A1 (fr) * | 1981-12-28 | 1983-07-01 | Benchimol Jean Louis | Procede de depot par epitaxie en phase liquide d'un compose ternaire |
JP3199110B2 (ja) | 1997-12-05 | 2001-08-13 | 松下電器産業株式会社 | 蛍光ランプ |
-
1971
- 1971-08-23 FR FR7130542A patent/FR2151171A5/fr not_active Expired
-
1972
- 1972-08-05 DE DE19722238664 patent/DE2238664A1/de active Pending
- 1972-08-17 AU AU45666/72A patent/AU4566672A/en not_active Expired
- 1972-08-18 NL NL7211381A patent/NL7211381A/xx unknown
- 1972-08-19 IT IT6967872A patent/IT964961B/it active
- 1972-08-21 JP JP8287972A patent/JPS4830691A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS4830691A (ja) | 1973-04-23 |
NL7211381A (ja) | 1973-02-27 |
AU4566672A (en) | 1974-02-21 |
DE2238664A1 (de) | 1973-03-15 |
FR2151171A5 (en) | 1973-04-13 |
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