IT1272004B - Impianto di rivestimento sotto alto vuoto - Google Patents
Impianto di rivestimento sotto alto vuotoInfo
- Publication number
- IT1272004B IT1272004B ITMI930461A ITMI930461A IT1272004B IT 1272004 B IT1272004 B IT 1272004B IT MI930461 A ITMI930461 A IT MI930461A IT MI930461 A ITMI930461 A IT MI930461A IT 1272004 B IT1272004 B IT 1272004B
- Authority
- IT
- Italy
- Prior art keywords
- high vacuum
- vacuum coating
- coating system
- bearing wheels
- plate
- Prior art date
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract 3
- 238000001816 cooling Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Coating Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Abstract
In un impianto di rivestimento sotto alto vuoto, ruote portanti (17) di una unità di base di traslazione (2) sono supportate direttamente su una piastra di recipiente (4) in supporti per ruote (16). In tal modo viene eliminato il telaio finora necessario. Dispositivi di raffreddamento e riscaldamento (21) dell'impianto di rivestimento sotto alto vuoto sono previsti su un rimorchio (18) che è accoppiato mobilmente, intorno ad un asse orizzontale (20) alla piastra di recipiente (4) e porta ruote portanti (19) in vicinanza della sua estremità posteriore.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4207527A DE4207527A1 (de) | 1992-03-10 | 1992-03-10 | Hochvakuum-beschichtungsanlage |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI930461A0 ITMI930461A0 (it) | 1993-03-10 |
ITMI930461A1 ITMI930461A1 (it) | 1994-09-10 |
IT1272004B true IT1272004B (it) | 1997-06-10 |
Family
ID=6453648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI930461A IT1272004B (it) | 1992-03-10 | 1993-03-10 | Impianto di rivestimento sotto alto vuoto |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE4207527A1 (it) |
GB (1) | GB2264954B (it) |
IT (1) | IT1272004B (it) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NO121829B (it) * | 1967-02-24 | 1971-04-13 | Sverre Munck As | |
FR2548589B1 (fr) * | 1983-07-07 | 1987-02-20 | Aerospatiale | Procede et dispositif d'impregnation metallique d'un substrat se presentant sous la forme d'une nappe de fibres conductrices du courant electrique |
JPS6127808A (ja) * | 1984-07-16 | 1986-02-07 | Okamura Seisakusho:Kk | 回転式収納棚 |
DE3726113A1 (de) * | 1987-08-06 | 1989-02-16 | Leybold Ag | Vorrichtung zum beschichten von baendern |
DE3738722C2 (de) * | 1987-11-14 | 1995-12-14 | Leybold Ag | Vorrichtung zum beidseitigen Beschichten von Bändern |
JP2525284B2 (ja) * | 1990-10-22 | 1996-08-14 | ティーディーケイ株式会社 | クリ―ン搬送方法及び装置 |
-
1992
- 1992-03-10 DE DE4207527A patent/DE4207527A1/de not_active Withdrawn
- 1992-11-26 GB GB9224787A patent/GB2264954B/en not_active Expired - Fee Related
-
1993
- 1993-03-10 IT ITMI930461A patent/IT1272004B/it active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
ITMI930461A0 (it) | 1993-03-10 |
GB2264954A (en) | 1993-09-15 |
GB2264954B (en) | 1995-09-06 |
DE4207527A1 (de) | 1993-09-16 |
ITMI930461A1 (it) | 1994-09-10 |
GB9224787D0 (en) | 1993-01-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970228 |