IT1272004B - HIGH VACUUM COATING SYSTEM - Google Patents

HIGH VACUUM COATING SYSTEM

Info

Publication number
IT1272004B
IT1272004B ITMI930461A ITMI930461A IT1272004B IT 1272004 B IT1272004 B IT 1272004B IT MI930461 A ITMI930461 A IT MI930461A IT MI930461 A ITMI930461 A IT MI930461A IT 1272004 B IT1272004 B IT 1272004B
Authority
IT
Italy
Prior art keywords
high vacuum
vacuum coating
coating system
bearing wheels
plate
Prior art date
Application number
ITMI930461A
Other languages
Italian (it)
Inventor
Klaus Contzen
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Ag filed Critical Leybold Ag
Publication of ITMI930461A0 publication Critical patent/ITMI930461A0/en
Publication of ITMI930461A1 publication Critical patent/ITMI930461A1/en
Application granted granted Critical
Publication of IT1272004B publication Critical patent/IT1272004B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Coating Apparatus (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

In un impianto di rivestimento sotto alto vuoto, ruote portanti (17) di una unità di base di traslazione (2) sono supportate direttamente su una piastra di recipiente (4) in supporti per ruote (16). In tal modo viene eliminato il telaio finora necessario. Dispositivi di raffreddamento e riscaldamento (21) dell'impianto di rivestimento sotto alto vuoto sono previsti su un rimorchio (18) che è accoppiato mobilmente, intorno ad un asse orizzontale (20) alla piastra di recipiente (4) e porta ruote portanti (19) in vicinanza della sua estremità posteriore.In a high vacuum coating plant, load-bearing wheels (17) of a translation base unit (2) are supported directly on a vessel plate (4) in wheel holders (16). This eliminates the previously needed chassis. Cooling and heating devices (21) of the high vacuum coating system are provided on a trailer (18) which is movably coupled, around a horizontal axis (20) to the container plate (4) and bearing wheels holder (19 ) near its rear end.

ITMI930461A 1992-03-10 1993-03-10 HIGH VACUUM COATING SYSTEM IT1272004B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4207527A DE4207527A1 (en) 1992-03-10 1992-03-10 HIGH VACUUM COATING SYSTEM

Publications (3)

Publication Number Publication Date
ITMI930461A0 ITMI930461A0 (en) 1993-03-10
ITMI930461A1 ITMI930461A1 (en) 1994-09-10
IT1272004B true IT1272004B (en) 1997-06-10

Family

ID=6453648

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI930461A IT1272004B (en) 1992-03-10 1993-03-10 HIGH VACUUM COATING SYSTEM

Country Status (3)

Country Link
DE (1) DE4207527A1 (en)
GB (1) GB2264954B (en)
IT (1) IT1272004B (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO121829B (en) * 1967-02-24 1971-04-13 Sverre Munck As
FR2548589B1 (en) * 1983-07-07 1987-02-20 Aerospatiale METHOD AND DEVICE FOR METALLIC IMPREGNATION OF A SUBSTRATE IN THE FORM OF A PATCH OF FIBERS CONDUCTING ELECTRIC CURRENT
JPS6127808A (en) * 1984-07-16 1986-02-07 Okamura Seisakusho:Kk Rotary containing shelf
DE3726113A1 (en) * 1987-08-06 1989-02-16 Leybold Ag DEVICE FOR COATING TAPES
DE3738722C2 (en) * 1987-11-14 1995-12-14 Leybold Ag Device for coating tapes on both sides
JP2525284B2 (en) * 1990-10-22 1996-08-14 ティーディーケイ株式会社 Clean transfer method and device

Also Published As

Publication number Publication date
ITMI930461A1 (en) 1994-09-10
GB9224787D0 (en) 1993-01-13
GB2264954B (en) 1995-09-06
GB2264954A (en) 1993-09-15
ITMI930461A0 (en) 1993-03-10
DE4207527A1 (en) 1993-09-16

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970228