GB9224787D0 - High vacuum coating apparatus - Google Patents

High vacuum coating apparatus

Info

Publication number
GB9224787D0
GB9224787D0 GB929224787A GB9224787A GB9224787D0 GB 9224787 D0 GB9224787 D0 GB 9224787D0 GB 929224787 A GB929224787 A GB 929224787A GB 9224787 A GB9224787 A GB 9224787A GB 9224787 D0 GB9224787 D0 GB 9224787D0
Authority
GB
United Kingdom
Prior art keywords
high vacuum
coating apparatus
vacuum coating
vacuum
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB929224787A
Other versions
GB2264954B (en
GB2264954A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of GB9224787D0 publication Critical patent/GB9224787D0/en
Publication of GB2264954A publication Critical patent/GB2264954A/en
Application granted granted Critical
Publication of GB2264954B publication Critical patent/GB2264954B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Coating Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
GB9224787A 1992-03-10 1992-11-26 High-vacuum coating apparatus Expired - Fee Related GB2264954B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4207527A DE4207527A1 (en) 1992-03-10 1992-03-10 HIGH VACUUM COATING SYSTEM

Publications (3)

Publication Number Publication Date
GB9224787D0 true GB9224787D0 (en) 1993-01-13
GB2264954A GB2264954A (en) 1993-09-15
GB2264954B GB2264954B (en) 1995-09-06

Family

ID=6453648

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9224787A Expired - Fee Related GB2264954B (en) 1992-03-10 1992-11-26 High-vacuum coating apparatus

Country Status (3)

Country Link
DE (1) DE4207527A1 (en)
GB (1) GB2264954B (en)
IT (1) IT1272004B (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO121829B (en) * 1967-02-24 1971-04-13 Sverre Munck As
FR2548589B1 (en) * 1983-07-07 1987-02-20 Aerospatiale METHOD AND DEVICE FOR METALLIC IMPREGNATION OF A SUBSTRATE IN THE FORM OF A PATCH OF FIBERS CONDUCTING ELECTRIC CURRENT
JPS6127808A (en) * 1984-07-16 1986-02-07 Okamura Seisakusho:Kk Rotary containing shelf
DE3726113A1 (en) * 1987-08-06 1989-02-16 Leybold Ag DEVICE FOR COATING TAPES
DE3738722C2 (en) * 1987-11-14 1995-12-14 Leybold Ag Device for coating tapes on both sides
JP2525284B2 (en) * 1990-10-22 1996-08-14 ティーディーケイ株式会社 Clean transfer method and device

Also Published As

Publication number Publication date
ITMI930461A1 (en) 1994-09-10
IT1272004B (en) 1997-06-10
GB2264954B (en) 1995-09-06
GB2264954A (en) 1993-09-15
ITMI930461A0 (en) 1993-03-10
DE4207527A1 (en) 1993-09-16

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19991126