GB1131165A - Apparatus and a method for depositing a liquid on discrete areas of a substrate - Google Patents
Apparatus and a method for depositing a liquid on discrete areas of a substrateInfo
- Publication number
- GB1131165A GB1131165A GB1742767A GB1742767A GB1131165A GB 1131165 A GB1131165 A GB 1131165A GB 1742767 A GB1742767 A GB 1742767A GB 1742767 A GB1742767 A GB 1742767A GB 1131165 A GB1131165 A GB 1131165A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- stylus
- etch
- areas
- discrete areas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B43—WRITING OR DRAWING IMPLEMENTS; BUREAU ACCESSORIES
- B43L—ARTICLES FOR WRITING OR DRAWING UPON; WRITING OR DRAWING AIDS; ACCESSORIES FOR WRITING OR DRAWING
- B43L13/00—Drawing instruments, or writing or drawing appliances or accessories not otherwise provided for
- B43L13/02—Draughting machines or drawing devices for keeping parallelism
- B43L13/022—Draughting machines or drawing devices for keeping parallelism automatic
- B43L13/024—Drawing heads therefor
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- ing And Chemical Polishing (AREA)
Abstract
1,131,165. Etching. STANDARD TELEPHONES & CABLES Ltd. 17 April, 1967, No. 17427/67. Heading B6J. [Also in Division B2] An etch-resist solution is applied by means of a stylus 32 to the upper surface of a substrate which has been previously coated with a layer of conductive material, e.g. platinum, gold or a platinum/gold alloy. After applying the etch resist solution to the discrete areas, the areas are exposed to a curing process, those areas not covered by the solution are then removed using a weak acid, and finally the etch-resist solution on the discrete areas is removed ultrasonically. The substrate may be quartz, glass or ceramic. The stylus 32 is fed with liquid from a reservoir 29 and is secured to a balanced head 5 which is pivoted about a supporting member and provided with electromagnetic lifting means 14 for moving the stylus into and out of contact with the substrate, the substrate support moving relative to the stylus in accordance with a predetermined pattern.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1742767A GB1131165A (en) | 1967-04-17 | 1967-04-17 | Apparatus and a method for depositing a liquid on discrete areas of a substrate |
ES352847A ES352847A1 (en) | 1967-04-17 | 1968-04-17 | Apparatus and a method for depositing a liquid on discrete areas of a substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1742767A GB1131165A (en) | 1967-04-17 | 1967-04-17 | Apparatus and a method for depositing a liquid on discrete areas of a substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1131165A true GB1131165A (en) | 1968-10-23 |
Family
ID=10095010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1742767A Expired GB1131165A (en) | 1967-04-17 | 1967-04-17 | Apparatus and a method for depositing a liquid on discrete areas of a substrate |
Country Status (2)
Country | Link |
---|---|
ES (1) | ES352847A1 (en) |
GB (1) | GB1131165A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10006124B2 (en) | 2013-07-30 | 2018-06-26 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Slot-die coating method and apparatus |
-
1967
- 1967-04-17 GB GB1742767A patent/GB1131165A/en not_active Expired
-
1968
- 1968-04-17 ES ES352847A patent/ES352847A1/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10006124B2 (en) | 2013-07-30 | 2018-06-26 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Slot-die coating method and apparatus |
Also Published As
Publication number | Publication date |
---|---|
ES352847A1 (en) | 1969-08-01 |
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