JPS5267760A - Method of forming accurate pattern on thin metallic layer on insulator - Google Patents

Method of forming accurate pattern on thin metallic layer on insulator

Info

Publication number
JPS5267760A
JPS5267760A JP14206676A JP14206676A JPS5267760A JP S5267760 A JPS5267760 A JP S5267760A JP 14206676 A JP14206676 A JP 14206676A JP 14206676 A JP14206676 A JP 14206676A JP S5267760 A JPS5267760 A JP S5267760A
Authority
JP
Japan
Prior art keywords
insulator
metallic layer
thin metallic
accurate pattern
forming accurate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14206676A
Other languages
Japanese (ja)
Inventor
Housuka Karuruhaintsu
Maiyaa Geruharuto
Uerunitsutsu Ebaaharuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS5267760A publication Critical patent/JPS5267760A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/08—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by electric discharge, e.g. by spark erosion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00—Duplicating or marking methods; Sheet materials for use therein
    • B41M5/24—Ablative recording, e.g. by burning marks; Spark recording
    • B41M5/245—Electroerosion or spark recording
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
    • G03F7/202—Masking pattern being obtained by thermal means, e.g. laser ablation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/0121—Patterning, e.g. plating or etching by moving electrode
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/056—Using an artwork, i.e. a photomask for exposing photosensitive layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1545—Continuous processing, i.e. involving rolls moving a band-like or solid carrier along a continuous production path

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • ing And Chemical Polishing (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
JP14206676A 1975-11-27 1976-11-26 Method of forming accurate pattern on thin metallic layer on insulator Pending JPS5267760A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752553385 DE2553385A1 (en) 1975-11-27 1975-11-27 PROCESS FOR MANUFACTURING PRECISE PATTERNS IN THIN METALIZATIONS ON PLASTIC FILM

Publications (1)

Publication Number Publication Date
JPS5267760A true JPS5267760A (en) 1977-06-04

Family

ID=5962831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14206676A Pending JPS5267760A (en) 1975-11-27 1976-11-26 Method of forming accurate pattern on thin metallic layer on insulator

Country Status (6)

Country Link
JP (1) JPS5267760A (en)
DE (1) DE2553385A1 (en)
FR (1) FR2333406A1 (en)
GB (1) GB1548737A (en)
IT (1) IT1064412B (en)
NL (1) NL7609185A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2457148A1 (en) * 1979-05-25 1980-12-19 Electricite De France METHOD AND DEVICE FOR LOCAL REMOVAL OF METAL COATING
FR2497394A1 (en) * 1980-12-31 1982-07-02 Europ Composants Electron Capacitance adjustment process in multilayer capacitor mfr. - uses capacitance meter and reference standard to generate electrical signal controlling laser based trimming tool
JPS59114543A (en) * 1982-12-15 1984-07-02 ロネオ・アルカテル・リミテツド Opaque recording sheet and manufacture of offset lithographic plate using same
EP0164461A1 (en) * 1984-06-06 1985-12-18 Roneo Alcatel Limited IMprovements in or relating to electro-sensitive materials
JPS59124888A (en) * 1982-12-30 1984-07-19 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Discharge recording material
JPS59124889A (en) * 1982-12-30 1984-07-19 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Discharge recording material
US4622262A (en) * 1982-12-30 1986-11-11 International Business Machines Corporation Recording materials of improved lubricity for use in electroerosion printing
US4587727A (en) * 1983-07-05 1986-05-13 International Business Machines Corporation System for generating circuit boards using electroeroded sheet layers
GB8324643D0 (en) * 1983-09-14 1983-10-19 British Steel Corp Production of grain orientated steel
DE9409413U1 (en) * 1994-06-13 1994-09-29 Oblf Ges Fuer Elektronik Und F Device for marking metallic samples
DE10254029A1 (en) * 2002-11-20 2004-06-09 Leonhard Kurz Gmbh & Co. Kg Process for producing a partially metallized film element
US8030591B2 (en) * 2006-07-31 2011-10-04 3M Innovative Properties Company Microreplication on a complex surface

Also Published As

Publication number Publication date
FR2333406A1 (en) 1977-06-24
IT1064412B (en) 1985-02-18
GB1548737A (en) 1979-07-18
NL7609185A (en) 1977-06-01
FR2333406B3 (en) 1980-10-17
DE2553385A1 (en) 1977-06-08

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