JPS5763912A - Electrode forming method - Google Patents
Electrode forming methodInfo
- Publication number
- JPS5763912A JPS5763912A JP13938280A JP13938280A JPS5763912A JP S5763912 A JPS5763912 A JP S5763912A JP 13938280 A JP13938280 A JP 13938280A JP 13938280 A JP13938280 A JP 13938280A JP S5763912 A JPS5763912 A JP S5763912A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- films
- conductive film
- adhered onto
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE:To form extremely small electrodes on an insulator substrate by providing a conductive film previously under resist films to be lifted off by applying a lift- off method. CONSTITUTION:A conductive film 20 is adhered onto an insulator substrate 10, on which electronic resist films are provided. Then, the resist films 30 are irradiated selectively with electron beams and dipped in a developing solution to be worked in a prescribed pattern. A metallic film 40 is then adhered onto the entire surface. Simultaneously with the removal of the resist 30, the metallic films 40 adhered onto the resist 30 are also removed. The metallic films 40 left on the substrate 10 surface are used as a mask to remove the conductive film 20 selectively, thus forming electrodes. Consequently, the work of the extremely small electrodes is realized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13938280A JPS5763912A (en) | 1980-10-07 | 1980-10-07 | Electrode forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13938280A JPS5763912A (en) | 1980-10-07 | 1980-10-07 | Electrode forming method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5763912A true JPS5763912A (en) | 1982-04-17 |
Family
ID=15244007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13938280A Pending JPS5763912A (en) | 1980-10-07 | 1980-10-07 | Electrode forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5763912A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7243642B2 (en) | 2001-09-18 | 2007-07-17 | Yanmar Co., Ltd. | Breather device of engine |
-
1980
- 1980-10-07 JP JP13938280A patent/JPS5763912A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7243642B2 (en) | 2001-09-18 | 2007-07-17 | Yanmar Co., Ltd. | Breather device of engine |
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