GB1126055A - Improvements in or relating to the manufacture of micro-electronic circuits - Google Patents

Improvements in or relating to the manufacture of micro-electronic circuits

Info

Publication number
GB1126055A
GB1126055A GB44778/66A GB4477866A GB1126055A GB 1126055 A GB1126055 A GB 1126055A GB 44778/66 A GB44778/66 A GB 44778/66A GB 4477866 A GB4477866 A GB 4477866A GB 1126055 A GB1126055 A GB 1126055A
Authority
GB
United Kingdom
Prior art keywords
mask
frame
space
contact
flexible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB44778/66A
Inventor
Andrew James Grundy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems Electronics Ltd
Original Assignee
Marconi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Co Ltd filed Critical Marconi Co Ltd
Priority to GB44778/66A priority Critical patent/GB1126055A/en
Publication of GB1126055A publication Critical patent/GB1126055A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/7035—Proximity or contact printers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Public Health (AREA)
  • Toxicology (AREA)
  • Atmospheric Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

1,126,055. Semi-conductor devices. MARCONI CO. Ltd. 25 Aug., 1967 [6 Oct., 1966], No. 44778/66. Heading H1K. A semi-conductor body mounted on a flexible plate 7 is brought into contact with a mask mounted on or constituted by a transparent plate 8, e.g. of glass, by evacuating the space 5 defined by the plates 7, 8 and an 0-ring 6. Evacuation is effected through a fine bore tube 9 penetrating the space 5, the tube 9 being either a permanent feature of the apparatus, or a hypodermic needle temporarily piercing the 0-ring 6. The plate 7 may be entirely flexible or may be mounted on a rigid frame. The body may then be exposed to light through the mask, e.g. to define a micro-circuit pattern in a photo-resist coating on an oxide layer through which diffusion may subsequently take place. A prior art arrangement for bringing a semiconductor body into accurately aligned contact with a mask is described, in which the body is mounted on a piston attached by a flexible diaphragm to a metal frame. The mask is mounted on a further frame sealingly joined to the first frame, and after lateral adjustment of the body by mutually perpendicular micrometer screws, the space enclosing the body is evacuated to bring the body into contact with the mask.
GB44778/66A 1966-10-06 1966-10-06 Improvements in or relating to the manufacture of micro-electronic circuits Expired GB1126055A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB44778/66A GB1126055A (en) 1966-10-06 1966-10-06 Improvements in or relating to the manufacture of micro-electronic circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB44778/66A GB1126055A (en) 1966-10-06 1966-10-06 Improvements in or relating to the manufacture of micro-electronic circuits

Publications (1)

Publication Number Publication Date
GB1126055A true GB1126055A (en) 1968-09-05

Family

ID=10434702

Family Applications (1)

Application Number Title Priority Date Filing Date
GB44778/66A Expired GB1126055A (en) 1966-10-06 1966-10-06 Improvements in or relating to the manufacture of micro-electronic circuits

Country Status (1)

Country Link
GB (1) GB1126055A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112242212A (en) * 2019-07-18 2021-01-19 日本航空电子工业株式会社 Cable assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112242212A (en) * 2019-07-18 2021-01-19 日本航空电子工业株式会社 Cable assembly

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