FR2587914B1 - Procede d'epuration du gaz d'un laser excimeur a halogenure de gaz rare - Google Patents

Procede d'epuration du gaz d'un laser excimeur a halogenure de gaz rare

Info

Publication number
FR2587914B1
FR2587914B1 FR868613476A FR8613476A FR2587914B1 FR 2587914 B1 FR2587914 B1 FR 2587914B1 FR 868613476 A FR868613476 A FR 868613476A FR 8613476 A FR8613476 A FR 8613476A FR 2587914 B1 FR2587914 B1 FR 2587914B1
Authority
FR
France
Prior art keywords
gas
excessor
laser
halide
purifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR868613476A
Other languages
English (en)
Other versions
FR2587914A1 (fr
Inventor
Kohzo Hakuta
Minoru Aramaki
Takashi Suenaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60213691A external-priority patent/JPS6274430A/ja
Priority claimed from JP61122206A external-priority patent/JPH0624605B2/ja
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Publication of FR2587914A1 publication Critical patent/FR2587914A1/fr
Application granted granted Critical
Publication of FR2587914B1 publication Critical patent/FR2587914B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Treating Waste Gases (AREA)
FR868613476A 1985-09-28 1986-09-26 Procede d'epuration du gaz d'un laser excimeur a halogenure de gaz rare Expired - Fee Related FR2587914B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60213691A JPS6274430A (ja) 1985-09-28 1985-09-28 希ガスハライドエキシマ−レ−ザ−ガスの精製法
JP61122206A JPH0624605B2 (ja) 1986-05-29 1986-05-29 希ガスハライドエキシマ−レ−ザ−ガスの精製法

Publications (2)

Publication Number Publication Date
FR2587914A1 FR2587914A1 (fr) 1987-04-03
FR2587914B1 true FR2587914B1 (fr) 1991-05-10

Family

ID=26459373

Family Applications (1)

Application Number Title Priority Date Filing Date
FR868613476A Expired - Fee Related FR2587914B1 (fr) 1985-09-28 1986-09-26 Procede d'epuration du gaz d'un laser excimeur a halogenure de gaz rare

Country Status (5)

Country Link
US (1) US4740982A (fr)
CA (1) CA1298959C (fr)
DE (1) DE3632995A1 (fr)
FR (1) FR2587914B1 (fr)
GB (1) GB2182484B (fr)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4977571A (en) * 1988-03-29 1990-12-11 Candela Laser Corporation Dye laser solution circulation system
IT1229210B (it) * 1988-03-31 1991-07-25 Central Glass Co Ltd Metodo e dispositivo per analizzare gas contenenti fluoro.
JPH0756905B2 (ja) * 1988-10-04 1995-06-14 富士電機株式会社 エキシマレーザ装置
JPH02112292A (ja) * 1988-10-20 1990-04-24 Mitsubishi Electric Corp ハロゲンガスレーザのガス制御装置
JPH0760914B2 (ja) * 1989-01-30 1995-06-28 セントラル硝子株式会社 エキシマーレーザーガスの精製法並びにその装置
DE4002185C2 (de) * 1990-01-25 1994-01-13 Lambda Physik Forschung Vorrichtung zum Reinigen von Lasergas
JPH06177B2 (ja) * 1990-02-05 1994-01-05 株式会社荏原総合研究所 Ｃ１ｆ▲下３▼を含有する排ガスの処理方法
DE4009850C1 (fr) * 1990-03-27 1991-11-07 Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh, 3400 Goettingen, De
WO1992016036A1 (fr) * 1991-03-06 1992-09-17 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procede destine a prolonger la duree de vie des gaz de laser a excimere
US5073896A (en) * 1991-04-18 1991-12-17 Lumonics Inc. Purification of laser gases
DE4132218A1 (de) * 1991-09-27 1993-04-01 Leybold Ag Verfahren und vorrichtung zur reinigung und rueckfuehrung von gasen
DE4335079C1 (de) * 1993-10-14 1995-01-19 Lambda Physik Gmbh Elektroden in einer Fluor enthaltenden Entladungseinheit eines gepulsten Gasentladungslasers
US5676914A (en) * 1994-04-26 1997-10-14 Competitive Technologies, Inc. Method for the destruction of methylene iodide
US5696785A (en) * 1994-10-11 1997-12-09 Corning Incorporated Impurity getters in laser enclosures
DE4441199B4 (de) * 1994-11-18 2006-03-16 Lambda Physik Ag Vorrichtung und Verfahren zum Reinigen von in eine Laserkammer einzuleitenden Gasen
DE19528784C1 (de) * 1995-08-04 1996-08-29 Inst Neuwertwirtschaft Gmbh Verfahren zur Reinigung von Inertgasen mittels Sorbenzien
US5646954A (en) * 1996-02-12 1997-07-08 Cymer, Inc. Maintenance strategy control system and monitoring method for gas discharge lasers
US6128323A (en) * 1997-04-23 2000-10-03 Cymer, Inc. Reliable modular production quality narrow-band high REP rate excimer laser
US5982795A (en) * 1997-12-22 1999-11-09 Cymer, Inc. Excimer laser having power supply with fine digital regulation
US6330261B1 (en) 1997-07-18 2001-12-11 Cymer, Inc. Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
FR2770694B1 (fr) * 1997-11-03 1999-12-17 Commissariat Energie Atomique Dispositif de laser a gaz et a moyens de purification de gaz integres
JP3725781B2 (ja) * 1997-12-15 2005-12-14 サイマー， インコーポレイテッド 高パルス速度パルス電源システム
US6240117B1 (en) 1998-01-30 2001-05-29 Cymer, Inc. Fluorine control system with fluorine monitor
US5978406A (en) * 1998-01-30 1999-11-02 Cymer, Inc. Fluorine control system for excimer lasers
US6285701B1 (en) 1998-08-06 2001-09-04 Lambda Physik Ag Laser resonator for improving narrow band emission of an excimer laser
US6490307B1 (en) 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
US6526085B2 (en) * 1998-10-05 2003-02-25 Lambda Physik Ag Performance control system and method for gas discharge lasers
US6212214B1 (en) 1998-10-05 2001-04-03 Lambda Physik Ag Performance control system and method for gas discharge lasers
US6060031A (en) * 1998-07-27 2000-05-09 Trw Inc. Method for neutralizing acid gases from laser exhaust
DE19942455A1 (de) 1998-10-05 2000-04-06 Lambda Physik Gmbh Leistungssteuersystem und -verfahren für Gasentladungslaser
US6965624B2 (en) * 1999-03-17 2005-11-15 Lambda Physik Ag Laser gas replenishment method
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
US6700915B2 (en) 1999-03-12 2004-03-02 Lambda Physik Ag Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections
US6243406B1 (en) 1999-03-12 2001-06-05 Peter Heist Gas performance control system for gas discharge lasers
US6714577B1 (en) 1999-03-17 2004-03-30 Lambda Physik Ag Energy stabilized gas discharge laser
US6603789B1 (en) 2000-07-05 2003-08-05 Lambda Physik Ag Narrow band excimer or molecular fluorine laser with improved beam parameters
US6721345B2 (en) 2000-07-14 2004-04-13 Lambda Physik Ag Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
US6801561B2 (en) 2000-09-25 2004-10-05 Lambda Physik Ag Laser system and method for spectral narrowing through wavefront correction
US6768765B1 (en) * 2001-06-07 2004-07-27 Lambda Physik Ag High power excimer or molecular fluorine laser system
JP2003021619A (ja) * 2001-07-05 2003-01-24 Canon Inc 蛍石及びその分析法、製造法、光学特性評価法
FR2830209B1 (fr) * 2001-09-28 2004-01-16 Hutchinson Procede de fabrication d'un dispositif antivibratoire pour automobile comportant un insert metallique destine a etre adherise avec un elastomere
KR20020096026A (ko) * 2002-10-16 2002-12-28 장성진 고순도의 염기성／불활성 가스 제조를 위한 정제방법 및장치
US7074378B2 (en) * 2004-01-23 2006-07-11 Air Products And Chemicals, Inc. Process for the purification of NF3
DE102007062047A1 (de) 2007-12-21 2009-07-16 Osram Opto Semiconductors Gmbh Kompaktgehäuse
FR2933817B1 (fr) * 2008-07-08 2010-09-03 Sagem Defense Securite Laser comportant un purificateur, centrale inertielle et procede de fabrication correspondants
JP4891969B2 (ja) * 2008-10-03 2012-03-07 株式会社荏原製作所 不純物を除去する不純物除去装置およびその運転方法
US8089998B2 (en) * 2009-05-26 2012-01-03 High Q Technologies Gmbh Ultra-short pulse laser system and method for producing femtosecond or picosecond pulses
EP2256879B1 (fr) * 2009-05-26 2013-10-02 High Q Laser GmbH Système laser à impulsions ultracourtes et procédé de production d'impulsions femto- ou picosecondes
US20130034118A1 (en) * 2011-08-04 2013-02-07 Coherent Gmbh Gas purifier for an excimer laser
WO2015075840A1 (fr) 2013-11-25 2015-05-28 ギガフォトン株式会社 Système de purification de gaz et dispositif laser
CN104953444B (zh) * 2015-07-03 2018-05-01 中国科学院光电研究院 一种用于准分子激光器的气体循环***
US9478934B1 (en) * 2015-07-24 2016-10-25 Lightmachinery Inc. Excimer gas purification
JP6175471B2 (ja) * 2015-10-30 2017-08-02 日本エア・リキード株式会社 ネオン回収精製システムおよびネオン回収精製方法
JP6457013B2 (ja) * 2017-05-17 2019-01-23 日本エア・リキード株式会社 ガスリサイクル機能を有するエキシマレーザ発振装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3806583A (en) * 1971-03-15 1974-04-23 Babcock & Wilcox Co Recovery of radioactive noble gases from gaseous effluents
DE2422574A1 (de) * 1974-05-09 1975-11-20 Collo Gmbh Schuettstoff-filtermaterial, insbesondere zur entfernung unangenehmer gerueche aus der luft, sowie verfahren zu seiner herstellung
US4031484A (en) * 1975-11-11 1977-06-21 United Technologies Corporation Portable chemical laser with gas recirculation
US4674099A (en) * 1984-05-01 1987-06-16 Turner Robert E Recycling of gases for an excimer laser
US4629611A (en) * 1985-04-29 1986-12-16 International Business Machines Corporation Gas purifier for rare-gas fluoride lasers

Also Published As

Publication number Publication date
US4740982A (en) 1988-04-26
GB2182484A (en) 1987-05-13
DE3632995A1 (de) 1987-04-02
GB2182484B (en) 1989-09-06
DE3632995C2 (fr) 1988-08-04
CA1298959C (fr) 1992-04-21
GB8622799D0 (en) 1986-10-29
FR2587914A1 (fr) 1987-04-03

Similar Documents

Publication Publication Date Title
FR2587914B1 (fr) Procede d'epuration du gaz d'un laser excimeur a halogenure de gaz rare
GB2143747B (en) Process for purifying flue gas
FR2515984B1 (fr) Procede de preparation d'un catalyseur pour l'epuration de gaz d'echappement
FR2582964B1 (fr) Procede pour epurer des gaz d'echappement
GB2069118B (en) Method for purifying a gas mixture
FR2605240B1 (fr) Procede perfectionne pour l'elimination des gaz acides de melanges de gaz
GB2239198B (en) Apparatus for gas purification
EP0199934A3 (en) Gas purifier for rare-gas fluoride lasers
GB2146038B (en) Process for purifying natural gas
PT82929A (fr) Procede de traitment d'un melange gazeux par absorption
FR2682611B1 (fr) Procede et installation d'epuration d'un gaz par adsorption.
FR2584062B1 (fr) Super purificateur pour l'azote et procede pour purifier ce gaz.
FR2569355B1 (fr) Catalyseur pour gaz d'echappement et procede pour sa fabrication
FR2605243B1 (fr) Procede d'epuration catalytique de gaz d'echappement
DE3663793D1 (en) Process for purifying hydrogen chloride gas
FR2507498B1 (fr) Procede pour eliminer co2 et, s'il est present, h2s d'un melange de gaz
GB2113567B (en) Process for purifying a gas and apparatus therefor
EP0243664A3 (en) Process for purifying flue gas
FR2568141B1 (fr) Procede et installation pour purifier les gaz de rejet
GB2220868B (en) Apparatus for continuously purifying gases
ES537868A0 (es) Un dispositivo para la purificacion de gases
FR2590804B1 (fr) Procede d'epuration de gaz contenant des matieres particulaires
FR2568788B1 (fr) Dispositif d'adsorption pour purifier des gaz
RO85733A (fr) Procede cryogenique d'elimination des gaz acides de melanges gazeux
GB2192871B (en) Process for removing sulphur-containing compounds from a residual gas

Legal Events

Date Code Title Description
ST Notification of lapse