FR2439243A1 - Installation de transport de pieces a travers une chambre de traitement sous vide et vanne d'isolement correspondante - Google Patents

Installation de transport de pieces a travers une chambre de traitement sous vide et vanne d'isolement correspondante

Info

Publication number
FR2439243A1
FR2439243A1 FR7932014A FR7932014A FR2439243A1 FR 2439243 A1 FR2439243 A1 FR 2439243A1 FR 7932014 A FR7932014 A FR 7932014A FR 7932014 A FR7932014 A FR 7932014A FR 2439243 A1 FR2439243 A1 FR 2439243A1
Authority
FR
France
Prior art keywords
parts
cover
installation
processing chamber
vacuum processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7932014A
Other languages
English (en)
Other versions
FR2439243B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of FR2439243A1 publication Critical patent/FR2439243A1/fr
Application granted granted Critical
Publication of FR2439243B1 publication Critical patent/FR2439243B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Spray Control Apparatus (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Nozzles (AREA)

Abstract

CHAQUE VANNE COMPREND UNE PLAQUE-OPERCULE 100 PLUS GRANDE QUE L'OUVERTURE CORRESPONDANTE DU CONDUIT DE LA VANNE. SUR SA FACE ARRIERE EST FIXEE UNE POUTRE PLUS LONGUE 104 SUR LES EXTREMITES DE LAQUELLE AGISSENT DES VERINS HORIZONTAUX 130, 131 ET AU MILIEU DE LAQUELLE AGISSENT DES MOYENS 134 DE LEVAGE DE L'OPERCULE. LE TRANSPORTEUR ADJACENT PRESENTE UNE EXTREMITE IMMEDIATEMENT ADJACENTE A L'OPERCULE, DE SORTE QU'IL EST CAPABLE D'ACHEMINER DES PIECES A DES EMPLACEMENTS ADJACENTS A L'OPERCULE AUSSI BIEN LORSQUE CET OPERCULE EST EN COURS D'OUVERTURE QUE S'IL EST EN COURS DE FERMETURE SANS QUE LES PIECES NE SE TROUVENT SUR LE TRAJET DE CET OPERCULE, CE QUI PERMET DE TRANSFERER LES PIECES A TRAVERS LA VANNE A UNE CADENCE DE PRODUCTION ELEVEE. APPLICATION AU REVETEMENT DE GRANDES PIECES PAR PULVERISATION SOUS VIDE.
FR7932014A 1978-04-07 1979-12-28 Installation de transport de pieces a travers une chambre de traitement sous vide et vanne d'isolement correspondante Granted FR2439243A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/894,287 US4313815A (en) 1978-04-07 1978-04-07 Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor

Publications (2)

Publication Number Publication Date
FR2439243A1 true FR2439243A1 (fr) 1980-05-16
FR2439243B1 FR2439243B1 (fr) 1983-04-15

Family

ID=25402861

Family Applications (3)

Application Number Title Priority Date Filing Date
FR7908918A Granted FR2439242A1 (fr) 1978-04-07 1979-04-09 Installation de revetement par pulverisation sous vide
FR7932015A Expired FR2439244B1 (fr) 1978-04-07 1979-12-28
FR7932014A Granted FR2439243A1 (fr) 1978-04-07 1979-12-28 Installation de transport de pieces a travers une chambre de traitement sous vide et vanne d'isolement correspondante

Family Applications Before (2)

Application Number Title Priority Date Filing Date
FR7908918A Granted FR2439242A1 (fr) 1978-04-07 1979-04-09 Installation de revetement par pulverisation sous vide
FR7932015A Expired FR2439244B1 (fr) 1978-04-07 1979-12-28

Country Status (5)

Country Link
US (1) US4313815A (fr)
JP (1) JPS5511083A (fr)
DE (1) DE2913724A1 (fr)
FR (3) FR2439242A1 (fr)
IT (1) IT1166732B (fr)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4756815A (en) * 1979-12-21 1988-07-12 Varian Associates, Inc. Wafer coating system
JPS5794338A (en) * 1980-12-04 1982-06-11 Tdk Corp Vapor deposition device
EP0122092A3 (fr) * 1983-04-06 1985-07-10 General Engineering Radcliffe Limited Dispositif de revêtement sous vide
US4534921A (en) * 1984-03-06 1985-08-13 Asm Fico Tooling, B.V. Method and apparatus for mold cleaning by reverse sputtering
US4533449A (en) * 1984-04-16 1985-08-06 The Perkin-Elmer Corporation Rapid surface figuring by selective deposition
US4661228A (en) * 1984-05-17 1987-04-28 Varian Associates, Inc. Apparatus and method for manufacturing planarized aluminum films
US4606806A (en) * 1984-05-17 1986-08-19 Varian Associates, Inc. Magnetron sputter device having planar and curved targets
US4761218A (en) * 1984-05-17 1988-08-02 Varian Associates, Inc. Sputter coating source having plural target rings
US5021138A (en) * 1985-01-17 1991-06-04 Babu Suryadevara V Side source center sink plasma reactor
US4663009A (en) * 1985-02-08 1987-05-05 Hewlett-Packard Company System and method for depositing plural thin film layers on a substrate
US4749465A (en) * 1985-05-09 1988-06-07 Seagate Technology In-line disk sputtering system
WO1986006753A1 (fr) * 1985-05-09 1986-11-20 Seagate Technology Systeme de traitement en ligne de disques par pulverisation
US4894133A (en) * 1985-11-12 1990-01-16 Virgle L. Hedgcoth Method and apparatus making magnetic recording disk
US5082747A (en) * 1985-11-12 1992-01-21 Hedgcoth Virgle L Magnetic recording disk and sputtering process and apparatus for producing same
US4670126A (en) * 1986-04-28 1987-06-02 Varian Associates, Inc. Sputter module for modular wafer processing system
DE3634710A1 (de) * 1986-10-11 1988-04-21 Ver Glaswerke Gmbh Vorrichtung zum vakuumbeschichten einer glasscheibe durch reaktive kathodenzerstaeubung
US4795299A (en) * 1987-04-15 1989-01-03 Genus, Inc. Dial deposition and processing apparatus
US5591267A (en) * 1988-01-11 1997-01-07 Ohmi; Tadahiro Reduced pressure device
US5906688A (en) * 1989-01-11 1999-05-25 Ohmi; Tadahiro Method of forming a passivation film
US5225057A (en) * 1988-02-08 1993-07-06 Optical Coating Laboratory, Inc. Process for depositing optical films on both planar and non-planar substrates
US5798027A (en) * 1988-02-08 1998-08-25 Optical Coating Laboratory, Inc. Process for depositing optical thin films on both planar and non-planar substrates
US5618388A (en) * 1988-02-08 1997-04-08 Optical Coating Laboratory, Inc. Geometries and configurations for magnetron sputtering apparatus
US4911810A (en) * 1988-06-21 1990-03-27 Brown University Modular sputtering apparatus
US5683072A (en) * 1988-11-01 1997-11-04 Tadahiro Ohmi Thin film forming equipment
US5789086A (en) * 1990-03-05 1998-08-04 Ohmi; Tadahiro Stainless steel surface having passivation film
DE3912295C2 (de) * 1989-04-14 1997-05-28 Leybold Ag Katodenzerstäubungsanlage
US6024843A (en) * 1989-05-22 2000-02-15 Novellus Systems, Inc. Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile
JPH03234979A (ja) * 1990-02-09 1991-10-18 Canon Inc 仕切り弁
DE4010495C2 (de) * 1990-03-31 1997-07-31 Leybold Ag Vorrichtung zum Beschichten eines Substrats mit Werkstoffen, beispielweise mit Metallen
JP2644912B2 (ja) * 1990-08-29 1997-08-25 株式会社日立製作所 真空処理装置及びその運転方法
US7089680B1 (en) 1990-08-29 2006-08-15 Hitachi, Ltd. Vacuum processing apparatus and operating method therefor
USRE39756E1 (en) * 1990-08-29 2007-08-07 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
USRE39823E1 (en) 1990-08-29 2007-09-11 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
EP0837491A3 (fr) * 1996-10-21 2000-11-15 Nihon Shinku Gijutsu Kabushiki Kaisha Dispositif de cathode composite de pulvérisation, et appareil de pulvérisation comportant une telle cathode composite
JP5026631B2 (ja) 1999-06-24 2012-09-12 株式会社アルバック スパッタリング装置
US6605195B2 (en) 2000-04-14 2003-08-12 Seagate Technology Llc Multi-layer deposition process using four ring sputter sources
CN102234784A (zh) * 2010-04-29 2011-11-09 鸿富锦精密工业（深圳）有限公司 镀膜***
CN102021576B (zh) * 2010-09-30 2012-06-27 深圳市信诺泰创业投资企业(普通合伙) 一种连续生产挠性覆铜板的方法
CN103538894B (zh) * 2013-10-25 2015-08-05 山东开泰工业科技有限公司 一种360抛丸器制造生产线
JP2019052371A (ja) * 2017-09-14 2019-04-04 エフ・ハー・エル・アンラーゲンバウ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング ３ｄサブストレートを均一にコーティングするための方法及び装置
WO2019212512A1 (fr) * 2018-04-30 2019-11-07 Hewlett-Packard Development Company, L.P. Dépôt physique en phase vapeur multidirectionnel (pvd)
US11713816B1 (en) 2019-08-22 2023-08-01 Colt Irrigation, LLC Pressure loss mitigation and durable valve
DE102019134546A1 (de) 2019-12-16 2021-06-17 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung und Vakuumanordnung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3641973A (en) * 1970-11-25 1972-02-15 Air Reduction Vacuum coating apparatus
FR2252419A1 (fr) * 1973-11-22 1975-06-20 Balzers Patent Beteilig Ag
US3904506A (en) * 1972-11-13 1975-09-09 Shatterproof Glass Corp Apparatus for continuous production of sputter-coated glass products
FR2341800A1 (fr) * 1976-02-20 1977-09-16 Kernforschung Gmbh Ges Fuer Dispositif de fermeture du type a tiroir

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2350322A (en) * 1939-12-04 1944-06-06 Berl Ernst Process of making ammonium salts of aromatic compounds
GB747580A (en) * 1952-12-05 1956-04-11 Standard Telephones Cables Ltd Method of making thin metal layers by cathodic sputtering
FR1574686A (fr) * 1968-01-11 1969-07-18
FR1595037A (fr) * 1968-02-12 1970-06-08
US3616402A (en) * 1968-05-31 1971-10-26 Western Electric Co Sputtering method and apparatus
US3968018A (en) * 1969-09-29 1976-07-06 Warner-Lambert Company Sputter coating method
JPS4715202U (fr) * 1971-03-20 1972-10-23
DE2114470B2 (de) * 1971-03-25 1975-02-13 Flachglas Ag Delog-Detag, 4650 Gelsenkirchen Vorrichtung zum kontinuierlichen, einseitigen Beschichten von Platten, wie Glasscheiben, Keramik- oder Kunststoffplatten u. dgl. mittels Kathodenzerstäubung
AU485283B2 (en) * 1971-05-18 1974-10-03 Warner-Lambert Company Method of making a razorblade
US3714925A (en) * 1971-07-30 1973-02-06 Gen Motors Corp Vacuum processing machine
JPS5322861B1 (fr) * 1972-07-12 1978-07-11
US3973753A (en) * 1974-03-18 1976-08-10 Varian Associates High vacuum gate valve
JPS51131461A (en) * 1975-05-13 1976-11-15 Ulvac Corp A vacuum treatment chamber apparatus
US4047624A (en) * 1975-10-21 1977-09-13 Airco, Inc. Workpiece handling system for vacuum processing
US4100055A (en) * 1977-06-10 1978-07-11 Varian Associates, Inc. Target profile for sputtering apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3641973A (en) * 1970-11-25 1972-02-15 Air Reduction Vacuum coating apparatus
US3904506A (en) * 1972-11-13 1975-09-09 Shatterproof Glass Corp Apparatus for continuous production of sputter-coated glass products
FR2252419A1 (fr) * 1973-11-22 1975-06-20 Balzers Patent Beteilig Ag
FR2341800A1 (fr) * 1976-02-20 1977-09-16 Kernforschung Gmbh Ges Fuer Dispositif de fermeture du type a tiroir

Also Published As

Publication number Publication date
IT1166732B (it) 1987-05-06
US4313815A (en) 1982-02-02
JPS5511083A (en) 1980-01-25
FR2439242B1 (fr) 1984-01-06
FR2439244B1 (fr) 1983-01-28
FR2439244A1 (fr) 1980-05-16
FR2439242A1 (fr) 1980-05-16
IT7921645A0 (it) 1979-04-06
DE2913724A1 (de) 1979-10-11
FR2439243B1 (fr) 1983-04-15

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Legal Events

Date Code Title Description
ST Notification of lapse