FR2344967A1 - Transistor a effet de champ a canal de longueur tres courte - Google Patents

Transistor a effet de champ a canal de longueur tres courte

Info

Publication number
FR2344967A1
FR2344967A1 FR7706922A FR7706922A FR2344967A1 FR 2344967 A1 FR2344967 A1 FR 2344967A1 FR 7706922 A FR7706922 A FR 7706922A FR 7706922 A FR7706922 A FR 7706922A FR 2344967 A1 FR2344967 A1 FR 2344967A1
Authority
FR
France
Prior art keywords
effect transistor
short length
channel field
length channel
short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7706922A
Other languages
English (en)
Other versions
FR2344967B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2344967A1 publication Critical patent/FR2344967A1/fr
Application granted granted Critical
Publication of FR2344967B1 publication Critical patent/FR2344967B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0843Source or drain regions of field-effect devices
    • H01L29/0847Source or drain regions of field-effect devices of field-effect transistors with insulated gate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/7827Vertical transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
FR7706922A 1976-03-17 1977-03-09 Transistor a effet de champ a canal de longueur tres courte Granted FR2344967A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2611338A DE2611338C3 (de) 1976-03-17 1976-03-17 Feldeffekttransistor mit sehr kurzer Kanallange

Publications (2)

Publication Number Publication Date
FR2344967A1 true FR2344967A1 (fr) 1977-10-14
FR2344967B1 FR2344967B1 (fr) 1980-01-11

Family

ID=5972731

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7706922A Granted FR2344967A1 (fr) 1976-03-17 1977-03-09 Transistor a effet de champ a canal de longueur tres courte

Country Status (9)

Country Link
US (1) US4101922A (fr)
JP (1) JPS52113685A (fr)
CA (1) CA1081368A (fr)
CH (1) CH614072A5 (fr)
DE (1) DE2611338C3 (fr)
FR (1) FR2344967A1 (fr)
GB (1) GB1576488A (fr)
IT (1) IT1077520B (fr)
NL (1) NL7701776A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0031377A1 (fr) * 1979-07-05 1981-07-08 Western Electric Company, Incorporated Tec vertical de porte flottante
EP0335632A2 (fr) * 1988-03-29 1989-10-04 Xerox Corporation Transistor en couche mince à fort courant
EP0703629A2 (fr) * 1994-08-30 1996-03-27 Daimler-Benz Aktiengesellschaft Transistor à effet de champ vertical de puissance
WO1997033322A1 (fr) * 1996-03-04 1997-09-12 Daimler-Benz Aktiengesellschaft Transistor a effet de champ de puissance
EP0869558A2 (fr) * 1997-03-31 1998-10-07 Motorola, Inc. Transistor bipolaire à grille isolée avec un champ électrique réduit

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5553462A (en) * 1978-10-13 1980-04-18 Int Rectifier Corp Mosfet element
US5191396B1 (en) * 1978-10-13 1995-12-26 Int Rectifier Corp High power mosfet with low on-resistance and high breakdown voltage
US4366495A (en) * 1979-08-06 1982-12-28 Rca Corporation Vertical MOSFET with reduced turn-on resistance
US4442589A (en) * 1981-03-05 1984-04-17 International Business Machines Corporation Method for manufacturing field effect transistors
US4837175A (en) * 1983-02-15 1989-06-06 Eaton Corporation Making a buried channel FET with lateral growth over amorphous region
US4833095A (en) * 1985-02-19 1989-05-23 Eaton Corporation Method for buried channel field effect transistor for microwave and millimeter frequencies utilizing ion implantation
US4935789A (en) * 1985-02-19 1990-06-19 Eaton Corporation Buried channel FET with lateral growth over amorphous region
US4724220A (en) * 1985-02-19 1988-02-09 Eaton Corporation Method for fabricating buried channel field-effect transistor for microwave and millimeter frequencies
US5231474A (en) * 1986-03-21 1993-07-27 Advanced Power Technology, Inc. Semiconductor device with doped electrical breakdown control region
US4862232A (en) * 1986-09-22 1989-08-29 General Motors Corporation Transistor structure for high temperature logic circuits with insulation around source and drain regions
US4818715A (en) * 1987-07-09 1989-04-04 Industrial Technology Research Institute Method of fabricating a LDDFET with self-aligned silicide
US4835586A (en) * 1987-09-21 1989-05-30 Siliconix Incorporated Dual-gate high density fet
US4893160A (en) * 1987-11-13 1990-01-09 Siliconix Incorporated Method for increasing the performance of trenched devices and the resulting structure
JPH0557532U (ja) * 1992-01-08 1993-07-30 株式会社栗本鐵工所 仕切弁
JPH0621447A (ja) * 1992-04-27 1994-01-28 Internatl Business Mach Corp <Ibm> 短チャネル電界効果トランジスタ
KR0166101B1 (ko) * 1993-10-21 1999-01-15 김주용 정전방전 보호회로의 트랜지스터 및 그 제조방법
US5701023A (en) * 1994-08-03 1997-12-23 National Semiconductor Corporation Insulated gate semiconductor device typically having subsurface-peaked portion of body region for improved ruggedness
US5869371A (en) * 1995-06-07 1999-02-09 Stmicroelectronics, Inc. Structure and process for reducing the on-resistance of mos-gated power devices
DE19840032C1 (de) 1998-09-02 1999-11-18 Siemens Ag Halbleiterbauelement und Herstellungsverfahren dazu
DE19961297A1 (de) * 1999-12-18 2001-06-21 Bosch Gmbh Robert Schaltungsanordnung zur Verpolsicherung eines DMOS-Transistors
US6646840B1 (en) * 2000-08-03 2003-11-11 Fairchild Semiconductor Corporation Internally triggered electrostatic device clamp with stand-off voltage
US6819089B2 (en) * 2001-11-09 2004-11-16 Infineon Technologies Ag Power factor correction circuit with high-voltage semiconductor component
US6825514B2 (en) * 2001-11-09 2004-11-30 Infineon Technologies Ag High-voltage semiconductor component
KR200446584Y1 (ko) 2008-01-02 2009-11-11 최용석 조립구조를 개선 시킨 침대 매트리스용 보조스프링

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123432B2 (fr) * 1971-08-26 1976-07-16
JPS5611227B2 (fr) * 1973-07-10 1981-03-12
US3982263A (en) * 1974-05-02 1976-09-21 National Semiconductor Corporation Integrated circuit device comprising vertical channel FET resistor

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0031377A1 (fr) * 1979-07-05 1981-07-08 Western Electric Company, Incorporated Tec vertical de porte flottante
EP0031377A4 (fr) * 1979-07-05 1983-04-25 Western Electric Co Tec vertical de porte flottante.
EP0335632A2 (fr) * 1988-03-29 1989-10-04 Xerox Corporation Transistor en couche mince à fort courant
EP0335632A3 (fr) * 1988-03-29 1991-01-16 Xerox Corporation Transistor en couche mince à fort courant
EP0703629A2 (fr) * 1994-08-30 1996-03-27 Daimler-Benz Aktiengesellschaft Transistor à effet de champ vertical de puissance
EP0703629A3 (fr) * 1994-08-30 1996-11-13 Daimler Benz Ag Transistor à effet de champ vertical de puissance
WO1997033322A1 (fr) * 1996-03-04 1997-09-12 Daimler-Benz Aktiengesellschaft Transistor a effet de champ de puissance
EP0869558A2 (fr) * 1997-03-31 1998-10-07 Motorola, Inc. Transistor bipolaire à grille isolée avec un champ électrique réduit
EP0869558A3 (fr) * 1997-03-31 1999-07-21 Motorola, Inc. Transistor bipolaire à grille isolée avec un champ électrique réduit

Also Published As

Publication number Publication date
IT1077520B (it) 1985-05-04
US4101922A (en) 1978-07-18
CA1081368A (fr) 1980-07-08
DE2611338C3 (de) 1979-03-29
DE2611338B2 (de) 1978-07-27
FR2344967B1 (fr) 1980-01-11
JPS52113685A (en) 1977-09-22
CH614072A5 (fr) 1979-10-31
JPS628952B2 (fr) 1987-02-25
GB1576488A (en) 1980-10-08
DE2611338A1 (de) 1977-09-29
NL7701776A (nl) 1977-09-20

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