JPS52113685A - Fet transistor having very short channel length - Google Patents

Fet transistor having very short channel length

Info

Publication number
JPS52113685A
JPS52113685A JP2913577A JP2913577A JPS52113685A JP S52113685 A JPS52113685 A JP S52113685A JP 2913577 A JP2913577 A JP 2913577A JP 2913577 A JP2913577 A JP 2913577A JP S52113685 A JPS52113685 A JP S52113685A
Authority
JP
Japan
Prior art keywords
channel length
short channel
fet transistor
fet
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2913577A
Other languages
English (en)
Other versions
JPS628952B2 (ja
Inventor
Chihani Iene
Hoetsupunaa Yoahimu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS52113685A publication Critical patent/JPS52113685A/ja
Publication of JPS628952B2 publication Critical patent/JPS628952B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0843—Source or drain regions of field-effect devices
    • H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7827—Vertical transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
JP2913577A 1976-03-17 1977-03-16 Fet transistor having very short channel length Granted JPS52113685A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2611338A DE2611338C3 (de) 1976-03-17 1976-03-17 Feldeffekttransistor mit sehr kurzer Kanallange

Publications (2)

Publication Number Publication Date
JPS52113685A true JPS52113685A (en) 1977-09-22
JPS628952B2 JPS628952B2 (ja) 1987-02-25

Family

ID=5972731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2913577A Granted JPS52113685A (en) 1976-03-17 1977-03-16 Fet transistor having very short channel length

Country Status (9)

Country Link
US (1) US4101922A (ja)
JP (1) JPS52113685A (ja)
CA (1) CA1081368A (ja)
CH (1) CH614072A5 (ja)
DE (1) DE2611338C3 (ja)
FR (1) FR2344967A1 (ja)
GB (1) GB1576488A (ja)
IT (1) IT1077520B (ja)
NL (1) NL7701776A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0557532U (ja) * 1992-01-08 1993-07-30 株式会社栗本鐵工所 仕切弁

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5191396B1 (en) * 1978-10-13 1995-12-26 Int Rectifier Corp High power mosfet with low on-resistance and high breakdown voltage
JPS5553462A (en) * 1978-10-13 1980-04-18 Int Rectifier Corp Mosfet element
US4249190A (en) * 1979-07-05 1981-02-03 Bell Telephone Laboratories, Incorporated Floating gate vertical FET
US4366495A (en) * 1979-08-06 1982-12-28 Rca Corporation Vertical MOSFET with reduced turn-on resistance
US4442589A (en) * 1981-03-05 1984-04-17 International Business Machines Corporation Method for manufacturing field effect transistors
US4837175A (en) * 1983-02-15 1989-06-06 Eaton Corporation Making a buried channel FET with lateral growth over amorphous region
US4833095A (en) * 1985-02-19 1989-05-23 Eaton Corporation Method for buried channel field effect transistor for microwave and millimeter frequencies utilizing ion implantation
US4724220A (en) * 1985-02-19 1988-02-09 Eaton Corporation Method for fabricating buried channel field-effect transistor for microwave and millimeter frequencies
US4935789A (en) * 1985-02-19 1990-06-19 Eaton Corporation Buried channel FET with lateral growth over amorphous region
US5231474A (en) * 1986-03-21 1993-07-27 Advanced Power Technology, Inc. Semiconductor device with doped electrical breakdown control region
US4862232A (en) * 1986-09-22 1989-08-29 General Motors Corporation Transistor structure for high temperature logic circuits with insulation around source and drain regions
US4818715A (en) * 1987-07-09 1989-04-04 Industrial Technology Research Institute Method of fabricating a LDDFET with self-aligned silicide
US4835586A (en) * 1987-09-21 1989-05-30 Siliconix Incorporated Dual-gate high density fet
US4893160A (en) * 1987-11-13 1990-01-09 Siliconix Incorporated Method for increasing the performance of trenched devices and the resulting structure
US4990977A (en) * 1988-03-29 1991-02-05 Xerox Corporation High current thin film transistor
JPH0621447A (ja) * 1992-04-27 1994-01-28 Internatl Business Mach Corp <Ibm> 短チャネル電界効果トランジスタ
KR0166101B1 (ko) * 1993-10-21 1999-01-15 김주용 정전방전 보호회로의 트랜지스터 및 그 제조방법
US5701023A (en) * 1994-08-03 1997-12-23 National Semiconductor Corporation Insulated gate semiconductor device typically having subsurface-peaked portion of body region for improved ruggedness
DE4430732C2 (de) * 1994-08-30 1998-07-02 Daimler Benz Ag Vertikaler Feldeffekt-Transistor hoher Leistung und Verfahren zu dessen Herstellung
US5869371A (en) * 1995-06-07 1999-02-09 Stmicroelectronics, Inc. Structure and process for reducing the on-resistance of mos-gated power devices
DE19608003C2 (de) * 1996-03-04 2001-11-29 Daimler Chrysler Ag Leistungs-Feldeffekt-Transistor und Verfahren zu seiner Herstellung
US5917204A (en) * 1997-03-31 1999-06-29 Motorola, Inc. Insulated gate bipolar transistor with reduced electric fields
DE19840032C1 (de) * 1998-09-02 1999-11-18 Siemens Ag Halbleiterbauelement und Herstellungsverfahren dazu
DE19961297A1 (de) * 1999-12-18 2001-06-21 Bosch Gmbh Robert Schaltungsanordnung zur Verpolsicherung eines DMOS-Transistors
US6646840B1 (en) * 2000-08-03 2003-11-11 Fairchild Semiconductor Corporation Internally triggered electrostatic device clamp with stand-off voltage
US6828609B2 (en) * 2001-11-09 2004-12-07 Infineon Technologies Ag High-voltage semiconductor component
US6819089B2 (en) * 2001-11-09 2004-11-16 Infineon Technologies Ag Power factor correction circuit with high-voltage semiconductor component
KR200446584Y1 (ko) 2008-01-02 2009-11-11 최용석 조립구조를 개선 시킨 침대 매트리스용 보조스프링

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027483A (ja) * 1973-07-10 1975-03-20

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123432B2 (ja) * 1971-08-26 1976-07-16
US3982263A (en) * 1974-05-02 1976-09-21 National Semiconductor Corporation Integrated circuit device comprising vertical channel FET resistor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027483A (ja) * 1973-07-10 1975-03-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0557532U (ja) * 1992-01-08 1993-07-30 株式会社栗本鐵工所 仕切弁

Also Published As

Publication number Publication date
FR2344967B1 (ja) 1980-01-11
US4101922A (en) 1978-07-18
DE2611338A1 (de) 1977-09-29
NL7701776A (nl) 1977-09-20
GB1576488A (en) 1980-10-08
CA1081368A (en) 1980-07-08
CH614072A5 (ja) 1979-10-31
DE2611338B2 (de) 1978-07-27
JPS628952B2 (ja) 1987-02-25
FR2344967A1 (fr) 1977-10-14
IT1077520B (it) 1985-05-04
DE2611338C3 (de) 1979-03-29

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