FR2114081A5 - Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic films - Google Patents

Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic films

Info

Publication number
FR2114081A5
FR2114081A5 FR7040948A FR7040948A FR2114081A5 FR 2114081 A5 FR2114081 A5 FR 2114081A5 FR 7040948 A FR7040948 A FR 7040948A FR 7040948 A FR7040948 A FR 7040948A FR 2114081 A5 FR2114081 A5 FR 2114081A5
Authority
FR
France
Prior art keywords
films
depositing metal
vacuum evaporator
thin heat
sensitive substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7040948A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laboratoires dElectronique Philips SAS
Original Assignee
Laboratoires dElectronique et de Physique Appliquee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laboratoires dElectronique et de Physique Appliquee filed Critical Laboratoires dElectronique et de Physique Appliquee
Priority to FR7040948A priority Critical patent/FR2114081A5/en
Application granted granted Critical
Publication of FR2114081A5 publication Critical patent/FR2114081A5/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Apparatus for the vacuum evaporation of a conducting body heated by means of a high frequency induction coil, comprising evacuatable closed vessel, >=1 retractable screen situated between the mass to be evaporated and the target, >=1 target support, and crucibles for the metallic masses to be evaporated, the novel feature of this arrangement being that each crucible is mounted on a rod guided at its lower end in a bore in a laterally movable element and fixed to a lever resting on an eccentric element, both these elements being fixed to a single control shaft.
FR7040948A 1970-11-16 1970-11-16 Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic films Expired FR2114081A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7040948A FR2114081A5 (en) 1970-11-16 1970-11-16 Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7040948A FR2114081A5 (en) 1970-11-16 1970-11-16 Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic films

Publications (1)

Publication Number Publication Date
FR2114081A5 true FR2114081A5 (en) 1972-06-30

Family

ID=9064179

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7040948A Expired FR2114081A5 (en) 1970-11-16 1970-11-16 Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic films

Country Status (1)

Country Link
FR (1) FR2114081A5 (en)

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Legal Events

Date Code Title Description
ST Notification of lapse