FR2114081A5 - Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic films - Google Patents
Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic filmsInfo
- Publication number
- FR2114081A5 FR2114081A5 FR7040948A FR7040948A FR2114081A5 FR 2114081 A5 FR2114081 A5 FR 2114081A5 FR 7040948 A FR7040948 A FR 7040948A FR 7040948 A FR7040948 A FR 7040948A FR 2114081 A5 FR2114081 A5 FR 2114081A5
- Authority
- FR
- France
- Prior art keywords
- films
- depositing metal
- vacuum evaporator
- thin heat
- sensitive substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Apparatus for the vacuum evaporation of a conducting body heated by means of a high frequency induction coil, comprising evacuatable closed vessel, >=1 retractable screen situated between the mass to be evaporated and the target, >=1 target support, and crucibles for the metallic masses to be evaporated, the novel feature of this arrangement being that each crucible is mounted on a rod guided at its lower end in a bore in a laterally movable element and fixed to a lever resting on an eccentric element, both these elements being fixed to a single control shaft.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7040948A FR2114081A5 (en) | 1970-11-16 | 1970-11-16 | Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7040948A FR2114081A5 (en) | 1970-11-16 | 1970-11-16 | Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic films |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2114081A5 true FR2114081A5 (en) | 1972-06-30 |
Family
ID=9064179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7040948A Expired FR2114081A5 (en) | 1970-11-16 | 1970-11-16 | Vacuum evaporator - for depositing metal films on thin heat -sensitive substrates eg plastic films |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2114081A5 (en) |
-
1970
- 1970-11-16 FR FR7040948A patent/FR2114081A5/en not_active Expired
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |