GB1217443A - Apparatus for evaporation by levitation in an ultra-vacuum - Google Patents

Apparatus for evaporation by levitation in an ultra-vacuum

Info

Publication number
GB1217443A
GB1217443A GB01803/69A GB1180369A GB1217443A GB 1217443 A GB1217443 A GB 1217443A GB 01803/69 A GB01803/69 A GB 01803/69A GB 1180369 A GB1180369 A GB 1180369A GB 1217443 A GB1217443 A GB 1217443A
Authority
GB
United Kingdom
Prior art keywords
window
chamber
inductor
mask
transfer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB01803/69A
Inventor
Jean Van Audenhove
Jean Joyeux Maurits Parengh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Atomic Energy Community Euratom
Original Assignee
European Atomic Energy Community Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Atomic Energy Community Euratom filed Critical European Atomic Energy Community Euratom
Publication of GB1217443A publication Critical patent/GB1217443A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/10—Vacuum distillation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/22—Furnaces without an endless core
    • H05B6/32—Arrangements for simultaneous levitation and heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,217,443. Vapour-deposition apparatus. EUROPEAN ATOMIC ENERGY COMMUNITY. March 5, 1969 [April 5, 1968], No.11803/69. Heading C7F. Apparatus for vapour deposition in ultravacuum comprises an ultra-vacuum chamber provided with at least one window or hatch 2, a mask 22 covering said window within the chamber and movable to uncover the window, a substrate support 3, an inductor 4 for effecting levitation and heating of the material 5 to be evaporated, a transfer device 10 operable to bring a succession of pieces of material 5 to a station beneath the inductor, the transfer device embodying upwardly removable carriers 6 for the material 5, means operable from outside the chamber for operation of the transfer device and comprising a first bar 9 passing through the chamber wall with a vacuum seal and arranged for rectilinear lengthwise movements, and raising means operable from outside the chamber by a second bar or rod 12 passing through the chamber wall with a vacuum seal and arranged for lengthwise movement, said raising means fulfilling simultaneously two functions, one to move the mask to uncover the window and the other to raise a carrier and material piece from the transfer device to position the carrier accurately on the inductor axis 11 and then to locate the material piece within the inductor. The chamber is evacuated and control bar 9 moves a holder 6 to a centred position on axis 11, and rod 12 is actuated upwards so that lug 18 coacting with helical groove 17 moves mask 22 from window 2, and so that tube 15 acts on carrier 26 to centre it accurately and lift it into the centre of induction coil 4 which is then switched on to levitate and evaporate material 5 whilst tube 15 is lowered so that the mask re-covers the window 2. While evaporation continues, crucible 29 is moved on to axis 11 to catch the globule of material 5 when coil 4 is de-energized and evaporation ended. Several materials 5 may be used.
GB01803/69A 1968-04-05 1969-03-05 Apparatus for evaporation by levitation in an ultra-vacuum Expired GB1217443A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE713308 1968-04-05

Publications (1)

Publication Number Publication Date
GB1217443A true GB1217443A (en) 1970-12-31

Family

ID=3852706

Family Applications (1)

Application Number Title Priority Date Filing Date
GB01803/69A Expired GB1217443A (en) 1968-04-05 1969-03-05 Apparatus for evaporation by levitation in an ultra-vacuum

Country Status (8)

Country Link
US (1) US3575133A (en)
BE (1) BE713308A (en)
CH (1) CH494582A (en)
FR (1) FR2005635A1 (en)
GB (1) GB1217443A (en)
LU (1) LU58103A1 (en)
NL (1) NL6905225A (en)
SE (1) SE346338B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1020059C2 (en) * 2002-02-21 2003-08-25 Corus Technology B V Method and device for coating a substrate.

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2917841A1 (en) * 1979-05-03 1980-11-13 Leybold Heraeus Gmbh & Co Kg EVAPORATOR FOR VACUUM EVAPORATION SYSTEMS
EP0392067A1 (en) * 1989-04-14 1990-10-17 Vsesojuzny Nauchno-Issledovatelsky Proektno-Konstruktorsky I Tekhnologichesky Inst. Elektrotermicheskogo Oborudovania Vniieto Vacuum induction furnace
US5254173A (en) * 1992-01-31 1993-10-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Turntable mechanism
KR100461283B1 (en) * 2000-12-30 2004-12-14 현대엘씨디주식회사 Organic source boat structure for organic electro-luminescent display fabricating apparatus
US9920418B1 (en) 2010-09-27 2018-03-20 James Stabile Physical vapor deposition apparatus having a tapered chamber

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2584660A (en) * 1949-09-24 1952-02-05 Eastman Kodak Co Vacuum coating process and apparatus therefor
US2686864A (en) * 1951-01-17 1954-08-17 Westinghouse Electric Corp Magnetic levitation and heating of conductive materials
US3290567A (en) * 1960-09-23 1966-12-06 Technical Ind Inc Controlled deposition and growth of polycrystalline films in a vacuum
FR1273518A (en) * 1960-10-28 1961-10-13 Ass Elect Ind Improvements to vacuum vaporizers
US3173283A (en) * 1960-12-27 1965-03-16 Vogtmann Hans Process and apparatus for loading extrusion presses
US3476170A (en) * 1967-05-15 1969-11-04 Traub Co The Casting method with laser beam melting of levitated mass

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1020059C2 (en) * 2002-02-21 2003-08-25 Corus Technology B V Method and device for coating a substrate.
WO2003071000A1 (en) * 2002-02-21 2003-08-28 Corus Technology Bv Method and device for coating a substrate
US7323229B2 (en) 2002-02-21 2008-01-29 Corus Technology Bv Method and device for coating a substrate
CN100545299C (en) * 2002-02-21 2009-09-30 科鲁斯技术有限公司 The method and apparatus of substrate plated film

Also Published As

Publication number Publication date
US3575133A (en) 1971-04-13
NL6905225A (en) 1969-10-07
BE713308A (en) 1968-10-07
SE346338B (en) 1972-07-03
DE1907542A1 (en) 1969-10-30
DE1907542B2 (en) 1976-10-28
LU58103A1 (en) 1969-06-03
CH494582A (en) 1970-08-15
FR2005635A1 (en) 1969-12-12

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