FI20060178L - Ytbeläggningsförfarande - Google Patents

Ytbeläggningsförfarande Download PDF

Info

Publication number
FI20060178L
FI20060178L FI20060178A FI20060178A FI20060178L FI 20060178 L FI20060178 L FI 20060178L FI 20060178 A FI20060178 A FI 20060178A FI 20060178 A FI20060178 A FI 20060178A FI 20060178 L FI20060178 L FI 20060178L
Authority
FI
Finland
Prior art keywords
surface coating
coating procedure
procedure
coating
Prior art date
Application number
FI20060178A
Other languages
English (en)
Finnish (fi)
Other versions
FI20060178A0 (sv
Inventor
Jari Ruuttu
Reijo Lappalainen
Vesa Myllymaeki
Lasse Pulli
Juha Maekitalo
Original Assignee
Picodeon Ltd Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Picodeon Ltd Oy filed Critical Picodeon Ltd Oy
Priority to FI20060178A priority Critical patent/FI20060178L/sv
Publication of FI20060178A0 publication Critical patent/FI20060178A0/sv
Priority to RU2008137490/02A priority patent/RU2467851C2/ru
Priority to JP2008555820A priority patent/JP5237122B2/ja
Priority to JP2008555816A priority patent/JP5203226B2/ja
Priority to CN200780006700.XA priority patent/CN101389441B/zh
Priority to KR1020087023134A priority patent/KR101395393B1/ko
Priority to EP07712591A priority patent/EP1991387A2/en
Priority to EP20070704878 priority patent/EP1994195A1/en
Priority to PCT/FI2007/050105 priority patent/WO2007096484A2/en
Priority to US12/280,631 priority patent/US20100221489A1/en
Priority to PCT/FI2007/050102 priority patent/WO2007096481A1/en
Priority to FI20075134A priority patent/FI124358B/sv
Priority to EP07704875A priority patent/EP1993778A2/en
Priority to KR1020087023252A priority patent/KR101398379B1/ko
Priority to EP20070704871 priority patent/EP1994194A1/en
Priority to JP2008555821A priority patent/JP5237123B2/ja
Priority to US12/280,650 priority patent/US20090017318A1/en
Priority to PCT/FI2007/050097 priority patent/WO2007096476A2/en
Priority to FI20075139A priority patent/FI124523B/sv
Priority to BRPI0707014-4A priority patent/BRPI0707014A2/pt
Priority to PCT/FI2007/050107 priority patent/WO2007096486A1/en
Priority to RU2008137492/02A priority patent/RU2467092C2/ru
Priority to CN200780013897.XA priority patent/CN101437644B/zh
Priority to US12/280,602 priority patent/US20090126787A1/en
Priority to EP20070704873 priority patent/EP1993776A2/en
Priority to KR1020087023172A priority patent/KR101399235B1/ko
Priority to PCT/FI2007/050106 priority patent/WO2007096485A2/en
Priority to EP07704867A priority patent/EP1993774A2/en
Priority to FI20075141A priority patent/FI124524B/sv
Priority to FI20075138A priority patent/FI123716B/sv
Priority to FI20075133A priority patent/FI124360B/sv
Priority to US12/280,641 priority patent/US20080311345A1/en
Priority to FI20075131A priority patent/FI20075131L/sv
Priority to CA002642867A priority patent/CA2642867A1/en
Priority to FI20075136A priority patent/FI124359B/sv
Priority to US12/224,298 priority patent/US20090302503A1/en
Priority to PCT/FI2007/050103 priority patent/WO2007096482A2/en
Priority to CN200780006479.8A priority patent/CN101389440B/zh
Priority to CN201410149093.4A priority patent/CN104167464A/zh
Priority to FI20075137A priority patent/FI124357B/sv
Priority to EP20070704876 priority patent/EP1993779A2/en
Priority to FI20070158A priority patent/FI20070158L/sv
Priority to PCT/FI2007/050108 priority patent/WO2007096487A1/en
Priority to FI20075140A priority patent/FI123964B/sv
Priority to KR1020087023269A priority patent/KR20090004884A/ko
Priority to KR1020087023133A priority patent/KR101395513B1/ko
Priority to PCT/FI2007/000049 priority patent/WO2007096464A2/en
Priority to JP2008555822A priority patent/JP5237124B2/ja
Priority to KR1020087023171A priority patent/KR101395425B1/ko
Priority to PCT/FI2007/050104 priority patent/WO2007096483A2/en
Priority to EP20070704874 priority patent/EP1993777A2/en
Priority to EP20070704877 priority patent/EP1993780A1/en
Priority to US12/280,622 priority patent/US20090061210A1/en
Priority to US12/280,636 priority patent/US20090136739A1/en
Priority to JP2008555824A priority patent/JP2009527914A/ja
Priority to US12/280,657 priority patent/US8741749B2/en
Priority to JP2008555823A priority patent/JP5237125B2/ja
Priority to EP20070704872 priority patent/EP1993775A1/en
Priority to US12/280,609 priority patent/US8486073B2/en
Priority to RU2008137489/02A priority patent/RU2467850C2/ru
Priority to JP2008555825A priority patent/JP5414279B2/ja
Priority to PCT/FI2007/050101 priority patent/WO2007096480A1/en
Publication of FI20060178L publication Critical patent/FI20060178L/sv
Priority to KR1020087023253A priority patent/KR101467584B1/ko

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605Carbon
    • C23C14/0611Diamond
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/081Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/083Oxides of refractory metals or yttrium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/087Oxides of copper or solid solutions thereof
FI20060178A 2006-02-23 2006-02-23 Ytbeläggningsförfarande FI20060178L (sv)

Priority Applications (63)

Application Number Priority Date Filing Date Title
FI20060178A FI20060178L (sv) 2006-02-23 2006-02-23 Ytbeläggningsförfarande
RU2008137490/02A RU2467851C2 (ru) 2006-02-23 2007-02-23 Солнечный элемент и способ и система для его изготовления
JP2008555820A JP5237122B2 (ja) 2006-02-23 2007-02-23 ガラス基材の塗装方法及び塗装されたガラス製品
JP2008555816A JP5203226B2 (ja) 2006-02-23 2007-02-23 コーティング方法
CN200780006700.XA CN101389441B (zh) 2006-02-23 2007-02-23 塑料基底上的涂层方法和涂覆的塑料产品
KR1020087023134A KR101395393B1 (ko) 2006-02-23 2007-02-23 금속 기재 상의 코팅 및 코팅된 금속 제품
EP07712591A EP1991387A2 (en) 2006-02-23 2007-02-23 Coating method
EP20070704878 EP1994195A1 (en) 2006-02-23 2007-02-23 Semiconductor and an arrangement and a method for producing a semiconductor
PCT/FI2007/050105 WO2007096484A2 (en) 2006-02-23 2007-02-23 Coating with carbon nitride and carbon nitride coated product
US12/280,631 US20100221489A1 (en) 2006-02-23 2007-02-23 Coating on a glass substrate and a coated glass product
PCT/FI2007/050102 WO2007096481A1 (en) 2006-02-23 2007-02-23 Coating on a glass substrate and a coated glass product
FI20075134A FI124358B (sv) 2006-02-23 2007-02-23 Beläggning på ett glassubstrat och belagd glasprodukt
EP07704875A EP1993778A2 (en) 2006-02-23 2007-02-23 Coating with carbon nitride and carbon nitride coated product
KR1020087023252A KR101398379B1 (ko) 2006-02-23 2007-02-23 반도체 및 반도체를 생산하는 설비 및 방법
EP20070704871 EP1994194A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
JP2008555821A JP5237123B2 (ja) 2006-02-23 2007-02-23 プラスチック基材の塗装方法及び塗装されたプラスチック製品
US12/280,650 US20090017318A1 (en) 2006-02-23 2007-02-23 Coating on a metal substrate and a coated metal product
PCT/FI2007/050097 WO2007096476A2 (en) 2006-02-23 2007-02-23 Coating on a medical substrate and a coated medical product
FI20075139A FI124523B (sv) 2006-02-23 2007-02-23 Beläggning på ett metallsubstrat och belagd metallisk produkt
BRPI0707014-4A BRPI0707014A2 (pt) 2006-02-23 2007-02-23 celula solar e um arranjo e um método para a produção de uma célula solar
PCT/FI2007/050107 WO2007096486A1 (en) 2006-02-23 2007-02-23 Solar cell and an arrangement and a method for producing a solar cell
RU2008137492/02A RU2467092C2 (ru) 2006-02-23 2007-02-23 Способ нанесения покрытия и металлическое изделие, снабженное покрытием
CN200780013897.XA CN101437644B (zh) 2006-02-23 2007-02-23 涂覆方法
US12/280,602 US20090126787A1 (en) 2006-02-23 2007-02-23 Solar cell and an arrangement and a method for producing a solar cell
EP20070704873 EP1993776A2 (en) 2006-02-23 2007-02-23 Coating on a plastic substrate and a coated plastic product
KR1020087023172A KR101399235B1 (ko) 2006-02-23 2007-02-23 탄소 질화물 코팅 및 탄소 질화물 코팅된 제품
PCT/FI2007/050106 WO2007096485A2 (en) 2006-02-23 2007-02-23 Coating on a metal substrate and a coated metal product
EP07704867A EP1993774A2 (en) 2006-02-23 2007-02-23 Coating on a medical substrate and a coated medical product
FI20075141A FI124524B (sv) 2006-02-23 2007-02-23 Anordning och förfarande för framställning av en halvledare
FI20075138A FI123716B (sv) 2006-02-23 2007-02-23 Metod för att ytbelägga en bestämd yta av en produkt med kolnitrid genom laserdeposition
FI20075133A FI124360B (sv) 2006-02-23 2007-02-23 Beläggning på ett fibersubstrat och belagd fiberprodukt
US12/280,641 US20080311345A1 (en) 2006-02-23 2007-02-23 Coating With Carbon Nitride and Carbon Nitride Coated Product
FI20075131A FI20075131L (sv) 2006-02-23 2007-02-23 Beläggning av ett medicinskt substrat och belagd medicinsk produkt
CA002642867A CA2642867A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
FI20075136A FI124359B (sv) 2006-02-23 2007-02-23 Beläggning av ett plastsubstrat och belagd plastprodukt
US12/224,298 US20090302503A1 (en) 2006-02-23 2007-02-23 Coating Method
PCT/FI2007/050103 WO2007096482A2 (en) 2006-02-23 2007-02-23 Coating on a plastic substrate and a coated plastic product
CN200780006479.8A CN101389440B (zh) 2006-02-23 2007-02-23 利用碳氮化物的涂覆以及碳氮化物涂覆的产品
CN201410149093.4A CN104167464A (zh) 2006-02-23 2007-02-23 太阳能电池以及用于生产太阳能电池的设备和方法
FI20075137A FI124357B (sv) 2006-02-23 2007-02-23 Beläggning av ett stensubstrat eller ett keramiskt substrat och belagd stenprodukt eller keramisk produkt
EP20070704876 EP1993779A2 (en) 2006-02-23 2007-02-23 Coating on a metal substrate and a coated metal product
FI20070158A FI20070158L (sv) 2006-02-23 2007-02-23 Anordning
PCT/FI2007/050108 WO2007096487A1 (en) 2006-02-23 2007-02-23 Semiconductor and an arrangement and a method for producing a semiconductor
FI20075140A FI123964B (sv) 2006-02-23 2007-02-23 Solcell och anordning och förfarande för framställning av en solcell
KR1020087023269A KR20090004884A (ko) 2006-02-23 2007-02-23 코팅 방법
KR1020087023133A KR101395513B1 (ko) 2006-02-23 2007-02-23 플라스틱 기재 상의 코팅 및 코팅된 플라스틱 제품
PCT/FI2007/000049 WO2007096464A2 (en) 2006-02-23 2007-02-23 Coating method
JP2008555822A JP5237124B2 (ja) 2006-02-23 2007-02-23 窒化炭素を用いたコーティングおよび窒化炭素をコーティングした製品
KR1020087023171A KR101395425B1 (ko) 2006-02-23 2007-02-23 유리 기재 상의 코팅 및 코팅된 유리 제품
PCT/FI2007/050104 WO2007096483A2 (en) 2006-02-23 2007-02-23 Coating on a stone or ceramic substrate and a coated stone or ceramic product
EP20070704874 EP1993777A2 (en) 2006-02-23 2007-02-23 Coating on a stone or ceramic substrate and a coated stone or ceramic product
EP20070704877 EP1993780A1 (en) 2006-02-23 2007-02-23 Solar cell and an arrangement and a method for producing a solar cell
US12/280,622 US20090061210A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
US12/280,636 US20090136739A1 (en) 2006-02-23 2007-02-23 Coating on a plastic substrate and a coated plastic product
JP2008555824A JP2009527914A (ja) 2006-02-23 2007-02-23 太陽電池ならびに太陽電池を生産する装置および方法
US12/280,657 US8741749B2 (en) 2006-02-23 2007-02-23 Semiconductor and an arrangement and a method for producing a semiconductor
JP2008555823A JP5237125B2 (ja) 2006-02-23 2007-02-23 金属基材上のコーティングおよびコーティングした製品
EP20070704872 EP1993775A1 (en) 2006-02-23 2007-02-23 Coating on a glass substrate and a coated glass product
US12/280,609 US8486073B2 (en) 2006-02-23 2007-02-23 Coating on a medical substrate and a coated medical product
RU2008137489/02A RU2467850C2 (ru) 2006-02-23 2007-02-23 Покрытие из нитрида углерода и изделие с таким покрытием
JP2008555825A JP5414279B2 (ja) 2006-02-23 2007-02-23 半導体ならびに半導体を生産する装置および方法
PCT/FI2007/050101 WO2007096480A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
KR1020087023253A KR101467584B1 (ko) 2006-02-23 2008-09-23 태양 전지 및 태양 전지를 생산하는 설비 및 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20060178A FI20060178L (sv) 2006-02-23 2006-02-23 Ytbeläggningsförfarande

Publications (2)

Publication Number Publication Date
FI20060178A0 FI20060178A0 (sv) 2006-02-23
FI20060178L true FI20060178L (sv) 2007-08-24

Family

ID=35953642

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20060178A FI20060178L (sv) 2006-02-23 2006-02-23 Ytbeläggningsförfarande

Country Status (7)

Country Link
US (1) US20090302503A1 (sv)
EP (1) EP1991387A2 (sv)
JP (1) JP5203226B2 (sv)
KR (1) KR20090004884A (sv)
CN (1) CN101437644B (sv)
FI (1) FI20060178L (sv)
WO (1) WO2007096464A2 (sv)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101565099B1 (ko) * 2007-02-23 2015-11-03 피코데온 리미티드 오와이 타겟의 광자 융발을 위한 방법 및 장치
DE102007043650A1 (de) 2007-09-13 2009-04-02 Siemens Ag Verfahren zur Verbesserung der Eigenschaften von Beschichtungen
EP2663419A2 (en) * 2011-01-13 2013-11-20 Tamarack Scientific Co. Inc. Laser removal of conductive seed layers
FI123883B (sv) * 2011-09-16 2013-11-29 Picodeon Ltd Oy Målmaterial, beläggning och ett belagt föremål
CN103031555B (zh) * 2011-10-10 2016-12-07 深圳富泰宏精密工业有限公司 壳体的制备方法及该方法所制备的壳体
DE102011122510A1 (de) * 2011-12-29 2013-07-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtung von optischen Wellenleitern
ITMI20130952A1 (it) * 2013-06-10 2014-12-11 Green Engineering S R L Componenti di un apparato di distillazione, metodo per la loro produzione e loro usi derivati
US10029421B2 (en) * 2014-09-18 2018-07-24 3Dm Digital Manufacturing Ltd Device and a method for 3D printing and manufacturing of materials using quantum cascade lasers
FI126659B (sv) 2014-09-24 2017-03-31 Picodeon Ltd Oy Förfarande för att belägga separatorfilmer för Li-batterier samt belagd separatorfilm
JP7013394B2 (ja) * 2016-05-31 2022-02-15 エッジウェル パーソナル ケア ブランズ リミテッド ライアビリティ カンパニー かみそりブレード刃先上のフルオロカーボンポリマーのパルスレーザ蒸着
US20220195589A1 (en) * 2019-04-04 2022-06-23 Lunar Resources, Inc. Method and system for vacuum vapor deposition of functional materials in space
GB202203879D0 (en) * 2022-03-21 2022-05-04 Rolls Royce Plc Apparatus and method for coating substrate

Family Cites Families (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099830A (en) * 1976-12-15 1978-07-11 A. J. Bingley Limited Optical systems including polygonal mirrors rotatable about two axes
DE2918283C2 (de) * 1979-05-07 1983-04-21 Carl Baasel, Lasertechnik KG, 8000 München Gerät zur Substratbehandlung mit einem Drehspiegel od. dgl.
US4701592A (en) * 1980-11-17 1987-10-20 Rockwell International Corporation Laser assisted deposition and annealing
US4394236A (en) * 1982-02-16 1983-07-19 Shatterproof Glass Corporation Magnetron cathode sputtering apparatus
US4686128A (en) * 1985-07-01 1987-08-11 Raytheon Company Laser hardened missile casing
JPS62174370A (ja) * 1986-01-28 1987-07-31 Mitsubishi Electric Corp セラミツクスコ−テイング装置
US5411797A (en) * 1988-04-18 1995-05-02 Board Of Regents, The University Of Texas System Nanophase diamond films
US5098737A (en) * 1988-04-18 1992-03-24 Board Of Regents The University Of Texas System Amorphic diamond material produced by laser plasma deposition
JP3016806B2 (ja) * 1990-01-24 2000-03-06 株式会社リコー 微小光学素子形成方法及び形成装置
JPH05804A (ja) * 1990-08-01 1993-01-08 Sumitomo Electric Ind Ltd 大面積複合酸化物超電導薄膜の成膜装置
JP3101636B2 (ja) * 1991-11-21 2000-10-23 日本たばこ産業株式会社 帯状シートの穿孔装置
FR2696441B1 (fr) * 1992-10-02 1994-12-16 Saint Gobain Vitrage Int Désalcalinisation de feuilles de verre à faible teneur en alcalins.
JP3255469B2 (ja) * 1992-11-30 2002-02-12 三菱電機株式会社 レーザ薄膜形成装置
US5578229A (en) * 1994-10-18 1996-11-26 Michigan State University Method and apparatus for cutting boards using opposing convergent laser beams
US5683601A (en) * 1994-10-24 1997-11-04 Panasonic Technologies, Inc. Laser ablation forward metal deposition with electrostatic assisted bonding
JPH08325714A (ja) * 1995-05-26 1996-12-10 Mitsubishi Electric Corp 蒸着装置
CN1134555C (zh) 1995-10-09 2004-01-14 社团法人高等技术研究院研究组合 大面积金钢石薄膜的制造装置及制造方法
JPH09118589A (ja) * 1995-10-26 1997-05-06 International Superconductivity Technology Center 酸化物薄膜生成法
JPH1032166A (ja) * 1996-07-16 1998-02-03 Toyota Motor Corp レーザーアブレーション法による結晶薄膜の形成方法
US5742028A (en) * 1996-07-24 1998-04-21 General Electric Company Preloaded laser shock peening
US6683783B1 (en) * 1997-03-07 2004-01-27 William Marsh Rice University Carbon fibers formed from single-wall carbon nanotubes
US5880552A (en) * 1997-05-27 1999-03-09 The United States Of America As Represented By The Secretary Of The Navy Diamond or diamond like carbon coated chemical sensors and a method of making same
AUPO912797A0 (en) * 1997-09-11 1997-10-02 Australian National University, The Ultrafast laser deposition method
US5858478A (en) * 1997-12-02 1999-01-12 The Aerospace Corporation Magnetic field pulsed laser deposition of thin films
JPH11189472A (ja) * 1997-12-25 1999-07-13 Hamamatsu Photonics Kk 窒化炭素の合成方法
JP3401425B2 (ja) * 1998-01-21 2003-04-28 理化学研究所 レーザー加工方法およびレーザー加工装置
US6159832A (en) * 1998-03-18 2000-12-12 Mayer; Frederick J. Precision laser metallization
US6198069B1 (en) * 1998-08-13 2001-03-06 The Regents Of The University Of California Laser beam temporal and spatial tailoring for laser shock processing
WO2000022184A1 (en) 1998-10-12 2000-04-20 The Regents Of The University Of California Laser deposition of thin films
KR20000026066A (ko) * 1998-10-17 2000-05-06 윤종용 회전반사경 조립체 및 이를 채용한 인쇄장치
JP4480809B2 (ja) * 1999-03-30 2010-06-16 Hoya株式会社 酸化インジウム薄膜及びその製造方法
CN1120898C (zh) * 1999-12-08 2003-09-10 中国科学院物理研究所 一种制备具有有序表面结构的镧钙锰氧薄膜的方法
JP3531865B2 (ja) * 2000-07-06 2004-05-31 独立行政法人 科学技術振興機構 超平坦透明導電膜およびその製造方法
AUPR026100A0 (en) * 2000-09-20 2000-10-12 Tamanyan, Astghik Deposition of thin films by laser ablation
US6676811B1 (en) * 2001-08-13 2004-01-13 The United States Of America As Represented By The Secretary Of The Air Force Method of depositing nanoparticles for flux pinning into a superconducting material
US6884328B2 (en) * 2001-11-29 2005-04-26 Seagate Technology Llc Selective annealing of magnetic recording films
US6677552B1 (en) * 2001-11-30 2004-01-13 Positive Light, Inc. System and method for laser micro-machining
US20030145681A1 (en) * 2002-02-05 2003-08-07 El-Shall M. Samy Copper and/or zinc alloy nanopowders made by laser vaporization and condensation
JP2003303771A (ja) * 2002-04-11 2003-10-24 Kumamoto Technology & Industry Foundation 真空蒸着方法および装置
US6809291B1 (en) * 2002-08-30 2004-10-26 Southeastern Universities Research Assn., Inc. Process for laser machining and surface treatment
KR100565051B1 (ko) * 2002-09-16 2006-03-30 삼성전자주식회사 광주사유닛 및 이를 채용한 전자사진방식 화상형성장치
US20040250769A1 (en) * 2002-10-28 2004-12-16 Finisar Corporation Pulsed laser deposition for mass production
KR100821810B1 (ko) * 2002-11-08 2008-04-11 도꾸리쯔교세이호진 상교기쥬쯔 소고겡뀨죠 기판상의 막형성 방법
US20040175582A1 (en) * 2002-12-05 2004-09-09 Olin Corporation, A Corporation Of The Commonwealth Of Virginia Laser ablation resistant copper foil
US7397592B2 (en) * 2003-04-21 2008-07-08 Semiconductor Energy Laboratory Co., Ltd. Beam irradiation apparatus, beam irradiation method, and method for manufacturing a thin film transistor
JP4515136B2 (ja) * 2003-04-21 2010-07-28 株式会社半導体エネルギー研究所 レーザビーム照射装置、薄膜トランジスタの作製方法
US20050061779A1 (en) * 2003-08-06 2005-03-24 Walter Blumenfeld Laser ablation feedback spectroscopy
JP4141933B2 (ja) * 2003-10-10 2008-08-27 独立行政法人科学技術振興機構 微粒子捕捉用の穴状回転フィルター板を有する成膜装置及び成膜方法
US7049543B2 (en) * 2003-11-07 2006-05-23 The Regents Of The University Of California Method of defining features on materials with a femtosecond laser
CN1332062C (zh) * 2004-05-14 2007-08-15 中国科学院半导体研究所 低能氧离子束辅助脉冲激光沉积氧化物薄膜的方法
US7879410B2 (en) * 2004-06-09 2011-02-01 Imra America, Inc. Method of fabricating an electrochemical device using ultrafast pulsed laser deposition
US7527824B2 (en) * 2004-06-25 2009-05-05 Becker Michael F Methods for producing coated nanoparticles from microparticles

Also Published As

Publication number Publication date
WO2007096464A2 (en) 2007-08-30
CN101437644B (zh) 2012-07-04
CN101437644A (zh) 2009-05-20
WO2007096464A3 (en) 2007-10-11
JP5203226B2 (ja) 2013-06-05
EP1991387A2 (en) 2008-11-19
KR20090004884A (ko) 2009-01-12
FI20060178A0 (sv) 2006-02-23
JP2009527644A (ja) 2009-07-30
US20090302503A1 (en) 2009-12-10

Similar Documents

Publication Publication Date Title
FI20060288A0 (sv) Beläggningsförfarande
DE602007012330D1 (de) Beschichtungszusammensetzung
BRPI0816087A2 (pt) Revestimento fotocatalítico
BRPI0717071A2 (pt) artigo revestido
FI20060178L (sv) Ytbeläggningsförfarande
BRPI0717211A2 (pt) artigo revestido
BRPI0808118A2 (pt) Revestimento hidrófilo
BRPI0808105A2 (pt) Revestimento hidrófilo
DE602007013995D1 (de) Beschichtungsverfahren
DE112007001800A5 (de) Gleitlack
DK2187759T3 (da) Erythritolbaserede hårde overtræk
ATE512727T1 (de) Streichvorrichtung
BRPI0815649A2 (pt) Revestimento
DE602007013051D1 (de) Sprühvorrichtung
ATE461253T1 (de) Antihaft-beschichtungszusammensetzung
DE502006006067D1 (de) Ng
SE0602723L (sv) Belagt skär
FI20060287A (sv) Hydrofobisk yta
ATE536943T1 (de) Oberflächenmodifikation
DE112007003218A5 (de) Antihaftbeschichtung
DE602006004709D1 (de) Beschichtungsverfahren
FI20070857A (sv) Ytbeläggning av en kropp
FI20075944A0 (sv) Beläggningsmetod
DE502006004347D1 (de) Wärmereflektierender Belag
BRPI0919801A2 (pt) revestimento ii

Legal Events

Date Code Title Description
PC Transfer of assignment of patent

Owner name: PICODEON LTD OY

Free format text: PICODEON LTD OY

FD Application lapsed