ES2106520T3 - Procedimiento que permite el trabajo de materiales por radiacion emitida por diodos. - Google Patents
Procedimiento que permite el trabajo de materiales por radiacion emitida por diodos.Info
- Publication number
- ES2106520T3 ES2106520T3 ES94911123T ES94911123T ES2106520T3 ES 2106520 T3 ES2106520 T3 ES 2106520T3 ES 94911123 T ES94911123 T ES 94911123T ES 94911123 T ES94911123 T ES 94911123T ES 2106520 T3 ES2106520 T3 ES 2106520T3
- Authority
- ES
- Spain
- Prior art keywords
- radiation
- pct
- diodes
- procedure
- allows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/034—Observing the temperature of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Semiconductor Lasers (AREA)
Abstract
LA INVENCION SE REFIERE A UN PROCEDIMIENTO PARA MECANIZACION DE MATERIALES MEDIANTE RADIACION DE DIODOS, EN PARTICULAR RADIACION DE DIODOS LASER. PARA ADAPTAR EL PERFIL DEL RAYO AL PROCESO DE MECANIZADO, SE IMPLANTA EL PROCEDIMIENTO DE TAL MODO QUE LA RADIACION EMITIDA POR UNA PLURALIDAD DE DIODOS CON UN PERFIL DE RAYO PREVIAMENTE DETERMINADO SE DIRIGE HACIA LA REGION DE MECANIZACION DE LA PIEZA DE TRABAJO Y LA DISTRIBUCION DE INTENSIDAD EN EL PERFIL DEL RAYO SE ALTERA MEDIANTE EL CONTROL DE LA POTENCIA DE SALIDA DEL DIODO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4316829A DE4316829A1 (de) | 1992-10-12 | 1993-05-19 | Verfahren zur Materialbearbeitung mit Diodenstrahlung |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2106520T3 true ES2106520T3 (es) | 1997-11-01 |
Family
ID=6488519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES94911123T Expired - Lifetime ES2106520T3 (es) | 1993-05-19 | 1994-03-08 | Procedimiento que permite el trabajo de materiales por radiacion emitida por diodos. |
Country Status (8)
Country | Link |
---|---|
US (1) | US5705788A (es) |
EP (1) | EP0700325B1 (es) |
JP (1) | JPH09501104A (es) |
AT (1) | ATE156739T1 (es) |
DE (1) | DE59403740D1 (es) |
DK (1) | DK0700325T3 (es) |
ES (1) | ES2106520T3 (es) |
WO (1) | WO1994026459A1 (es) |
Families Citing this family (64)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5531279A (en) * | 1994-04-12 | 1996-07-02 | Indresco Inc. | Sensor impulse unit |
DE4429913C1 (de) * | 1994-08-23 | 1996-03-21 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zum Plattieren |
DE69612411T2 (de) * | 1995-01-31 | 2001-12-06 | Toshiba Kawasaki Kk | Unterwasserbehandlungsverfahren und -system |
DE19514285C1 (de) | 1995-04-24 | 1996-06-20 | Fraunhofer Ges Forschung | Vorrichtung zum Umformen von Werkstücken mit Laserdiodenstrahlung |
FR2737814B1 (fr) * | 1995-08-11 | 1997-09-12 | Soc D Production Et De Rech Ap | Procede et dispositif de commande d'une source laser a plusieurs modules laser pour optimiser le traitement de surface par laser |
DE19637464C1 (de) * | 1996-09-13 | 1997-10-09 | Fraunhofer Ges Forschung | Verschleißbeständige Nockenwelle und Verfahren zu ihrer Herstellung |
JP2000334585A (ja) * | 1999-05-25 | 2000-12-05 | Ando Electric Co Ltd | レーザマーキング装置、及びレーザマーキング方法 |
US6313433B1 (en) * | 2000-04-03 | 2001-11-06 | Universal Laser Systems, Inc | Laser material processing system with multiple laser sources apparatus and method |
US6451152B1 (en) | 2000-05-24 | 2002-09-17 | The Boeing Company | Method for heating and controlling temperature of composite material during automated placement |
DE10037109C5 (de) * | 2000-07-27 | 2010-02-25 | Vaw Aluminium Ag | Verfahren und Vorrichtung zur Schweißnahtglättung beim Strahlschweißen |
WO2002009904A1 (en) * | 2000-07-31 | 2002-02-07 | Toyota Jidosha Kabushiki Kaisha | Laser beam machining method |
CA2332190A1 (en) * | 2001-01-25 | 2002-07-25 | Efos Inc. | Addressable semiconductor array light source for localized radiation delivery |
US20030102070A1 (en) * | 2001-11-30 | 2003-06-05 | The Boeing Company | System, method, and computer program product for providing control for high speed fiber placement |
JP4182001B2 (ja) * | 2002-03-12 | 2008-11-19 | 三星ダイヤモンド工業株式会社 | 脆性材料の加工方法及び加工装置 |
WO2003096387A2 (en) | 2002-05-08 | 2003-11-20 | Phoseon Technology, Inc. | High efficiency solid-state light source and methods of use and manufacture |
JP3939205B2 (ja) * | 2002-06-18 | 2007-07-04 | 浜松ホトニクス株式会社 | レーザ加工装置、レーザ加工温度測定装置、レーザ加工方法及びレーザ加工温度測定方法 |
US20040191559A1 (en) * | 2003-03-26 | 2004-09-30 | Bustamante Anthony T. | Method and apparatus for strengthening steel and cast iron parts |
DE10361521A1 (de) | 2003-12-03 | 2005-07-07 | Pac Tech - Packaging Technologies Gmbh | Verfahren und Vorrichtung zur wechselseitigen Kontaktierung von zwei Wafern |
KR101149683B1 (ko) * | 2003-12-03 | 2012-05-24 | 파크 테크-파카징 테크놀로지이스 게엠베하 | 두 웨이퍼의 교번 접촉을 위한 방법 및 장치 |
DE102004001276A1 (de) * | 2004-01-08 | 2005-08-04 | Mtu Aero Engines Gmbh | Verfahren zur Erwärmung von Bauteilen |
WO2005094390A2 (en) * | 2004-03-30 | 2005-10-13 | Phoseon Technology, Inc. | Led array having array-based led detectors |
DE102004020704A1 (de) * | 2004-04-28 | 2005-11-24 | Precitec Kg | Sensorvorrichtung zur Erfassung von Strahlung aus dem Bereich einer Wechselwirkungszone zwischen einem Laserstrahl und einem Werkstück sowie Vorrichtung zur Überwachung eines Laserbearbeitungsvorgangs und Laserbearbeitungskopf |
JP2006108672A (ja) * | 2004-09-30 | 2006-04-20 | Heidelberger Druckmas Ag | 刷版の製造時の放射線源のための冷却装置 |
US20060073311A1 (en) * | 2004-10-05 | 2006-04-06 | The Boeing Company | Apparatus and method for composite tape profile cutting |
US7842145B2 (en) * | 2004-10-05 | 2010-11-30 | The Boeing Company | Method for laying composite tape |
JP4800324B2 (ja) * | 2004-12-30 | 2011-10-26 | フォーセン テクノロジー インク | 露光装置 |
US7538295B2 (en) * | 2005-04-21 | 2009-05-26 | Hewlett-Packard Development Company, L.P. | Laser welding system |
US7897891B2 (en) * | 2005-04-21 | 2011-03-01 | Hewlett-Packard Development Company, L.P. | Laser welding system |
US8318291B2 (en) * | 2005-09-07 | 2012-11-27 | The Boeing Company | Composite member defining a contour surface |
US7767930B2 (en) * | 2005-10-03 | 2010-08-03 | Aradigm Corporation | Method and system for LASER machining |
US20070116889A1 (en) * | 2005-11-18 | 2007-05-24 | Federal Mogul World Wide, Inc. | Laser treatment of metal |
FR2895924B1 (fr) * | 2006-01-10 | 2009-09-25 | Valeo Electronique Sys Liaison | Procede de brasage entre eux d'au moins deux organes empiles |
US20070254111A1 (en) * | 2006-04-26 | 2007-11-01 | Lineton Warran B | Method for forming a tribologically enhanced surface using laser treating |
WO2008092097A2 (en) * | 2007-01-26 | 2008-07-31 | Shasta Crystals, Inc. | Multi-beam optical afterheater for laser heated pedstal growth |
DE102008044523B4 (de) * | 2008-09-15 | 2011-06-16 | Thyssenkrupp Steel Europe Ag | Warmumformprofile |
CN102203674B (zh) | 2008-09-22 | 2015-08-12 | Asml荷兰有限公司 | 光刻设备、可编程图案形成装置和光刻方法 |
DE102009039417B4 (de) * | 2009-08-31 | 2015-09-24 | GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG | UV-Strahlungsüberwachung in der Halbleiterverarbeitung unter Anwendung eines temperaturabhänigen Signals |
TWI448830B (zh) | 2010-02-09 | 2014-08-11 | Asml Netherlands Bv | 微影裝置及元件製造方法 |
NL2006256A (en) | 2010-02-23 | 2011-08-24 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
US9041911B2 (en) | 2010-02-25 | 2015-05-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
NL2006385A (en) | 2010-04-12 | 2011-10-13 | Asml Netherlands Bv | Substrate handling apparatus and lithographic apparatus. |
US8309883B2 (en) * | 2010-05-20 | 2012-11-13 | Ipg Photonics Corporation | Methods and systems for laser processing of materials |
JP5672480B2 (ja) * | 2010-08-30 | 2015-02-18 | スズキ株式会社 | ビードの終端部の形状を判定する装置及びその方法 |
NL2007789A (en) | 2010-12-08 | 2012-06-11 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
KR101517457B1 (ko) | 2011-03-29 | 2015-05-04 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피에서 방사선 빔 스팟 위치의 측정 |
JP5731063B2 (ja) | 2011-04-08 | 2015-06-10 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置、プログラマブル・パターニングデバイス、及びリソグラフィ方法 |
KR101579916B1 (ko) | 2011-04-21 | 2015-12-23 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치, 리소그래피 장치를 유지하는 방법, 및 디바이스 제조 방법 |
WO2013023876A1 (en) | 2011-08-18 | 2013-02-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US10201877B2 (en) | 2011-10-26 | 2019-02-12 | Titanova Inc | Puddle forming and shaping with primary and secondary lasers |
NL2009342A (en) | 2011-10-31 | 2013-05-07 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
JP5815887B2 (ja) | 2011-11-29 | 2015-11-17 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置、デバイス製造方法およびコンピュータプログラム |
NL2009797A (en) | 2011-11-29 | 2013-05-30 | Asml Netherlands Bv | Apparatus and method for converting a vector-based representation of a desired device pattern for a lithography apparatus, apparatus and method for providing data to a programmable patterning device, a lithography apparatus and a device manufacturing method. |
US9341960B2 (en) | 2011-12-05 | 2016-05-17 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP5881851B2 (ja) | 2011-12-06 | 2016-03-09 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置、セットポイントデータを提供する装置、デバイス製造方法、セットポイントデータの計算方法、およびコンピュータプログラム |
NL2009902A (en) | 2011-12-27 | 2013-07-01 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
US9354502B2 (en) | 2012-01-12 | 2016-05-31 | Asml Netherlands B.V. | Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method for providing setpoint data and a computer program |
US9568831B2 (en) | 2012-01-17 | 2017-02-14 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
NL2010176A (en) | 2012-02-23 | 2013-08-26 | Asml Netherlands Bv | Device, lithographic apparatus, method for guiding radiation and device manufacturing method. |
MX368291B (es) | 2012-09-06 | 2019-09-26 | Etxetar Sa | Procedimiento y sistema para el endurecimiento por laser de una superficie de una pieza de trabajo. |
NL2012052A (en) | 2013-01-29 | 2014-08-04 | Asml Netherlands Bv | A radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method. |
WO2015136615A1 (ja) * | 2014-03-11 | 2015-09-17 | 株式会社島津製作所 | レーザ加工装置 |
US10864603B2 (en) | 2015-03-17 | 2020-12-15 | Ikergune A.I.E. | Method and system for heat treatment of sheet metal |
ES2644261B1 (es) * | 2016-05-27 | 2018-03-15 | Macsa Id, S.A. | Procedimiento de control de un sistema matricial de marcaje láser |
KR102120722B1 (ko) | 2018-09-18 | 2020-06-09 | 레이저쎌 주식회사 | 마이크론급의 두께를 갖는 전자부품에 대한 레이저 리플로우 장치 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3656175A (en) * | 1969-06-16 | 1972-04-11 | Ncr Co | Semiconductor diode laser recorder |
DE3583969D1 (de) * | 1984-06-13 | 1991-10-10 | Fuji Photo Film Co Ltd | Abtastvorrichtung mit halbleiterlaser. |
US4696104A (en) * | 1985-06-07 | 1987-09-29 | Vanzetti Systems, Inc. | Method and apparatus for placing and electrically connecting components on a printed circuit board |
DE3623409A1 (de) * | 1986-07-11 | 1988-01-21 | Bias Forschung & Entwicklung | Verfahren zur ueberwachung des bearbeitungsprozesses mit einer hochleistungsenergiequelle, insbesondere einem laser, und bearbeitungsoptik zur durchfuehrung desselben |
US4825035A (en) * | 1986-09-20 | 1989-04-25 | Mitsubishi Denki Kabushiki Kaisha | Control apparatus for energy beam hardening |
US4914272A (en) * | 1987-09-14 | 1990-04-03 | Sony Corporation | Laser beam soldering apparatus and soldering method using the same |
JPH02142695A (ja) * | 1988-07-13 | 1990-05-31 | Sony Corp | レーザ加工装置 |
US4963714A (en) * | 1988-10-24 | 1990-10-16 | Raytheon Company | Diode laser soldering system |
DE3926540A1 (de) * | 1989-08-11 | 1991-02-14 | Fraunhofer Ges Forschung | Verfahren einer laserbestrahlung beschichteter werkstuecke und vorrichtug zur durchfuehrung des verfahrens |
AU8205891A (en) * | 1990-06-21 | 1992-01-07 | Phoenix Laser Systems, Inc. | Dynamic control of laser energy output |
US5553629A (en) * | 1993-03-11 | 1996-09-10 | The United States Of America As Represented By The Secretary Of The Air Force | Portable medical laser pack system |
-
1994
- 1994-03-08 DK DK94911123.1T patent/DK0700325T3/da active
- 1994-03-08 US US08/557,070 patent/US5705788A/en not_active Expired - Lifetime
- 1994-03-08 WO PCT/EP1994/000706 patent/WO1994026459A1/de active IP Right Grant
- 1994-03-08 AT AT94911123T patent/ATE156739T1/de not_active IP Right Cessation
- 1994-03-08 JP JP6524844A patent/JPH09501104A/ja active Pending
- 1994-03-08 DE DE59403740T patent/DE59403740D1/de not_active Expired - Lifetime
- 1994-03-08 ES ES94911123T patent/ES2106520T3/es not_active Expired - Lifetime
- 1994-03-08 EP EP94911123A patent/EP0700325B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5705788A (en) | 1998-01-06 |
ATE156739T1 (de) | 1997-08-15 |
EP0700325A1 (de) | 1996-03-13 |
DK0700325T3 (da) | 1997-09-01 |
DE59403740D1 (de) | 1997-09-18 |
EP0700325B1 (de) | 1997-08-13 |
JPH09501104A (ja) | 1997-02-04 |
WO1994026459A1 (de) | 1994-11-24 |
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