ES2090074T3 - Robot biaxial con acoplamiento magnetico. - Google Patents
Robot biaxial con acoplamiento magnetico.Info
- Publication number
- ES2090074T3 ES2090074T3 ES90119433T ES90119433T ES2090074T3 ES 2090074 T3 ES2090074 T3 ES 2090074T3 ES 90119433 T ES90119433 T ES 90119433T ES 90119433 T ES90119433 T ES 90119433T ES 2090074 T3 ES2090074 T3 ES 2090074T3
- Authority
- ES
- Spain
- Prior art keywords
- robot
- magnetic coupling
- biaxial robot
- separate movements
- biaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J21/00—Chambers provided with manipulation devices
- B25J21/005—Clean rooms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
- B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
- B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
- B25J9/126—Rotary actuators
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
UN ROBOT QUE TIENE UN PAR DE ACOPLAMIENTOS MAGNETICOS (517,530;522,527) QUE ACOPLA CADA UNO UN MOTOR (51,52) EN UNA PRIMERA CAMARA CILINDRICA (53) A UN ANILLO CILINDRICO ASOCIADO (529,528) SEPARADO CERCA DE LA PARED CILINDRICA (55) DE DICHA PRIMERA CAMARA (53). EL ROBOT INCLUYE UN MECANISMO PARA CONVERTIR LA ROTACION DE CADA UNO DE ESTOS ANILLOS (529,528) EN MOVIMIENTOS SEPARADOS DEL ROBOT. EN LA VERSION PREFERIDA, ESTOS MOVIMIENTOS SEPARADOS SON RADIALES Y ROTACIONALES. TAL CONSTRUCCION PERMITE REDUCIR LA CANTIDAD DE PRODUCCION DE PARTICULAS POR TAL ROBOT.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US42477189A | 1989-10-20 | 1989-10-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2090074T3 true ES2090074T3 (es) | 1996-10-16 |
Family
ID=23683794
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES90119433T Expired - Lifetime ES2090074T3 (es) | 1989-10-20 | 1990-10-10 | Robot biaxial con acoplamiento magnetico. |
ES94101717T Expired - Lifetime ES2130295T3 (es) | 1989-10-20 | 1990-10-10 | Aparato de tipo robot. |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES94101717T Expired - Lifetime ES2130295T3 (es) | 1989-10-20 | 1990-10-10 | Aparato de tipo robot. |
Country Status (6)
Country | Link |
---|---|
US (5) | US5583408A (es) |
EP (3) | EP0858867A3 (es) |
JP (1) | JPH0755464B2 (es) |
KR (1) | KR100204161B1 (es) |
DE (2) | DE69032945T2 (es) |
ES (2) | ES2090074T3 (es) |
Families Citing this family (126)
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-
1990
- 1990-10-10 DE DE69032945T patent/DE69032945T2/de not_active Expired - Fee Related
- 1990-10-10 EP EP98106428A patent/EP0858867A3/en not_active Withdrawn
- 1990-10-10 DE DE69027273T patent/DE69027273T2/de not_active Expired - Fee Related
- 1990-10-10 EP EP90119433A patent/EP0423608B1/en not_active Expired - Lifetime
- 1990-10-10 EP EP94101717A patent/EP0600851B1/en not_active Expired - Lifetime
- 1990-10-10 ES ES90119433T patent/ES2090074T3/es not_active Expired - Lifetime
- 1990-10-10 ES ES94101717T patent/ES2130295T3/es not_active Expired - Lifetime
- 1990-10-18 JP JP2280531A patent/JPH0755464B2/ja not_active Expired - Lifetime
- 1990-10-19 KR KR1019900016725A patent/KR100204161B1/ko not_active IP Right Cessation
-
1994
- 1994-07-20 US US08/277,781 patent/US5583408A/en not_active Expired - Lifetime
- 1994-08-30 US US08/298,382 patent/US5469035A/en not_active Expired - Lifetime
-
1995
- 1995-10-26 US US08/548,945 patent/US5656902A/en not_active Expired - Lifetime
-
1997
- 1997-04-22 US US08/844,871 patent/US5764012A/en not_active Expired - Fee Related
-
1998
- 1998-03-27 US US09/049,035 patent/US5990585A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5656902A (en) | 1997-08-12 |
KR100204161B1 (ko) | 1999-06-15 |
ES2130295T3 (es) | 1999-07-01 |
US5764012A (en) | 1998-06-09 |
US5990585A (en) | 1999-11-23 |
EP0600851A3 (en) | 1994-08-17 |
EP0858867A2 (en) | 1998-08-19 |
EP0423608A1 (en) | 1991-04-24 |
EP0600851A2 (en) | 1994-06-08 |
KR910007637A (ko) | 1991-05-30 |
DE69032945D1 (de) | 1999-03-18 |
EP0600851B1 (en) | 1999-02-03 |
EP0423608B1 (en) | 1996-06-05 |
DE69032945T2 (de) | 1999-09-16 |
DE69027273T2 (de) | 1997-01-23 |
US5469035A (en) | 1995-11-21 |
US5583408A (en) | 1996-12-10 |
JPH0755464B2 (ja) | 1995-06-14 |
EP0858867A3 (en) | 1999-03-17 |
JPH03136779A (ja) | 1991-06-11 |
DE69027273D1 (de) | 1996-07-11 |
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