EP4151860A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP4151860A2
EP4151860A2 EP22216232.3A EP22216232A EP4151860A2 EP 4151860 A2 EP4151860 A2 EP 4151860A2 EP 22216232 A EP22216232 A EP 22216232A EP 4151860 A2 EP4151860 A2 EP 4151860A2
Authority
EP
European Patent Office
Prior art keywords
rotor
holweck
vacuum pump
collar
outer diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22216232.3A
Other languages
German (de)
English (en)
Other versions
EP4151860A3 (fr
Inventor
Sönke Gilbrich
Jan Hofmann
Bernd Koci
Mirko Mekota
Thilo Wille
Michael Schweighöfer
Tobias Stoll
Bernhard Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP22216232.3A priority Critical patent/EP4151860A3/fr
Priority to EP24166455.6A priority patent/EP4390144A3/fr
Priority to EP24166459.8A priority patent/EP4390145A2/fr
Publication of EP4151860A2 publication Critical patent/EP4151860A2/fr
Publication of EP4151860A3 publication Critical patent/EP4151860A3/fr
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb

Definitions

  • the invention relates to a vacuum pump, in particular a turbomolecular pump, with a rotor shaft rotating about an axis of rotation during operation and with at least one rotor component fastened to the rotor shaft.
  • a turbomolecular pump for example, has a plurality of rotor disks as rotor components, which each comprise a plurality of rotor blades as pumping-effective regions and interact with stator disks arranged relative to a housing of the pump.
  • a Holweck pump includes one or more Holweck sleeves that rotate during operation and are attached to a Holweck hub that is fixed to the rotor shaft.
  • a Holweck sleeve interacts with one or more Holweck stators, with the cylindrical outer surface and/or the cylindrical inner surface of the Holweck sleeve representing the effective pumping area, which interacts with one or more Holweck grooves, each of which is designed as an effective pumping area on the respective Holweck stator.
  • turbomolecular pumps often have not only one or more turbomolecular pump stages, but also one or more Holweck pump stages arranged downstream of the at least one turbomolecular pump stage.
  • the pump performance of a vacuum pump is determined in particular by its (gas-dependent) pumping speed, which for a given gas is essentially dependent on the geometry of the rotor and stator components and the speed of the rotor components is dependent, with the speed usually being a fixed device variable for a respective pump type, which indicates the speed at which the pump can be operated continuously in normal operation. This speed is also referred to below as the rated speed.
  • the pump power cannot simply be increased at will by larger diameters of the rotor and stator components, since this results in higher track speeds for the radially outer areas of the rotor components at the same speeds, in particular for the blade ends of the rotor blades of rotor disks.
  • the object of the invention is to remedy this.
  • This aluminum alloy is also referred to simply as “the aluminum alloy” or as “the material according to the invention” in the following.
  • each rotor component of the vacuum pump is made of the material according to the invention. But this is not mandatory. It is thus possible, for example, for all rotor disks of a turbomolecular pumping stage to be made from the aluminum alloy, whereas the rotating components of one or more Holweck pumping stages arranged downstream thereof are not made from this aluminum alloy.
  • the Holweck hub may be made of the aluminum alloy, but the or each Holweck sleeve attached to the Holweck hub is not.
  • the rotor disk has a rotor outer diameter DA, which is measured between two imaginary blade ends that are diametrically opposite one another, that the Holweck hub has a Holweck outer diameter DHW that is diametrically between two opposite points of a radial outer surface of the Holweck hub is measured, and that the rotor outer diameter DA is greater than the Holweck outer diameter DHW by a factor of at least 1.22, preferably at least 1.25, particularly preferably at least 1.30.
  • This concept means a relative reduction in the diameter of the Holweck hub (and thus the diameter of a Holweck sleeve attached to the radially outer end of the Holweck hub) compared to the outer rotor diameter of the rotor disc.
  • This reduction results in lower gas friction in the Holweck pump stage, which in turn allows for an increase in rotational speed and hence greater tip tip speed of the rotor disk. It has been found that this concept results in a higher pumping power overall.
  • the rotor disk has a rotor outer diameter DA, which is measured between two imaginary blade ends that are diametrically opposite one another, that the rotor disk has a collar outer diameter DB that is between two diametrically opposite points of a radial outer surface of the collar is measured, that the rotor disk has a basic outside diameter DG, which is measured from blade base to blade base of two imaginary diametrically opposite rotor blades, and that the difference DA - DG by a factor of at least 0.94, preferably at least 0.95, particularly preferably at least 0.97, is greater than the difference DA - DB.
  • This concept means—in comparison to known rotor disks—an increase in the proportion of the effective pumping area of a respective rotor blade, which is measured starting from the blade base, of the blade length measured starting from the collar. As a result, the portion of the length of a respective rotor blade that is effective for pumping can be increased and thus the pumping capacity of the vacuum pump can be increased overall.
  • the rotor disk has a basic outer diameter DG, which is measured from blade base to blade base of two imaginary diametrically opposite rotor blades, that the rotor shaft has a shaft outer diameter DI, and that DG is greater than DI by a factor of at most 1.20, preferably at most 1.15, more preferably at most 1.10.
  • This concept leads to a relative reduction of that part of the rotor disk, in relation to the radial direction, which has no or at most only a comparatively very low pumping efficiency.
  • the outer shaft diameter DI corresponds to the inner diameter of the flange of the rotor disk.
  • the rotor disks are preferably a one-piece component which is produced from a starting material by milling and/or sawing.
  • the rotor disk has an outer rotor diameter DA that is greater than 5.0 cm, preferably in a range from 5.0 cm to 60 cm, with the rotor outer diameter DA is measured between two imaginary blade ends that are diametrically opposite one another.
  • the rotor disk has a rotor outer diameter DA, which is measured between two imaginary blade ends that are diametrically opposite one another, with the Holweck hub having a Holweck outer diameter DHW, which is measured between two diametrically opposite points on a radial outer surface of the Holweck hub , and wherein the rotor outer diameter DA is at least 135 mm and the Holweck outer diameter DHW is at least 108 mm or the rotor outer diameter DA is 120 mm and the Holweck outer diameter DHW is 99 mm.
  • the rotor disk has a rotor outer diameter DA, which is measured between two imaginary blade ends diametrically opposite one another
  • the vacuum pump comprises a second Holweck hub, which has a Holweck outer diameter DHW, which is between two diametrically opposite points of a radial outer surface of the second Holweck hub is measured, the Holweck outside diameter DHW2 of the second Holweck hub being at least 91 mm, and/or the rotor outside diameter DA being greater by a factor of at least 1.40, preferably at least 1.48, than the Holweck outside diameter DHW2 of the second Holweck hub.
  • a magnetic bearing or a hybrid bearing can be provided for the rotor shaft. If a hybrid bearing is provided, then a permanent magnetic bearing is provided on the high-vacuum side and a roller bearing is provided on the fore-vacuum side.
  • the structure and arrangement of magnetic bearings and roller bearings for rotor shafts of vacuum pumps are known in principle to those skilled in the art, so that there is no need to go into detail here. In this regard, reference is also made to the the Figures 1 to 5 described embodiment of a turbomolecular pump referenced.
  • a plurality of rotor disks are fastened to the rotor shaft, with at least two rotor disks differing from one another in terms of the material from which they are made. It can be provided that at least one of the rotor disks is made of the aluminum alloy.
  • one or more rotor disks on the high-vacuum side are made of the aluminum alloy, whereas one or more rotor disks on the fore-vacuum side are made of a different material.
  • the aluminum alloy according to the invention is not used for all rotor disks, but only for a part of the rotor disks on the high-vacuum side.
  • the Holweck sleeve and/or the Holweck hub can have an outside diameter DHH or DHW, which is measured between two diametrically opposite points on a radial outer surface of the Holweck sleeve or the Holweck hub and which is in the region from 5.0 cm to 60 cm.
  • the rotor component can have an outer diameter greater than 10 cm, preferably greater than 15 cm, in particular preferably greater than 20 cm, the outer diameter being measured between two diametrically opposite points, each lying on a radially outer surface of the rotor component.
  • the flange of the rotor disk and/or the Holweck hub has an axial height in the range from 3.0 mm to 5.9 mm, in particular up to 5.49 mm.
  • the rotor blades can each have a blade thickness in the range from 0.125 mm to 2.9 mm if the blade thickness—seen in the radial direction—is measured in the middle between the blade base and the blade end.
  • the rotor blades each have a thickness of less than 9.8 mm, in particular less than 9.0 mm, at the blade base.
  • this relates to a method for operating a vacuum pump, in particular a vacuum pump as disclosed herein, wherein the vacuum pump comprises a rotor shaft rotating about an axis of rotation during operation and at least one rotor component fastened to the rotor shaft, wherein in the method the vacuum pump is operated at a rotational speed of the rotor shaft such that the maximum permissible temperature of the rotor component is greater than 90° C., in particular greater than or equal to 98° C., particularly preferably greater than or equal to 120° C.
  • the rotor component is a rotor disk, which includes a radially inner collar, via which the rotor disk is fastened to the rotor shaft, and a plurality of rotor blades, each of which is integrally connected to the collar and which, starting from a blade base, extend to the collar extend radially outwards and have a free blade end radially outwards, or around a Holweck component, in particular a Holweck hub or a Holweck sleeve.
  • a maximum permissible temperature of the rotor components of more than 90°C enables the vacuum pump to be operated as intended at a higher nominal speed than in known vacuum pumps, in which the maximum permissible temperature of the rotor components is limited to 90°C. Due to the higher speed, an increase in pump capacity can be achieved.
  • the aluminum alloy defined by independent claim 1 is a material that enables maximum permissible temperatures of more than 90°C for rotor components of vacuum pumps, in particular for rotor disks and/or Holweck components, without the above mentioned problems arise.
  • the vacuum pump is operated with a speed of the rotor shaft such that the blade tip speed of the rotor disk is more than 420 m/s, preferably more than 438 m/s, particularly preferably more than 464 m/s , amounts to.
  • the blade end speed of the rotor disk ie the path speed of the blade ends during operation with the rotor shaft rotating at the rated speed, is limited to a maximum of 420 m/s.
  • the pump performance of the vacuum pump can be increased due to the higher nominal speed.
  • the vacuum pump is operated with a rotor shaft speed of more than 59,000 revolutions per minute, preferably more than 100,000 revolutions per minute, particularly preferably more than 150,000 revolutions per minute.
  • the rotor shaft is mounted on the fore-vacuum side by a roller bearing that is lubricated with an oil that is is a synthetic oil which has a kinematic viscosity in the range from 4.5 to 6.5 mm 2 /s at 100°C (viscosity measured according to ASTM D445 - 17a).
  • an oil is a synthetic oil which has a kinematic viscosity in the range from 4.5 to 6.5 mm 2 /s at 100°C (viscosity measured according to ASTM D445 - 17a).
  • a preferred example of such an oil is the oil with the designation "AeroShell Turbine Oil 560".
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms when the vacuum pump is aligned according to FIG 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally is. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (cf. also 3 ).
  • Several connections 127 for accessories are provided on the electronics housing 123 .
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection through which flushing gas to protect the electric motor 125 (see e.g 3 ) before the pumped gas in the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111, can be admitted.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be conducted into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate solely on air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141 .
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed to operate as well can be taken if it is oriented in a different way than in 1 is shown. It is also possible to realize embodiments of the vacuum pump in which the underside 141 cannot be arranged facing downwards but to the side or directed upwards. In principle, any angles are possible.
  • various screws 143 are also arranged, by means of which components of the vacuum pump that are not further specified here are fastened to one another.
  • a bearing cap 145 is attached to the underside 141 .
  • fastening bores 147 are arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface. This is not possible with other existing turbomolecular vacuum pumps (not shown), which in particular are larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant fed in and out via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about an axis of rotation 151 .
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pumping stages connected in series with one another in a pumping manner, with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump stage.
  • the stator discs 157 are held at a desired axial distance from one another by spacer rings 159 .
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes.
  • Other turbomolecular vacuum pumps (not shown) exist that do not have Holweck pumping stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two Holweck rotor sleeves 163, 165 in the shape of a cylinder jacket, fastened to the rotor hub 161 and carried by it, which are oriented coaxially to the axis of rotation 151 and are nested in one another in the radial direction. Also provided are two cylinder jacket-shaped Holweck stator sleeves 167, 169, which are also oriented coaxially with respect to the axis of rotation 151 and are nested in one another when viewed in the radial direction.
  • the pumping-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radially inner surface of the outer Holweck stator sleeve 167 faces the radially outer surface of the outer Holweck rotor sleeve 163 to form a radial Holweck gap 171 and forms with it the subsequent one of the turbomolecular pumps first Holweck pump stage.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and therewith forms a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and therewith forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the central Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connection channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165 .
  • the above-mentioned pumping-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running in a spiral shape around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Advance vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided for the rotatable mounting of the rotor shaft 153 .
  • injection nut 185 In the area of the roller bearing 181 there is a conical injection nut 185 on the rotor shaft 153 with an outer diameter which increases towards the roller bearing 181 intended.
  • the injection nut 185 is in sliding contact with at least one stripper of an operating fluid store.
  • an injection screw may be provided instead of an injection nut. Since different designs are thus possible, the term "spray tip" is also used in this context.
  • the resource reservoir comprises a plurality of absorbent discs 187 stacked on top of one another, which are impregnated with a resource for the roller bearing 181, e.g. with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid reservoir via the scraper to the rotating spray nut 185 and, as a result of the centrifugal force, is conveyed along the spray nut 185 in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it e.g. fulfills a lubricating function.
  • the roller bearing 181 and the operating fluid reservoir are surrounded by a trough-shaped insert 189 and the bearing cover 145 in the vacuum pump.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, which each comprise a ring stack of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another, forming a radial bearing gap 199, the ring magnets 195 on the rotor side being arranged radially on the outside and the ring magnets 197 on the stator side being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 produces magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the ring magnets 195 on the rotor side are carried by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the ring magnets 197 on the stator side are carried by a support portion 203 on the stator side, which extends through extends through ring magnets 197 and is suspended from radial struts 205 of housing 119.
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 201 .
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the support section 203 and a fastening ring 211 connected to the support section 203 .
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnet 197 .
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs idle without contact during normal operation of the vacuum pump 111 and only engages in the event of an excessive radial deflection of the rotor 149 relative to the stator, in order to create a radial stop for the rotor 149 to form, so that a collision of the rotor-side structures is prevented with the stator-side structures.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough so that the backup bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217 .
  • an intermediate space 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement can affect one another magnetically in order to transmit the drive torque.
  • the motor stator 217 is fixed in the housing inside the motor room 137 provided for the electric motor 125 .
  • a sealing gas which is also referred to as flushing gas and which can be air or nitrogen, for example, can get into the engine compartment 137 via the sealing gas connection 135 .
  • the sealing gas can protect the electric motor 125 from process gas, e.g. from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 prevails in the engine compartment 137 at least approximately.
  • a labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the motor compartment 137, in particular in order to achieve better sealing of the motor compartment 217 in relation to the Holweck pump stages located radially outside.
  • FIG. 6 to 8 individual aspects and exemplary embodiments, in particular certain dimensions or dimensional relationships, of a vacuum pump according to the invention explained, which can be realized individually or in any combination in a turbomolecular pump, for example in a turbomolecular pump, as previously based on the Figures 1 to 5 has been described.
  • a turbomolecular pump as shown in the Figures 1 to 5 has been described, be designed in a manner according to the invention and in particular have one or more of the dimensions and/or one or more of the dimensional ratios as they are based on FIG Figures 6 to 8 be explained.
  • the serve Figures 6 to 8 for illustrative purposes only the dimensions or dimensional ratios are not true to scale.
  • the turbomolecular pump according to 6 includes a turbomolecular pumping stage and a Holweck pumping stage.
  • a plurality of rotor disks 15 are fastened to a rotor shaft 13, which rotates about an axis of rotation 11 during operation and is mounted in a roller bearing 37 on the fore-vacuum side.
  • the roller bearing can be lubricated by a synthetic oil, as has been described in the introductory part of the present disclosure.
  • a Holweck hub 17 is also fastened to the rotor shaft 13 and carries a cylindrical Holweck sleeve 18 radially on the outside.
  • the radial outer surface of the Holweck hub 17 lies on the same radius as the radially outer lateral surface of the Holweck sleeve 18, namely on a radius of 1/2 * DHW, i.e. the outer diameter of the Holweck hub 17 is DHW.
  • the radially outer ends 25 of the rotor blades 21 lie on a radius of 1/2 * DA, i.e. the rotor disks 15 have an outer diameter DA.
  • the ratio DA/DHW is at least 1.22.
  • the rotor blades 21 of a respective rotor disk 15 interact with stator blades of a respective stator disk 29 .
  • the stator disks 29 are fastened within a housing 27 of the turbomolecular pump in a manner which is fundamentally known to those skilled in the art.
  • the Holweck sleeve 18 interacts with a radially outer Holweck stator 31 and with a radially inner Holweck stator 33 , which are each provided with a Holweck groove arrangement facing the respective lateral surface of the Holweck sleeve 18 .
  • Holweck pump stages arranged one behind the other, each comprising a Holweck stator and an opposite lateral surface of a Holweck sleeve and also referred to as radially nested or nested Holweck stages, is fundamentally known to the person skilled in the art.
  • the rotor discs 15 and the Holweck hub 17 can be manufactured from the aluminum alloy.
  • the Holweck sleeve 18 can consist of a different material, for example a carbon fiber reinforced plastic (CFRP), as is known in principle to a person skilled in the art for the production of Holweck sleeves.
  • CFRP carbon fiber reinforced plastic
  • FIG. 7 shows a rotor disk 15 which is fixed on a rotor shaft 13 of a turbomolecular pump.
  • the rotor shaft 13 carries a high-vacuum side magnetic bearing 35, of which 7 two permanent magnet rings are shown.
  • the magnetic bearing of a rotor shaft 13 of a turbomolecular pump on the high-vacuum side is known in principle to a person skilled in the art, so that it does not need to be discussed in more detail. In this regard, the description of a turbomolecular pump based on the Figures 1 to 5 referred.
  • the rotor disk 15 is a one-piece component that is manufactured from a starting material by milling and/or sawing. This material is preferably the aluminum alloy. However, this material is not mandatory for the rotor disk 15 . The dimensions and dimensional relationships explained in more detail below can also be implemented on rotor disks 15 that are not made of this aluminum alloy.
  • the rotor disk 15 includes a radially inner, hollow-cylindrical collar 19 via which the rotor disk 15 is fastened to the rotor shaft 13 .
  • the rotor disk 15 has a plurality of rotor blades 21 which are each integrally connected to the collar 19 and which each extend radially outwards starting from a blade base 23 on the collar 19 and have a free blade end 25 radially on the outside.
  • a respective blade base 23 lies on a larger radius - in relation to the central axis of the hollow-cylindrical collar 19, which coincides with the axis of rotation 11 of the rotor shaft 13 when it is fastened to the rotor shaft 13 - than the radial outer surface of the collar 19.
  • the outer diameter DB of the collar 19 which is measured between two diametrically opposite points on the radial outer surface of collar 19, is consequently smaller than the basic outside diameter DG, which is measured from blade base 23 to blade base 23 of two imaginary rotor blades 21 diametrically opposite one another.
  • the rotor disk 15 has a rotor outer diameter DA, which is measured between two imaginary blade ends 25 diametrically opposite one another.
  • the rotor shaft 13 has an outer shaft diameter DI that corresponds to the inner diameter of the collar 19 of the rotor disk 15 .
  • the radial length of a respective rotor blade 21 measured from the blade base 23 to the blade end 25 represents the effective pumping portion of the total length of the rotor blade 21, which is measured from the collar 19 to the blade end 25.
  • the ratio (DA - DG)/(DA - DB) is at least 0.94, preferably at least 0.95, particularly preferably 0.97.
  • Rotor disks 15 with such a dimension ratio can be operated at relatively high speeds, in particular if they are made of the aluminum alloy. This leads to a particularly pronounced increase in the pumping capacity of the vacuum pump in question.
  • the basic outside diameter DG is by a factor of at most 1.20, preferably at most 1.15, particularly preferably at most 1.10 , larger than the shaft outer diameter DI.
  • the outer shaft diameter DI corresponds to the inner diameter of the collar 19 of the rotor disk 15.
  • the collar 19 of the rotor disk 15 according to the invention is therefore comparatively thin.
  • Rotor disks 15 with a collar 19 dimensioned in this way can then be operated at relatively high speeds if they are made of the aluminum alloy.
  • the axial height h of collar 19 of rotor disk 15 is preferably in a range from 3.0 mm to 5.9 mm, in particular up to 5.49 mm.
  • Preferred configurations of the rotor blades 21 relate to their blade thickness. 8 illustrates how blade thickness is defined within the scope of the present disclosure. Accordingly, at a respective radial point of a rotor blade 21, the blade thickness dG is the smallest diameter of a section surface of the rotor blade 21, which is obtained at the radial point by a section through the rotor blade 21 running perpendicular to the radial direction.
  • the blade thickness dG at the blade base is 23 (cf. 7 ) less than 9.8 mm, in particular less than 9.0 mm.
  • the blade thickness dG is preferably in the range of 0.125 mm and 2.9 mm.
  • Rotor disks 15 whose rotor blades 21 have the respective blade thickness dG at one or both of these radial points can be operated at comparatively high speeds if the rotor disks 15 are made of the aluminum alloy.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP22216232.3A 2022-12-22 2022-12-22 Pompe à vide Pending EP4151860A3 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP22216232.3A EP4151860A3 (fr) 2022-12-22 2022-12-22 Pompe à vide
EP24166455.6A EP4390144A3 (fr) 2022-12-22 Pompe à vide
EP24166459.8A EP4390145A2 (fr) 2022-12-22 2022-12-22 Pompe à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP22216232.3A EP4151860A3 (fr) 2022-12-22 2022-12-22 Pompe à vide

Related Child Applications (2)

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EP24166455.6A Division EP4390144A3 (fr) 2022-12-22 Pompe à vide
EP24166459.8A Division EP4390145A2 (fr) 2022-12-22 2022-12-22 Pompe à vide

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EP4151860A2 true EP4151860A2 (fr) 2023-03-22
EP4151860A3 EP4151860A3 (fr) 2023-04-05

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EP22216232.3A Pending EP4151860A3 (fr) 2022-12-22 2022-12-22 Pompe à vide

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3650702A1 (fr) 2018-11-12 2020-05-13 Pfeiffer Vacuum Gmbh Utilisation d'une huile synthétique dans une pompe à vide et pompe à vide

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Publication number Priority date Publication date Assignee Title
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE10053664A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe
DE10113329A1 (de) * 2001-03-20 2002-09-26 Leybold Vakuum Gmbh Turbomolekularpumpe
JP2004019493A (ja) * 2002-06-13 2004-01-22 Fujitsu Ltd 排気装置
FR2845737B1 (fr) * 2002-10-11 2005-01-14 Cit Alcatel Pompe turbomoleculaire a jupe composite
DE10354204B4 (de) * 2003-11-20 2016-03-10 Leybold Vakuum Gmbh Molekularpumpe
DE102006031965A1 (de) * 2005-07-15 2007-01-18 Leybold Vacuum Gmbh Rotoren einer Turbomolekularpumpe
DE202013010937U1 (de) * 2013-11-30 2015-03-02 Oerlikon Leybold Vacuum Gmbh Rotorscheibe sowie Rotor für eine Vakuumpumpe
DE102014114326A1 (de) * 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe
JP7192660B2 (ja) * 2019-05-30 2022-12-20 株式会社島津製作所 真空ポンプおよびリークディテクタ
JP7377640B2 (ja) * 2019-07-22 2023-11-10 エドワーズ株式会社 真空ポンプ、及び、真空ポンプに用いられるロータ並びに回転翼
FR3111143B1 (fr) * 2020-06-04 2022-11-18 Constellium Issoire Produits en alliage aluminium cuivre magnésium performants à haute température

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3650702A1 (fr) 2018-11-12 2020-05-13 Pfeiffer Vacuum Gmbh Utilisation d'une huile synthétique dans une pompe à vide et pompe à vide

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EP4151860A3 (fr) 2023-04-05
EP4390144A2 (fr) 2024-06-26
EP4390145A2 (fr) 2024-06-26

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