EP3529852B1 - Mehrschichtiger wellenleiter mit mindestens einer vorrichtung zum übergang zwischen den schichten dieses mehrschichtigen wellenleiters - Google Patents

Mehrschichtiger wellenleiter mit mindestens einer vorrichtung zum übergang zwischen den schichten dieses mehrschichtigen wellenleiters Download PDF

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EP3529852B1
EP3529852B1 EP17783526.1A EP17783526A EP3529852B1 EP 3529852 B1 EP3529852 B1 EP 3529852B1 EP 17783526 A EP17783526 A EP 17783526A EP 3529852 B1 EP3529852 B1 EP 3529852B1
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Prior art keywords
adaptation
channel
coupled
guide
channels
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French (fr)
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EP3529852A1 (de
Inventor
Nicolas CAPET
Francesco FOGLIA MANZILLO
Karim TEKKOUK
Ronan Sauleau
Mauro Ettorre
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Centre National dEtudes Spatiales CNES
Centre National de la Recherche Scientifique CNRS
Universite de Rennes 1
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Centre National dEtudes Spatiales CNES
Centre National de la Recherche Scientifique CNRS
Universite de Rennes 1
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/02—Coupling devices of the waveguide type with invariable factor of coupling
    • H01P5/022—Transitions between lines of the same kind and shape, but with different dimensions
    • H01P5/024—Transitions between lines of the same kind and shape, but with different dimensions between hollow waveguides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/16—Dielectric waveguides, i.e. without a longitudinal conductor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/02—Coupling devices of the waveguide type with invariable factor of coupling
    • H01P5/022—Transitions between lines of the same kind and shape, but with different dimensions

Definitions

  • the invention relates to a multilayer waveguide, that is to say a waveguide comprising several layers - in particular at least a plurality of layers formed of a dielectric material, said substrate -, superimposed on each other. , optionally with dielectric assembly interlayer layers, the various layers thus superimposed being etched so as to present guide channels in which an electromagnetic wave to be guided propagates.
  • the invention relates to a multilayer waveguide comprising a device for transition between two guide channels.
  • multilayer waveguides are known.
  • the different layers can in particular be formed of printed circuit boards held together by assembly devices such as adhesive films (assembly interlayers) or screws.
  • assembly devices such as adhesive films (assembly interlayers) or screws.
  • Such multilayer waveguides can be used in particular for the production of antennas.
  • At least two guide channels respectively extending in two distinct layers separated from each other by an intermediate dielectric layer each has an opening, the two openings of the two coupled guide channels facing each other and making it possible to transmit an electromagnetic wave through said intermediate dielectric layer and between these two coupled guide channels.
  • APRIL 2012 describes a waveguide comprising two printed circuit boards (PCB) superimposed via an adhesive film, each of the printed circuit boards having an array of coupling slots and channels formed from parallel rows of metal vias formed in the thickness of the plates.
  • the number of superimposed layers of a multilayer waveguide formed by etching and stacking printed circuit boards is limited, in practice from 10 to 20 layers depending on the technologies implemented.
  • the electromagnetic waves guided in these known multilayer waveguides undergo energy losses during their transmission between two coupled guide channels, resulting in particular from poor electrical contact, or even from the absence of electrical contact, between the channels. guides coupled.
  • the poor contact between the coupled guide channels results in a reflection of the electromagnetic waves and can also be the cause of parasitic radiation and energy losses, these drawbacks being amplified in the case of a misalignment. guide channels coupled during manufacture of the multilayer waveguide.
  • US 2015/0303541 describes a connection between a first waveguide of a first printed circuit board and a second waveguide of a second printed circuit board.
  • the two waveguides are formed by vias.
  • the first waveguide has an opening on one face of the first plate facing an opening of the second waveguide on a face of the second plate.
  • the connection includes an insulating film disposed between the two printed circuit boards.
  • a metal layer is disposed over the entire face of each plate having the opening of the waveguide on each side of the insulating film. The insulating film improves the transmission of electromagnetic waves.
  • the insulating film consists of a material which can be deformed under the effect of pressure so that the insulating film has a shape which adapts to the defects of the plates and to avoid a vacuum between these two plates so improve the connection between the first waveguide and the second waveguide.
  • the invention aims to overcome these drawbacks.
  • the invention therefore aims to provide a multilayer waveguide making it possible to ensure optimum transmission of the power of an electromagnetic wave guided between two layers of this multilayer waveguide.
  • the invention therefore aims to provide such a multilayer waveguide in which the electromagnetic energy transmission losses between coupled guide channels is minimized.
  • the invention also aims to provide such a multilayer waveguide with a simple and inexpensive structure.
  • the invention also aims to provide such a multilayer waveguide which is tolerant to manufacturing defects.
  • the invention also aims to provide such a multilayer waveguide comprising a device for transitioning between layers of this multilayer waveguide making it possible to increase the number of layers of this multilayer waveguide.
  • the coupled guide channels extend along said transmission direction at the level of the transition device.
  • the coupled guide channels extend along the same axis oriented in said direction of transmission.
  • the coupled guide channels extend along said direction of transmission but extend along an axis secant to said direction of transmission.
  • two coupled guide channels extend perpendicular to each other.
  • each adaptation channel of a waveguide depends in particular on the characteristics of the electromagnetic wave to be transmitted and on the characteristics of said intermediate dielectric layer.
  • the length of at least one adaptation wall of each adaptation channel is chosen so as to minimize the insertion losses of the transition device. More particularly, the shortest adaptation wall of each adaptation channel is the one whose length must be adapted. However, nothing prevents the length of each adaptation wall of an adaptation channel from being adapted.
  • the input impedance of a matching channel is the impedance of the terminal load brought back to the input of the matching channel.
  • the value of the impedance of the terminal load generally depends on the thickness and on the permittivity of the intermediate dielectric layer and on the permittivity of the superimposed layers forming guide channels.
  • each matching channel is adjusted so as to obtain an impedance at least substantially zero, ideally zero (short circuit), between the matching walls at the level of the coupling ends of two guide channels coupled to so as to improve the transmission of an electromagnetic wave while in particular minimizing energy losses.
  • the input impedance must be low to obtain a virtual perfect electrical conductor between the two coupled guide channels. Consequently, the design of a transition device according to the invention is simple and rapid.
  • the adaptation length l of each adaptation channel can be chosen between 0.1 ⁇ and 0.5 ⁇ , where ⁇ is the electromagnetic wavelength which propagates in this adaptation channel.
  • the length of each adaptation channel is generally less than the dimensions of the superimposed layers of the waveguide according to the invention.
  • the length of each matching channel is less than the length of the interlayer dielectric layer.
  • a transition device of a multilayer waveguide according to the invention makes it possible to minimize the transmission energy losses induced by the absence of electrical contact between two coupled guide channels.
  • a waveguide transition device according to the invention also makes it possible to minimize the reflection of the wave.
  • the minimization of the transmission energy losses of an electromagnetic wave is obtained over a wide frequency band (at least 30% of the central transmission frequency of the electromagnetic wave).
  • the transition device according to the invention makes it possible to obtain a transmission of an electromagnetic wave between two coupled guide channels similar to a transmission that can be obtained between guide channels which would be in electric contact.
  • the transition device therefore makes it possible to improve the transmission of electromagnetic waves between two coupled guide channels.
  • the transition device has the advantage of having a structure that is simple to manufacture and inexpensive.
  • a waveguide transition device is tolerant to manufacturing defects, an offset in the alignment of the coupled guide channels, and therefore of their walls. adaptation, resulting in very little energy loss compared to perfect alignment.
  • the coupled guide channels extend in two different superimposed layers of the multilayer electromagnetic waveguide.
  • the intermediate dielectric layer extends between two superimposed layers of the multilayer electromagnetic waveguide, no electrically conductive element allowing an electrical connection between these two superimposed layers being present between the latter.
  • the intermediate dielectric layer is present between said superposed layers and between the adaptation walls of the transition device. Said superimposed layers are therefore electrically isolated from one another.
  • each adaptation channel is intersecting with the direction of transmission, that is to say in particular that it is not parallel to the latter.
  • the angle formed between this longitudinal direction of an adaptation channel and the direction of transmission can be any but is preferably greater than 45 °, in particular greater than 60 °, more particularly between 80 ° and 90 °, values included .
  • the longitudinal direction of each adaptation channel is orthogonal to the direction of transmission.
  • the adaptation walls of each adaptation channel are orthogonal to the guide walls of the guide channels.
  • At least one transition device comprises a single adaptation channel extending on one side only from the coupled guide channels, in a longitudinal direction secant to the direction of transmission.
  • At least one transition device comprises at least two adaptation channels extending opposite to each other from the coupled guide channels, each adaptation channel extending along a longitudinal direction secant to the direction of transmission.
  • At least one transition device comprises at least four adaptation channels extending opposite each other in pairs from the coupled guide channels, distributed at 90 ° around the guide channels coupled, each adaptation channel extending in a longitudinal direction secant to the direction of transmission.
  • a waveguide according to the invention comprises several superimposed layers to form guide channels for an electromagnetic wave.
  • a waveguide according to the invention consists of at least one -notably a single-plurality of stacked layers superimposed on each other and fixed to each other in pairs. At least two layers include at least one lumen, the different lumens formed through the different layers being arranged so as to form guide channels within the waveguide. So, an electromagnetic wave can thus be guided in the different lights of each layer of the multilayer waveguide.
  • a waveguide according to the invention comprises at least one device for the transition between two coupled guide channels extending respectively through the thickness of two superimposed layers via an intermediate dielectric layer. The faces of the adjacent layers define a plane, called the main plane, the direction in thickness of the different layers being orthogonal to this main plane.
  • the direction of transmission is at least substantially orthogonal to the main plane of each layer.
  • a waveguide according to the invention is formed from a plurality of printed circuit boards (PCBs) stacked on top of each other by means of adhesive films.
  • PCBs printed circuit boards
  • Each printed circuit fabrication plate comprises at least one thickness of dielectric material, said substrate, and at least one thickness of electrically conductive material applied to at least one main face of the substrate.
  • Each adhesive film interposed between two printed circuit manufacturing plates constitutes an intermediate dielectric layer.
  • the guide channels can be formed at least in part by an etching / depositing process for printed circuit manufacturing plates.
  • Such an etching / deposition process makes it possible in particular to make holes through the thickness of each plate or the thickness of electrically conductive material of each plate and / or to deposit an electrically conductive material, such as copper, for form surface tracks of the substrate or vias or vias veneers (a via is a connection of electrically conductive material, generally in the form of a hollow or solid cylinder of revolution, formed in or through the thickness of at least a layer of dielectric solid material, cf. for example “Electromagnetics for High-Speed Analog and Digital Communication Circuits” by Ali M.Niknejad, published in 2007 ).
  • a waveguide according to the invention comprises several stacks of layers superimposed on one another, the different stacks being juxtaposed in pairs, one next to the other, at least one transition device being arranged between two juxtaposed stacks, that is to say between two coupled guide channels extending respectively in each stack and parallel to the main plane of the layers of each stack.
  • the direction of transmission is therefore parallel to the main plane of the layers of each stack, and the longitudinal direction of the adaptation channels can be orthogonal to the main plane of the layers of each stack.
  • each stack may in particular be formed of a plurality of printed circuit manufacturing plates stacked on top of each other by means of adhesive films. Other variant embodiments of each stack can be envisaged, for example as indicated above.
  • each adaptation wall of at least one adaptation channel is formed of a metal layer.
  • a metallic layer can be a metallic strip or a plurality of electrically conductive vias separated and juxtaposed parallel to one another.
  • an adaptation channel comprises two adaptation walls, each adaptation wall being formed by a metal blade.
  • an adaptation channel comprises two adaptation walls, each adaptation wall being formed by a plurality of electrically conductive vias.
  • an adaptation channel comprises a first adaptation wall formed by a metal strip and a second wall formed by a plurality of electrically conductive vias.
  • Such a plurality of juxtaposed vias is, from the point of view of the transmission of the electromagnetic wave, equivalent to a continuous metal plate, since the distance separating two adjacent vias is less than a predetermined distance depending on the wavelength of the electromagnetic wave.
  • the realization of a waveguide wall by juxtaposed vias has the advantage of allowing collective manufacture by rapid and economical etching / deposition processes, using traditional machines already widely in use on a scale. industrial.
  • each via of a matching wall extends along said intermediate dielectric layer from a coupling end of a guide channel coupled along the longitudinal direction of the channel. adaptation.
  • each via of a matching wall extends orthogonally to the longitudinal direction of the matching channel and to the direction of transmission.
  • the intermediate dielectric layer is interposed between two of said superimposed layers in which the coupled guide channels extend.
  • each matching wall extends between the intermediate dielectric layer and one of the preceding superimposed layers.
  • the intermediate dielectric layer is interposed between two layers of dielectric substrate in which the coupled guide channels extend. Further, each matching wall extends between the intermediate dielectric layer and one of the dielectric substrate layers.
  • each layer of a multilayer waveguide according to the invention in which extends a guide channel coupled comprises a thickness of a solid and rigid dielectric material, said substrate, common to the various layers of the waveguide superimposed on each other in pairs by means of an intermediate dielectric layer which may or may not be formed from the same substrate.
  • guide channels are described in the publication “A Multilayer LTCC Solution for Integrating 5G Access Point Antenna Modules”, F. Foglia Manzillo et al., In IEEE Transactions on Microwave Theory and Techniques, vol. 64, no. 7, pp. 2272-2283, July 2016 .
  • the intermediate dielectric layer is placed between faces, called coupling faces, of two dielectric substrate layers.
  • the coupling ends of the guide channels open onto these coupling faces.
  • the adaptation walls of each adaptation channel are placed between a coupling face of one of the dielectric substrate layers comprising a coupled guide channel and the intermediate dielectric layer of the transition device.
  • the matching channels are parallel to the assembly faces of the dielectric substrate layers.
  • a waveguide transition device thus makes it possible to ensure electromagnetic wave transmission between guide channels coupled with several superimposed layers while minimizing energy losses.
  • each coupled guide channel is delimited by at least two electrically conductive walls, called guide walls, spaced apart from one another.
  • this guide channel is called a “parallel plate waveguide”.
  • each coupled guide channel is delimited by two by two parallel guide walls and arranged to form a polygonal - in particular rectangular - cross section of the coupled guide channel.
  • a guide channel can be qualified as a “rectangular waveguide” (often designated by the acronym RW, standing for “rectangular waveguide”).
  • RW standing for “rectangular waveguide”.
  • the adaptation walls of the transition device can be peripheral walls of the end of coupling of each guide channel.
  • a guide wall can be formed of a plurality of electrically conductive vias juxtaposed parallel to each other.
  • each guide wall of at least one coupled guide channel is a metal plate.
  • each guide wall of at least one coupled guide channel is formed of a plurality of electrically conductive vias.
  • At least one guide wall of at least one coupled guide channel is formed of a metal plate and at least one other guide wall of this coupled guide channel is formed of a plurality of electrically conductive vias.
  • a guide channel whose guide walls are formed by juxtaposed vias makes it possible to guide an electromagnetic wave in a manner similar to a guide channel whose guide walls are formed by metal plates.
  • the orientation of the vias is the same on two parallel guide walls of a coupled guide channel.
  • the vias are oriented in the same direction as that of a field E relating to the electromagnetic mode that one wishes to have in the guide channel.
  • the vias are oriented orthogonally to the direction of a field. E relating to the electromagnetic mode that one wishes to have in the guide channel.
  • the vias of at least one guide wall of at least one guide channel extend parallel to the direction of transmission.
  • the vias of the guide walls of two coupled guide channels are aligned with respect to each other which improves the transmission of an electromagnetic wave between these coupled guide channels.
  • the vias of at least one guide wall of at least one guide channel extend orthogonally to the direction of transmission.
  • the invention also extends to an antenna comprising at least one waveguide according to the invention.
  • an antenna according to the invention can be an antenna having a structure of the type called CTS, standing for “Continuous Transverse Stub” as described for example by US6101705 .
  • the invention also relates to a multilayer waveguide comprising a device for transitioning two guiding channels of the multilayer waveguide, a method of manufacturing such a multilayer waveguide and an antenna comprising such a waveguide.
  • Multilayer wave characterized in combination by all or part of the characteristics mentioned above or below.
  • a multilayer waveguide 20 according to the invention as shown in the figures 1 to 6 and 8 comprises at least two guide channels 21.
  • Each guide channel 21 extends longitudinally in a direction 22 of transmission and is delimited transversely by at least two electrically conductive walls, called guide walls 23, spaced from one another by a dielectric material 24. Thus, each guide channel 21 makes it possible to guide an electromagnetic wave between its guide walls 23.
  • the guide channels 21 have the same characteristic impedance Z C1 .
  • the guide walls 23 transversely delimiting a guide channel 21 are moreover, symmetrical in pairs with respect to a plane, called the transmission plane, parallel to these guide walls 23 and equidistant from the guide walls 23, this transmission plane being a median plane of the guide channel 21.
  • the dielectric material 24 interposed between two guide walls 23 of a guide channel 21 may be air or else any other suitable dielectric solid material.
  • the dielectric element 24 has a relative dielectric permittivity coefficient of between 1 and 10, nevertheless nothing prevents having such a coefficient greater than 10.
  • the guide channels 21 of the multilayer waveguide 20 are integrated in layers 25 of the same solid and rigid dielectric material, called the substrate, of the multilayer waveguide 20, superimposed two by two.
  • the substrate used is chosen according to the applications of the multilayer waveguide.
  • the substrate is generally an organic substrate of low relative dielectric permittivity, that is to say less than to 4.
  • the substrate can be a composite material formed from polytetrafluoroethylene and glass fibers such as RT / duroid® 5880 in order to transmit electromagnetic waves at high frequency.
  • each layer 25 is a printed circuit board (PCB) fabrication board.
  • PCB printed circuit board
  • Each layer 25 then comprises a thickness of dielectric material, said substrate, and a thickness of electrically conductive material applied to its two main faces of the substrate.
  • Each substrate layer 25 has at least one external face, called the coupling face, so that, when the substrate layers 25 are superimposed, a coupling face of a substrate layer 25 is opposite a coupling face. of another superimposed layer.
  • the coupling faces of the substrate layers 25 are plane and parallel to each other. Thus, the layers of the waveguide are more easily superimposed.
  • a multilayer waveguide according to the embodiment of the invention shown in figure 1 comprises two guide channels 21, called coupled guide channels 21, extending axially but being separated from one another so as to have an absence of electrical contact between these two guide channels 21.
  • One end, called the coupling end, of a coupled guide channel 21 is thus facing a coupling end of another guide channel 21 coupled so that an electromagnetic wave can be transmitted between these two channels 21 guides coupled.
  • the two coupled guide channels 21 are respectively integrated in two substrate layers 25 separated at a distance from one another.
  • An electromagnetic wave can then be transmitted between these two substrate layers 25 of the multilayer waveguide 20.
  • the substrate layers 25 of the multilayer waveguide 20 are thus superimposed so that the coupling ends of the guide channels 21 coupled to two superimposed substrate layers 25 are facing each other but distant from one another. the other.
  • the direction 22 of transmission is preferably orthogonal to the coupling face of each layer 25 of substrate.
  • each coupled guide channel 21 is delimited transversely by two guide walls 23.
  • the guide channel 21 is thus a waveguide with parallel plates.
  • each coupled guide channel 21 is delimited by two parallel metal plates 26 of the same dimensions.
  • the guide walls 23 delimiting the same side of two coupled guide channels 21 are placed on the same plane so that the two coupled guide channels 21 are perfectly aligned.
  • the multilayer waveguide 20 comprises, for each pair of coupled guide channels 21, a device 28 for transitioning the two coupled guide channels 21.
  • This transition device 28 comprises an intermediate dielectric layer 29 disposed between the two layers 25 of substrate comprising the coupled guide channels 21.
  • this intermediate dielectric layer 29 may be an adhesive film or a layer of adhesive making it possible to assemble the layers 25 of substrate one on top of the other.
  • the adhesive film may for example consist of a fabric pre-impregnated with resin.
  • the intermediate dielectric layer 29 has for example a relative dielectric permittivity coefficient of between 2 and 4, more particularly of the order of 2.5.
  • the intermediate dielectric layer 29 has a thickness smaller than the thickness of each of the two layers 25 of substrate which it connects. In particular, the thickness of the dielectric layer 29 is for example less than the length ⁇ of the electromagnetic wavelength which propagates in this same dielectric layer 29.
  • the intermediate dielectric layer 29 has a thickness less than ⁇ / 10, preferably less than ⁇ / 100.
  • the interlayer dielectric layer 29 may be formed of a layer of air. This layer of air can be unwanted, due to manufacturing errors, in particular during the manufacture of hollow waveguides.
  • the substrate layers 25 are then assembled to one another by a mechanical assembly device such as screws or else by pressing, for example.
  • the transition device 28 also comprises at least one adaptation channel 30 extending from the coupled guide channels, each adaptation channel 30 extending in a longitudinal direction secant to the direction of transmission, between the two layers. 25 comprising the two coupled guide channels 21.
  • each adaptation channel 30 is delimited by two electrically conductive walls, called adaptation walls 36, spaced from one another by the intermediate dielectric layer 29.
  • Each matching wall 36 extends between a substrate layer 25 comprising a coupled guide channel 21 and the intermediate dielectric layer 29.
  • at least one transition device comprises a single adaptation channel extending on one side only from the coupled guide channels, according to a longitudinal direction secant to the direction of transmission.
  • At least one transition device comprises at least two adaptation channels extending opposite to each other from the coupled guide channels, each adaptation channel extending in a secant longitudinal direction to the direction of transmission.
  • Each adaptation channel 30 extends in a longitudinal direction 31, secant to the transmission direction 22, over a predetermined length, called the adaptation length l, from the guide walls 23 of the guide channels 21 coupled at the level. coupling ends facing one another of the coupled guide channels 21, and moving away from these coupled guide channels 21.
  • a first adaptation channel 30 of the device 28 for transitioning two coupled guide channels 21 has a first adaptation wall 36 extending orthogonally to the direction 22 of transmission from a first guide wall 23. a first guide channel 21 coupled at its coupling end.
  • the first adaptation channel 30 comprises also a second adaptation wall 36 extending orthogonally to the direction 22 of transmission from a first guide wall 23 of a second guide channel 21 coupled at its coupling end, the first wall 23 of guiding the first guide channel 21 and the first guide wall 23 of the second guide channel 21 being placed on the same side of the transmission plane.
  • a second adaptation channel 30 of the transition device 28 has a first adaptation wall 36 extending orthogonally to the direction 22 of transmission from a second wall 23 for guiding the first guide channel 21 at its level. coupling end.
  • the first adaptation channel 30 also comprises a second adaptation wall 36 extending orthogonally to the direction 22 of transmission from a second guide wall 23 of the second guide channel 21 at its coupling end.
  • Each adaptation wall 36 can be formed by a blade, called the adaptation blade 32, electrically conductive.
  • Each adaptation blade 32 extends along the length of adaptation from a coupling end of an adaptation guide channel 21 and has a width equal to the width of this coupling end of this channel 21 guide.
  • a conductive adaptation blade 32 is orthogonal to the direction 22 of transmission.
  • the adaptation blades 32 may be disposed against the layers 25 of dielectric substrate.
  • a coupled guide channel 21 is delimited by two guide walls 23, each guide wall 23 being formed by a row of vias 27 juxtaposed so as to form a waveguide with parallel plates.
  • the vias 27 of the two guide walls 23 are preferably symmetrical to each other with respect to the transmission plane of the guide channel 21.
  • the vias 27 can be oriented in the direction 22 of transmission as shown figure 2 or on the contrary orthogonally to the direction 22 of transmission as shown figure 3 according to the electromagnetic mode that one wishes to have in the guide channel.
  • the vias 27 of a guide channel 21 are generally integrated in a layer 25 of dielectric substrate and pass right through the thickness thereof.
  • the vias are oriented orthogonally to the direction of a field E relating to the electromagnetic mode that one wishes to have in the guide channel.
  • the juxtaposed vias 27 forming a guide wall 23 are spaced from each other by a given distance, for example of the order of the diameter of the vias, so that a row of vias is similar to a metal wall with respect to a electromagnetic wave transmission.
  • the arrangement of the vias 27 of a guide wall 23 is for example described by J. Hirokawa and M. Ando, "Single-layer feed waveguide consisting of posts for plane TEM wave excitation in parallel plates," IEEE Trans. Antennas Propag., Vol. 46, no. 5, pp. 625-630, May 1998 and by D. Deslanders, K. Wu, "Accurate modeling, wave mechanisms, and design considerations of a substrate integrated waveguide" .IEEE Trans.
  • each adaptation wall 36 of each adaptation channel 30 is formed by a row of vias 33 juxtaposed parallel to each other and extending in the direction 31 longitudinal of the adaptation channel 30. More particularly, the vias 33 extend along said interlayer dielectric layer 29 from a coupling end of a coupled guide channel 21.
  • the guide channels 21 are delimited by two metal plates 26 parallel to each other and each adaptation wall 36 of each adaptation channel 30 is formed by a row of juxtaposed vias 33 parallel to each other and extending orthogonally to the longitudinal direction 31 of the adaptation channel 30 and to the transmission direction 22.
  • figure 7 represents an equivalent diagram of a multilayer waveguide according to the invention having two guide channels coupled by two adaptation channels.
  • Each adaptation channel 30 has a terminal load of impedance Z R , at its end in said longitudinal direction opposite to the coupled guide channels 21, which has a finite and non-zero value, representative of the phenomena of fringe fields and of radiation effects occurring at the ends of each adaptation channel opposite to the guide channels.
  • This terminal load is equivalent to a resistor in parallel with a capacitor at this end of the matching channel. This terminal load implies that each adaptation channel is not terminated by either a short circuit or an open circuit.
  • the adaptation length l of each adaptation channel is chosen to obtain an impedance of input Z AA ' , Z BB' of this adaptation channel at least substantially zero.
  • the input impedance Z AA ' , Z BB' of a matching channel is the impedance Z R of the terminal load brought back to the input AA ', BB' of the adaptation channel.
  • the value of the impedance Z R of this terminal load depends in particular on the thickness and on the permittivity of the intermediate dielectric layer and on the permittivity of the superimposed layers forming guide channels.
  • the adjustment of the adaptation length l of each adaptation channel makes it possible to obtain a low impedance, ideally zero (short circuit), between the two guide channels coupled so as to improve the transmission of an electromagnetic wave by minimizing in particular energy losses.
  • the adaptation length l of each adaptation channel can for example be chosen between 0.1 ⁇ and 0, 5 ⁇ , in particular between 0.2 ⁇ and 0.3 ⁇ . Consequently, the design of a transition device according to the invention is simple and rapid.
  • the layers 25 of substrate have the same relative permittivity ⁇ r 1 and all the waves are propagate according to the direction of propagation.
  • the figure 8 shows another equivalent diagram of a multilayer waveguide according to the invention having two guide channels coupled by two adaptation channels.
  • This equivalent scheme is valid for any thickness of the intermediate dielectric layer.
  • Each adaptation channel 30 has a terminal load of impedance Z R , at its end in said longitudinal direction opposite to the coupled guide channels 21, which has a finite and non-zero value, representative of the phenomena of fringe fields and of radiation effects occurring at the ends of each adaptation channel opposite to the guide channels.
  • This terminal load is equivalent to a resistor in parallel with a capacitor at this end of the matching channel.
  • the transition region between the matching channels and the guide channels is considered a junction of four four-port waveguides.
  • the coefficients of a distribution matrix [S] associated with this junction can be obtained by digital simulation.
  • the adaptation length l of each adaptation channel is then determined from these coefficients.
  • each adaptation channel 30 can be easily calculated, a transition device 28 can be designed quickly and simply.
  • a multilayer waveguide according to the embodiment shown in figure 9 comprises two parallelepipedal coupled guide channels 21.
  • each coupled guide channel 21 is delimited by four guide walls 23 which are parallel two by two and orthogonal two by two.
  • Such guide channels 21 thus form rectangular waveguides.
  • Each guide wall 23 is formed by a metal plate 26.
  • the transition device 28 then comprises four adaptation channels 30 between the two guide channels 21.
  • the four adaptation channels 30 are orthogonal two by two.
  • each adaptation wall 36 of an adaptation channel 30 is formed of a metal blade extending from a guide wall 23 of a coupled guide channel 21.
  • the walls 36 adaptation of the transition device 28 can be peripheral walls of the coupling ends of the guide channels.
  • the adaptation length l of two adaptation walls 36 of a first adaptation channel may be different from that of two adaptation walls 36 of a second adaptation channel orthogonal to the first adaptation channel.
  • a transition device 28 according to the invention makes it possible to improve the transmission of an electromagnetic wave between the coupled guide channels 21 while minimizing the energy losses, as well as the reflection of the electromagnetic waves transmitted between two coupled guide channels 21. .
  • it makes it possible to obtain in the two coupled guide channels 21 separated from one another a transmission of an electromagnetic wave similar to that which would be obtained with a continuous waveguide.
  • the frequency of the transmitted electromagnetic wave is 30 GHz.
  • the layers of the multilayer waveguides compared consist of a substrate with a relative permittivity equal to 2.2.
  • the results were obtained by software simulation with an electromagnetic solver 3D simulation software, namely ANSYS HFSS®, marketed by the company ANSYS, Inc., Canonsburg, Pennsylvania, USA
  • Other simulation software such as CST STUDIO SUITE® , marketed by the company CST of America®, Inc, Framingham, Massachussets, USA, or COMSOL Multiphysics®, marketed by the company COMSOL, Inc., Burlington, Massachussets, USA, or others, can be used.
  • a transmission coefficient of the order of -0.01dB and a reflection coefficient are obtained. of the order of -70dB.
  • a transmission coefficient of the order of of -4dB and a reflection coefficient of the order of -5dB With the case of a multilayer waveguide not in accordance with the invention comprising two superimposed guide channels not being in contact electrically, comprising an intermediate dielectric layer consisting of air 100 ⁇ m thick between two layers of the multilayer waveguide 20 and not comprising a transition device 28 according to the invention, a transmission coefficient of the order of of -4dB and a reflection coefficient of the order of -5dB.
  • a transmission coefficient is obtained of the order of - 0.04dB and a reflection coefficient of the order of -45dB.
  • a multilayer waveguide according to the embodiment of the invention shown in figure 1 comprising an adhesive film of 36 ⁇ m and relative permittivity of 2.6 as an intermediate dielectric layer 29 of the transition device 28, as well as adaptation blades 32 with an adaptation length l equal to 2 mm, a transmission coefficient of the order of - 0.01dB and a reflection coefficient of the order of -66dB.
  • a transition device 28 according to the invention is therefore robust with respect to misalignments of the coupled guide channels 21, which lead to little loss of energy.
  • a transmission coefficient of l is obtained. 'order of -0.03dB and a reflection coefficient of the order of -85dB.
  • a multilayer waveguide not in accordance with the invention comprising two guide channels of superimposed rectangular section which are not in electrical contact, comprising an intermediate dielectric layer made of air 100 ⁇ m thick between the two guide channels and do not include a transition device 28 according to the invention, each guide channel being delimited by four orthogonal guide walls two by two, one obtains a transmission coefficient of the order of -3dB and a reflection coefficient of l order of -5dB.
  • a transmission coefficient is obtained of the order of -0.04dB and a reflection coefficient of the order of -55dB.
  • the figures 10 to 13 present multilayer waveguides according to the invention which can be used as a basic block (assembly of guide channels coupled in a T shape, in particular for the dividers of power, and guide channels coupled perpendicular to each other) for the design of more complex structure multilayer waveguides, antennas.
  • the transition device 28 comprises two adaptation channels coupling the guide channel of the lower substrate layer to one end of the guide channel of the upper substrate layer.
  • the adaptation wall of the transition device 28 placed in contact with the coupling face of the upper substrate layer extends along the guide channel of the upper substrate layer so as to delimit it and to allow guiding an electromagnetic wave in this guide channel.
  • the figure 11 presents an alternative embodiment of the multilayer waveguide of the figure 10 , the transition device 28 comprising a single adaptation channel.
  • the multilayer waveguide comprises two layers 25 of substrate.
  • a first substrate layer called the lower substrate layer, comprises a guide channel extending in a direction of transmission.
  • a second substrate layer referred to as the upper substrate layer, comprises a guide channel extending orthogonally to the direction of transmission.
  • the single matching channel coupling the guide channel of the lower substrate layer to one end of the guide channel of the upper substrate layer, extends orthogonally to the direction of transmission away from the guide channel of the top substrate layer.
  • the guide channel of the upper substrate layer is delimited by a metallized wall disposed between the lower substrate layer and the interlayer dielectric layer extending along the two substrate layers of the multilayer waveguide so as to allow the guiding of an electromagnetic wave in the guide channel of the upper substrate layer while providing electrical contact with a guide wall of the guide channel of the lower substrate layer.
  • the guide channel of the upper substrate layer therefore partly comprises the intermediate dielectric layer.
  • the figure 12 presents a multilayer waveguide according to the invention making it possible to obtain a power divider with one input and two outputs.
  • the multilayer waveguide has four substrate layers, a first substrate layer comprising a guide channel extending in a transmission direction and being connected to a guide channel of a second superimposed substrate layer. at the first layer, the latter guide channel extending orthogonally to the direction of transmission.
  • a third substrate layer superimposed on the second substrate layer also comprises two coupled guide channels extending in the direction of transmission opening onto a coupling face of the third substrate layer.
  • One of the guide channels of the third substrate layer being connected to one end of the guide channel of the second substrate layer, and the other guide channel being connected to another end of this guide channel.
  • a fourth substrate layer 25 comprises two coupled guide channels extending in the direction of transmission, one of these guide channels being positioned facing a guide channel of the third substrate layer and the other channel. coupled guide channel of the fourth substrate layer being opposite the other guide channel of the third substrate layer.
  • a first transition device 28 is respectively placed between a first guide channel coupled to the fourth layer of substrate and the guide channel coupled opposite the latter to the third layer of substrate.
  • a second transition device 28 is respectively placed between the other guide channel coupled with the fourth layer of substrate and the guide channel coupled opposite the latter with the third layer of substrate.
  • the intermediate dielectric layer 29 is placed between the third substrate layer and the fourth substrate layer.
  • the transition devices 28 include two adaptation channels.
  • the adaptation channels are orthogonal to the direction of transmission.
  • the figure 13 presents a multilayer waveguide according to an alternative embodiment of the figure 12 .
  • the multilayer waveguide has two substrate layers, a first substrate layer, referred to as the lower substrate layer, comprising a first guide channel extending in a direction of transmission and being connected to a second guide channel of the lower substrate layer orthogonal to the direction of transmission.
  • a second substrate layer, called the upper substrate layer, comprises two guide channels.
  • a first guide channel of the upper substrate layer is coupled with one end of the second guide channel of the lower substrate layer.
  • the second guide channel is coupled to the other end of the second guide channel of the lower substrate layer.
  • the guide channels of the upper substrate layer are positioned opposite the ends of the second guide channel of the lower substrate layer.
  • a first transition device 28 is placed between the coupled first guide channel of the upper substrate layer and the second guide channel of the lower substrate layer.
  • a second transition device 28 is placed between the second coupled guide channel of the upper substrate layer and the second guide channel of the lower substrate layer.
  • the transition devices 28 include two adaptation channels.
  • the two transition devices 28 have a common adaptation wall between the ends of the second guide channel of the lower substrate layer so as to delimit this second guide channel and allow the guiding of an electromagnetic wave in this second channel of guidance between its ends.
  • the common adaptation wall is a metallized wall placed on the lower substrate layer.
  • the figure 14 presents a multilayer waveguide according to the invention comprising five substrate layers superimposed on each other making it possible to obtain a so-called candlestick supply network (see for example US 7,432,871 ).
  • a guide channel, extending in a direction of transmission, of the first substrate layer is coupled by a transition device to a guide channel, extending orthogonally to the direction of transmission, of a second substrate layer to the first substrate layer.
  • the device for transitioning between the first and the second substrate layer comprises two adaptation channels. Each of these adaptation channels has an adaptation wall extending along the guide channel of the second substrate layer so as to delimit it.
  • a first end of the guide channel of the second layer of substrate is coupled by a transition device to a first guide channel, extending in the direction of transmission, of a third layer of substrate.
  • a second end of the guide channel of the second substrate layer is coupled by another transition device to a second guide channel, extending in the direction of transmission, of the third substrate layer.
  • the transition devices between the second and the third substrate layers each have two adaptation channels, as shown in figure 11 .
  • a first guide channel of the third substrate layer is coupled to a first end of a first guide channel, extending orthogonally to the direction of transmission, of a fourth substrate layer, as shown in Fig. figure 12 .
  • a second guide channel of the third substrate layer is coupled to a first end of a second guide channel, extending orthogonally to the direction of transmission, of a fourth substrate layer.
  • a second end of the first guide channel of the fourth substrate layer is coupled by a transition device to a first guide channel, extending in the direction of transmission, of a fifth substrate layer. Furthermore, a second end of the second guide channel of the fourth substrate layer is coupled by a transition device to a second guide channel, extending in the direction of transmission, of the fifth substrate layer.
  • each transition device between the fourth and the fifth substrate layer comprises two adaptation channels.
  • Each guide channel of the fourth substrate layer is delimited by an adaptation wall of the adaptation channel with which it is associated.
  • a multilayer waveguide 20 according to the invention can be incorporated in an antenna as shown in figure 15 .
  • the antenna is made by adding radiating slits on the upper face of the multilayer waveguide 20 shown in figure 14 for example.
  • the figure 16 presents an alternative embodiment of the multilayer waveguide of the figure 14 .
  • This multilayer waveguide differs from the one presented in figure 14 in that the transition devices between the first substrate layer and the second substrate layer, between the third substrate layer and the fourth substrate layer and between the fourth substrate layer and the fifth substrate layer comprise a single channel d 'adaptation.
  • a multi-layered waveguide 20 according to the invention the layers 25 of which are printed circuit fabrication plates (PCB) can be manufactured by etching the adaptation walls 36 of the adaptation channels 30 on the thickness of material electrically. conductor applied to at least one main face of the substrate of each layer 25.
  • each adaptation wall 36 is formed of the electrically conductive material of the layers 25.
  • the guide walls 23, formed of vias 27 or metal plates 26 are manufactured in the layers 25 of the multilayer waveguide by methods known to those skilled in the art.
  • the layers 25 of the multi-layered waveguide 20 are assembled by interposing a dielectric interlayer 29 (film adhesive or air layer) between each of them.
  • a multilayer waveguide 20 according to the invention can also be produced by additive manufacturing of layers of polymer material and by depositing an electrically conductive material on at least one surface of the layers of polymer material.
  • the adaptation walls 36 of the adaptation channels 30 are then etched on the thickness of electrically conductive material applied.
  • the layers, once engraved, are then assembled together by gluing using an adhesive film.
  • a multilayer waveguide 20 according to the invention can also be produced from metal parts delimiting the guide channels and the adaptation channels.
  • the space between the metal parts defining the guide channels or the adaptation channels can be filled with air or else a dielectric foam.
  • a multilayer waveguide 20 according to the invention can therefore be manufactured using methods known to those skilled in the art.
  • the manufacture of a multilayer waveguide 20 is thus simple and quick to implement.
  • the tolerance to manufacturing defects of a multi-layered waveguide according to the invention makes it possible to facilitate manufacturing by accepting a margin of non-alignment of the coupled guide channels.
  • the invention therefore relates to a multilayer waveguide 20 comprising a device 28 for the transition of two guide channels 21 extending from a multilayer waveguide 20, each guide channel 21 comprising at least two electrically conductive walls.
  • the transition device 28 makes it possible to improve the transmission of electromagnetic waves between the guide channels 21, the transition device 28 comprising at least one adaptation channel 30, each adaptation channel 30 being delimited by two electrically conductive walls.
  • a multilayer waveguide, a method for manufacturing such a multilayer waveguide and an antenna according to the invention can be the subject of numerous variant embodiments with respect to the embodiments shown in the figures.
  • each guide wall can be formed from a plurality of juxtaposed rows of vias.
  • the guide channel 21 can be delimited by four guide walls 23, each guide wall 23 being formed of at least one row, in particular at least two adjacent rows of which the vias of a row are offset in the direction transmission with respect to the vias of another row of this guide wall 23, for example by three adjacent rows of vias 27 placed in staggered rows.
  • a multilayer waveguide according to the invention can comprise guide walls formed by at least one row of vias and adaptation walls formed by at least one other row of vias.
  • a multilayer waveguide according to the invention can be used in order to design radars, satellite systems, circuits and multilayer waveguide antennas operating down to millimeter waves.
  • a multilayer waveguide 20 according to the invention makes it possible in particular to produce antennas according to a CTS type structure as shown. figure 15 .

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Claims (12)

  1. Mehrschichtiger, elektromagnetischer Wellenleiter (20), umfassend mehrere übereinander gelagerte Schichten (25), die Leitkanäle (21) für eine elektromagnetische Welle bilden, und mindestens eine Übergangsvorrichtung (28), umfassend mindestens eine dielektrische Zwischenschicht (29) zwischen zwei Leitkanälen (21), so genannten gekoppelten Leitkanälen, die sich gemäß einer Übertragungsrichtung (22) einer elektromagnetischen Welle zwischen diesen gekoppelten Leitkanälen (21) über die Übergangsvorrichtung (28) verlängern,
    - wobei jede Übertragungsvorrichtung (28) mindestens einen Anpassungskanal umfasst, der sich ausgehend von den gekoppelten Leitkanälen (21) erstreckt, gemäß einer Längsrichtung (31), die sich mit der Übertragungsrichtung (22) schneidet,
    - wobei jeder Anpassungskanal (30) von mindestens zwei elektrisch leitenden Wänden begrenzt ist, so genannten Anpassungswänden (36), die durch die dielektrische Zwischenschicht (29) der Übergangsvorrichtung (28) voneinander beabstandet sind, wobei sich jede Anpassungswand (36) gemäß der Längsrichtung (31) entlang der dielektrischen Zwischenschicht (29) ausgehend von einem Ende, so genannten Kopplungsende, eines gekoppelten Leitkanals (21) erstreckt, und wobei sich mindestens eine Anpassungswand gemäß der Längsrichtung (31) auf einer Länge erstreckt, die zwischen 0,1 A und 0,5 A gewählt ist, um eine Impedanz, so genannte Eingangsimpedanz, die mindestens im Wesentlichen null ist, zwischen den Anpassungswänden (36) dieses Anpassungskanals (30) auf Höhe der Kopplungsenden der gekoppelten Leitkanäle (21) zu erhalten, um die Übertragung einer elektromagnetischen Welle zwischen den zwei gekoppelten Leitkanälen (21) zu optimieren.
  2. Wellenleiter nach Anspruch 1, dadurch gekennzeichnet, dass die Längsrichtung (31) jedes Anpassungskanals senkrecht zu der Übertragungsrichtung (22) ist.
  3. Wellenleiter nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, dass mindestens eine Anpassungswand (36) mindestens eines Anpassungskanals (30) ein Metallblatt (32) ist.
  4. Wellenleiter nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass mindestens eine Anpassungswand (36) mindestens eines Anpassungskanals (30) aus einer Vielzahl von zueinander parallelen, nebeneinanderliegenden, elektrisch leitenden Durchkontaktierungen (33) gebildet ist.
  5. Wellenleiter nach Anspruch 4, dadurch gekennzeichnet, dass sich die Durchkontaktierungen (33) entlang der dielektrischen Zwischenschicht (29) ausgehend von einem Kopplungsende eines gekoppelten Leitkanals (21) erstrecken.
  6. Wellenleiter nach Anspruch 4, dadurch gekennzeichnet, dass sich die Durchkontaktierungen (33) entlang der dielektrischen Zwischenschicht (29) senkrecht zu der Längsrichtung (31) des Anpassungskanals (30) und zu der Übertragungsrichtung (22) erstrecken.
  7. Wellenleiter nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass die dielektrische Zwischenschicht (29) zwischen zwei der übereinander gelagerten Schichten (25) eingefügt ist, in denen sich die gekoppelten Leitkanäle (21) erstrecken, und dadurch, dass sich jede Anpassungswand (32) zwischen der dielektrischen Zwischenschicht (29) und einer der vorhergehenden, übereinander gelagerten Schichten (25) erstreckt.
  8. Wellenleiter nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass jeder gekoppelte Leitkanal (21) von mindestens zwei elektrisch leitenden Wänden, so genannten Leitwänden (23) begrenzt ist, die voneinander beabstandet sind.
  9. Wellenleiter nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass jeder gekoppelte Leitkanal (21) von Leitwänden (23) begrenzt ist, die paarweise parallel und angeordnet sind, um einen vieleckigen, querverlaufenden, geraden Querschnitt des gekoppelten Leitkanals (21) zu bilden.
  10. Wellenleiter nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass mindestens eine Übergangsvorrichtung (28) mindestens zwei Anpassungskanäle umfasst, die sich einander gegenüberliegend erstrecken.
  11. Antenne, dadurch gekennzeichnet, dass sie mindestens einen Wellenleiter nach einem der Ansprüche 1 bis 10 umfasst.
  12. Verfahren zur Herstellung eines mehrschichtigen, elektromagnetischen Wellenleiters (20), umfassend mehrere übereinander gelagerte Schichten (25), die Leitkanäle (21) für eine elektromagnetische Welle bilden, und mindestens eine Übergangsvorrichtung (28), umfassend mindestens eine dielektrische Zwischenschicht (29) zwischen zwei Leitkanälen (21), so genannten gekoppelten Leitkanälen, die sich gemäß einer Übertragungsrichtung (22) einer elektromagnetischen Welle zwischen diesen gekoppelten Leitkanälen (21) über die Übergangsvorrichtung (28) verlängern,
    wobei die Übergangsvorrichtung (28) so hergestellt ist, dass:
    - jede Übertragungsvorrichtung (28) mindestens einen Anpassungskanal umfasst, der sich ausgehend von den gekoppelten Leitkanälen (21) erstreckt, gemäß einer Längsrichtung (31), die sich mit der Übertragungsrichtung (22) schneidet,
    - jeder Anpassungskanal (30) von mindestens zwei elektrisch leitenden Wänden begrenzt ist, so genannten Anpassungswänden (36), die durch die dielektrische Zwischenschicht (29) der Übergangsvorrichtung (28) voneinander beabstandet sind, wobei sich jede Anpassungswand (36) gemäß der Längsrichtung (31) entlang der dielektrischen Zwischenschicht (29) ausgehend von einem Ende, so genannten Kopplungsende, eines gekoppelten Leitkanals (21) erstreckt, und wobei sich mindestens eine Anpassungswand gemäß der Längsrichtung (31) auf einer Länge erstreckt, die zwischen 0,1 λ und 0,5 λ gewählt ist, um eine Impedanz, so genannte Eingangsimpedanz, die mindestens im Wesentlichen null ist, zwischen den Anpassungswänden (36) dieses Anpassungskanals (30) auf Höhe der Kopplungsenden der gekoppelten Leitkanäle (21) zu erhalten, um die Übertragung einer elektromagnetischen Welle zwischen den zwei gekoppelten Leitkanälen (21) zu optimieren.
EP17783526.1A 2016-10-21 2017-10-16 Mehrschichtiger wellenleiter mit mindestens einer vorrichtung zum übergang zwischen den schichten dieses mehrschichtigen wellenleiters Active EP3529852B1 (de)

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FR1660249A FR3057999B1 (fr) 2016-10-21 2016-10-21 Guide d'onde multicouche comprenant au moins un dispositif de transition entre des couches de ce guide d'onde multicouche
PCT/EP2017/076359 WO2018073176A1 (fr) 2016-10-21 2017-10-16 Guide d'onde multicouche comprenant au moins un dispositif de transition entre des couches de ce guide d'onde multicouche

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FR3127642B1 (fr) * 2021-09-28 2024-04-19 Commissariat Energie Atomique Microcircuit à guide d’onde intégré
EP4235956A1 (de) 2022-02-28 2023-08-30 Centre national de la recherche scientifique Mehrschichtige wellenleiterstrukturen für hochfrequenzantennen, hochfrequenzantennen damit
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US6101705A (en) 1997-11-18 2000-08-15 Raytheon Company Methods of fabricating true-time-delay continuous transverse stub array antennas
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JP4029173B2 (ja) * 2004-08-24 2008-01-09 株式会社村田製作所 伝送線路接続構造および送受信装置
US7432871B2 (en) 2005-03-08 2008-10-07 Raytheon Company True-time-delay feed network for CTS array
WO2011118544A1 (ja) * 2010-03-24 2011-09-29 日本電気株式会社 無線モジュール及びその製造方法
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EP3529852A1 (de) 2019-08-28
FR3057999B1 (fr) 2019-07-19
FR3057999A1 (fr) 2018-04-27
ES2834080T3 (es) 2021-06-16
US20190319327A1 (en) 2019-10-17
WO2018073176A1 (fr) 2018-04-26

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