EP3267040A1 - Pompe turbomoleculaire - Google Patents

Pompe turbomoleculaire Download PDF

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Publication number
EP3267040A1
EP3267040A1 EP16177824.6A EP16177824A EP3267040A1 EP 3267040 A1 EP3267040 A1 EP 3267040A1 EP 16177824 A EP16177824 A EP 16177824A EP 3267040 A1 EP3267040 A1 EP 3267040A1
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EP
European Patent Office
Prior art keywords
pumping stage
pump
turbomolecular
housing
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP16177824.6A
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German (de)
English (en)
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EP3267040B1 (fr
Inventor
Mirko Mekota
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Priority to EP16177824.6A priority Critical patent/EP3267040B1/fr
Publication of EP3267040A1 publication Critical patent/EP3267040A1/fr
Application granted granted Critical
Publication of EP3267040B1 publication Critical patent/EP3267040B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the present invention relates to a turbomolecular pump having a pump inlet and a pump outlet formed in a common pump housing, and having at least one turbomolecular pumping stage having an inlet region and an outlet region associated with the pump inlet.
  • Vacuum pumps play an important role in vacuum technology and are used in various technical applications for the extraction of mostly gaseous media and for the evacuation of cavities.
  • turbomolecular pumps also referred to as turbopumps, are used.
  • Turbomolecular pumps operate in the molecular, i. non-viscous, range and are capable of producing a vacuum with a very high purity.
  • a turbomolecular pump typically includes a housing that encloses a pumping chamber with a rotor shaft. At least one pump structure of the turbomolecular pump is arranged in the pump chamber, which conveys a gas present in the pump chamber or in a region to be evacuated from an inlet to an outlet of the turbomolecular pump and thereby pumps.
  • a drive for the rotor shaft is usually arranged in a separate storage space from the pump room.
  • Turbomolecular pumps are torque transfer pumps in which gas molecules entering the pump of a gas to be pumped receive a torque by impacting the moving rotor blades of the rotor shaft.
  • the Pump usually includes several pump stages of series or successively arranged rotor and stator discs. Each pumping stage thus usually consists of at least one rotor and one stator disk, which are arranged in pairs.
  • a pumping stage may also consist of only one rotor disk, and this applies in particular to the pumping stage located at the downstream end. In this case, the pump ends with a rotor disk.
  • the gas molecules due to the position of rotor and stator to each other receive a component of movement parallel to the axis of the pump, the axis usually corresponds to the rotor shaft.
  • multiple pump stages increase the pressure of the gas from the inlet to the outlet of the pump.
  • a turbomolecular pump basically works only effectively in pressure ranges in the molecular flow range and does not evacuate or promote to atmospheric pressure, but is usually supported by a backing pump, which then expels against a gas pressure of more than 1 mbar.
  • the working pressure range of the turbomolecular pump may be extended by coupling a molecular pumping stage driven by the same rotor shaft, for example a Holweck pumping stage or Siegbahn pumping stage, to the outlet of the turbomolecular pump within the pump housing. This makes it possible to use lower-pressure fore-vacuum pumps because the outlet pressure of the gas is increased.
  • Foreground pumps for example diaphragm pumps and spiral or scroll pumps, are self-contained pumps arranged separately from the turbomolecular pump in question, the suction side of which is connected via lines to the outlet of the turbomolecular pump.
  • such an arrangement is associated with a certain effort in terms of an airtight and electrical connection of both pumps. A risk of functional impairments due to leaks as well as faults in the electrical connection can generally not be ruled out.
  • So-called pumping stations in which a turbomolecular pump and a backing pump are mounted on a common frame and are already airtight and electrically connected by the manufacturer, are known from the prior art.
  • Such arrangements are usually relatively large and therefore have a large footprint.
  • they are often limited in their installation position and therefore difficult to integrate into existing systems.
  • DE 601 01 368 T2 DE 698 15 806 T2 such as EP 2 631 488 A1 ,
  • the object of the present invention is to provide a turbomolecular pump which overcomes the disadvantages described above, i. a compact, easy-to-integrate turbomolecular pump whose commissioning as simple as possible and therefore has few sources of error, at the same time the turbomolecular pump should be produced with the least possible effort and also should have a long service life.
  • the turbomolecular pump according to the invention comprises at least one pre-pumping stage which is effective between the outlet region of the turbomolecular pumping stage and the pump outlet and which is designed to compress gas conveyed by the turbomolecular pumping stage and against a gas pressure of more than 1 mbar, in particular against atmospheric pressure.
  • turbomolecular pump according to the invention is thus characterized in particular by the integration of the pre-pumping stage.
  • the turbomolecular pump according to the invention is therefore particularly advantageously a compact unit which can be put into operation directly without having to connect a separate backing pump as a further component. For the user, this results in a considerable time savings during installation and saves space. The risk of errors occurring during installation is greatly reduced by the integral design.
  • the pump according to the invention can be handled as a conventional pump of the respective type, in particular as regards the minimum space requirement and the arbitrary installation position.
  • the pump has its own Vorpumpcut so to speak, with "on board”, so that they produce at least largely maintaining all the advantages of a conventional pump of each type beyond on the suction side high vacuum pressure and on the discharge side directly against a relatively high pressure and in particular against atmospheric pressure can emit.
  • the invention can be realized in particular by using a special small construction of a pump type suitable as a pre-pumping stage.
  • a pump type suitable as a pre-pumping stage.
  • miniaturized pre-pumping stages or simply of "mini-pumping".
  • Such backing pumps can operate in continuous operation without their own backing pumps and against a relatively high pressure, for example. of more than 1 mbar or even against atmospheric pressure. It has surprisingly been found that such pumps are used as Vorpump processn integrated in turbomolecular pumps and thus can make the use of conventional backing pumps superfluous. By eliminating a separate forepump, a lot of energy can be saved.
  • a conventional separate backing pump may be helpful in initially evacuating a recipient.
  • the integrated pre-pumping stage according to the invention suffices, ie the conventional separate pre-pump then needs exclusively for the purpose initial evacuation to be used, for example, by temporary parallel switching.
  • the pre-pumping stage is a dependent unit whose operation requires one or more functional parts of the turbomolecular pump.
  • a common control and / or a common energy supply can be provided for the turbomolecular pumping stage and for the pre-pumping stage.
  • the functional parts of the turbomolecular pump may be, for example, an electric motor, an accessory connection, a data interface, a flood inlet, a barrier or coolant connection, a rotor shaft or gas flow paths forming structural elements.
  • the pre-pumping stage is dependent on the power supply of the turbomolecular pumping stage and optionally further pumping stages and shares with this pumping stage or these pumping stages a common control.
  • the pre-pumping stage may be based on a type of pump drive movement different from that of the turbomolecular pumping stage.
  • the pre-pumping stage unfolds its pumping action by operating orbiting or oscillating components moving relative to one another during operation.
  • the pre-pumping stage is preferably based on an orbital or oscillating pump drive movement.
  • the pre-pumping stage in this development is therefore preferably based on an orbital or oscillating relative movement of its pump-effective components.
  • the vibrations caused in each case by the different pump drive movements of the turbomolecular pumping stage and the pre-pumping stage at least partially cancel each other. Overall, therefore, can be realized in this way - in a sense as a side effect - at least a lower vibrational turbomolecular pump.
  • the pre-pumping stage is of the type of a spiral or scroll vacuum pump or of a diaphragm vacuum pump type.
  • Spiral or scroll vacuum pumps typically have crescent-shaped suction chambers formed by a helical rotor in cross-section engaging a similar helical stator, the rotor being orbited by an eccentric drive. This type of pump is therefore based on an orbital pump drive motion.
  • Diaphragm pumps basically operate on the principle of volume reduction by means of a flexible membrane, e.g. powered by a crank moved up and down. This type of pump is therefore based on an oscillating pump drive motion.
  • the pre-pumping stage is of a type different from a side channel or regeneration vacuum pump.
  • the side channel pump power is transmitted from a rotor rotating concentrically in the housing to a medium to be conveyed in a side channel arranged next to the rotor.
  • the medium moves repeatedly between individual areas of the rotor and the side channel back and forth.
  • the delivery rate is based on this momentum exchange.
  • This type of pump is therefore based on a rotating pump drive movement.
  • the pre-pumping stage has at least one movement axis with respect to which at least two components of the pre-pumping stage move relative to one another during operation, wherein the movement axis of the pre-pumping stage and a rotational axis of a rotor shaft of the turbomolecular pumping stage do not coincide.
  • the pre-pumping stage may have at least one axis of symmetry which does not coincide with the axis of rotation of the rotor shaft of the turbomolecular pumping stage.
  • the two components are the helical rotor and the spiral stator of a scroll or scroll vacuum pump.
  • the pre-pumping stage is preferably integrated into the turbomolecular pump completely independently of the position of the rotor shaft of the turbomolecular pumping stage.
  • this can simplify the retrofitting of already existing turbomolecular pumps with an integrated pre-pumping stage.
  • it may be sufficient to have only a few components, e.g. to modify the housing, an existing turbomolecular pump to integrate a pre-pumping stage.
  • the pre-pumping stage comprises a housing, which is at least partially formed by the pump housing.
  • At least one, preferably three, in particular five, housing side (s) of the housing of the pre-pumping stage are / are at least partially formed by the pump housing.
  • the housing of the Vorpumpcut can do this, for example, with an open side of the housing mounted on the pump housing or with be inserted or inserted in a corresponding receptacle of the pump housing a plurality of open housing sides.
  • the pre-pumping stage may also be at least partially enclosed within the pump housing by a housing, in particular in order to realize a delimitation towards further functional parts of the turbomolecular pumping stage.
  • the housing of the Vorpumpesti may be connected to the pump housing by fastening means such as screws, rivets or adhesive.
  • the pre-pumping stage or at least one pump-active structure of the pre-pumping stage is arranged in the pump housing or on the pump housing.
  • the pre-pumping stage is arranged in the pump housing or within the pump housing, i. the pre-pumping stage is preferably completely surrounded by the pump housing.
  • the pre-pumping stage is preferably completely surrounded by the pump housing.
  • an optionally present drive the Vorpumptreatment can be arranged in or on the pump housing.
  • the pre-pumping stage or at least one pump-active structure of the pre-pumping stage is at least partially formed by the pump housing.
  • the helical stator of a spiral or scroll vacuum pump may be formed as an integral part of the pump housing.
  • a valve head of a diaphragm pump as an integral part of the pump housing.
  • the pumping stage preferably comprises at least one stationary conveying element and at least one conveying element which moves in operation relative to the stationary conveying element, wherein the stationary conveying element of the pre-pumping stage is at least partially formed by the pump casing.
  • the stationary conveying element may, for example, be the spiral-shaped stator of a scroll or scroll vacuum pump.
  • the pre-pumping stage is a multiple, at least 5 to 10 times, preferably 10 to 15 times, smaller than the pump housing.
  • the pre-pumping stage occupies only about one fifth to one tenth, in particular one tenth to one fifteenth, of the total volume of the pump housing.
  • the pre-pumping stage is arranged asymmetrically and / or eccentrically with respect to the axis of rotation of the rotor shaft of the turbomolecular pumping stage.
  • the arrangement of the pre-pumping stage is independent of the position of the rotor shaft of the turbomolecular pumping stage.
  • the pre-pumping stage can be arranged within a limited angular range about the axis of rotation of the rotor shaft of the turbomolecular pumping stage, wherein the Angular range is less than 180 °, in particular less than 135 °, preferably less than 90 °.
  • an outlet region of the pre-pumping stage forms the pump outlet.
  • the outlet region of the pre-pumping stage may be connected to the pump outlet directly or via a gas flow path defined by one or more housing parts and / or stationary, solid structural elements located within the pump housing.
  • the gas flow path is e.g. a channel, which is formed in particular in a wall of the pump housing.
  • the inlet region of the pre-pumping stage is preferably connected directly to the outlet region of the turbomolecular pumping stage or to an outlet region of a further pumping stage arranged between the turbomolecular pumping stage and the pre-pumping stage.
  • the further pumping stage is, in particular, a molecular pumping stage, for example a Siegbahn and / or Holweck pumping stage. It can be arranged between the turbomolecular pumping stage and the Vorpumplace more pumping stages.
  • a gas flow path between the outlet region of the turbomolecular pump or the outlet region of the further pumping stage arranged between the turbomolecular pumping stage and the pre-pumping stage and the inlet region of the pre-pumping stage is provided by one or more housing parts and / or stationary, solid, within the pump housing is located structural elements limited.
  • a preferred embodiment of the turbomolecular pump according to the invention comprises a turbomolecular pumping stage, a molecular pumping stage, in particular a Holweck pumping stage, and a pre-pumping stage.
  • the pre-pumping stage is a spiral or scroll vacuum pump miniaturized in comparison with the dimensions of the pump housing of the turbomolecular pump, whose spiral-shaped stator is formed by a structural element of the pump housing.
  • the spiral or scroll vacuum pump preferably has its own electromotive drive, which draws its energy from the power supply of the turbomolecular pumping stage and / or the molecular pumping stage.
  • the spiral or scroll vacuum pump including its drive motor is arranged in the pump housing and the outlet region of the scroll or scroll vacuum pump is connected to the pump outlet via a gas flow path, which is designed in particular as a simple bore.
  • the outer dimensions of a turbomolecular pump according to the invention are at least substantially equal to the dimensions of a corresponding conventional turbomolecular pump, which does not comprise an integrated pre-pumping stage.
  • the integration of the pre-pumping stage into the turbomolecular pump according to the invention substantially increases the compactness of a high-vacuum pumping system which hitherto usually consists of at least two separate components - the turbomolecular pump and the backing pump.
  • the space requirement is considerably reduced.
  • the installation is simplified for the user since it eliminates the wiring of two separate components.
  • the short gas flow paths within the turbomolecular pump housing realized by the integration of the pre-pumping stage also reduce the risk of leakage.
  • turbomolecular pump 111 comprises a pump inlet 115 surrounded by an inlet flange 113, to which in a conventional manner, a non-illustrated recipient can be connected.
  • the gas from the recipient may be drawn from the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, may be connected.
  • the inlet flange 113 forms according to the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally.
  • electrical and / or electronic components of the vacuum pump 111 are housed, for example, for operating an arranged in the vacuum pump electric motor 125 (see. Fig. 3 ).
  • On the electronics housing 123 a plurality of terminals 127 are provided for accessories.
  • a data interface 129 for example, according to the RS485 standard, and a power supply terminal 131 on the electronics housing 123 are arranged.
  • a flood inlet 133 in particular in the form of a flood valve, is provided, via which the vacuum pump 111 can be ventilated.
  • a sealing gas connection 135, which is also referred to as flushing gas connection is arranged, via which flushing gas for protecting the electric motor 125 from the gas conveyed by the pump into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is housed, can be brought (cf. Fig. 3 ).
  • two coolant connections 139 are furthermore arranged, wherein one of the coolant connections is provided as an inlet and the other coolant connection is provided as an outlet for coolant, which can be passed through the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a base, so that the vacuum pump 111 can be operated standing on the bottom 141.
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and thus be operated to a certain extent suspended.
  • the vacuum pump 111 may be configured to operate can be taken if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the lower side 141 can not be turned down but can be turned to the side or directed upwards.
  • a bearing cap 145 is attached to the bottom 141.
  • mounting holes 147 are arranged, via which the pump 111 can be attached, for example, to a support surface.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises a plurality of process gas pumping stages for conveying the process gas pending at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged, which has a about a rotation axis 151 rotatable rotor shaft 153.
  • Turbomolecular pump 111 includes a plurality of turbomolecular pump stages operatively connected in series with a plurality of rotor disks 155 mounted on rotor shaft 153 and stator disks 157 disposed between rotor disks 155 and housed in housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one pump stage.
  • the pairs of rotor disk 155 and Statorefficiency 157 a turbomolecular pumping stage 250.
  • the stator 157 are held by spacer rings 159 at a desired axial distance from each other.
  • the vacuum pump further comprises Holweck pumping stages which are arranged one inside the other in the radial direction and which are pumpingly connected to one another in series.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder shell-shaped Holweck rotor sleeves 163, 165 fastened to the rotor hub 161 and oriented coaxially with the rotation axis 151 and nested in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the rotation axis 151 and, as seen in the radial direction, are nested one inside the other.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and / or outer surfaces, the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radially inner surface of the outer Holweck stator sleeve 167 faces the radially outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171, and forms with it the first Holweck pump stage subsequent to the turbomolecular pumps.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 forming a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and forms with this the third Holweck pumping stage.
  • a radially extending channel may be provided, via which the radially outer Holweck gap 171 with the middle Holweck gap 173 is connected.
  • a radially extending channel may be provided, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 may be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided.
  • a conical spray nut 185 with an outer diameter increasing toward the rolling bearing 181 is provided on the rotor shaft 153.
  • the spray nut 185 is in sliding contact with at least one scraper of a resource storage.
  • the resource storage comprises a plurality of stackable absorbent discs 187 provided with a rolling bearing bearing means 181, e.g. with a lubricant, soaked.
  • the operating means is transferred by capillary action of the resource storage on the scraper on the rotating sprayer nut 185 and due to the centrifugal force along the sprayer 185 in the direction of increasing outer diameter of the spray nut 185 to the roller bearing 181 out promoted, where eg fulfills a lubricating function.
  • the rolling bearing 181 and the resource storage are enclosed by a trough-shaped insert 189 and the bearing cap 145 in the vacuum pump.
  • the permanent magnet bearing 183 includes a rotor-side bearing half 191 and a stator-side bearing half 193, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 195, 197 include.
  • the ring magnets 195, 197 are opposed to each other to form a radial bearing gap 199, wherein the rotor-side ring magnets 195 are disposed radially outward and the stator-side ring magnets 197 radially inward.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause a radial bearing of the rotor shaft 153.
  • the rotor-side ring magnets 195 are supported by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are supported by a stator-side support portion 203, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119.
  • Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a lid element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203. Between the fastening ring 211 and the ring magnet 197, a plate spring 213 may also be provided.
  • an emergency bearing 215 is provided, which rests without contact during normal operation of the vacuum pump 111 and engages only with an excessive radial deflection of the rotor 149 relative to the stator to a radial stop for the rotor 149 form, so that a collision of the rotor-side structures with the stator-side structures prevented becomes.
  • the safety bearing 215 is designed as an unlubricated rolling bearing and forms with the rotor 149 and / or the stator a radial gap, which causes the safety bearing 215 is disengaged in the normal pumping operation.
  • the radial deflection at which the safety bearing 215 engages is dimensioned large enough so that the safety bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotationally driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149 whose rotor shaft 153 extends through the motor stator 217.
  • On the extending through the motor stator 217 through portion of the rotor shaft 153 may be arranged radially outside or embedded a permanent magnet arrangement.
  • a gap 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement for the transmission of the drive torque can influence magnetically.
  • the motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as purge gas, and which may be, for example, air or nitrogen, enter the engine compartment 137.
  • the electric motor 125 can be protected from the process gas, for example from corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, ie in the engine compartment 137 there is at least approximately the vacuum pressure caused by the backing pump connected to the pump outlet 117.
  • delimiting wall 221 Between the rotor hub 161 and a motor space 137 delimiting wall 221 may also be a so-called. And per se known labyrinth seal 223 may be provided, in particular to achieve a better seal of the engine compartment 217 against the Holweck pump stages located radially outside.
  • Fig. 6 schematically shows a possible basic structure of a turbomolecular pump 110 according to the invention, which arranged in a housing 119 has a turbomolecular pumping stage 250, a downstream of this molecular pumping stage 270 and the molecular pumping stage 270 downstream pre-pumping stage 300.
  • the pre-pumping stage 300 has a housing 302 that is partially formed by the housing 119. As from the representation of Fig. 6 As is clear, the housing 302 of the pre-pumping stage 300 is much smaller than the pump housing 119. The pre-pumping stage 300 is thus integrated into the turbomolecular pump 110.
  • a gas flow path 312 is indicated by arrows.
  • a gas to be pumped enters the turbomolecular pumping stage 250 via an inlet region 116.
  • the gas After passing through an outlet region 118 of the turbomolecular pumping stage 250, the gas enters the molecular pumping stage 270 and passes from its outlet region 272 into an inlet region 316 of the pre-pumping stage 300.
  • the pre-pumping stage 300 puffs the gas at a relatively high pressure compared to a vacuum 1 mbar and in particular against atmospheric pressure, via an outlet region 310 of the pre-pumping stage 300.
  • Fig. 7 shows a schematic cross section through the turbomolecular pump 110 of Fig. 6 , which is shown here quadratically for the sake of simplicity.
  • the cross section may be circular.
  • the pre-pumping stage 300 is arranged within an angular range of less than 90 ° about a rotation axis 151 of a rotor shaft 153.
  • the rotor shaft 153 are both the turbomolecular pumping stage 250 and the molecular pumping stage 270 assigned.
  • the arrangement of the pre-pumping stage 300 in the housing 119 is in principle independent of the position of the rotor shaft 153, since the pre-pumping stage 300 is not part of the rotor shaft 153 and is not driven by the rotor shaft 153.
  • the Fig. 6 and 7 It can be seen that the pre-pumping stage 300 is arranged in a bottom-side edge region of the pump housing 119.
  • the Fig. 8 to 10 each show a turbomolecular pump 110 according to the invention, which differs from the pump according to the Fig. 1 to 5 in each case differ essentially by the integrated pre-pumping stage 300, the arrangement of the pump outlet 117 and the arrangement of the sealing gas connection 135. Corresponding components are - for reasons of clarity only partially - provided with identical reference numerals. Matches between the pumps 110 are in part only in conjunction with one of Fig. 8 to 10 explained.
  • the turbomolecular pump 110 includes a molecular pumping stage 270 in the form of three Holweck pumping stages downstream of the turbomolecular pumping stage 250.
  • the outlet portion 272 of the molecular pumping stage 270 is connected to the inlet portion of the pre-pumping stage 300 via a gas flow path 312 formed as a bore in a structural member of the housing 119.
  • the outlet portion 310 of the pre-pumping stage 300 forms the pump outlet 117, through which the gas to be pumped can be expelled against atmospheric pressure.
  • the pre-pumping stage 300 is, for example, an in Fig. 8 not shown spiral or scroll vacuum pump, which is surrounded by a housing 302. Parts of the housing 302 are formed by the housing 119. Conversely, the housing 302 of the pre-pumping stage 300 forms part of the actual Pump housing 119.
  • the pre-pumping stage 300 may also include another type of pump in a small construction, such as a diaphragm vacuum pump.
  • the pre-pumping stage 300 further comprises a separate drive motor, which is arranged within the housing 302 and connected via a schematically indicated power supply line 124 to the electronics housing 123 and in particular to the power supply terminal 131.
  • Pre-pumping stage 300, molecular pumping stage 270, and turbo-molecular pumping stage 250 thus share an energy source, i. the pre-pumping stage 300 is not a self-contained unit.
  • the pre-pumping stage 300 is therefore not only spatially but also functionally integrated into the turbomolecular pump 110.
  • Fig. 9 shows a further embodiment of a turbomolecular pump 110 according to the invention, in which the pre-pumping stage 300 is completely within the pump housing 119.
  • the outlet region 310 of the pre-pumping stage 300 is connected to the pump outlet 117 via a gas flow path 312.
  • Fig. 10 shows a further embodiment of the turbomolecular pump 110 according to the invention, in which a stationary conveying element 306 of the pre-pumping stage 300 is formed by the pump housing 119.
  • the stationary conveying element 306 is a spiral-shaped stator of a spiral or scroll vacuum pump forming the pre-pumping stage 300.
  • the helical stator can either be milled into the housing 119 or formed on a separate insert, which can be inserted and fixed in the housing 119.
  • the pre-pumping stage 300 further includes a moving conveyor element 308 in the form of a helical rotor driven by an electric motor 318.
  • the rotor 308 and the motor 318 may be inserted into a receiving space of the pump housing 119 to assemble the rotor 308 and the stator 306.
  • the rotor 308 and the stator 306 may be formed on an insert be, which closes the pump housing 119.
  • a separate closure element may be provided.
  • the motor 318 is in turn connected via a line 124 to the electronics housing 123.
  • the outlet region 310 of the pre-pumping stage 300 is connected to the pump outlet 117 via a gas flow path 312 in the form of a bore formed in the housing 119.
  • Fig. 11 shows a further embodiment of a turbomolecular pump 110 according to the invention, in which the pre-pumping stage 300 is completely within the pump housing 119.
  • the pre-pumping stage 300 is a scroll or scroll vacuum pump that includes a helical stator as a stationary conveyor element 306 and a helical orbiter as a moving conveyor element 308. This conveying element 308 is driven by an electric motor 318 connected to the electronics housing 123 via a line 124.
  • the outlet region of the pre-pumping stage 300 is connected to the pump outlet 117 in a manner not shown in detail here.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP16177824.6A 2016-07-04 2016-07-04 Pompe turbomoléculaire Active EP3267040B1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113924417A (zh) * 2019-05-29 2022-01-11 爱德华兹有限公司 涡轮分子泵、真空抽吸***和排空真空腔室的方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1213482A1 (fr) * 2000-12-01 2002-06-12 Seiko Instruments Inc. Pompe à vide
DE69815806T2 (de) 1997-12-24 2004-05-19 Varian S.P.A., Leini Vakuumpumpe
DE60101368T2 (de) 2001-02-22 2004-10-14 Varian S.P.A., Leini Vakuumpumpe
EP2631488A2 (fr) 2012-02-23 2013-08-28 Pfeiffer Vacuum Gmbh Pompe à vide
EP2644893A2 (fr) * 2012-03-30 2013-10-02 Ebara Corporation Appareil d'évacuation sous vide
DE102015113821A1 (de) * 2014-08-27 2016-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69815806T2 (de) 1997-12-24 2004-05-19 Varian S.P.A., Leini Vakuumpumpe
EP1213482A1 (fr) * 2000-12-01 2002-06-12 Seiko Instruments Inc. Pompe à vide
DE60101368T2 (de) 2001-02-22 2004-10-14 Varian S.P.A., Leini Vakuumpumpe
EP2631488A2 (fr) 2012-02-23 2013-08-28 Pfeiffer Vacuum Gmbh Pompe à vide
EP2644893A2 (fr) * 2012-03-30 2013-10-02 Ebara Corporation Appareil d'évacuation sous vide
DE102015113821A1 (de) * 2014-08-27 2016-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113924417A (zh) * 2019-05-29 2022-01-11 爱德华兹有限公司 涡轮分子泵、真空抽吸***和排空真空腔室的方法

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