EP3049676B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3049676B1
EP3049676B1 EP14761870.6A EP14761870A EP3049676B1 EP 3049676 B1 EP3049676 B1 EP 3049676B1 EP 14761870 A EP14761870 A EP 14761870A EP 3049676 B1 EP3049676 B1 EP 3049676B1
Authority
EP
European Patent Office
Prior art keywords
housing portion
vacuum pump
heat
housing
drive means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14761870.6A
Other languages
German (de)
English (en)
Other versions
EP3049676A1 (fr
Inventor
Rainer Hölzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51518781&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP3049676(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP3049676A1 publication Critical patent/EP3049676A1/fr
Application granted granted Critical
Publication of EP3049676B1 publication Critical patent/EP3049676B1/fr
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (6)

  1. Pompe à vide, en particulier pompe turbomoléculaire, comprenant
    des éléments de rotor (20, 22) reliés à un arbre de rotor (10),
    au moins un dispositif stator (24, 26) coopérant avec un élément de rotor (20, 22),
    un dispositif d'entraînement électrique (30) entraînant l'arbre de rotor (10),
    des paliers (32) portant l'arbre de rotor (10), et
    un carter comportant plusieurs parties de carter (14, 28, 34),
    des composants sensibles à la chaleur (32) tels que les paliers (32) étant reliés à une première partie de carter (34) et des composants à fort dégagement de chaleur (30, 24, 26) tels que le dispositif d'entraînement (30) étant reliés à une deuxième partie de carter (28), et
    la deuxième partie de carter (28) étant reliée de manière thermiquement conductrice au dispositif d'entraînement (30),
    caractérisée en ce que
    la deuxième partie de carter (28) est reliée au dispositif d'entraînement (30) par le biais d'une partie support (36), la première partie de carter (34) et la deuxième partie de carter (28) étant reliées entre elles au moyen d'une liaison à faible conductivité thermique ou étant découplées thermiquement l'une de l'autre.
  2. Pompe à vide selon la revendication 1, caractérisée en ce qu'est relié à la partie support (36) au moins un dispositif stator (24), en particulier d'un étage Holweck, d'un étage de Siegbahn, d'un étage de Gaede ou d'un compresseur à canal latéral.
  3. Pompe à vide selon les revendications 1 à 2, caractérisée en ce que la deuxième partie de carter (28) est reliée à la partie support (36) et/ou au dispositif d'entraînement (30) et/ou au dispositif stator (24) avec une bonne conductivité thermique, en particulier par compression.
  4. Pompe à vide selon les revendications 1 à 3, caractérisée en ce que la première partie de carter (34) est reliée à l'un des paliers, en particulier le palier (32) côté refoulement.
  5. Pompe à vide selon les revendications 1 à 4, caractérisée en ce que la première partie de carter (34) est reliée à un dispositif de commande, en particulier à faible dégagement de chaleur.
  6. Pompe à vide selon les revendications 1 à 5, caractérisée en ce que la première partie de carter (34) et la deuxième partie de carter (28) sont reliées à un dispositif de refroidissement séparé.
EP14761870.6A 2013-09-24 2014-09-11 Pompe à vide Active EP3049676B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202013008470.7U DE202013008470U1 (de) 2013-09-24 2013-09-24 Vakuumpumpe
PCT/EP2014/069344 WO2015043962A1 (fr) 2013-09-24 2014-09-11 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3049676A1 EP3049676A1 (fr) 2016-08-03
EP3049676B1 true EP3049676B1 (fr) 2019-07-10

Family

ID=51518781

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14761870.6A Active EP3049676B1 (fr) 2013-09-24 2014-09-11 Pompe à vide

Country Status (4)

Country Link
US (1) US10221864B2 (fr)
EP (1) EP3049676B1 (fr)
DE (1) DE202013008470U1 (fr)
WO (1) WO2015043962A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62168993A (ja) 1985-11-27 1987-07-25 Shimadzu Corp ヒ−トパイプ冷却式タ−ボ分子ポンプ
DE3613344A1 (de) 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
DE3932228A1 (de) 1988-09-28 1990-04-05 Hitachi Ltd Turbovakuumpumpe
WO1994000694A1 (fr) 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Pompe a vide a gaz et a friction
EP1236906A1 (fr) 2001-02-16 2002-09-04 Pfeiffer Vacuum GmbH Pompe à vide
EP1344940A1 (fr) 2002-03-13 2003-09-17 BOC Edwards Technologies, Limited Pompe à vide
DE19702456B4 (de) 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP1760319A1 (fr) 2004-06-25 2007-03-07 Osaka Vacuum, Ltd. Structure support de palier pour pompe turbomoléculaire
DE60037353T2 (de) 1999-02-19 2008-12-04 Ebara Corp. Turbomolekularpumpe
DE602004012546T2 (de) 2003-04-29 2009-04-16 Edwards Ltd., Crawley Vakuumpumpe
JP2010025122A (ja) 2003-02-18 2010-02-04 Osaka Vacuum Ltd 分子ポンプの断熱構造
JP2011007049A (ja) 2009-06-23 2011-01-13 Osaka Vacuum Ltd 分子ポンプ
JP4703279B2 (ja) 2004-06-25 2011-06-15 株式会社大阪真空機器製作所 複合分子ポンプの断熱構造
WO2012163996A2 (fr) 2011-05-31 2012-12-06 Fmc Kongsberg Subsea As Compresseur sous-marin directement entraîné par un moteur à aimant permanent à stator et rotor immergés dans un liquide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3508483A1 (de) * 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln Gehaeuse fuer eine turbomolekularvakuumpumpe
US6926493B1 (en) * 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62168993A (ja) 1985-11-27 1987-07-25 Shimadzu Corp ヒ−トパイプ冷却式タ−ボ分子ポンプ
DE3613344A1 (de) 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
DE3932228A1 (de) 1988-09-28 1990-04-05 Hitachi Ltd Turbovakuumpumpe
WO1994000694A1 (fr) 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Pompe a vide a gaz et a friction
DE19702456B4 (de) 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE60037353T2 (de) 1999-02-19 2008-12-04 Ebara Corp. Turbomolekularpumpe
EP1236906A1 (fr) 2001-02-16 2002-09-04 Pfeiffer Vacuum GmbH Pompe à vide
EP1344940A1 (fr) 2002-03-13 2003-09-17 BOC Edwards Technologies, Limited Pompe à vide
JP2010025122A (ja) 2003-02-18 2010-02-04 Osaka Vacuum Ltd 分子ポンプの断熱構造
DE602004012546T2 (de) 2003-04-29 2009-04-16 Edwards Ltd., Crawley Vakuumpumpe
EP1760319A1 (fr) 2004-06-25 2007-03-07 Osaka Vacuum, Ltd. Structure support de palier pour pompe turbomoléculaire
JP4703279B2 (ja) 2004-06-25 2011-06-15 株式会社大阪真空機器製作所 複合分子ポンプの断熱構造
JP2011007049A (ja) 2009-06-23 2011-01-13 Osaka Vacuum Ltd 分子ポンプ
WO2012163996A2 (fr) 2011-05-31 2012-12-06 Fmc Kongsberg Subsea As Compresseur sous-marin directement entraîné par un moteur à aimant permanent à stator et rotor immergés dans un liquide

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
ANONYMOUS: "Aluminium – Wikipedia", WIKIPEDIA, 11 October 2012 (2012-10-11), pages 1 - 40, XP055705911, Retrieved from the Internet <URL:https://de.wikipedia.org/wiki/Aluminium> [retrieved on 20200617]
ANONYMOUS: "Aluminium", WIKIPEDIA, 11 October 2012 (2012-10-11), pages 1 - 9, XP055721004
ANONYMOUS: "Polytetrafluorethylen", WIKIPEDIA, 14 October 2012 (2012-10-14), pages 1 - 4, XP055721003
ANONYMOUS: "Polytetrafluorethylen", WIKIPEDIA, 25 August 2003 (2003-08-25), XP055349011, Retrieved from the Internet <URL:https://de.wikipedia.org/wiki/Polytetrafluorethylen> [retrieved on 20170223]

Also Published As

Publication number Publication date
WO2015043962A1 (fr) 2015-04-02
US20160298649A1 (en) 2016-10-13
US10221864B2 (en) 2019-03-05
EP3049676A1 (fr) 2016-08-03
DE202013008470U1 (de) 2015-01-08

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